[go: up one dir, main page]

BR8103024A - Sistema e processo para producao continua de celulas solares amorfas - Google Patents

Sistema e processo para producao continua de celulas solares amorfas

Info

Publication number
BR8103024A
BR8103024A BR8103024A BR8103024A BR8103024A BR 8103024 A BR8103024 A BR 8103024A BR 8103024 A BR8103024 A BR 8103024A BR 8103024 A BR8103024 A BR 8103024A BR 8103024 A BR8103024 A BR 8103024A
Authority
BR
Brazil
Prior art keywords
amorphas
solar cells
continuous production
continuous
production
Prior art date
Application number
BR8103024A
Other languages
English (en)
Inventor
S Ovshinsky
Izu Masatsugu
David Cannella Vincent
Original Assignee
Atlantic Richfield Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/151,301 external-priority patent/US4400409A/en
Application filed by Atlantic Richfield Co filed Critical Atlantic Richfield Co
Publication of BR8103024A publication Critical patent/BR8103024A/pt

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/10—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material
    • H10F71/107—Continuous treatment of the devices, e.g. roll-to roll processes or multi-chamber deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/517—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using a combination of discharges covered by two or more of groups C23C16/503 - C23C16/515
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/30—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
    • H10F19/31—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/10—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material
    • H10F71/103—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material including only Group IV materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Photovoltaic Devices (AREA)
BR8103024A 1980-05-19 1981-05-15 Sistema e processo para producao continua de celulas solares amorfas BR8103024A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/151,301 US4400409A (en) 1980-05-19 1980-05-19 Method of making p-doped silicon films
US06/240,493 US4410558A (en) 1980-05-19 1981-03-16 Continuous amorphous solar cell production system

Publications (1)

Publication Number Publication Date
BR8103024A true BR8103024A (pt) 1982-02-09

Family

ID=26848504

Family Applications (1)

Application Number Title Priority Date Filing Date
BR8103024A BR8103024A (pt) 1980-05-19 1981-05-15 Sistema e processo para producao continua de celulas solares amorfas

Country Status (6)

Country Link
US (1) US4410558A (pt)
EP (1) EP0041773B1 (pt)
JP (1) JP2741638B2 (pt)
BR (1) BR8103024A (pt)
DE (1) DE3172482D1 (pt)
MX (1) MX155842A (pt)

