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AU2002212035A1 - Time base comprising an integrated micromechanical tuning fork resonator - Google Patents

Time base comprising an integrated micromechanical tuning fork resonator

Info

Publication number
AU2002212035A1
AU2002212035A1 AU2002212035A AU1203502A AU2002212035A1 AU 2002212035 A1 AU2002212035 A1 AU 2002212035A1 AU 2002212035 A AU2002212035 A AU 2002212035A AU 1203502 A AU1203502 A AU 1203502A AU 2002212035 A1 AU2002212035 A1 AU 2002212035A1
Authority
AU
Australia
Prior art keywords
time base
tuning fork
fork resonator
integrated micromechanical
micromechanical tuning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002212035A
Inventor
Metin Giousouf
Heinz Kuck
Rainer Platz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ETA SA Manufacture Horlogere Suisse
Original Assignee
Ebauchesfabrik ETA AG
Eta SA Fabriques dEbauches
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebauchesfabrik ETA AG, Eta SA Fabriques dEbauches filed Critical Ebauchesfabrik ETA AG
Publication of AU2002212035A1 publication Critical patent/AU2002212035A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H03H9/2478—Single-Ended Tuning Fork resonators
    • H03H9/2484—Single-Ended Tuning Fork resonators with two fork tines, e.g. Y-beam cantilever
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B1/00—Details
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02283—Vibrating means
    • H03H2009/02291—Beams
    • H03H2009/02299—Comb-like, i.e. the beam comprising a plurality of fingers or protrusions along its length

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Micromachines (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
AU2002212035A 2000-12-21 2001-11-13 Time base comprising an integrated micromechanical tuning fork resonator Abandoned AU2002212035A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP00204720A EP1217735B1 (en) 2000-12-21 2000-12-21 Time base comprising an integrated micromechanical tuning fork resonator
EP00204720 2000-12-21
PCT/CH2001/000665 WO2002051004A1 (en) 2000-12-21 2001-11-13 Time base comprising an integrated micromechanical tuning fork resonator

Publications (1)

Publication Number Publication Date
AU2002212035A1 true AU2002212035A1 (en) 2002-07-01

Family

ID=8172509

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002212035A Abandoned AU2002212035A1 (en) 2000-12-21 2001-11-13 Time base comprising an integrated micromechanical tuning fork resonator

Country Status (9)

Country Link
US (1) US6831531B1 (en)
EP (1) EP1217735B1 (en)
JP (1) JP4099393B2 (en)
KR (1) KR100896880B1 (en)
CN (1) CN1292535C (en)
AU (1) AU2002212035A1 (en)
DE (1) DE60037132T2 (en)
RU (1) RU2271603C2 (en)
WO (1) WO2002051004A1 (en)

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Also Published As

Publication number Publication date
JP2004515992A (en) 2004-05-27
US6831531B1 (en) 2004-12-14
DE60037132T2 (en) 2008-09-11
RU2003122360A (en) 2005-02-10
EP1217735A1 (en) 2002-06-26
EP1217735B1 (en) 2007-11-14
JP4099393B2 (en) 2008-06-11
CN1292535C (en) 2006-12-27
HK1062963A1 (en) 2004-12-03
WO2002051004A1 (en) 2002-06-27
DE60037132D1 (en) 2007-12-27
KR20030067703A (en) 2003-08-14
RU2271603C2 (en) 2006-03-10
CN1481612A (en) 2004-03-10
KR100896880B1 (en) 2009-05-12

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