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AR248314A1 - Sensor capacitativo de presion diferencial con proteccion para excesos de presion - Google Patents

Sensor capacitativo de presion diferencial con proteccion para excesos de presion

Info

Publication number
AR248314A1
AR248314A1 AR90315866A AR31586690A AR248314A1 AR 248314 A1 AR248314 A1 AR 248314A1 AR 90315866 A AR90315866 A AR 90315866A AR 31586690 A AR31586690 A AR 31586690A AR 248314 A1 AR248314 A1 AR 248314A1
Authority
AR
Argentina
Prior art keywords
pressure
diaphragm
base
silicon
wall
Prior art date
Application number
AR90315866A
Other languages
English (en)
Original Assignee
United Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Technologies Corp filed Critical United Technologies Corp
Application granted granted Critical
Publication of AR248314A1 publication Critical patent/AR248314A1/es

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

UN SENSOR CAPACITATIVO DE PRESION DIFERENCIAL DEL TIPO DE SILICIO SOBRE SILICIO Y CON PROTECCION PARA EXCESOS DE PRESION.COMPRENDE UNA 1ERA.BASE DE SILICIO CONDUCTOR ATRAVESADA POR UNA BOCA DE PRESION COMUNICADA CON UN AREA EXTERIOR EN LA QUE SE DEBEN REVELAR VARIACIONES DE PRESION;UN 1ER.DIAFRAGMA DE SILICIO CONDUCTOR, FLEXIBLE, ELASTICO Y QUE TIENE UN LADO EXTERIOR EXPUESTO A DICHA BOCA DE PRESION DE DICHA 1ERA.BASE, SIENDO DICHO DIAFRAGMA CAPAZ DE EFECTUAR MOVIMIENTOS DE FLEXIONAMIENTO CAUSADOS POR CAMBIOS OCURRIDOS EN LA PRESION DE SU LADO EXTERIOR Y UNA 1ERA.PARED ESPACIADORA DE MATERIAL NO CONDUCTOR DISPUESTA ENTRE DICHA BASE Y DICHO DIAFRAGMA PROVEYENDO UNA PARED PERIFERICA DE UNION;UNA 2DA.BASE DE SILICIO CONDUCTOR QUE TIENE UNA BOCA DE PRESION QUE SE COMUNICA CON UN AREA EXTERIOR EN LA QUE SE DEBEN REVELAR VARIACIONES DE PRESION; UN 2DO.DIAFRAGMA DE SILICIO CONDUCTOR, FLEXIBLE, ELASTICO Y QUE TIENE UN LADO EXTERIOR EXPUESTO A LA BOCA DE PRESION DE DICHA 2DA.BASE, SIENDO D ICHO DIAFRAGMA CAPAZ DE EFECTUAR MOVIMIENTOS DE FLEXIONAMIENTO CAUSADOS POR CAMBIOS OCURRIDOS EN LA PRESION DE SU LADO EXTERIOR;Y UNA 2DA.PARED ESPACIADORA, HECHA DE MATERIAL NO CONDUCTOR Y DISPUESTA ENTRA LA 2DA.BASE Y EL 2DO.DIAFRAGMA, PROVEYENDO UNA PARED PERIFERICA DE UNION;Y UNA 3ERA.PARED ESPACIADORA HECHA DE MATERIAL NO CONDUCTOR, DISPUESTA CENTRALMENTE ENTRE LOS DIAFRAGMAS 1ERO.Y 2DO. Y QUE UNE ESTOS ULTIMOS EN RELACION ESPACIADA, PARALELA Y YUXTAPUESTA;LA 3ERA.PARED Y LOS DIAFRAGMAS 1ERO.Y 2DO.FORMAN ENTRE ELLOS UNA CAMARA O CAVIDAD DE REFERENCIA EVACUADA;CADA UNO DE LOS DIAFRAGMAS REFUERZA AL OTRO DIAFRAGMA;EL MOVIMIENTO DE FLEXIONAMIENTO DE CADA UNO DE LOS DIAFRAGMAS DE SILICIO CAUSA UNA VARIACION DE LA CAPACITANCIA DEL SENSOR.
AR90315866A 1988-12-30 1990-01-02 Sensor capacitativo de presion diferencial con proteccion para excesos de presion AR248314A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/292,281 US4879627A (en) 1988-12-30 1988-12-30 Differential capacitive pressure sensor with over-pressure protection

