BR8500738A - Detector de pressao capacitivo - Google Patents

Detector de pressao capacitivo

Info

Publication number: BR8500738A
Authority: BR; Brazil
Prior art keywords: pressure detector; capacitive pressure; capacitive; detector; pressure
Prior art date: 1984-02-21

Application number

BR8500738A

Other languages

English (en)

Inventor

Heikki Kuisma

Original Assignee

Vaisala Oy

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-02-21

Filing date

1985-02-15

Publication date

1985-10-08

1985-02-15 Application filed by Vaisala Oy filed Critical Vaisala Oy

1985-10-08 Publication of BR8500738A publication Critical patent/BR8500738A/pt

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Measuring Fluid Pressure (AREA)
Switches Operated By Changes In Physical Conditions (AREA)

BR8500738A 1984-02-21 1985-02-15 Detector de pressao capacitivo BR8500738A (pt)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
FI840700A FI69211C (fi)	1984-02-21	1984-02-21	Kapacitiv styckgivare

Publications (1)

Publication Number	Publication Date
BR8500738A true BR8500738A (pt)	1985-10-08

Family

ID=8518584

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
BR8500738A BR8500738A (pt)	1984-02-21	1985-02-15	Detector de pressao capacitivo

Country Status (9)

Country	Link
US (1)	US4594639A (pt)
JP (1)	JPS60195830A (pt)
BR (1)	BR8500738A (pt)
DE (1)	DE3505924C2 (pt)
FI (1)	FI69211C (pt)
FR (1)	FR2559899B1 (pt)
GB (1)	GB2154747B (pt)
IT (1)	IT1186831B (pt)
NL (1)	NL8500465A (pt)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4572204A (en) *	1984-03-21	1986-02-25	Hewlett-Packard Company	Pressure dome with compliant chamber
FI75426C (fi) *	1984-10-11	1988-06-09	Vaisala Oy	Absoluttryckgivare.
US4812199A (en) *	1987-12-21	1989-03-14	Ford Motor Company	Rectilinearly deflectable element fabricated from a single wafer
FI78784C (fi) *	1988-01-18	1989-09-11	Vaisala Oy	Tryckgivarkonstruktion och foerfarande foer framstaellning daerav.
US4960177A (en) *	1988-06-03	1990-10-02	University Of Hawaii	Silicon membrane micro-scale
US4905575A (en) *	1988-10-20	1990-03-06	Rosemount Inc.	Solid state differential pressure sensor with overpressure stop and free edge construction
US4954925A (en) *	1988-12-30	1990-09-04	United Technologies Corporation	Capacitive sensor with minimized dielectric drift
DE3932618A1 (de) *	1989-09-29	1991-04-18	Fraunhofer Ges Forschung	Vorrichtung zur messung mechanischer kraefte und kraftwirkungen
DE3937522A1 (de) *	1989-11-10	1991-05-16	Texas Instruments Deutschland	Mit einem traegerelement verbundener halbleiter-drucksensor
FI93059C (fi) *	1993-07-07	1995-02-10	Vaisala Oy	Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi
FI93579C (fi) *	1993-08-20	1995-04-25	Vaisala Oy	Sähköstaattisen voiman avulla takaisinkytketty kapasitiivinen anturi ja menetelmä sen aktiivisen elementin muodon ohjaamiseksi
US6662663B2 (en)	2002-04-10	2003-12-16	Hewlett-Packard Development Company, L.P.	Pressure sensor with two membranes forming a capacitor
DE102013204197A1 (de) *	2013-03-12	2014-10-02	Robert Bosch Gmbh	Mikroelektrochemischer Sensor und Verfahren zum Betreiben eines mikroelektrochemischen Sensors
EP3094950B1 (en) *	2014-01-13	2022-12-21	Nextinput, Inc.	Miniaturized and ruggedized wafer level mems force sensors
EP3307671B1 (en)	2015-06-10	2022-06-15	Nextinput, Inc.	Ruggedized wafer level mems force sensor with a tolerance trench
CN110494724B (zh)	2017-02-09	2023-08-01	触控解决方案股份有限公司	集成数字力传感器和相关制造方法
US11243125B2 (en)	2017-02-09	2022-02-08	Nextinput, Inc.	Integrated piezoresistive and piezoelectric fusion force sensor
EP3655740A4 (en)	2017-07-19	2021-07-14	Nextinput, Inc.	VOLTAGE TRANSFER STACKING IN A MEMS FORCE SENSOR
US11423686B2 (en)	2017-07-25	2022-08-23	Qorvo Us, Inc.	Integrated fingerprint and force sensor
WO2019023552A1 (en)	2017-07-27	2019-01-31	Nextinput, Inc.	PIEZORESISTIVE AND PIEZOELECTRIC FORCE SENSOR ON WAFER AND METHODS OF MANUFACTURING THE SAME
WO2019079420A1 (en)	2017-10-17	2019-04-25	Nextinput, Inc.	SHIFT TEMPERATURE COEFFICIENT COMPENSATION FOR FORCE SENSOR AND STRAIN GAUGE
US11385108B2 (en)	2017-11-02	2022-07-12	Nextinput, Inc.	Sealed force sensor with etch stop layer
US11874185B2 (en)	2017-11-16	2024-01-16	Nextinput, Inc.	Force attenuator for force sensor
US10962427B2 (en)	2019-01-10	2021-03-30	Nextinput, Inc.	Slotted MEMS force sensor

