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AU2001251540A1 - Modular sorter - Google Patents

Modular sorter

Info

Publication number
AU2001251540A1
AU2001251540A1 AU2001251540A AU5154001A AU2001251540A1 AU 2001251540 A1 AU2001251540 A1 AU 2001251540A1 AU 2001251540 A AU2001251540 A AU 2001251540A AU 5154001 A AU5154001 A AU 5154001A AU 2001251540 A1 AU2001251540 A1 AU 2001251540A1
Authority
AU
Australia
Prior art keywords
modular sorter
sorter
modular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001251540A
Inventor
Daniel Babbs
Matthew Coady
Timothy Ewald
William J. Fosnight
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asyst Technologies Inc
Original Assignee
ASYST TECHNOLOGIES
Asyst Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASYST TECHNOLOGIES, Asyst Technologies Inc filed Critical ASYST TECHNOLOGIES
Publication of AU2001251540A1 publication Critical patent/AU2001251540A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • H10P72/0611—
    • H10P72/3408—
    • H10P72/3411—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber
AU2001251540A 2000-04-12 2001-04-10 Modular sorter Abandoned AU2001251540A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09547829 2000-04-12
US09/547,829 US6520727B1 (en) 2000-04-12 2000-04-12 Modular sorter
PCT/US2001/011823 WO2001079090A1 (en) 2000-04-12 2001-04-10 Modular sorter

Publications (1)

Publication Number Publication Date
AU2001251540A1 true AU2001251540A1 (en) 2001-10-30

Family

ID=24186310

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001251540A Abandoned AU2001251540A1 (en) 2000-04-12 2001-04-10 Modular sorter

Country Status (8)

Country Link
US (1) US6520727B1 (en)
EP (1) EP1272410A4 (en)
JP (1) JP2003533015A (en)
KR (1) KR100562542B1 (en)
CN (1) CN1269707C (en)
AU (1) AU2001251540A1 (en)
TW (1) TW589278B (en)
WO (1) WO2001079090A1 (en)

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US6690993B2 (en) * 2000-10-12 2004-02-10 R. Foulke Development Company, Llc Reticle storage system
US6962471B2 (en) * 2000-10-26 2005-11-08 Leica Microsystems Jena Gmbh Substrate conveying module and system made up of substrate conveying module and workstation
KR100914363B1 (en) * 2001-07-15 2009-08-28 어플라이드 머티어리얼스, 인코포레이티드 Processing system
JP2005520321A (en) 2001-07-16 2005-07-07 アシスト テクノロジーズ インコーポレイテッド Integrated system for tool front-end workpiece processing
US7100340B2 (en) * 2001-08-31 2006-09-05 Asyst Technologies, Inc. Unified frame for semiconductor material handling system
US7217076B2 (en) * 2001-08-31 2007-05-15 Asyst Technologies, Inc. Semiconductor material handling system
EP1454340B1 (en) * 2001-11-29 2006-09-13 Diamond Semiconductor Group, LLC. Wafer handling apparatus and method
JP2003243481A (en) * 2002-02-21 2003-08-29 Asm Japan Kk Semiconductor manufacturing apparatus and maintenance method
US6827546B2 (en) * 2002-08-19 2004-12-07 Brooks-Pri Automation, Inc. Modular frame for a wafer fabrication system
US6748282B2 (en) * 2002-08-22 2004-06-08 Taiwan Semiconductor Manufacturing Co., Ltd Flexible dispatching system and method for coordinating between a manual automated dispatching mode
DE10325225B4 (en) * 2003-06-04 2006-11-16 Leica Microsystems Semiconductor Gmbh system Cabinets
US20050096775A1 (en) * 2003-10-31 2005-05-05 Yu-Chih Wang Method and system of automatic carrier transfer
US7379790B2 (en) 2004-05-04 2008-05-27 Intuitive Surgical, Inc. Tool memory-based software upgrades for robotic surgery
JP4579723B2 (en) * 2005-03-07 2010-11-10 川崎重工業株式会社 Transport system unit and divided body
KR101089536B1 (en) * 2006-06-06 2011-12-05 에이비비 리써치 리미티드 Improved method and system for operating a cyclic production machine in coordination with a loader or unloader machine
DE102006029003A1 (en) * 2006-06-24 2008-01-03 Vistec Semiconductor Systems Gmbh Wafer e.g. semiconductor wafer, handling device, has tool rack with tool component, base rack and robot for moving wafers, and robot mounted on coupling rack that is mounted directly on base rack independently of tool rack
KR100906370B1 (en) 2007-11-20 2009-07-06 코리아테크노(주) Multi-Sorter Stage Feeder
US8757026B2 (en) 2008-04-15 2014-06-24 Dynamic Micro Systems, Semiconductor Equipment Gmbh Clean transfer robot
TWI368593B (en) * 2009-02-23 2012-07-21 Inotera Memories Inc A system and a method for automatically product distributing
CH704193A1 (en) * 2010-12-08 2012-06-15 Tec Sem Ag Device for receiving and dispensing substrate e.g. glass substrate used in e.g. LCD device, has handling device that is secured with housing elements which are assembled into frame-less self-supporting housing by releasable fastener
JP5952526B2 (en) * 2011-02-04 2016-07-13 株式会社ダイヘン Work transfer system
TWI435074B (en) * 2011-06-29 2014-04-21 Mpi Corp Optical inspection device and optical inspection method
TWI447059B (en) * 2012-01-10 2014-08-01 華亞科技股份有限公司 Wafer storage system
KR101461026B1 (en) * 2013-09-23 2014-11-13 피에스케이 주식회사 Substrate processing apparatus
JP5910647B2 (en) * 2014-02-19 2016-04-27 トヨタ自動車株式会社 Mobile robot movement control method
CN105280521B (en) * 2014-07-23 2019-03-12 北京北方华创微电子装备有限公司 Technique processing control method, system and the semiconductor equipment of semiconductor equipment
US9987747B2 (en) * 2016-05-24 2018-06-05 Semes Co., Ltd. Stocker for receiving cassettes and method of teaching a stocker robot disposed therein
US11735451B2 (en) * 2019-09-27 2023-08-22 Taiwan Semiconductor Manufacturing Co., Ltd. Stocker system for wafer cassette
CN112582319A (en) * 2019-09-27 2021-03-30 台湾积体电路制造股份有限公司 Support member system
KR102384032B1 (en) * 2021-12-22 2022-04-11 주식회사 오토솔루션 A Semiconductor Wafers Sorter System That Can Accurately Sort Various Types Of Semiconductor Wafers
JP1728449S (en) * 2022-03-30 2022-10-27 Substrate processing equipment