Publications (1)

Publication Number Publication Date
AR248314A1 true AR248314A1 (es) 1995-07-12

Family

ID=23124001

Family Applications (1)

Application Number Title Priority Date Filing Date
AR90315866A AR248314A1 (es) 1988-12-30 1990-01-02 Sensor capacitativo de presion diferencial con proteccion para excesos de presion

Country Status (9)

Country Link
US (1) US4879627A (es)
EP (1) EP0376631B1 (es)
JP (1) JPH02264839A (es)
KR (1) KR0137940B1 (es)
AR (1) AR248314A1 (es)
BR (1) BR9000012A (es)
CA (1) CA2006162C (es)
DE (1) DE68904889T2 (es)
IL (1) IL92928A (es)

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DE4124662A1 (de) * 1991-07-25 1993-01-28 Fibronix Sensoren Gmbh Relativdrucksensor
DE4227819C2 (de) * 1991-08-22 1996-10-17 Yamatake Honeywell Co Ltd Kapazitiver Drucksensor
FR2687779B1 (fr) * 1992-02-20 1995-11-10 Sextant Avionique Micro-capteur capacitif a protection laterale et procede de fabrication.
US5333504A (en) * 1992-09-01 1994-08-02 Rosemount Inc. High overpressure low range pressure sensor
US5349491A (en) * 1992-11-06 1994-09-20 Kavlico Corporation Pre-stressed pressure transducer and method of forming same
FR2701562B1 (fr) * 1993-02-10 1995-05-05 Sextant Avionique Micro-capteur capacitif à faible capcité parasite et procédé de fabrication.
CH688745A5 (fr) * 1993-06-25 1998-02-13 Suisse Electronique Microtech Capteur de pression différentielle de type capacitif.
AU658524B1 (en) * 1993-08-17 1995-04-13 Yokogawa Electric Corporation Semiconductor type differential pressure measurement apparatus and method for manufacturing the same
US5440931A (en) * 1993-10-25 1995-08-15 United Technologies Corporation Reference element for high accuracy silicon capacitive pressure sensor
US5444901A (en) * 1993-10-25 1995-08-29 United Technologies Corporation Method of manufacturing silicon pressure sensor having dual elements simultaneously mounted
US5375034A (en) * 1993-12-02 1994-12-20 United Technologies Corporation Silicon capacitive pressure sensor having a glass dielectric deposited using ion milling
US5381299A (en) * 1994-01-28 1995-01-10 United Technologies Corporation Capacitive pressure sensor having a substrate with a curved mesa
US5448444A (en) * 1994-01-28 1995-09-05 United Technologies Corporation Capacitive pressure sensor having a reduced area dielectric spacer
US5438880A (en) * 1994-05-17 1995-08-08 United Technologies Corporation Electrostatic linear airspeed transducer
US5479827A (en) * 1994-10-07 1996-01-02 Yamatake-Honeywell Co., Ltd. Capacitive pressure sensor isolating electrodes from external environment
US5535626A (en) * 1994-12-21 1996-07-16 Breed Technologies, Inc. Sensor having direct-mounted sensing element
US5757608A (en) * 1996-01-25 1998-05-26 Alliedsignal Inc. Compensated pressure transducer
US5818002A (en) * 1996-03-01 1998-10-06 Cts Corporation Pressure change warning switch
US6473289B1 (en) 1999-10-16 2002-10-29 Paralax, Llc Vacuum variable capacitor
US6431003B1 (en) 2000-03-22 2002-08-13 Rosemount Aerospace Inc. Capacitive differential pressure sensor with coupled diaphragms
JP2001356062A (ja) * 2000-06-13 2001-12-26 Yamatake Corp 容量式圧力センサ
JP2004233107A (ja) * 2003-01-28 2004-08-19 Kyocera Corp 圧力検出装置用パッケージ
FR2859281B1 (fr) * 2003-09-02 2005-12-23 Auxitrol Sa Protection d'une membrane deformable contre de fortes deformations dans une structure micromecanique
JP2005274265A (ja) * 2004-03-24 2005-10-06 Nippon M K S Kk 流量計
DE102008043171A1 (de) * 2008-10-24 2010-04-29 Endress + Hauser Gmbh + Co. Kg Drucksensor, insbesondere Drucksensortechnik
DE102009000056A1 (de) * 2009-01-07 2010-07-08 Robert Bosch Gmbh Sensorelement zur kapazitiven Differenzdruckerfassung
DE102010022642A1 (de) 2010-06-04 2011-12-08 Rolls-Royce Deutschland Ltd & Co Kg Vorrichtung zur Überprüfung des Durchflusses von Öl oder Brennstoff durch eine Filteranordnung
US8466523B2 (en) * 2011-10-07 2013-06-18 Continental Automotive Systems, Inc. Differential pressure sensor device
DE102012202038A1 (de) 2012-02-10 2013-08-14 Rolls-Royce Deutschland Ltd & Co Kg Messvorrichtung mit einem Drucksensor
US9470593B2 (en) 2013-09-12 2016-10-18 Honeywell International Inc. Media isolated pressure sensor
CN107478359B (zh) * 2017-07-28 2019-07-19 佛山市川东磁电股份有限公司 一种双膜电容式压力传感器及制作方法
JP7328112B2 (ja) * 2019-10-09 2023-08-16 アズビル株式会社 センサ素子
CN111122020B (zh) * 2019-12-31 2022-10-21 中国科学院微电子研究所 电容式压力检测装置及传感器
CN112834112B (zh) * 2021-01-04 2023-01-06 郑州东辰科技有限公司 一种力标准器及液压承载装置
CN117928814A (zh) * 2024-01-24 2024-04-26 阿尔法仪器技术(深圳)有限公司 一种新型的微差压传感器芯体
CN119197829A (zh) * 2024-10-14 2024-12-27 上海蓝威微机电有限公司 一种mems平板电容式差压压力传感器