Families Citing this family (92)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0087479A4 (en) * 1981-09-11 1985-04-24 Konishiroku Photo Ind METHOD AND DEVICE FOR PRODUCING AN AMORPHON SILICONE SUN BATTERY.
DE3280455T3 (de) * 1981-11-04 2000-07-13 Kanegafuchi Kagaku Kogyo K.K., Osaka Biegsame photovoltaische Vorrichtung.
JPH06188443A (ja) * 1981-12-28 1994-07-08 Kanegafuchi Chem Ind Co Ltd 可撓性光起電力装置
US4485125A (en) * 1982-03-19 1984-11-27 Energy Conversion Devices, Inc. Method for continuously producing tandem amorphous photovoltaic cells
US4423701A (en) * 1982-03-29 1984-01-03 Energy Conversion Devices, Inc. Glow discharge deposition apparatus including a non-horizontally disposed cathode
GB2117971A (en) * 1982-04-05 1983-10-19 Hitachi Ltd Amorphous silicon photovoltaic device
US4440107A (en) * 1982-07-12 1984-04-03 Energy Conversion Devices, Inc. Magnetic apparatus for reducing substrate warpage
EP0103168A3 (en) * 1982-09-10 1986-07-02 Hitachi, Ltd. Amorphous silicon solar battery
IN161171B (pt) 1982-09-16 1987-10-10 Energy Conversion Devices Inc
US4574733A (en) * 1982-09-16 1986-03-11 Energy Conversion Devices, Inc. Substrate shield for preventing the deposition of nonhomogeneous films
US4517223A (en) * 1982-09-24 1985-05-14 Sovonics Solar Systems Method of making amorphous semiconductor alloys and devices using microwave energy
IL69756A0 (en) * 1982-09-24 1983-12-30 Energy Conversion Devices Inc System and method for making large area photovoltaic devices
JPS5961077A (ja) * 1982-09-29 1984-04-07 Nippon Denso Co Ltd アモルフアスシリコン太陽電池
DE3239676A1 (de) * 1982-10-27 1984-05-03 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zur herstellung von solargeneratoren
US4462333A (en) * 1982-10-27 1984-07-31 Energy Conversion Devices, Inc. Process gas introduction, confinement and evacuation system for glow discharge deposition apparatus
US4520757A (en) * 1982-10-27 1985-06-04 Energy Conversion Devices, Inc. Process gas introduction, confinement and evacuation system for glow discharge deposition apparatus
US4485264A (en) * 1982-11-09 1984-11-27 Energy Conversion Devices, Inc. Isolation layer for photovoltaic device and method of producing same
AU2095083A (en) * 1982-11-09 1984-05-17 Energy Conversion Devices Inc. Laminated strip of large area solar cells
US4515107A (en) * 1982-11-12 1985-05-07 Sovonics Solar Systems Apparatus for the manufacture of photovoltaic devices
US4527006A (en) * 1982-11-24 1985-07-02 Semiconductor Energy Laboratory Co., Ltd. Photoelectric conversion device
JPS59201471A (ja) * 1983-04-29 1984-11-15 Semiconductor Energy Lab Co Ltd 光電変換半導体装置
JPS60119784A (ja) * 1983-12-01 1985-06-27 Kanegafuchi Chem Ind Co Ltd 絶縁金属基板の製法およびそれに用いる装置
JPH0614552B2 (ja) * 1983-02-02 1994-02-23 富士ゼロックス株式会社 光電変換素子の製造方法
JPS59143362A (ja) * 1983-02-03 1984-08-16 Fuji Xerox Co Ltd パツシベ−シヨン膜
JPS59217378A (ja) * 1983-05-25 1984-12-07 Semiconductor Energy Lab Co Ltd 光電変換装置
US4696885A (en) * 1983-09-06 1987-09-29 Energy Conversion Devices, Inc. Method of forming a large surface area integrated circuit
DE3400843A1 (de) * 1983-10-29 1985-07-18 VEGLA Vereinigte Glaswerke GmbH, 5100 Aachen Verfahren zum herstellen von autoglasscheiben mit streifenfoermigen blendschutzfiltern durch bedampfen oder sputtern, und vorrichtung zur durchfuehrung des verfahrens
US4514579A (en) * 1984-01-30 1985-04-30 Energy Conversion Devices, Inc. Large area photovoltaic cell and method for producing same
DE3418078A1 (de) * 1984-05-16 1985-11-21 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zur herstellung eines traegermaterials fuer die solarzellen eines solargenerators
DE3528087C2 (de) * 1984-08-06 1995-02-09 Showa Aluminum Corp Substrat für Solarzellen aus amorphem Silicium
US4624862A (en) * 1984-11-05 1986-11-25 Energy Conversion Devices, Inc. Boron doped semiconductor materials and method for producing same
JPS61136220A (ja) * 1984-12-07 1986-06-24 Fuji Electric Co Ltd 微結晶シリコン膜の形成方法
EP0189976A3 (en) * 1985-01-30 1987-12-02 Energy Conversion Devices, Inc. Extremely lightweight, flexible semiconductor device arrays and method of making same
US4566403A (en) * 1985-01-30 1986-01-28 Sovonics Solar Systems Apparatus for microwave glow discharge deposition
US4759993A (en) * 1985-04-25 1988-07-26 Ovonic Synthetic Materials Co., Inc. Plasma chemical vapor deposition SiO2-x coated articles and plasma assisted chemical vapor deposition method of applying the coating
DE3685380D1 (de) * 1985-07-29 1992-06-25 Energy Conversion Devices Inc Verfahren und vorrichtung zum kontinuierlichen niederschlagen von elektrischen isolatoren.
US4664951A (en) * 1985-07-31 1987-05-12 Energy Conversion Devices, Inc. Method provided for corrective lateral displacement of a longitudinally moving web held in a planar configuration
US4663828A (en) * 1985-10-11 1987-05-12 Energy Conversion Devices, Inc. Process and apparatus for continuous production of lightweight arrays of photovoltaic cells
US4663829A (en) * 1985-10-11 1987-05-12 Energy Conversion Devices, Inc. Process and apparatus for continuous production of lightweight arrays of photovoltaic cells
US4841908A (en) * 1986-06-23 1989-06-27 Minnesota Mining And Manufacturing Company Multi-chamber deposition system
IL82673A0 (en) * 1986-06-23 1987-11-30 Minnesota Mining & Mfg Multi-chamber depositions system
US4874631A (en) * 1986-06-23 1989-10-17 Minnesota Mining And Manufacturing Company Multi-chamber deposition system
US4725890A (en) * 1986-07-15 1988-02-16 Ovonic Imaging Systems, Inc. Flexible array of photosensitive elements
US4766500A (en) * 1986-07-15 1988-08-23 Ovonic Imaging Systems, Inc. Method of replicating images on a contoured image-bearing surface
