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AU2001232890A1 - Isolation technique for pressure sensing structure - Google Patents

Isolation technique for pressure sensing structure

Info

Publication number
AU2001232890A1
AU2001232890A1 AU2001232890A AU3289001A AU2001232890A1 AU 2001232890 A1 AU2001232890 A1 AU 2001232890A1 AU 2001232890 A AU2001232890 A AU 2001232890A AU 3289001 A AU3289001 A AU 3289001A AU 2001232890 A1 AU2001232890 A1 AU 2001232890A1
Authority
AU
Australia
Prior art keywords
pressure sensing
sensing structure
isolation technique
isolation
technique
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001232890A
Inventor
James H. Hoffman
Gerald Lopopolo
David E. Wagner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SILICON VALLEY SENSORS Inc
Original Assignee
SILICON VALLEY SENSORS Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SILICON VALLEY SENSORS Inc filed Critical SILICON VALLEY SENSORS Inc
Publication of AU2001232890A1 publication Critical patent/AU2001232890A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0069—Electrical connection means from the sensor to its support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/145—Housings with stress relieving means
    • G01L19/146—Housings with stress relieving means using flexible element between the transducer and the support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • H10W70/681—
    • H10W72/536—
    • H10W72/5363—
    • H10W72/884—
    • H10W90/753—

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Child & Adolescent Psychology (AREA)
  • Measuring Fluid Pressure (AREA)
AU2001232890A 2000-01-19 2001-01-19 Isolation technique for pressure sensing structure Abandoned AU2001232890A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/489,560 2000-01-19
US09/489,560 US6550337B1 (en) 2000-01-19 2000-01-19 Isolation technique for pressure sensing structure
PCT/US2001/001962 WO2001053789A1 (en) 2000-01-19 2001-01-19 Isolation technique for pressure sensing structure

Publications (1)

Publication Number Publication Date
AU2001232890A1 true AU2001232890A1 (en) 2001-07-31

Family

ID=23944355

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001232890A Abandoned AU2001232890A1 (en) 2000-01-19 2001-01-19 Isolation technique for pressure sensing structure

Country Status (3)

Country Link
US (2) US6550337B1 (en)
AU (1) AU2001232890A1 (en)
WO (1) WO2001053789A1 (en)

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Also Published As

Publication number Publication date
US6938490B2 (en) 2005-09-06
WO2001053789A1 (en) 2001-07-26
WO2001053789A9 (en) 2002-10-24
US6550337B1 (en) 2003-04-22
US20030150275A1 (en) 2003-08-14

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