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB1138401A (en) *	1965-05-06	1969-01-01	Mallory & Co Inc P R	Bonding
US3808480A (en) *	1973-04-16	1974-04-30	Bunker Ramo	Capacitive pressure transducer
US3965746A (en) *	1974-11-04	1976-06-29	Teledyne Industries, Inc.	Pressure transducer
US4040118A (en) *	1975-06-18	1977-08-02	Bunker Ramo Corporation	Pressure sensitive transducer
US4203128A (en) *	1976-11-08	1980-05-13	Wisconsin Alumni Research Foundation	Electrostatically deformable thin silicon membranes
JPS5516228A (en) *	1978-07-21	1980-02-04	Hitachi Ltd	Capacity type sensor
US4386453A (en) *	1979-09-04	1983-06-07	Ford Motor Company	Method for manufacturing variable capacitance pressure transducers
US4390925A (en) *	1981-08-26	1983-06-28	Leeds & Northrup Company	Multiple-cavity variable capacitance pressure transducer
US4415948A (en) *	1981-10-13	1983-11-15	United Technologies Corporation	Electrostatic bonded, silicon capacitive pressure transducer
US4445383A (en) *	1982-06-18	1984-05-01	General Signal Corporation	Multiple range capacitive pressure transducer
US4467394A (en) *	1983-08-29	1984-08-21	United Technologies Corporation	Three plate silicon-glass-silicon capacitive pressure transducer

1984
- 1984-02-21 FI FI840700A patent/FI69211C/fi not_active IP Right Cessation
1985
- 1985-02-15 BR BR8500738A patent/BR8500738A/pt unknown
- 1985-02-15 US US06/701,870 patent/US4594639A/en not_active Expired - Lifetime
- 1985-02-15 FR FR8502193A patent/FR2559899B1/fr not_active Expired
- 1985-02-18 GB GB08504078A patent/GB2154747B/en not_active Expired
- 1985-02-19 NL NL8500465A patent/NL8500465A/nl not_active Application Discontinuation
- 1985-02-20 IT IT12436/85A patent/IT1186831B/it active
- 1985-02-21 JP JP60033644A patent/JPS60195830A/ja not_active Expired - Lifetime
- 1985-02-21 DE DE3505924A patent/DE3505924C2/de not_active Expired - Lifetime

Also Published As

Publication number	Publication date
FI69211C (fi)	1985-12-10
GB8504078D0 (en)	1985-03-20
FI69211B (fi)	1985-08-30
IT8512436A0 (it)	1985-02-20
FR2559899B1 (fr)	1987-02-13
GB2154747A (en)	1985-09-11
US4594639A (en)	1986-06-10
DE3505924A1 (de)	1985-08-22
FI840700A0 (fi)	1984-02-21
JPS60195830A (ja)	1985-10-04
DE3505924C2 (de)	1994-03-24
IT1186831B (it)	1987-12-16
FR2559899A1 (fr)	1985-08-23
NL8500465A (nl)	1985-09-16
GB2154747B (en)	1987-05-07

Publication	Publication Date	Title
IT1186829B (it)	1987-12-16	Rivelatore capacitivo di pressione assoluta
BR8500738A (pt)	1985-10-08	Detector de pressao capacitivo
BR8207848A (pt)	1983-08-30	Sensor de pressao capacitivo aperfeicoado
BR8505067A (pt)	1986-07-29	Transdutor de pressao absoluta capacitivo
GB8519698D0 (en)	1985-09-11	Capacitive measuring system
BR8500735A (pt)	1985-10-08	Detector de pressao capacitivo
BR8207904A (pt)	1983-09-13	Transdutor de pressao capacitivo de silicio-vidro-silicio
BR8707718A (pt)	1989-08-15	Sensor de pressao
DE3785037D1 (de)	1993-04-29	Kapazitiver druckfuehler.
FR2516736B1 (fr)	1986-05-02	Transducteur capacitif
PT84262B (pt)	1989-09-14	Sensor de pressao
BR9001722A (pt)	1991-05-21	Detetor capacitivo de pressao diferencial
FI91444B (fi)	1994-03-15	Paineanturi
DK461784A (da)	1985-06-28	Trykfoeler
DE3586238D1 (de)	1992-07-23	Druckmesssystem.
DE3587185D1 (de)	1993-04-22	Annaeherungsdetektor.
GB8513788D0 (en)	1985-07-03	Capacitive pressure detector
AT386482B (de)	1988-08-25	Druckaufnehmer
DE3529799A1 (de)	1986-02-27	Drucksensor
AT383895B (de)	1987-09-10	Druckaufnehmer
FR2595467B3 (fr)	1988-08-12	Detecteur de pression
GB2162319B (en)	1987-08-19	Pressure sensitive capacitor
AT381169B (de)	1986-09-10	Druckaufnehmer
DK547882A (da)	1983-07-17	Trykfoeler
NO855194L (no)	1986-07-01	Trykksensor.