US5155565A (en) * 1988-02-05 1992-10-13 Minnesota Mining And Manufacturing Company Method for manufacturing an amorphous silicon thin film solar cell and Schottky diode on a common substrate
US5001939A (en) * 1988-08-04 1991-03-26 Minnesota Mining And Manufacturing Co. Surface characterization apparatus and method
US5053625A (en) * 1988-08-04 1991-10-01 Minnesota Mining And Manufacturing Company Surface characterization apparatus and method
US4888061A (en) * 1988-09-01 1989-12-19 Minnesota Mining And Manufacturing Company Thin-film solar cells resistant to damage during flexion
US5180686A (en) * 1988-10-31 1993-01-19 Energy Conversion Devices, Inc. Method for continuously deposting a transparent oxide material by chemical pyrolysis
DE4324320B4 (de) * 1992-07-24 2006-08-31 Fuji Electric Co., Ltd., Kawasaki Verfahren und Vorrichtung zur Herstellung einer als dünne Schicht ausgebildeten fotovoltaischen Umwandlungsvorrichtung
DE4225385C2 (de) * 1992-07-31 1994-09-29 Siemens Solar Gmbh Verfahren zur kostengünstigen Herstellung einer Schicht eines ternären Verbindungshalbleiters
US5946587A (en) * 1992-08-06 1999-08-31 Canon Kabushiki Kaisha Continuous forming method for functional deposited films
EP0584722A1 (de) * 1992-08-22 1994-03-02 HOESCH SIEGERLANDWERKE GmbH Verfahren zur Herstellung von mit Fotovoltaikmodulen versehenen Bauelementen
US6720576B1 (en) * 1992-09-11 2004-04-13 Semiconductor Energy Laboratory Co., Ltd. Plasma processing method and photoelectric conversion device
US5821597A (en) * 1992-09-11 1998-10-13 Semiconductor Energy Laboratory Co., Ltd. Photoelectric conversion device
US5563095A (en) * 1994-12-01 1996-10-08 Frey; Jeffrey Method for manufacturing semiconductor devices
US5674325A (en) * 1995-06-07 1997-10-07 Photon Energy, Inc. Thin film photovoltaic device and process of manufacture
JP3017422B2 (ja) * 1995-09-11 2000-03-06 キヤノン株式会社 光起電力素子アレー及びその製造方法
WO1997049132A1 (en) * 1996-06-20 1997-12-24 Jeffrey Frey Light-emitting semiconductor device
DE19731853A1 (de) * 1997-07-24 1999-03-04 Kti Kirstein Ges Fuer Innovati Solarzelleneinheit sowie Verfahren zu deren Herstellung
US6287888B1 (en) 1997-12-26 2001-09-11 Semiconductor Energy Laboratory Co., Ltd. Photoelectric conversion device and process for producing photoelectric conversion device
US6017585A (en) * 1998-02-24 2000-01-25 National Semiconductor Corporation High efficiency semiconductor wafer coating apparatus and method
US6316283B1 (en) * 1998-03-25 2001-11-13 Asulab Sa Batch manufacturing method for photovoltaic cells
KR100414132B1 (ko) 1998-07-02 2004-01-07 아스트로파워 다결정성 실리콘 박막, 다결정성 실리콘 박막 전자 디바이스, 집적 태양 전지, 태양전지 모듈 및 그 제조방법
EP1014426A3 (en) * 1998-12-22 2004-02-04 Canon Kabushiki Kaisha Apparatus and method for processing a substrate
JP4841023B2 (ja) * 2000-02-10 2011-12-21 株式会社半導体エネルギー研究所 成膜装置及び太陽電池の作製方法
BR0109057A (pt) * 2000-03-09 2003-06-03 Isovolta Processo para a produção de um módulo fotovoltaico de camada fina
JP4316767B2 (ja) 2000-03-22 2009-08-19 株式会社半導体エネルギー研究所 基板処理装置
JP4439665B2 (ja) 2000-03-29 2010-03-24 株式会社半導体エネルギー研究所 プラズマｃｖｄ装置
FR2818442B1 (fr) * 2000-12-20 2003-10-17 Energy Systems Internat Bv Dispositif photovoltaique formant vitrage
JP2002208563A (ja) * 2001-01-09 2002-07-26 Ebara Corp 被加工物の加工装置及び加工方法
JP2003031823A (ja) * 2001-07-11 2003-01-31 Toppan Printing Co Ltd 薄膜太陽電池
JP3504940B2 (ja) * 2002-05-17 2004-03-08 沖電気工業株式会社 半導体装置の製造方法
EP2009703A1 (en) * 2006-04-14 2008-12-31 Sharp Kabushiki Kaisha Solar cell, solar cell module using the solar cell and method for manufacturing the solar cell module
US7982127B2 (en) * 2006-12-29 2011-07-19 Industrial Technology Research Institute Thin film solar cell module of see-through type
WO2008092963A2 (en) * 2007-02-01 2008-08-07 Corus Uk Limited A power generating element for conversion of light into electricity and process for manufacturing thereof
US20090023274A1 (en) * 2007-07-07 2009-01-22 Xinmin Cao Hybrid Chemical Vapor Deposition Process Combining Hot-Wire CVD and Plasma-Enhanced CVD
WO2009029901A1 (en) * 2007-08-31 2009-03-05 Applied Materials, Inc. Production line module for forming multiple sized photovoltaic devices
US20100047954A1 (en) * 2007-08-31 2010-02-25 Su Tzay-Fa Jeff Photovoltaic production line
EP2053663A1 (en) * 2007-10-25 2009-04-29 Applied Materials, Inc. Hover cushion transport for webs in a web coating process
US20090188603A1 (en) * 2008-01-25 2009-07-30 Applied Materials, Inc. Method and apparatus for controlling laminator temperature on a solar cell
FR2936241B1 (fr) * 2008-09-24 2011-07-15 Saint Gobain Electrode avant pour cellule solaire avec revetement antireflet.
WO2010078022A2 (en) * 2008-12-17 2010-07-08 Alta Devices, Inc. Tape-based epitaxial lift off apparatuses and methods
EP2228467A3 (en) * 2009-03-11 2015-08-26 Fujifilm Corporation Aluminum alloy substrate and solar cell substrate
JP2010232454A (ja) * 2009-03-27 2010-10-14 Fujifilm Corp 基板とその位置決め方法、光電変換素子とその製造方法及び製造装置、及び太陽電池
JP4629153B1 (ja) * 2009-03-30 2011-02-09 富士フイルム株式会社 太陽電池および太陽電池の製造方法
JP5498221B2 (ja) * 2009-04-08 2014-05-21 富士フイルム株式会社 半導体装置及びそれを用いた太陽電池
US20100273279A1 (en) * 2009-04-27 2010-10-28 Applied Materials, Inc. Production line for the production of multiple sized photovoltaic devices
US20110065227A1 (en) * 2009-09-15 2011-03-17 Applied Materials, Inc. Common laser module for a photovoltaic production line
WO2011137373A2 (en) * 2010-04-30 2011-11-03 Applied Materials, Inc. Vertical inline cvd system
EP2395567B1 (en) 2010-06-10 2018-10-03 Solarwave AB A method for producing a solar cell module
US8101245B1 (en) * 2010-08-12 2012-01-24 Ovshinsky Innovation, Llc Plasma deposition of amorphous semiconductors at microwave frequencies

