AU2002327648A1 - Process and apparatus for silicon boat, silicon tubing and other silicon based member fabrication - Google Patents

Process and apparatus for silicon boat, silicon tubing and other silicon based member fabrication

Info

Publication number: AU2002327648A1
Authority: AU; Australia
Prior art keywords: silicon; boat; tubing; based member; member fabrication
Prior art date: 2001-09-19
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2002327648A

Inventor

Kiril A. Pandelisev

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Phoenix Scientific Corp

Original Assignee

Phoenix Scientific Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-09-19

Filing date

2002-09-19

Publication date

2003-04-01

2002-09-19 Application filed by Phoenix Scientific Corp filed Critical Phoenix Scientific Corp

2003-04-01 Publication of AU2002327648A1 publication Critical patent/AU2002327648A1/en

Status Abandoned legal-status Critical Current

Classifications

- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/08—Reaction chambers; Selection of materials therefor
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2303/00—Use of resin-bonded materials as reinforcement
- B29K2303/04—Inorganic materials
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2503/00—Use of resin-bonded materials as filler
- B29K2503/04—Inorganic materials

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Crystallography & Structural Chemistry (AREA)
Materials Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Chemical Kinetics & Catalysis (AREA)
General Chemical & Material Sciences (AREA)
Silicon Compounds (AREA)
Chemical Vapour Deposition (AREA)

AU2002327648A 2001-09-19 2002-09-19 Process and apparatus for silicon boat, silicon tubing and other silicon based member fabrication Abandoned AU2002327648A1 (en)

Applications Claiming Priority (5)

Application Number	Priority Date	Filing Date	Title
US32309801P	2001-09-19	2001-09-19
US60/323,098		2001-09-19
US33671201P	2001-12-07	2001-12-07
US60/336,712		2001-12-07
PCT/US2002/029516 WO2003024876A2 (en)	2001-09-19	2002-09-19	Process and apparatus for silicon boat, silicon tubing and other silicon based member fabrication

Publications (1)

Publication Number	Publication Date
AU2002327648A1 true AU2002327648A1 (en)	2003-04-01

Family

ID=26983771

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2002327648A Abandoned AU2002327648A1 (en)	2001-09-19	2002-09-19	Process and apparatus for silicon boat, silicon tubing and other silicon based member fabrication

Country Status (3)

Country	Link
AU (1)	AU2002327648A1 (en)
CA (1)	CA2460996A1 (en)
WO (1)	WO2003024876A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN115029786B (en) *	2022-06-24	2024-04-30	云南北方光学科技有限公司	Processing method of infrared thin silicon window

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6021382A (en) *	1983-07-15	1985-02-02	Canon Inc	Plasma cvd apparatus
US5340516A (en) *	1989-07-28	1994-08-23	Engelhard Corporation	Thermal shock and creep resistant porous mullite articles prepared from topaz and process for manufacture
US5173121A (en) *	1990-11-09	1992-12-22	The Board Of Trustees Of The University Of Little Rock	Apparatus for the deposition and film formation of silicon on substrates
JPH0610080A (en) *	1992-06-25	1994-01-18	Takeshi Masumoto	Method for producing high strength alloy having fine structure
US6194026B1 (en) *	1998-10-19	2001-02-27	Howmet Research Corporation	Superalloy component with abrasive grit-free coating
JP4216491B2 (en) *	2000-06-01	2009-01-28	三井造船株式会社	α-SiC Wafer Manufacturing Method

2002
- 2002-09-19 WO PCT/US2002/029516 patent/WO2003024876A2/en not_active Ceased
- 2002-09-19 AU AU2002327648A patent/AU2002327648A1/en not_active Abandoned
- 2002-09-19 CA CA002460996A patent/CA2460996A1/en not_active Abandoned

Also Published As

Publication number	Publication date
CA2460996A1 (en)	2003-03-27
WO2003024876A2 (en)	2003-03-27
WO2003024876A3 (en)	2003-05-22

Publication	Publication Date	Title
AU2002341583A1 (en)	2003-03-24	Chemical mechanical polishing tool, apparatus and method
AU2002354691A1 (en)	2003-01-29	Wafer transport apparatus
AU2002332500A1 (en)	2003-02-24	Apparatus, method and system for single well solution-mining
AU2002334359A1 (en)	2003-03-18	Language-acquisition apparatus
AU2002321629A1 (en)	2003-03-24	Inkjet deposition apparatus and method
AUPR245601A0 (en)	2001-02-01	An apparatus (WSM09)
AU2002350109A1 (en)	2003-05-19	Methods and apparatus for cryo-therapy
AUPR245301A0 (en)	2001-02-01	An apparatus (WSM06)
AU2002219529A1 (en)	2003-07-15	Semiconductor device and method for fabricating the same
AUPR245701A0 (en)	2001-02-01	An apparatus (WSM10)
AUPR851701A0 (en)	2001-11-29	Seating apparatus
EP1431425A4 (en)	2007-07-25	Single crystal semiconductor manufacturing apparatus and method, and single crystal ingot
AU2002356723A1 (en)	2003-06-10	Apparatus
AUPR245401A0 (en)	2001-02-01	An apparatus (WSM07)
AU2002357256A1 (en)	2003-07-15	Semiconductor apparatus
AU2002366929A1 (en)	2003-07-09	Gas purging method and exposure system, and device production method
AU2002327648A1 (en)	2003-04-01	Process and apparatus for silicon boat, silicon tubing and other silicon based member fabrication
AU2002363818A1 (en)	2003-06-17	Gripping apparatus
AU2002326011A1 (en)	2004-04-19	Dialysis apparatus
AU2002348998A1 (en)	2003-07-24	N-methyl-homocystines, use thereof and method for the production thereof
AU4462001A (en)	2001-10-08	Aligner, apparatus and method for transferring wafer, microdevice and method formanufacturing the same
AU2003202468A1 (en)	2003-07-24	Paper-binding and -folding apparatus
AU2002303671A1 (en)	2003-02-17	Semiconductor apparatus
AU2002324653A1 (en)	2003-02-24	Method and apparatus for doping semiconductors
AU2002336013A1 (en)	2003-04-28	Method for improved wafer alignment

Legal Events

Date	Code	Title	Description
2004-06-10	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase