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AU2001288952A1 - Novel polymers and photoresist compositions for short wavelength imaging - Google Patents

Novel polymers and photoresist compositions for short wavelength imaging

Info

Publication number
AU2001288952A1
AU2001288952A1 AU2001288952A AU8895201A AU2001288952A1 AU 2001288952 A1 AU2001288952 A1 AU 2001288952A1 AU 2001288952 A AU2001288952 A AU 2001288952A AU 8895201 A AU8895201 A AU 8895201A AU 2001288952 A1 AU2001288952 A1 AU 2001288952A1
Authority
AU
Australia
Prior art keywords
short wavelength
photoresist compositions
novel polymers
wavelength imaging
imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001288952A
Inventor
Robert L. Brainard
Gary N. Taylor
Shintaro Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DuPont Electronic Materials International LLC
Original Assignee
Shipley Co LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shipley Co LLC filed Critical Shipley Co LLC
Priority claimed from PCT/US2001/028206 external-priority patent/WO2002021213A2/en
Publication of AU2001288952A1 publication Critical patent/AU2001288952A1/en
Abandoned legal-status Critical Current

Links

AU2001288952A 2000-09-08 2001-09-08 Novel polymers and photoresist compositions for short wavelength imaging Abandoned AU2001288952A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US23142300P 2000-09-08 2000-09-08
US60231473 2000-09-08
US25266000P 2000-11-22 2000-11-22
US60252660 2000-11-22
PCT/US2001/028206 WO2002021213A2 (en) 2000-09-08 2001-09-08 Novel polymers and photoresist compositions for short wavelength imaging

Publications (1)

Publication Number Publication Date
AU2001288952A1 true AU2001288952A1 (en) 2002-03-22

Family

ID=26925154

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001288952A Abandoned AU2001288952A1 (en) 2000-09-08 2001-09-08 Novel polymers and photoresist compositions for short wavelength imaging

Country Status (1)

Country Link
AU (1) AU2001288952A1 (en)

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