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AU2002311355A1 - Method for producing silicon tetrafluoride - Google Patents

Method for producing silicon tetrafluoride

Info

Publication number
AU2002311355A1
AU2002311355A1 AU2002311355A AU2002311355A AU2002311355A1 AU 2002311355 A1 AU2002311355 A1 AU 2002311355A1 AU 2002311355 A AU2002311355 A AU 2002311355A AU 2002311355 A AU2002311355 A AU 2002311355A AU 2002311355 A1 AU2002311355 A1 AU 2002311355A1
Authority
AU
Australia
Prior art keywords
silicon tetrafluoride
producing silicon
producing
tetrafluoride
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002311355A
Inventor
Valery Georgiyevich Barabanov
Andrey Sergeyevich Kuznetzov
Viktor Alexeyevich Lvov
Vladimir Sergeyevich Menshov
Yury Alexeyevich Petrov
Rostislav Leonidovich Rabinovich
Mikhail Vasilyevich Sapozhnikov
Viktor Panteleymonovich Shopen
Vladimir Sergeyevich Turkin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ZAO "ASTOR ELECTRONICS"
Original Assignee
ZAO "ASTOR ELECTRONICS"
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ZAO "ASTOR ELECTRONICS" filed Critical ZAO "ASTOR ELECTRONICS"
Publication of AU2002311355A1 publication Critical patent/AU2002311355A1/en
Abandoned legal-status Critical Current

Links

AU2002311355A 2001-09-28 2002-05-20 Method for producing silicon tetrafluoride Abandoned AU2002311355A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU2001126317 2001-09-28

Publications (1)

Publication Number Publication Date
AU2002311355A1 true AU2002311355A1 (en) 2003-04-07

Family

ID=

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