CN104155810B - Mask - Google Patents
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- CN104155810B CN104155810B CN201410350975.7A CN201410350975A CN104155810B CN 104155810 B CN104155810 B CN 104155810B CN 201410350975 A CN201410350975 A CN 201410350975A CN 104155810 B CN104155810 B CN 104155810B
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Abstract
Description
技术领域technical field
本发明涉及显示器制备技术领域,特别涉及一种掩模板。The invention relates to the technical field of display preparation, in particular to a mask plate.
背景技术Background technique
薄膜晶体管液晶显示装置是目前平面显示器的主流。薄膜晶体管液晶显示装置的面板,包括平行设置的薄膜晶体管阵列基板和彩色滤光片基板,两者之间设置有液晶层,为了控制液晶层厚度的稳定均一性,在两基板之间设置隔垫物。目前,高性能的薄膜晶体管液晶显示装置较多采用柱状隔垫物。由于薄膜晶体管液晶显示装置在高温下工作时液晶分子会随重力场移动,从而出现重力水波纹现象,影响薄膜晶体管液晶显示装置的显示质量。另外,向液晶层注入液晶的时候,如果在周边区域出现液晶堆积过多的情况,就会导致周边水波纹现象,情况严重时还会在薄膜晶体管液晶显示装置的下端出现大面积的漏光现象。通过将位于液晶层周边区域内的柱状隔垫物的高度设置成高于液晶层中部区域内的柱状隔垫物的高度,可以有效解决重力水波纹现象和重力水波纹现象。Thin film transistor liquid crystal display devices are the mainstream of flat panel displays at present. The panel of the thin film transistor liquid crystal display device includes a thin film transistor array substrate and a color filter substrate arranged in parallel, and a liquid crystal layer is arranged between them. In order to control the stability and uniformity of the thickness of the liquid crystal layer, a spacer is arranged between the two substrates thing. At present, columnar spacers are often used in high-performance thin film transistor liquid crystal display devices. When the thin film transistor liquid crystal display device works at high temperature, the liquid crystal molecules will move with the gravitational field, so that the gravitational water ripple phenomenon will appear, which will affect the display quality of the thin film transistor liquid crystal display device. In addition, when the liquid crystal is injected into the liquid crystal layer, if the liquid crystal accumulates too much in the peripheral area, it will cause peripheral water ripples, and in severe cases, a large area of light leakage will occur at the lower end of the thin film transistor liquid crystal display device. By setting the height of the columnar spacers in the peripheral region of the liquid crystal layer to be higher than the height of the columnar spacers in the middle region of the liquid crystal layer, the gravitational water ripple phenomenon and the gravitational water ripple phenomenon can be effectively solved.
在薄膜晶体管液晶显示装置的生产过程中,可以使用掩膜板通过曝光形成柱状隔垫物。如图1所示,图1为现有技术中的掩膜板结构示意图,现有的掩膜板常采用金属挡光材料制成,掩膜板一般包括与显示面板非显示区域对应的曝光区域01和用于对位或观察掩膜板与基板之间距离的测试区域02,该曝光区域01内一般设有容许紫外光通过、以形成柱状隔垫物的曝光图案011,由于测试区域02需要透光,因此,现有技术的掩膜板与测试区域对应的部分一般为一缺口,缺口的设置将导致测试区域内无法设置曝光图案,即基板上与该测试区域对应的部分将不会形成隔垫物,这样便会导致显示面板周边位置的盒厚 发生异常,显示画面不良。In the production process of the thin film transistor liquid crystal display device, columnar spacers can be formed by exposure using a mask. As shown in Figure 1, Figure 1 is a schematic diagram of the mask structure in the prior art. The existing mask is usually made of metal light-shielding material, and the mask generally includes an exposure area corresponding to the non-display area of the display panel. 01 and the test area 02 for aligning or observing the distance between the mask and the substrate. Generally, the exposure area 01 is provided with an exposure pattern 011 that allows ultraviolet light to pass through to form columnar spacers. Because the test area 02 requires Therefore, the part of the mask plate in the prior art corresponding to the test area is generally a gap. The setting of the gap will cause the exposure pattern to be unable to be set in the test area, that is, the part of the substrate corresponding to the test area will not be formed. Spacers, this will lead to abnormal thickness of the box around the display panel and poor display screen.
发明内容Contents of the invention
本发明提供了一种掩膜板,可以减少显示面板周边位置的盒厚异常现象的发生,提高显示装置的显示效果。The invention provides a mask plate, which can reduce the occurrence of abnormal box thickness at the peripheral position of the display panel and improve the display effect of the display device.
