AU2002354093A1 - Plasma processing device - Google Patents

Plasma processing device

Info

Publication number: AU2002354093A1
Authority: AU; Australia
Prior art keywords: processing device; plasma processing; plasma; processing
Prior art date: 2001-12-07
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2002354093A

Inventor

Toshihiro Hayami

Daisuke Hayashi

Hiroo Ono

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Tokyo Electron Ltd

Original Assignee

Tokyo Electron Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-12-07

Filing date

2002-12-05

Publication date

2003-06-17

2002-12-05 Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd

2003-06-17 Publication of AU2002354093A1 publication Critical patent/AU2002354093A1/en

Status Abandoned legal-status Critical Current

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means

Landscapes

Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
Plasma & Fusion (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Drying Of Semiconductors (AREA)
Plasma Technology (AREA)

AU2002354093A 2001-12-07 2002-12-05 Plasma processing device Abandoned AU2002354093A1 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
JP2001374439		2001-12-07
JP2001-374439		2001-12-07
PCT/JP2002/012736 WO2003049170A1 (en)	2001-12-07	2002-12-05	Plasma processing device

Publications (1)

Publication Number	Publication Date
AU2002354093A1 true AU2002354093A1 (en)	2003-06-17

Family

ID=19182995

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2002354093A Abandoned AU2002354093A1 (en)	2001-12-07	2002-12-05	Plasma processing device

Country Status (2)

Country	Link
AU (1)	AU2002354093A1 (en)
WO (1)	WO2003049170A1 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
ES2078735T3 (en) *	1991-05-21	1995-12-16	Materials Research Corp	SOFT ENGRAVING MODULE USING TOOLS AND PLASMA ECR GENERATOR FOR THE SAME.
JPH07130495A (en) *	1993-11-05	1995-05-19	Tokyo Electron Ltd	Magnetron type plasma processing device
JP2000306845A (en) *	1999-04-19	2000-11-02	Tokyo Electron Ltd	Magnetron plasma processing apparatus and processing method

2002
- 2002-12-05 WO PCT/JP2002/012736 patent/WO2003049170A1/en not_active Ceased
- 2002-12-05 AU AU2002354093A patent/AU2002354093A1/en not_active Abandoned

Also Published As

Publication number	Publication date
WO2003049170A1 (en)	2003-06-12

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Legal Events

Date	Code	Title	Description
2004-08-26	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase