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AU2003262070A1 - Process for production of fluoropolymers for resist - Google Patents

Process for production of fluoropolymers for resist

Info

Publication number
AU2003262070A1
AU2003262070A1 AU2003262070A AU2003262070A AU2003262070A1 AU 2003262070 A1 AU2003262070 A1 AU 2003262070A1 AU 2003262070 A AU2003262070 A AU 2003262070A AU 2003262070 A AU2003262070 A AU 2003262070A AU 2003262070 A1 AU2003262070 A1 AU 2003262070A1
Authority
AU
Australia
Prior art keywords
fluoropolymers
resist
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003262070A
Other languages
English (en)
Other versions
AU2003262070A8 (en
Inventor
Takayuki Araki
Takamitsu Furukawa
Takuji Ishikawa
Toshiro Itani
Meiten Koh
Minoru Toriumi
Tamio Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daikin Industries Ltd
Semiconductor Leading Edge Technologies Inc
Original Assignee
Daikin Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daikin Industries Ltd filed Critical Daikin Industries Ltd
Publication of AU2003262070A1 publication Critical patent/AU2003262070A1/en
Publication of AU2003262070A8 publication Critical patent/AU2003262070A8/xx
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F214/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
    • C08F214/18—Monomers containing fluorine

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
AU2003262070A 2002-09-13 2003-09-11 Process for production of fluoropolymers for resist Abandoned AU2003262070A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2002268739 2002-09-13
JP2002-268739 2002-09-13
JP2003-44455 2003-02-21
JP2003044455 2003-02-21
PCT/JP2003/011605 WO2004024787A1 (fr) 2002-09-13 2003-09-11 Procede de production de fluoropolymeres pour reserve

Publications (2)

Publication Number Publication Date
AU2003262070A1 true AU2003262070A1 (en) 2004-04-30
AU2003262070A8 AU2003262070A8 (en) 2004-04-30

Family

ID=31996178

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003262070A Abandoned AU2003262070A1 (en) 2002-09-13 2003-09-11 Process for production of fluoropolymers for resist

Country Status (4)

Country Link
JP (1) JPWO2004024787A1 (fr)
AU (1) AU2003262070A1 (fr)
TW (1) TW200408649A (fr)
WO (1) WO2004024787A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4551704B2 (ja) * 2004-07-08 2010-09-29 富士フイルム株式会社 液浸露光用保護膜形成組成物及びそれを用いたパターン形成方法
JP2006085081A (ja) * 2004-09-17 2006-03-30 Daikin Ind Ltd 微細パターン形成方法およびそれに用いるレジスト組成物
JP5163287B2 (ja) * 2008-05-26 2013-03-13 旭硝子株式会社 含フッ素弾性共重合体、その製造方法および架橋ゴム
KR101716816B1 (ko) * 2009-05-29 2017-03-16 닛산 가가쿠 고교 가부시키 가이샤 불소함유 고분지 폴리머 및 이를 포함하는 수지 조성물

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0662720B2 (ja) * 1986-03-25 1994-08-17 旭硝子株式会社 耐熱性樹脂の製造法
TW588220B (en) * 2000-04-04 2004-05-21 Daikin Ind Ltd Novel fluorine-containing polymer having group reactive with acid and chemically amplifying type photo resist composition prepared by using same
JP4010160B2 (ja) * 2002-03-04 2007-11-21 旭硝子株式会社 レジスト組成物

Also Published As

Publication number Publication date
TW200408649A (en) 2004-06-01
WO2004024787A1 (fr) 2004-03-25
AU2003262070A8 (en) 2004-04-30
JPWO2004024787A1 (ja) 2006-01-05

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase