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AU2002221113A1 - Laminated film and method of forming film - Google Patents

Laminated film and method of forming film

Info

Publication number
AU2002221113A1
AU2002221113A1 AU2002221113A AU2002221113A AU2002221113A1 AU 2002221113 A1 AU2002221113 A1 AU 2002221113A1 AU 2002221113 A AU2002221113 A AU 2002221113A AU 2002221113 A AU2002221113 A AU 2002221113A AU 2002221113 A1 AU2002221113 A1 AU 2002221113A1
Authority
AU
Australia
Prior art keywords
film
forming
laminated
laminated film
forming film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
AU2002221113A
Other versions
AU2002221113B2 (en
Inventor
Koso Fujino
Kazuya Ohmatsu
Takahiro Taneda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2001067274A external-priority patent/JP2002266072A/en
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of AU2002221113A1 publication Critical patent/AU2002221113A1/en
Application granted granted Critical
Publication of AU2002221113B2 publication Critical patent/AU2002221113B2/en
Assigned to SUMITOMO ELECTRIC INDUSTRIES, LTD. reassignment SUMITOMO ELECTRIC INDUSTRIES, LTD. Request for Assignment Assignors: INTERNATIONAL SUPERCONDUCTIVITY TECHNOLOGY CENTER, SUMITOMO ELECTRIC INDUSTRIES, LTD.
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

AU2002221113A 2001-03-09 2001-12-10 Laminated film and method of forming film Ceased AU2002221113B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001067274A JP2002266072A (en) 2001-03-09 2001-03-09 Laminated film and film forming method
JP2001-67274 2001-03-09
PCT/JP2001/010814 WO2002072909A1 (en) 2001-03-09 2001-12-10 Laminated film and method of forming film

Publications (2)

Publication Number Publication Date
AU2002221113A1 true AU2002221113A1 (en) 2003-03-20
AU2002221113B2 AU2002221113B2 (en) 2007-03-29

Family

ID=18925653

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002221113A Ceased AU2002221113B2 (en) 2001-03-09 2001-12-10 Laminated film and method of forming film

Country Status (8)

Country Link
US (1) US7544273B2 (en)
EP (1) EP1375697A4 (en)
JP (1) JP2002266072A (en)
KR (1) KR100764527B1 (en)
CN (1) CN1215196C (en)
AU (1) AU2002221113B2 (en)
NZ (1) NZ527998A (en)
WO (1) WO2002072909A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002235168A (en) * 2001-02-08 2002-08-23 Sumitomo Electric Ind Ltd Film forming method and film forming apparatus
JP6105849B2 (en) * 2011-05-16 2017-03-29 デクセリアルズ株式会社 Phase difference element
TWI714965B (en) 2018-02-15 2021-01-01 日商京瓷股份有限公司 Member for plasma processing device and plasma processing device with same
CN111175806B (en) * 2020-01-08 2022-03-01 中国科学院近代物理研究所 Beam scattering target device and beam energy dissipation analyzer
KR102523480B1 (en) * 2020-10-13 2023-04-19 김현철 Method for preparation of metal oxide compound having room temperature superconductivity by using alternating target laser ablation deposition and metal oxide thin film using the method
CN119663213B (en) * 2025-02-19 2025-05-16 武汉工程大学 A preparation method of Y2O3-BZO composite coating suitable for etching machine parts

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