为达到上述目的,本发明提供以下技术方案:To achieve the above object, the present invention provides the following technical solutions:
本发明提供了一种掩膜板,包括:与显示装置的非显示区域对应的曝光区域和测试区域,所述测试区域用于掩膜板对位或观察掩膜板与基板之间距离,所述曝光区域内设有曝光图案,所述测试区域上覆盖有允许可见光透过的紫外截止滤光膜,所述紫外截止滤光膜上设有所述曝光图案。The present invention provides a mask plate, including: an exposure area corresponding to a non-display area of a display device and a test area, the test area is used for aligning the mask plate or observing the distance between the mask plate and the substrate. An exposure pattern is set in the exposure area, and the test area is covered with an ultraviolet cut-off filter film that allows visible light to pass through, and the exposure pattern is set on the ultraviolet cut-off filter film.
本发明提供的掩膜板,通过测试区域上设置的紫外截止滤光膜,以及紫外截止滤光膜上设有的曝光图案,可以实现基板与测试区域对应的部分上也形成隔垫物,避免显示面板周边盒厚异常现象的发生,同时由于紫外截止滤光膜可以阻止紫外光,允许可见光通过,因此,紫外截止滤光膜又能够便于对位和观察掩膜板与基板之间距离。The mask plate provided by the present invention can also form a spacer on the part corresponding to the substrate and the test area through the ultraviolet cut-off filter film arranged on the test area and the exposure pattern provided on the ultraviolet cut-off filter film, so as to avoid Abnormal box thickness around the display panel occurs. At the same time, because the UV cut-off filter film can block ultraviolet light and allow visible light to pass through, the UV cut-off filter film can facilitate alignment and observation of the distance between the mask and the substrate.
所以,本发明提供的掩膜板,可以减少显示面板周边位置的盒厚异常现象的发生,提高显示装置的显示效果。Therefore, the mask plate provided by the present invention can reduce the occurrence of abnormal cell thickness at the periphery of the display panel and improve the display effect of the display device.
在一些可选的实施方式中,所述紫外截止滤光膜为氧化钛-氧化铈膜层。In some optional embodiments, the ultraviolet cutoff filter film is a titanium oxide-cerium oxide film layer.
在一些可选的实施方式中,所述紫外截止滤光膜内设有紫外吸收剂或光稳定剂。In some optional embodiments, an ultraviolet absorber or light stabilizer is provided in the ultraviolet cutoff filter film.
在一些可选的实施方式中,所述紫外吸收剂或光稳定剂包括:水杨酸酯类、苯酮类、苯并三唑类、取代丙烯腈类、三嗪类和受阻胺类中的一种或多种。In some optional embodiments, the UV absorber or light stabilizer includes: salicylates, benzophenones, benzotriazoles, substituted acrylonitriles, triazines and hindered amines one or more.
在一些可选的实施方式中,所述紫外截止滤光膜镀设于所述测试区域。In some optional implementation manners, the ultraviolet cutoff filter film is coated on the test area.
在一些可选的实施方式中,所述曝光区域的材料为遮光金属。In some optional implementation manners, the material of the exposure area is light-shielding metal.
在一些可选的实施方式中,所述曝光图案为多个间隔分布的孔。In some optional implementation manners, the exposure pattern is a plurality of holes distributed at intervals.
在一些可选的实施方式中,所述掩膜板为柱状隔垫物掩膜板。In some optional embodiments, the mask is a columnar spacer mask.
附图说明Description of drawings
图1为现有技术中的掩膜板结构示意图;FIG. 1 is a schematic structural diagram of a mask plate in the prior art;
图2为本发明实施例中提供的掩膜板结构示意图。FIG. 2 is a schematic structural diagram of a mask plate provided in an embodiment of the present invention.
图中:In the picture:
01-曝光区域 011-曝光图案01-Exposure area 011-Exposure pattern
02-测试区域 1-曝光区域02-Test area 1-Exposure area
2-曝光图案 3-紫外截止滤光膜2-Exposure pattern 3-UV cut filter film
具体实施方式detailed description
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
如图2所示,图2为本发明实施例中提供的掩膜板结构示意图,本发明实施例提供的掩膜板,包括:与显示装置的非显示区域对应的曝光区域1和测试区域,测试区域用于掩膜板对位或观察掩膜板与基板之间距离的,曝光区域1内设有曝光图案2,测试区域上覆盖有允许可见光透过的紫外截止滤光膜3,紫外截止滤光膜3上设有曝光图案2。As shown in FIG. 2, FIG. 2 is a schematic structural diagram of the mask provided in the embodiment of the present invention. The mask provided in the embodiment of the present invention includes: an exposure area 1 and a test area corresponding to the non-display area of the display device, The test area is used for aligning the mask or observing the distance between the mask and the substrate. The exposure area 1 is provided with an exposure pattern 2, and the test area is covered with a UV cut-off filter film 3 that allows visible light to pass through. The exposure pattern 2 is arranged on the filter film 3 .