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US2725501A (en) * 1954-07-27 1955-11-29 Gen Motors Corp Combustion chamber pressure indicator
US3232114A (en) * 1962-06-15 1966-02-01 Acton Lab Inc Pressure transducer
US3965746A (en) * 1974-11-04 1976-06-29 Teledyne Industries, Inc. Pressure transducer
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
JPS5937716Y2 (ja) * 1979-01-31 1984-10-19 日産自動車株式会社 半導体差圧センサ
US4415948A (en) * 1981-10-13 1983-11-15 United Technologies Corporation Electrostatic bonded, silicon capacitive pressure transducer
US4586109A (en) * 1985-04-01 1986-04-29 Bourns Instruments, Inc. Batch-process silicon capacitive pressure sensor
US4735098A (en) * 1985-11-19 1988-04-05 Kavlico Corporation Dual diaphragm differential pressure transducer

Also Published As

Publication number Publication date
EP0376631B1 (en) 1993-02-10
US4879627A (en) 1989-11-07
KR900010373A (ko) 1990-07-07
KR0137940B1 (ko) 1998-05-15
IL92928A (en) 1992-02-16
IL92928A0 (en) 1990-09-17
BR9000012A (pt) 1990-10-09
JPH02264839A (ja) 1990-10-29
DE68904889T2 (de) 1993-08-05
DE68904889D1 (de) 1993-03-25
CA2006162A1 (en) 1990-06-30
EP0376631A1 (en) 1990-07-04
CA2006162C (en) 1995-02-07

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