AU2002228436A1 - Film forming method and film forming device - Google Patents

Film forming method and film forming device

Info

Publication number: AU2002228436A1
Authority: AU; Australia
Prior art keywords: film forming; forming method; forming device; film; forming
Prior art date: 2001-02-08
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

AU2002228436A

Other versions

AU2002228436B2 (en

Inventor

Shuji Hahakura

Kazuya Ohmatsu

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Sumitomo Electric Industries Ltd

Original Assignee

Sumitomo Electric Industries Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-02-08

Filing date

2002-02-05

Publication date

2003-02-13

2001-02-08 Priority claimed from JP2001032280A external-priority patent/JP2002235168A/en

2002-02-05 Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd

2003-02-13 Publication of AU2002228436A1 publication Critical patent/AU2002228436A1/en

2007-05-24 Application granted granted Critical

2007-05-24 Publication of AU2002228436B2 publication Critical patent/AU2002228436B2/en

2022-02-05 Anticipated expiration legal-status Critical

Status Ceased legal-status Critical Current

Links

AU2002228436A 2001-02-08 2002-02-05 Film forming method and film forming device Ceased AU2002228436B2 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
JP2001-32280		2001-02-08
JP2001032280A JP2002235168A (en)	2001-02-08	2001-02-08	Film forming method and film forming apparatus
PCT/JP2002/000936 WO2002063063A1 (en)	2001-02-08	2002-02-05	Film forming method and film forming device

Publications (2)

Publication Number	Publication Date
AU2002228436A1 true AU2002228436A1 (en)	2003-02-13
AU2002228436B2 AU2002228436B2 (en)	2007-05-24

Family

ID=18896239

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2002228436A Ceased AU2002228436B2 (en)	2001-02-08	2002-02-05	Film forming method and film forming device

Country Status (13)

Country	Link
US (1)	US20040096580A1 (en)
EP (1)	EP1371746B1 (en)
JP (1)	JP2002235168A (en)
KR (1)	KR100819719B1 (en)
CN (1)	CN1265016C (en)
AT (1)	ATE321154T1 (en)
AU (1)	AU2002228436B2 (en)
CA (1)	CA2436750C (en)
DE (1)	DE60210045T2 (en)
DK (1)	DK1371746T3 (en)
ES (1)	ES2261642T3 (en)
NZ (1)	NZ527521A (en)
WO (1)	WO2002063063A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE102006028977B4 (en) *	2006-06-23	2012-04-12	Qimonda Ag	Sputterdepositions device
JP5244725B2 (en) *	2009-07-21	2013-07-24	株式会社日立ハイテクノロジーズ	Deposition equipment
JP2015517020A (en) *	2012-02-03	2015-06-18	シーゲイトテクノロジーエルエルシー	Method for forming the layer
CN106544634B (en) *	2015-09-17	2019-03-12	宁波江丰电子材料股份有限公司	A kind of forming method of film layer, target and target production method
CN107630188A (en) *	2017-10-31	2018-01-26	安徽富芯微电子有限公司	A kind of film-coating mechanism and its application method for being used to improve metal level plating film uniformity
SG11202005894VA (en)	2017-12-22	2020-07-29	Institute Of Geological And Nuclear Sciences Ltd	Ion beam sputtering apparatus and method
CN108165934B (en) *	2018-01-19	2020-06-16	武汉华美晨曦光电有限责任公司	Evaporation plating equipment
CN114250164B (en) *	2020-09-23	2023-11-17	中国农业大学	A kind of Acinetobacter 1502IPR-05 with nitrogen-fixing and phosphorus-solubilizing ability and its application
WO2023006198A1 (en) *	2021-07-28	2023-02-02	MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V.	Apparatus for a thermal evaporation system and method of coating a coating region on a front surface of a substrate

