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AU2001270030A1 - Selectively enabled delay elements for interferometers - Google Patents

Selectively enabled delay elements for interferometers

Info

Publication number
AU2001270030A1
AU2001270030A1 AU2001270030A AU7003001A AU2001270030A1 AU 2001270030 A1 AU2001270030 A1 AU 2001270030A1 AU 2001270030 A AU2001270030 A AU 2001270030A AU 7003001 A AU7003001 A AU 7003001A AU 2001270030 A1 AU2001270030 A1 AU 2001270030A1
Authority
AU
Australia
Prior art keywords
interferometers
delay elements
selectively enabled
enabled delay
selectively
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001270030A
Inventor
Robert H. Cormack
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU2001270030A1 publication Critical patent/AU2001270030A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/32—Investigating bands of a spectrum in sequence by a single detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4531—Devices without moving parts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
AU2001270030A 2000-06-21 2001-06-21 Selectively enabled delay elements for interferometers Abandoned AU2001270030A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US21296900P 2000-06-21 2000-06-21
US60212969 2000-06-21
PCT/US2001/019802 WO2001098731A1 (en) 2000-06-21 2001-06-21 Selectively enabled delay elements for interferometers

Publications (1)

Publication Number Publication Date
AU2001270030A1 true AU2001270030A1 (en) 2002-01-02

Family

ID=22793167

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001270030A Abandoned AU2001270030A1 (en) 2000-06-21 2001-06-21 Selectively enabled delay elements for interferometers

Country Status (2)

Country Link
AU (1) AU2001270030A1 (en)
WO (1) WO2001098731A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2406638B (en) * 2003-10-01 2006-03-29 Amc Amsterdam Interferometric measurement apparatus and method therefor
DE102006032810A1 (en) * 2006-07-14 2008-01-17 Carl Zeiss Smt Ag Illumination optics for a microlithography projection exposure apparatus, illumination system with such an illumination optics, microlithography projection exposure apparatus with such an illumination system, microlithographic production method for components and component produced by this method
GB2598538A (en) * 2020-05-18 2022-03-09 Univ Loughborough Method and apparatus for measuring distance

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4394069A (en) * 1979-06-05 1983-07-19 Beckman Instruments, Inc. Liquid crystal tuned birefringent filter
US5600440A (en) * 1995-07-05 1997-02-04 The United States Of America As Represented By The Secretary Of The Navy Liquid crystal interferometer

Also Published As

Publication number Publication date
WO2001098731A1 (en) 2001-12-27

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