在制备隔垫物时,是将制备隔垫物的材料(一般为液态,常用的如PR胶等)设置在基板上,掩膜板覆盖在该基板上,紫外光通过掩膜板上的曝光图案2照射在制备隔垫物的材料上,使得相应的区域内的制备隔垫物的材料固化,形成隔垫物,现有技术中为了便于掩膜板的对位和观察掩膜板与基板之间的间距,一般在掩膜板上会设有测试区域,该区域需要透光,故该区域无法设置曝光图案,对应的基板的相应位置上将不会形成隔垫物,两个基板对盒时,容易使显示面板周边出现盒厚异常现象。When preparing the spacer, the material for the preparation of the spacer (usually liquid, commonly used such as PR glue, etc.) is placed on the substrate, the mask is covered on the substrate, and the ultraviolet light is exposed through the mask. Pattern 2 is irradiated on the material for preparing the spacer, so that the material for preparing the spacer in the corresponding area is solidified to form a spacer. In the prior art, in order to facilitate the alignment of the mask plate and the observation of the mask plate and the substrate Generally, there will be a test area on the mask plate. This area needs to be transparent, so the exposure pattern cannot be set in this area. Spacers will not be formed on the corresponding positions of the corresponding substrates. When the box is used, it is easy to cause abnormal box thickness around the display panel.
本发明提供的掩膜板,通过测试区域上设置的紫外截止滤光膜3,以及紫外截止滤光膜3上设有的曝光图案2,可以实现基板与测试区域对应的部分上也形成隔垫物,避免显示面板周边盒厚异常现象的发生,同时由于紫外截止滤光膜3可以阻止紫外光,允许可见光通过,因此,紫外截止滤光膜3又能够便于对位和观察掩膜板与基板之间距离。The mask plate provided by the present invention can also form a spacer on the part corresponding to the substrate and the test area through the ultraviolet cut-off filter film 3 provided on the test area and the exposure pattern 2 provided on the ultraviolet cut-off filter film 3 objects, to avoid the occurrence of abnormal box thickness around the display panel, and at the same time, because the ultraviolet cut filter film 3 can block ultraviolet light and allow visible light to pass through, the ultraviolet cut filter film 3 can facilitate alignment and observation of the mask plate and the substrate distance between.
所以,本发明提供的掩膜板,可以减少显示面板周边位置的盒厚异常现象的发生,提高显示装置的显示效果。Therefore, the mask plate provided by the present invention can reduce the occurrence of abnormal cell thickness at the periphery of the display panel and improve the display effect of the display device.
上述紫外截止滤光膜的具体材料可以为多种,本发明提供的一种具体实施方式中,紫外截止滤光膜为氧化钛-氧化铈膜层。The specific material of the above-mentioned ultraviolet cut-off filter film can be various. In a specific embodiment provided by the present invention, the ultraviolet cut-off filter film is a titanium oxide-cerium oxide film layer.
现有技术中的紫外截止滤光膜实现阻止紫外光的方法,一般为紫外光吸收的方法,紫外截止滤光膜内通常会设有紫外吸收剂或光稳定剂。紫外吸收剂或光稳定剂可以包括水杨酸酯类、苯酮类、苯并三唑类、取代丙烯腈类、三嗪类受阻胺类中的一种或多种。即可以由一种或多种复合形成,当然,紫外吸收剂或光稳定剂也可以由其它材料复合形成,这里就不再一一赘述。The UV cut-off filter film in the prior art realizes the method of blocking ultraviolet light, which is generally the method of ultraviolet light absorption, and a UV absorber or light stabilizer is usually provided in the UV cut-off filter film. The ultraviolet absorber or light stabilizer may include one or more of salicylates, benzophenones, benzotriazoles, substituted acrylonitriles, and triazine hindered amines. That is, it can be formed by compounding one or more kinds of materials. Of course, the ultraviolet absorber or light stabilizer can also be formed by compounding other materials, which will not be repeated here.
一种具体的实施方式中,紫外截止滤光膜镀设于测试区域。当然紫外截止滤光膜也可以通过其它方式覆盖在测试区域上,如粘贴等,这里就不再一一赘述。In a specific implementation manner, the ultraviolet cutoff filter film is coated on the test area. Of course, the UV cut-off filter film can also be covered on the test area by other methods, such as pasting, etc., which will not be repeated here.
