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DE602004008648D1 - Bistabiler mikromechanischer schalter, betätigungsverfahren und entsprechendes verfahren zu seiner realisierung - Google Patents

Bistabiler mikromechanischer schalter, betätigungsverfahren und entsprechendes verfahren zu seiner realisierung

Info

Publication number
DE602004008648D1
DE602004008648D1 DE602004008648T DE602004008648T DE602004008648D1 DE 602004008648 D1 DE602004008648 D1 DE 602004008648D1 DE 602004008648 T DE602004008648 T DE 602004008648T DE 602004008648 T DE602004008648 T DE 602004008648T DE 602004008648 D1 DE602004008648 D1 DE 602004008648D1
Authority
DE
Germany
Prior art keywords
substrate
bridge
realization
medial
conductive element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004008648T
Other languages
English (en)
Other versions
DE602004008648T2 (de
Inventor
Pierre-Louis Charvet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE602004008648D1 publication Critical patent/DE602004008648D1/de
Application granted granted Critical
Publication of DE602004008648T2 publication Critical patent/DE602004008648T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Push-Button Switches (AREA)
  • Hydrogenated Pyridines (AREA)
DE602004008648T 2003-08-01 2004-07-26 Bistabiler mikromechanischer schalter, betätigungsverfahren und entsprechendes verfahren zu seiner realisierung Expired - Lifetime DE602004008648T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0309534A FR2858459B1 (fr) 2003-08-01 2003-08-01 Commutateur micro-mecanique bistable, methode d'actionnement et procede de realisation correspondant
FR0309534 2003-08-01
PCT/FR2004/001988 WO2005015594A2 (fr) 2003-08-01 2004-07-26 Commutateur micro-mecanique bistable, methode d’actionnement et procede de realisation correspondant

Publications (2)

Publication Number Publication Date
DE602004008648D1 true DE602004008648D1 (de) 2007-10-11
DE602004008648T2 DE602004008648T2 (de) 2008-06-26

Family

ID=34043741

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004008648T Expired - Lifetime DE602004008648T2 (de) 2003-08-01 2004-07-26 Bistabiler mikromechanischer schalter, betätigungsverfahren und entsprechendes verfahren zu seiner realisierung

Country Status (7)

Country Link
US (1) US7342472B2 (de)
EP (1) EP1652205B1 (de)
JP (1) JP4481309B2 (de)
AT (1) ATE371948T1 (de)
DE (1) DE602004008648T2 (de)
FR (1) FR2858459B1 (de)
WO (1) WO2005015594A2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4740751B2 (ja) * 2005-01-21 2011-08-03 パナソニック株式会社 電気機械スイッチ
DK1705676T3 (da) * 2005-03-21 2008-02-18 Delfmems RF MEMS omskifter med en fleksibel og fri omskiftermembran
US7763818B2 (en) * 2005-07-29 2010-07-27 Brigham Young University Spherical bistable mechanism
KR101188438B1 (ko) * 2006-02-20 2012-10-08 삼성전자주식회사 하향형 멤스 스위치의 제조방법 및 하향형 멤스 스위치
EP1850360A1 (de) * 2006-04-26 2007-10-31 Seiko Epson Corporation Mikroschalter mit einem ersten betätigbaren Teil und mit einem zweiten Kontaktteil
US7978034B2 (en) * 2006-06-15 2011-07-12 Panasonic Corporation Electromechanical element and electronic equipment using the same
US8063456B2 (en) 2006-09-12 2011-11-22 Alcatel Lucent Mechanical switch with a curved bilayer
JP5084841B2 (ja) * 2006-12-12 2012-11-28 エヌエックスピー ビー ヴィ 被制御の電極オフ状態位置を有するｍｅｍｓデバイス
ES2388126T3 (es) * 2009-03-20 2012-10-09 Delfmems Estructura de tipo MEMS con una membrana flexible y medios de accionamiento eléctrico mejorados
GB2497379B (en) * 2011-12-07 2016-06-08 Ibm A nano-electromechanical switch
CA2926793C (en) 2013-10-11 2022-11-22 Lawrence S. ZISMAN Spray-dry formulations for treating pulmonary arterial hypertension
US9783977B2 (en) * 2015-11-20 2017-10-10 University Of South Florida Shape-morphing space frame apparatus using unit cell bistable elements
CN109950063B (zh) * 2019-04-16 2024-06-14 苏州希美微纳系统有限公司 基于杠杆原理的双稳态rf mems接触式开关
US12055927B2 (en) * 2021-02-26 2024-08-06 Honeywell International Inc. Thermal metamaterial for low power MEMS thermal control

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH670914A5 (de) * 1986-09-10 1989-07-14 Landis & Gyr Ag
SE0101182D0 (sv) * 2001-04-02 2001-04-02 Ericsson Telefon Ab L M Micro electromechanical switches
US7126446B2 (en) * 2001-06-15 2006-10-24 Brigham Young University Self-retracting fully compliant bistable micromechanism
US20030080839A1 (en) * 2001-10-31 2003-05-01 Wong Marvin Glenn Method for improving the power handling capacity of MEMS switches
US7053736B2 (en) * 2002-09-30 2006-05-30 Teravicta Technologies, Inc. Microelectromechanical device having an active opening switch
FR2865724A1 (fr) * 2004-02-04 2005-08-05 St Microelectronics Sa Microsysteme electromecanique pouvant basculer entre deux positions stables

Also Published As

Publication number Publication date
US7342472B2 (en) 2008-03-11
ATE371948T1 (de) 2007-09-15
DE602004008648T2 (de) 2008-06-26
FR2858459A1 (fr) 2005-02-04
EP1652205B1 (de) 2007-08-29
WO2005015594A2 (fr) 2005-02-17
FR2858459B1 (fr) 2006-03-10
JP2007501494A (ja) 2007-01-25
WO2005015594A3 (fr) 2005-06-09
JP4481309B2 (ja) 2010-06-16
US20060192641A1 (en) 2006-08-31
EP1652205A2 (de) 2006-05-03

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Legal Events

Date Code Title Description
8332 No legal effect for de
8370 Indication related to discontinuation of the patent is to be deleted
8364 No opposition during term of opposition