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3367304A (en) * 1967-03-13 1968-02-06 Dow Corning Deposition chamber for manufacture of refractory coated filaments
FR2133498B1 (pt) * 1971-04-15 1977-06-03 Labo Electronique Physique
US4058418A (en) * 1974-04-01 1977-11-15 Solarex Corporation Fabrication of thin film solar cells utilizing epitaxial deposition onto a liquid surface to obtain lateral growth
US3969163A (en) * 1974-09-19 1976-07-13 Texas Instruments Incorporated Vapor deposition method of forming low cost semiconductor solar cells including reconstitution of the reacted gases
JPS51141587A (en) * 1975-05-30 1976-12-06 Sharp Kk Method of producing solar battery
US4064521A (en) * 1975-07-28 1977-12-20 Rca Corporation Semiconductor device having a body of amorphous silicon
US4152535A (en) * 1976-07-06 1979-05-01 The Boeing Company Continuous process for fabricating solar cells and the product produced thereby
US4226897A (en) * 1977-12-05 1980-10-07 Plasma Physics Corporation Method of forming semiconducting materials and barriers
JPS54109767A (en) * 1978-02-16 1979-08-28 Sony Corp Forming method of amorphous semiconductor layer
US4226898A (en) * 1978-03-16 1980-10-07 Energy Conversion Devices, Inc. Amorphous semiconductors equivalent to crystalline semiconductors produced by a glow discharge process
DE2827049A1 (de) * 1978-06-20 1980-01-10 Siemens Ag Solarzellenbatterie und verfahren zu ihrer herstellung
JPS5559783A (en) * 1978-10-27 1980-05-06 Canon Inc Electronic device with solar battery
DE2900724C2 (de) * 1979-01-10 1986-05-28 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur Beschichtung von Substraten im Vakuum
JPS5934421B2 (ja) * 1979-11-29 1984-08-22 住友電気工業株式会社 薄膜製造法