可选的,曝光区域1的材料为遮光金属。遮光金属可以阻挡紫外光和可见光通过,当然曝光区域1也可以为采用其它遮光材料制成,这里就不再一一赘述。Optionally, the material of the exposure area 1 is light-shielding metal. The light-shielding metal can block the passage of ultraviolet light and visible light. Of course, the exposure area 1 can also be made of other light-shielding materials, which will not be repeated here.
上述曝光图案的具体形状可以为多种,例如,圆形孔,三角形孔,多边形孔等,这里就不再一一赘述,本发明提供的一种具体实施方式中,如图2所示,曝光图案为多个间隔分布的孔。The specific shapes of the above-mentioned exposure pattern can be various, for example, circular holes, triangular holes, polygonal holes, etc., which will not be repeated here. In a specific embodiment provided by the present invention, as shown in Figure 2, the exposure The pattern is a plurality of spaced holes.
上述掩膜板可以为制备阵列基板或彩膜基板过程中用到的任一种掩膜板,本发明实施例中,是以掩膜板为柱状隔垫物掩膜板为例进行说明的。但不限于柱状隔垫物掩膜板。The above-mentioned mask plate may be any mask plate used in the process of preparing the array substrate or the color filter substrate. In the embodiment of the present invention, the mask plate is a columnar spacer mask plate as an example for illustration. But not limited to the columnar spacer mask.
显然,本领域的技术人员可以对本发明进行各种改动和变型而不脱离本发明的精神和范围。这样,倘若本发明的这些修改和变型属于本发明权利要求及其等同技术的范围之内,则本发明也意图包含这些改动和变型在内。Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalent technologies, the present invention also intends to include these modifications and variations.
Claims (8)
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| CN201410350975.7A CN104155810B (en) | 2014-07-22 | 2014-07-22 | Mask |
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| CN104155810B true CN104155810B (en) | 2017-01-25 |
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| CN108873556B (en) * | 2018-09-04 | 2024-09-20 | 洛伦兹(北京)科技有限公司 | Composite liquid crystal device for beam deflection |
| CN114624843B (en) * | 2022-03-04 | 2024-04-30 | 上海慧希电子科技有限公司 | Optical device manufacturing method |
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| JP2005148354A (en) * | 2003-11-14 | 2005-06-09 | Dainippon Printing Co Ltd | Photomask, exposure apparatus, liquid crystal panel member, liquid crystal panel member manufacturing apparatus, and liquid crystal panel member manufacturing method |
| CN1656354A (en) * | 2002-05-31 | 2005-08-17 | 株式会社尼康 | Position measurement method, exposure method, exposure device, and device manufacturing method |
| CN1912739A (en) * | 2005-08-12 | 2007-02-14 | 株式会社半导体能源研究所 | Light exposure mask and method for manufacturing semiconductor device using the same |
| CN1971383A (en) * | 2006-11-28 | 2007-05-30 | 京东方科技集团股份有限公司 | Method for manufacturing partition of LCD device and its application |
| CN101268417A (en) * | 2005-09-21 | 2008-09-17 | 大日本印刷株式会社 | Photomask with gray scale and manufacturing method thereof |
| KR20090060055A (en) * | 2007-12-07 | 2009-06-11 | 엘지디스플레이 주식회사 | Liquid crystal display equipped with a compensation film and a method of manufacturing the same |
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1656354A (en) * | 2002-05-31 | 2005-08-17 | 株式会社尼康 | Position measurement method, exposure method, exposure device, and device manufacturing method |
| JP2005148354A (en) * | 2003-11-14 | 2005-06-09 | Dainippon Printing Co Ltd | Photomask, exposure apparatus, liquid crystal panel member, liquid crystal panel member manufacturing apparatus, and liquid crystal panel member manufacturing method |
| CN1912739A (en) * | 2005-08-12 | 2007-02-14 | 株式会社半导体能源研究所 | Light exposure mask and method for manufacturing semiconductor device using the same |
| CN101268417A (en) * | 2005-09-21 | 2008-09-17 | 大日本印刷株式会社 | Photomask with gray scale and manufacturing method thereof |
| CN1971383A (en) * | 2006-11-28 | 2007-05-30 | 京东方科技集团股份有限公司 | Method for manufacturing partition of LCD device and its application |
| KR20090060055A (en) * | 2007-12-07 | 2009-06-11 | 엘지디스플레이 주식회사 | Liquid crystal display equipped with a compensation film and a method of manufacturing the same |
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