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AU2002315750A1 - Coating device and coating method - Google Patents

Coating device and coating method

Info

Publication number
AU2002315750A1
AU2002315750A1 AU2002315750A AU2002315750A AU2002315750A1 AU 2002315750 A1 AU2002315750 A1 AU 2002315750A1 AU 2002315750 A AU2002315750 A AU 2002315750A AU 2002315750 A AU2002315750 A AU 2002315750A AU 2002315750 A1 AU2002315750 A1 AU 2002315750A1
Authority
AU
Australia
Prior art keywords
coating
coating method
coating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002315750A
Inventor
Nobukazu Ishizaka
Takahiro Kitano
Shinji Kobayashi
Norihisa Koga
Hiroaki Kurishima
Tomohide Minami
Masateru Morikawa
Jun Ookura
Shinichi Sugimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of AU2002315750A1 publication Critical patent/AU2002315750A1/en
Abandoned legal-status Critical Current

Links

AU2002315750A 2001-07-03 2002-07-01 Coating device and coating method Abandoned AU2002315750A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-202335 2001-07-03
JP2001-269321 2001-09-05

Publications (1)

Publication Number Publication Date
AU2002315750A1 true AU2002315750A1 (en) 2003-01-21

Family

ID=

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