Also Published As

Publication number Publication date
EP0041773B1 (en) 1985-10-02
JP2741638B2 (ja) 1998-04-22
EP0041773A1 (en) 1981-12-16
DE3172482D1 (en) 1985-11-07
US4410558A (en) 1983-10-18
JPH0738125A (ja) 1995-02-07
MX155842A (es) 1988-05-11

Similar Documents

Publication Publication Date Title
BR8103024A (pt) Sistema e processo para producao continua de celulas solares amorfas
BR7703064A (pt) Reator e processo de pirolise e sistema para hidrolise de pedacos de lixo
BR8404938A (pt) Processo para producao continua de polimero halogenado
BR8203067A (pt) Processo para preparacao continua de mono- ou poliisocianatos organicos
BR8503851A (pt) Processo e aparelhos para producao de blocos para construcao civil e blocos para construcao civil
BR8501670A (pt) Processo para operar sistema de celula de combustivel
BR8303663A (pt) Elemento catalisador para celula de combustivel e processo para sua producao
BR8604182A (pt) Processo para producao de eteres
BR8108482A (pt) Processo para producao de n-fosfonometilglicina
BE874620A (fr) Procede et installation de production de methane
BR8007726A (pt) Processo para preparacao de pelotas de gel de silica
BR8104455A (pt) Sistema de celula eletroquimica e processo para a producao de energia eletrica
MX173410B (es) Sulfometilpoliacrilamida y proceso para su produccion
BR8201296A (pt) Sistema de celula de combustivel e processo para operar o mesmo
BR7607267A (pt) Celula de eletrofloculacao e processo para separacao eletrocinetica de particulas de argila
BR8806930A (pt) Processo para fabricacao de eter de butila terciario de metila e sistema de reator para producao de eteres de alquila terciaria de metila
BR8008628A (pt) Processo para prodzir continuamente microperolas de mesocabono
BR8503590A (pt) Processo para producao de alcoois e catalisador
BR8200617A (pt) Processo para produzir poliolefinas
BR8200811A (pt) Processo para producao de dissulfetos de tiuram
BR8107906A (pt) Processo para producao continua de resinas de estireno modificadas com borracha
BR8108577A (pt) Processo e aparelho para producao continua de etanol
BR8107007A (pt) Processo para formacao de celulas fotovoltaicas e respectivas celulas fotovoltaicas
BR8204766A (pt) Processo para producao de 2-cloropiridinas
BR8305223A (pt) Sistema e processo para a fabricacao de dispositivos fotovoltaicos

Legal Events

Date Code Title Description
MM Lapse due to non-payment of fees (art. 50)