[go: up one dir, main page]

AU2001288845A1 - Body-tied silicon on insulator semiconductor device structure and method therefor - Google Patents

Body-tied silicon on insulator semiconductor device structure and method therefor

Info

Publication number
AU2001288845A1
AU2001288845A1 AU2001288845A AU8884501A AU2001288845A1 AU 2001288845 A1 AU2001288845 A1 AU 2001288845A1 AU 2001288845 A AU2001288845 A AU 2001288845A AU 8884501 A AU8884501 A AU 8884501A AU 2001288845 A1 AU2001288845 A1 AU 2001288845A1
Authority
AU
Australia
Prior art keywords
semiconductor device
device structure
method therefor
insulator semiconductor
tied
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001288845A
Inventor
Michael A. Mendicino
Byoung W. Min
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of AU2001288845A1 publication Critical patent/AU2001288845A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/031Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
    • H10D30/0321Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] comprising silicon, e.g. amorphous silicon or polysilicon
    • H10D30/0323Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] comprising silicon, e.g. amorphous silicon or polysilicon comprising monocrystalline silicon
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6704Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
    • H10D30/6708Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device for preventing the kink effect or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect
    • H10D30/6711Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device for preventing the kink effect or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect by using electrodes contacting the supplementary regions or layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/711Insulated-gate field-effect transistors [IGFET] having floating bodies
    • H10P90/1906
    • H10W10/061
    • H10W10/181
    • H10W10/014
    • H10W10/17
AU2001288845A 2000-09-19 2001-09-07 Body-tied silicon on insulator semiconductor device structure and method therefor Abandoned AU2001288845A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US66555000A 2000-09-19 2000-09-19
US09/665,550 2000-09-19
PCT/US2001/027704 WO2002025701A2 (en) 2000-09-19 2001-09-07 Body-tied silicon on insulator semiconductor device structure and method therefor

Publications (1)

Publication Number Publication Date
AU2001288845A1 true AU2001288845A1 (en) 2002-04-02

Family

ID=24670554

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001288845A Abandoned AU2001288845A1 (en) 2000-09-19 2001-09-07 Body-tied silicon on insulator semiconductor device structure and method therefor

Country Status (3)

Country Link
AU (1) AU2001288845A1 (en)
TW (1) TW506078B (en)
WO (1) WO2002025701A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7732287B2 (en) 2006-05-02 2010-06-08 Honeywell International Inc. Method of forming a body-tie
US7964897B2 (en) 2008-07-22 2011-06-21 Honeywell International Inc. Direct contact to area efficient body tie process flow
JP5736808B2 (en) * 2011-02-02 2015-06-17 富士通セミコンダクター株式会社 Semiconductor device and manufacturing method thereof
US8946819B2 (en) * 2013-05-08 2015-02-03 Globalfoundries Singapore Pte. Ltd. Silicon-on-insulator integrated circuits with local oxidation of silicon and methods for fabricating the same

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3028061B2 (en) * 1996-03-14 2000-04-04 日本電気株式会社 SOI structure semiconductor device and semiconductor gate array
JP3441330B2 (en) * 1997-02-28 2003-09-02 株式会社東芝 Semiconductor device and manufacturing method thereof
EP0989613B1 (en) * 1998-08-29 2005-05-04 International Business Machines Corporation SOI transistor with body contact and method of forming same
JP2001274264A (en) * 2000-03-24 2001-10-05 Mitsubishi Electric Corp Semiconductor device and manufacturing method thereof

Also Published As

Publication number Publication date
WO2002025701A2 (en) 2002-03-28
TW506078B (en) 2002-10-11
WO2002025701A3 (en) 2002-10-10

Similar Documents

Publication Publication Date Title
AU2002357202A1 (en) Body-tied silicon on insulator semiconductor device and method therefor
AU3330600A (en) Semiconductor device and semiconductor substrate
AU2001272741A1 (en) Semiconductor light-emitting device and semiconductor light-emitting apparatus
EP1130626A3 (en) Method and apparatus for manufacturing semiconductor device
AU2001267880A1 (en) Semiconductor device and method for fabricating the same
AU2002348252A1 (en) Organic semiconductor device and method
AU2001291257A1 (en) Multigate semiconductor device with vertical channel current and method of fabrication
GB0017158D0 (en) Thin-film semiconductor device and method of manufacture
AU2001273116A1 (en) Semiconductor device and method of formation
EP1102327A3 (en) Field effect semiconductor device
AU2692600A (en) Semiconductor element and semiconductor device
AU2000224587A1 (en) Semiconductor device
AU2001236028A1 (en) Semiconductor device
AU2319600A (en) Semiconductor device
AU2002304041A1 (en) Semiconductor storage method and device supporting multi-interfaces
AU2002354254A1 (en) Method for making nitride semiconductor substrate and method for making nitride semiconductor device
AU2001271293A1 (en) Semiconductor structure, device, circuit, and process
AU2001294188A1 (en) Device and method for manufacturing semiconductor
EP1202350A3 (en) Semiconductor device and manufacturing method thereof
AU2002316720A1 (en) Epitaxial semiconductor on insulator (soi) structures and devices
AU2003240569A1 (en) Method of making an soi semiconductor device having enhanced, self-aligned dielectric regions in the bulk silicon substrate
AU3230801A (en) Semiconductor device fabrication method and semiconductor device fabrication device
AU2002228766A1 (en) Semiconductor device and method of making same
EP1174914A3 (en) Semiconductor device and semiconductor device manufacturing method
AU2001242793A1 (en) Semiconductor device and fabrication method therefor