CA958313A - Etching si3n4 - Google Patents

Etching si3n4

Info

Publication number: CA958313A
Authority: CA; Canada
Prior art keywords: si3n4; etching; etching si3n4
Prior art date: 1971-09-03
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

CA137,932A

Other languages

English (en)

Other versions

CA137932S (en

Inventor

Peter T. Panousis

Herbert A. Waggener

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

AT&T Corp

Original Assignee

Western Electric Co Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1971-09-03

Filing date

1972-03-23

Publication date

1974-11-26

1972-03-23 Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc

1974-11-26 Application granted granted Critical

1974-11-26 Publication of CA958313A publication Critical patent/CA958313A/en

Status Expired legal-status Critical Current

Classifications

- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
- C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
- H10P50/283—
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/043—Dual dielectric
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/051—Etching
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/114—Nitrides of silicon

Landscapes

Chemical & Material Sciences (AREA)
Inorganic Chemistry (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Organic Chemistry (AREA)
Weting (AREA)
Bipolar Transistors (AREA)

CA137,932A 1971-09-03 1972-03-23 Etching si3n4 Expired CA958313A (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US17784071A	1971-09-03	1971-09-03

Publications (1)

Publication Number	Publication Date
CA958313A true CA958313A (en)	1974-11-26

Family

ID=22650170

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA137,932A Expired CA958313A (en)	1971-09-03	1972-03-23	Etching si3n4

Country Status (12)

Country	Link
US (1)	US3715249A (nl)
JP (1)	JPS5141550B2 (nl)
KR (1)	KR780000506B1 (nl)
BE (1)	BE788159A (nl)
CA (1)	CA958313A (nl)
DE (1)	DE2241870C3 (nl)
FR (1)	FR2151104B1 (nl)
GB (1)	GB1392758A (nl)
HK (1)	HK35876A (nl)
IT (1)	IT962297B (nl)
NL (1)	NL154059B (nl)
SE (1)	SE375118B (nl)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2425684A1 (de) *	1974-05-28	1975-12-11	Ibm Deutschland	Verfahren zum aetzen von silicium enthaltenden materialien
US4116714A (en) *	1977-08-15	1978-09-26	International Business Machines Corporation	Post-polishing semiconductor surface cleaning process
US5215930A (en) *	1991-10-23	1993-06-01	At&T Bell Laboratories	Integrated circuit etching of silicon nitride and polysilicon using phosphoric acid
KR970008354B1 (ko) *	1994-01-12	1997-05-23	엘지반도체 주식회사	선택적 식각방법
US5607543A (en) *	1995-04-28	1997-03-04	Lucent Technologies Inc.	Integrated circuit etching
US5885903A (en) *	1997-01-22	1999-03-23	Micron Technology, Inc.	Process for selectively etching silicon nitride in the presence of silicon oxide
KR20070004609A (ko) *	2003-12-30	2007-01-09	아크리온 엘엘씨	기판을 처리하는 동안 실리콘 질화물을 선택적으로에칭하는 시스템 및 방법
JP3882932B2 (ja)	2004-04-08	2007-02-21	信越化学工業株式会社	ジルコニウム含有酸化物
JP4799332B2 (ja) *	2006-09-12	2011-10-26	株式会社東芝	エッチング液、エッチング方法および電子部品の製造方法
TWI629720B (zh)	2015-09-30	2018-07-11	Tokyo Electron Limited	用於濕蝕刻製程之溫度的動態控制之方法及設備

1971
- 1971-09-03 US US00177840A patent/US3715249A/en not_active Expired - Lifetime
1972
- 1972-03-23 CA CA137,932A patent/CA958313A/en not_active Expired
- 1972-08-21 SE SE7210841A patent/SE375118B/xx unknown
- 1972-08-25 JP JP47084700A patent/JPS5141550B2/ja not_active Expired
- 1972-08-25 DE DE2241870A patent/DE2241870C3/de not_active Expired
- 1972-08-25 NL NL727211625A patent/NL154059B/nl not_active IP Right Cessation
- 1972-08-29 KR KR7201303A patent/KR780000506B1/ko not_active Expired
- 1972-08-30 BE BE788159A patent/BE788159A/xx unknown
- 1972-08-30 IT IT52451/72A patent/IT962297B/it active
- 1972-08-31 GB GB4037972A patent/GB1392758A/en not_active Expired
- 1972-09-01 FR FR7231175A patent/FR2151104B1/fr not_active Expired
1976
- 1976-06-10 HK HK358/76*UA patent/HK35876A/xx unknown

Also Published As

Publication number	Publication date
IT962297B (it)	1973-12-20
DE2241870A1 (de)	1973-03-22
NL7211625A (nl)	1973-03-06
FR2151104B1 (nl)	1974-08-19
KR780000506B1 (en)	1978-10-25
HK35876A (en)	1976-06-18
US3715249A (en)	1973-02-06
DE2241870B2 (de)	1976-03-11
FR2151104A1 (nl)	1973-04-13
JPS5141550B2 (nl)	1976-11-10
SE375118B (nl)	1975-04-07
BE788159A (fr)	1972-12-18
GB1392758A (en)	1975-04-30
JPS4834675A (nl)	1973-05-21
NL154059B (nl)	1977-07-15
DE2241870C3 (de)	1978-04-20

Publication	Publication Date	Title
AU450078B2 (en)	1974-06-07	SUBSTITUTED-p-MENTHANES
AU4648672A (en)	1974-03-14	Compost-toilet
AU463807B2 (en)	1975-08-07	Furyland furfuryl-benzomorphanes
CA958313A (en)	1974-11-26	Etching si3n4
CA926281A (en)	1973-05-15	Etching
CA961864A (en)	1975-01-28	Glaze
CA843904A (en)	1970-06-09	Etching
CA843905A (en)	1970-06-09	Etching
CA843903A (en)	1970-06-09	Etching
AU467477B2 (en)	1973-09-20	QUINOXALINE-din-OXIDES
AU4636772A (en)	1974-03-14	2-aminoquinoxalines
AU4692172A (en)	1974-03-28	3-trifluoro-methylanilides
CA879058A (en)	1971-08-24	Etching
CA869001A (en)	1971-04-20	Mechanical hand
CA979359A (en)	1975-12-09	Emulsifiers
AU456320B2 (en)	1974-12-12	Cikir bibd syrveukkabce ststem
AU468156B2 (en)	1976-01-08	5-nitroimidazoles
AU466226B1 (en)	1972-12-21	Wall-plugs
AU2792771A (en)	1972-10-26	Paddleboat
AU4286072A (en)	1973-12-06	Multiseeders
AU3244971A (en)	1973-02-22	Clipshade
CA967081A (en)	1975-05-06	Etchant
CA888417A (en)	1971-12-14	Ranging devices
CA864397A (en)	1971-02-23	Roller-band devices
CA863795A (en)	1971-02-16	Roller-band devices