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AU2001279171A1 - Improved apparatus and method for forming a high pressure plasma discharge column - Google Patents

Improved apparatus and method for forming a high pressure plasma discharge column

Info

Publication number
AU2001279171A1
AU2001279171A1 AU2001279171A AU7917101A AU2001279171A1 AU 2001279171 A1 AU2001279171 A1 AU 2001279171A1 AU 2001279171 A AU2001279171 A AU 2001279171A AU 7917101 A AU7917101 A AU 7917101A AU 2001279171 A1 AU2001279171 A1 AU 2001279171A1
Authority
AU
Australia
Prior art keywords
forming
high pressure
plasma discharge
pressure plasma
improved apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001279171A
Inventor
Neil H. Brooks
Torkil H. Jensen
Charles M. Moeller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Atomics Corp
Original Assignee
General Atomics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Atomics Corp filed Critical General Atomics Corp
Publication of AU2001279171A1 publication Critical patent/AU2001279171A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
AU2001279171A 2000-08-04 2001-08-03 Improved apparatus and method for forming a high pressure plasma discharge column Abandoned AU2001279171A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/632,651 US6417625B1 (en) 2000-08-04 2000-08-04 Apparatus and method for forming a high pressure plasma discharge column
US09632651 2000-08-04
PCT/US2001/024376 WO2002013222A1 (en) 2000-08-04 2001-08-03 Improved apparatus and method for forming a high pressure plasma discharge column

Publications (1)

Publication Number Publication Date
AU2001279171A1 true AU2001279171A1 (en) 2002-02-18

Family

ID=24536372

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001279171A Abandoned AU2001279171A1 (en) 2000-08-04 2001-08-03 Improved apparatus and method for forming a high pressure plasma discharge column

Country Status (3)

Country Link
US (2) US6417625B1 (en)
AU (1) AU2001279171A1 (en)
WO (1) WO2002013222A1 (en)

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US9741553B2 (en) 2014-05-15 2017-08-22 Excelitas Technologies Corp. Elliptical and dual parabolic laser driven sealed beam lamps
US10186416B2 (en) 2014-05-15 2019-01-22 Excelitas Technologies Corp. Apparatus and a method for operating a variable pressure sealed beam lamp
JP6707467B2 (en) 2014-05-15 2020-06-10 エクセリタス テクノロジーズ コーポレイション Laser driven shield beam lamp
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US10008378B2 (en) 2015-05-14 2018-06-26 Excelitas Technologies Corp. Laser driven sealed beam lamp with improved stability
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US11776804B2 (en) 2021-04-23 2023-10-03 Kla Corporation Laser-sustained plasma light source with reverse vortex flow
US11587781B2 (en) 2021-05-24 2023-02-21 Hamamatsu Photonics K.K. Laser-driven light source with electrodeless ignition
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US12165856B2 (en) 2022-02-21 2024-12-10 Hamamatsu Photonics K.K. Inductively coupled plasma light source
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Also Published As

Publication number Publication date
WO2002013222A1 (en) 2002-02-14
US20030222586A1 (en) 2003-12-04
US6956329B2 (en) 2005-10-18
US6417625B1 (en) 2002-07-09

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