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AU5063699A - Furnace for processing semiconductor wafers - Google Patents

Furnace for processing semiconductor wafers

Info

Publication number
AU5063699A
AU5063699A AU50636/99A AU5063699A AU5063699A AU 5063699 A AU5063699 A AU 5063699A AU 50636/99 A AU50636/99 A AU 50636/99A AU 5063699 A AU5063699 A AU 5063699A AU 5063699 A AU5063699 A AU 5063699A
Authority
AU
Australia
Prior art keywords
furnace
semiconductor wafers
processing semiconductor
processing
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU50636/99A
Inventor
Gideon Drimer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Persys Technology Ltd
Original Assignee
Persys Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Persys Technology Ltd filed Critical Persys Technology Ltd
Priority claimed from PCT/IL1999/000425 external-priority patent/WO2000008401A1/en
Publication of AU5063699A publication Critical patent/AU5063699A/en
Abandoned legal-status Critical Current

Links

AU50636/99A 1999-08-02 1999-08-02 Furnace for processing semiconductor wafers Abandoned AU5063699A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IL1999/000425 WO2000008401A1 (en) 1998-08-06 1999-08-02 Furnace for processing semiconductor wafers

Publications (1)

Publication Number Publication Date
AU5063699A true AU5063699A (en) 2000-02-28

Family

ID=11062732

Family Applications (1)

Application Number Title Priority Date Filing Date
AU50636/99A Abandoned AU5063699A (en) 1999-08-02 1999-08-02 Furnace for processing semiconductor wafers

Country Status (1)

Country Link
AU (1) AU5063699A (en)

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase