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ATE361563T1 - Dreidimensionale miniaturkapselung für mems- sensoren - Google Patents

Dreidimensionale miniaturkapselung für mems- sensoren

Info

Publication number
ATE361563T1
ATE361563T1 AT04715806T AT04715806T ATE361563T1 AT E361563 T1 ATE361563 T1 AT E361563T1 AT 04715806 T AT04715806 T AT 04715806T AT 04715806 T AT04715806 T AT 04715806T AT E361563 T1 ATE361563 T1 AT E361563T1
Authority
AT
Austria
Prior art keywords
structured
mems
mems sensors
mounting
mems sensor
Prior art date
Application number
AT04715806T
Other languages
English (en)
Inventor
Douglas C Macgugan
Original Assignee
Honeywell Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Int Inc filed Critical Honeywell Int Inc
Application granted granted Critical
Publication of ATE361563T1 publication Critical patent/ATE361563T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0074—3D packaging, i.e. encapsulation containing one or several MEMS devices arranged in planes non-parallel to the mounting board
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
    • G01C21/10—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration
    • G01C21/12—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning
    • G01C21/16—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning by integrating acceleration or speed, i.e. inertial navigation
    • G01C21/166—Mechanical, construction or arrangement details of inertial navigation systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/023—Housings for acceleration measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R33/00—Coupling devices specially adapted for supporting apparatus and having one part acting as a holder providing support and electrical connection via a counterpart which is structurally associated with the apparatus, e.g. lamp holders; Separate parts thereof
    • H01R33/88—Coupling devices specially adapted for supporting apparatus and having one part acting as a holder providing support and electrical connection via a counterpart which is structurally associated with the apparatus, e.g. lamp holders; Separate parts thereof adapted for simultaneous co-operation with two or more identical counterparts

Landscapes

  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Automation & Control Theory (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
AT04715806T 2003-02-28 2004-02-27 Dreidimensionale miniaturkapselung für mems- sensoren ATE361563T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/377,439 US6918297B2 (en) 2003-02-28 2003-02-28 Miniature 3-dimensional package for MEMS sensors

Publications (1)

Publication Number Publication Date
ATE361563T1 true ATE361563T1 (de) 2007-05-15

Family

ID=32908142

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04715806T ATE361563T1 (de) 2003-02-28 2004-02-27 Dreidimensionale miniaturkapselung für mems- sensoren

Country Status (5)

Country Link
US (1) US6918297B2 (de)
EP (1) EP1642365B1 (de)
AT (1) ATE361563T1 (de)
DE (1) DE602004006270T2 (de)
WO (1) WO2004079874A1 (de)

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Also Published As

Publication number Publication date
US20040169244A1 (en) 2004-09-02
EP1642365B1 (de) 2007-05-02
DE602004006270D1 (de) 2007-06-14
DE602004006270T2 (de) 2008-01-03
WO2004079874A1 (en) 2004-09-16
US6918297B2 (en) 2005-07-19
EP1642365A1 (de) 2006-04-05

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