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AU2002234949A1 - Light source device, light illuminating device and exposure device, and device producing method - Google Patents

Light source device, light illuminating device and exposure device, and device producing method

Info

Publication number
AU2002234949A1
AU2002234949A1 AU2002234949A AU2002234949A AU2002234949A1 AU 2002234949 A1 AU2002234949 A1 AU 2002234949A1 AU 2002234949 A AU2002234949 A AU 2002234949A AU 2002234949 A AU2002234949 A AU 2002234949A AU 2002234949 A1 AU2002234949 A1 AU 2002234949A1
Authority
AU
Australia
Prior art keywords
producing method
light source
exposure
light
light illuminating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002234949A
Inventor
Hitoshi Kawai
Hiroshi Kitano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of AU2002234949A1 publication Critical patent/AU2002234949A1/en
Abandoned legal-status Critical Current

Links

AU2002234949A 2001-03-02 2002-03-04 Light source device, light illuminating device and exposure device, and device producing method Abandoned AU2002234949A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-058970 2001-03-02
JP2001-248655 2001-08-20

Publications (1)

Publication Number Publication Date
AU2002234949A1 true AU2002234949A1 (en) 2002-09-19

Family

ID=

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