Family Cites Families (21)

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Publication number Priority date Publication date Assignee Title
US4532970A (en) 1983-09-28 1985-08-06 Hewlett-Packard Company Particle-free dockable interface for integrated circuit processing
US4534389A (en) 1984-03-29 1985-08-13 Hewlett-Packard Company Interlocking door latch for dockable interface for integrated circuit processing
US4676002A (en) 1984-06-25 1987-06-30 Slocum Alexander H Mechanisms to determine position and orientation in space
US4815912A (en) 1984-12-24 1989-03-28 Asyst Technologies, Inc. Box door actuated retainer
US4775281A (en) 1986-12-02 1988-10-04 Teradyne, Inc. Apparatus and method for loading and unloading wafers
US4911810A (en) * 1988-06-21 1990-03-27 Brown University Modular sputtering apparatus
US4995430A (en) 1989-05-19 1991-02-26 Asyst Technologies, Inc. Sealable transportable container having improved latch mechanism
JP3258748B2 (en) * 1993-02-08 2002-02-18 東京エレクトロン株式会社 Heat treatment equipment
JP2913439B2 (en) 1993-03-18 1999-06-28 東京エレクトロン株式会社 Transfer device and transfer method
US5518542A (en) 1993-11-05 1996-05-21 Tokyo Electron Limited Double-sided substrate cleaning apparatus
JP3453223B2 (en) * 1994-08-19 2003-10-06 東京エレクトロン株式会社 Processing equipment
US5647718A (en) 1995-07-07 1997-07-15 Pri Automation, Inc. Straight line wafer transfer system
US5789890A (en) 1996-03-22 1998-08-04 Genmark Automation Robot having multiple degrees of freedom
US6091498A (en) * 1996-07-15 2000-07-18 Semitool, Inc. Semiconductor processing apparatus having lift and tilt mechanism
US6082949A (en) 1996-10-11 2000-07-04 Asyst Technologies, Inc. Load port opener
US5920679A (en) 1997-08-25 1999-07-06 The Research Foundation Of State University Of New York Apparatus and method for computer-aided low-harmonic trajectory planning for computer-controlled machinery
US6155768A (en) 1998-01-30 2000-12-05 Kensington Laboratories, Inc. Multiple link robot arm system implemented with offset end effectors to provide extended reach and enhanced throughput
JPH11220001A (en) * 1998-01-30 1999-08-10 Hitachi Ltd Load port and load port carrier in semiconductor substrate processing equipment
US6050891A (en) * 1998-02-06 2000-04-18 Applied Materials, Inc. Vacuum processing system with turbo-axial fan in clean-air supply system of front end environment
US6298280B1 (en) 1998-09-28 2001-10-02 Asyst Technologies, Inc. Method for in-cassette wafer center determination
US6326755B1 (en) 2000-04-12 2001-12-04 Asyst Technologies, Inc. System for parallel processing of workpieces

Also Published As

Publication number Publication date
KR100562542B1 (en) 2006-03-22
TW589278B (en) 2004-06-01
US6520727B1 (en) 2003-02-18
JP2003533015A (en) 2003-11-05
KR20020089463A (en) 2002-11-29
CN1416403A (en) 2003-05-07
EP1272410A4 (en) 2007-02-28
EP1272410A1 (en) 2003-01-08
CN1269707C (en) 2006-08-16
WO2001079090A1 (en) 2001-10-25

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