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5736437A (en) *	1980-08-14	1982-02-27	Fuji Photo Film Co Ltd	Producing device of magnetic recording medium
JPS6194242A (en) *	1984-10-16	1986-05-13	Fuji Photo Film Co Ltd	Manufacture of magnetic recording medium
JPH0533124A (en) *	1991-07-26	1993-02-09	Olympus Optical Co Ltd	Laser flash vapor-deposition device
US5332133A (en) *	1991-11-01	1994-07-26	Nisshin Flour Milling Co., Ltd.	Powder supplying apparatus and powder spraying apparatus
JPH06101037A (en) *	1992-09-22	1994-04-12	Hitachi Ltd	Ion beam sputtering system
US5650378A (en) *	1992-10-02	1997-07-22	Fujikura Ltd.	Method of making polycrystalline thin film and superconducting oxide body
JP2996568B2 (en) *	1992-10-30	2000-01-11	株式会社フジクラ	Method for producing polycrystalline thin film and method for producing oxide superconducting conductor
AU6132494A (en) *	1993-03-12	1994-09-26	Neocera, Inc.	Superconducting films on alkaline earth fluoride substrates with multiple buffer layers
JPH06271394A (en) *	1993-03-19	1994-09-27	Chodendo Hatsuden Kanren Kiki Zairyo Gijutsu Kenkyu Kumiai	Target for laser beam vapor deposition device and production of oxide superconductor using the same
US5411772A (en) *	1994-01-25	1995-05-02	Rockwell International Corporation	Method of laser ablation for uniform thin film deposition
JPH0870144A (en) *	1994-08-26	1996-03-12	Sumitomo Electric Ind Ltd	How to make superconducting parts
JPH08144051A (en) *	1994-11-21	1996-06-04	Matsushita Electric Ind Co Ltd	Thin film forming method using laser ablation and laser ablation apparatus
US5624722A (en) *	1995-03-07	1997-04-29	Sumitomo Electric Industries, Ltd.	Apparatus and method for depositing films on substrate via on-axis laser ablation
JPH08246134A (en) *	1995-03-07	1996-09-24	Sumitomo Electric Ind Ltd	Thin film manufacturing method and thin film manufacturing apparatus by laser deposition method
JP3771012B2 (en) *	1997-09-02	2006-04-26	株式会社フジクラ	Oxide superconducting conductor
US6090207A (en) *	1998-04-02	2000-07-18	Neocera, Inc.	Translational target assembly for thin film deposition system
JP3877903B2 (en) *	1999-04-28	2007-02-07	株式会社フジクラ	Thin film formation method
JP2002266072A (en) *	2001-03-09	2002-09-18	Sumitomo Electric Ind Ltd	Laminated film and film forming method

2001
- 2001-02-08 JP JP2001032280A patent/JP2002235168A/en not_active Withdrawn
2002
- 2002-02-05 CN CNB028044746A patent/CN1265016C/en not_active Expired - Fee Related
- 2002-02-05 US US10/466,330 patent/US20040096580A1/en not_active Abandoned
- 2002-02-05 AU AU2002228436A patent/AU2002228436B2/en not_active Ceased
- 2002-02-05 NZ NZ527521A patent/NZ527521A/en unknown
- 2002-02-05 DK DK02710513T patent/DK1371746T3/en active
- 2002-02-05 EP EP02710513A patent/EP1371746B1/en not_active Expired - Lifetime
- 2002-02-05 ES ES02710513T patent/ES2261642T3/en not_active Expired - Lifetime
- 2002-02-05 CA CA002436750A patent/CA2436750C/en not_active Expired - Fee Related
- 2002-02-05 WO PCT/JP2002/000936 patent/WO2002063063A1/en not_active Ceased
- 2002-02-05 AT AT02710513T patent/ATE321154T1/en not_active IP Right Cessation
- 2002-02-05 KR KR1020037010471A patent/KR100819719B1/en not_active Expired - Fee Related
- 2002-02-05 DE DE60210045T patent/DE60210045T2/en not_active Expired - Lifetime

Publication	Publication Date	Title
AU2002221122A1 (en)	2002-06-24	Thin film forming method and thin film forming device
AU2003289383A1 (en)	2004-07-22	Coating device and coating film forming method
AU2002357309A1 (en)	2003-06-30	Photoactivation device and method
AU2001286419A1 (en)	2002-11-11	Endourethral device and method
AU2002253574A1 (en)	2002-11-11	Exposure method and apparatus
AU2002306898A1 (en)	2002-11-18	Optical device and method therefor
AU2002312813A1 (en)	2003-05-22	Slicing method and device
AUPR645501A0 (en)	2001-08-09	Attachment device and method
AU2002245675A1 (en)	2002-09-24	Electromanipulation device and method
EP1179436A3 (en)	2004-03-31	Laminating film and laminating method using it
AU2002228436A1 (en)	2003-02-13	Film forming method and film forming device
AU2002238901A1 (en)	2002-10-03	Thin film forming method and apparatus
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AU2003281011A1 (en)	2004-02-02	Film forming method and film forming apparatus
AU2002315775A1 (en)	2003-01-21	Thin film forming method and thin film forming device
AU1052901A (en)	2001-05-14	Device and method for manufacturing film
AU2002230162A1 (en)	2002-08-19	Spatter device and spatter film forming method
AU2002333176A1 (en)	2003-04-01	Fracture-splitting device and fracture-splitting method
AU2001227097A1 (en)	2002-08-06	Method and device for fusing film