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AU2002353611A1 - Apparatus of chemical vapor deposition for forming a thin film - Google Patents

Apparatus of chemical vapor deposition for forming a thin film

Info

Publication number
AU2002353611A1
AU2002353611A1 AU2002353611A AU2002353611A AU2002353611A1 AU 2002353611 A1 AU2002353611 A1 AU 2002353611A1 AU 2002353611 A AU2002353611 A AU 2002353611A AU 2002353611 A AU2002353611 A AU 2002353611A AU 2002353611 A1 AU2002353611 A1 AU 2002353611A1
Authority
AU
Australia
Prior art keywords
forming
thin film
vapor deposition
chemical vapor
chemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002353611A
Inventor
Pyung-Yong Um
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eugene Technology Co Ltd
Original Assignee
Eugene Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eugene Technology Co Ltd filed Critical Eugene Technology Co Ltd
Publication of AU2002353611A1 publication Critical patent/AU2002353611A1/en
Abandoned legal-status Critical Current

Links

AU2002353611A 2001-11-16 2002-11-15 Apparatus of chemical vapor deposition for forming a thin film Abandoned AU2002353611A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2001/71276 2001-11-16

Publications (1)

Publication Number Publication Date
AU2002353611A1 true AU2002353611A1 (en) 2003-05-26

Family

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