AU1955395A - Tantalum compounds - Google Patents

Tantalum compounds

Info

Publication number: AU1955395A
Authority: AU; Australia
Prior art keywords: tantalum compounds; tantalum; compounds
Prior art date: 1994-03-26
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU19553/95A

Inventor

Simon Robert Drake

Timothy John Leedham

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

SIMONE ROBERT DRAKE

Original Assignee

SIMONE ROBERT DRAKE

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1994-03-26

Filing date

1995-03-23

Publication date

1995-10-17

1994-03-26 Priority claimed from GB9406060A external-priority patent/GB9406060D0/en

1994-11-24 Priority claimed from GB9423750A external-priority patent/GB9423750D0/en

1995-03-23 Application filed by SIMONE ROBERT DRAKE filed Critical SIMONE ROBERT DRAKE

1995-10-17 Publication of AU1955395A publication Critical patent/AU1955395A/en

Status Abandoned legal-status Critical Current

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/405—Oxides of refractory metals or yttrium
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F9/00—Compounds containing elements of Groups 5 or 15 of the Periodic Table
- C07F9/005—Compounds of elements of Group 5 of the Periodic Table without metal-carbon linkages

Landscapes

Chemical & Material Sciences (AREA)
Organic Chemistry (AREA)
Inorganic Chemistry (AREA)
General Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)

AU19553/95A 1994-03-26 1995-03-23 Tantalum compounds Abandoned AU1955395A (en)

Applications Claiming Priority (5)

Application Number	Priority Date	Filing Date	Title
GB9406060		1994-03-26
GB9406060A GB9406060D0 (en)	1994-03-26	1994-03-26	Volatile tantalum compounds
GB9423750A GB9423750D0 (en)	1994-11-24	1994-11-24	Tantalum compounds
GB9423750		1994-11-24
PCT/GB1995/000644 WO1995026355A1 (en)	1994-03-26	1995-03-23	Tantalum compounds

Publications (1)

Publication Number	Publication Date
AU1955395A true AU1955395A (en)	1995-10-17

Family

ID=26304592

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU19553/95A Abandoned AU1955395A (en)	1994-03-26	1995-03-23	Tantalum compounds

Country Status (2)

Country	Link
AU (1)	AU1955395A (en)
WO (1)	WO1995026355A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP3223800B2 (en)	1996-07-25	2001-10-29	三菱マテリアル株式会社	Tantalum compound
GB9809207D0 (en) *	1998-04-29	1998-07-01	Bp Chem Int Ltd	Novel catalysts for olefin polymerisation
US20020009861A1 (en) *	1998-06-12	2002-01-24	Pravin K. Narwankar	Method and apparatus for the formation of dielectric layers
WO2000032608A1 (en) *	1998-11-26	2000-06-08	Infineon Technologies Ag	Complex compound of an element of sub-group iv
US7112485B2 (en)	2002-08-28	2006-09-26	Micron Technology, Inc.	Systems and methods for forming zirconium and/or hafnium-containing layers
US6784049B2 (en)	2002-08-28	2004-08-31	Micron Technology, Inc.	Method for forming refractory metal oxide layers with tetramethyldisiloxane
US7030042B2 (en)	2002-08-28	2006-04-18	Micron Technology, Inc.	Systems and methods for forming tantalum oxide layers and tantalum precursor compounds
US7041609B2 (en)	2002-08-28	2006-05-09	Micron Technology, Inc.	Systems and methods for forming metal oxides using alcohols
JP4823069B2 (en)	2004-11-02	2011-11-24	株式会社Ａｄｅｋａ	Metal compound, thin film forming raw material, and thin film manufacturing method
WO2011148890A1 (en) *	2010-05-24	2011-12-01	昭和電工株式会社	Organotantalum complex compound and method for producing same

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS58203443A (en) *	1982-05-24	1983-11-26	Hitachi Ltd	Composition for correcting white spot defects on photomasks
US4525468A (en) *	1982-09-30	1985-06-25	E. I. Du Pont De Nemours And Company	Olefin polymerization catalyst

1995
- 1995-03-23 WO PCT/GB1995/000644 patent/WO1995026355A1/en not_active Ceased
- 1995-03-23 AU AU19553/95A patent/AU1955395A/en not_active Abandoned

Also Published As

Publication number	Publication date
WO1995026355A1 (en)	1995-10-05

Publication	Publication Date	Title
AU3382595A (en)	1996-03-04	Novel compounds
AU7028094A (en)	1996-02-08	Capacitor
AU4036895A (en)	1996-06-20	Substituted 1H-imidazoles
AU2263195A (en)	1995-11-16	Dendrimeric compounds
AU1272295A (en)	1995-07-03	Proinsulin-like compounds
AU2070795A (en)	1995-10-17	3-aryl-4-hydroxy-delta3-dihydrothiophenone derivatives
AU5116096A (en)	1996-10-08	Fungicidal compounds
AU4514496A (en)	1996-07-03	Novel compounds
AU4925697A (en)	1998-06-25	Compounds
AU2844595A (en)	1996-02-22	Substituted biphenyloxazolines
AU5261093A (en)	1994-07-14	Aminoalkylphenyl compounds
AU2485595A (en)	1996-01-25	1-Pyridyltetrazolinone derivatives
AU4839196A (en)	1996-10-02	Polyazacycloalkane compounds
AU4049095A (en)	1996-06-27	Substituted pyrazine compounds
AU1955395A (en)	1995-10-17	Tantalum compounds
AU4399396A (en)	1996-07-10	Compounds
AU4117396A (en)	1996-06-19	Morpholinoethylamide derivatives
AU1217797A (en)	1997-07-17	New compounds
AU2320895A (en)	1996-01-18	Polyalkylpiperidine compounds
AU2084895A (en)	1995-10-23	DC-89 derivatives
AU5115996A (en)	1996-10-08	Fungicidal compounds
AU6657596A (en)	1997-02-26	Trindene compounds
AU1454895A (en)	1995-08-01	Diphenyloxazoline derivatives
AU3856995A (en)	1996-06-06	UCF116 Compounds
AU5394594A (en)	1994-07-28	New compounds