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MY161014A - Conveyor assembly for a deposition apparatus - Google Patents

Conveyor assembly for a deposition apparatus

Info

Publication number
MY161014A
MY161014A MYPI2010005812A MYPI2010005812A MY161014A MY 161014 A MY161014 A MY 161014A MY PI2010005812 A MYPI2010005812 A MY PI2010005812A MY PI2010005812 A MYPI2010005812 A MY PI2010005812A MY 161014 A MY161014 A MY 161014A
Authority
MY
Malaysia
Prior art keywords
conveyor
deposition apparatus
housing
leg
vapor deposition
Prior art date
Application number
MYPI2010005812A
Inventor
Max William Reed
Russell Weldon Black
Original Assignee
First Solar Malaysia Sdn Bhd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by First Solar Malaysia Sdn Bhd filed Critical First Solar Malaysia Sdn Bhd
Publication of MY161014A publication Critical patent/MY161014A/en

Links

Classifications

    • H10P72/3202—
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G17/00—Conveyors having an endless traction element, e.g. a chain, transmitting movement to a continuous or substantially-continuous load-carrying surface or to a series of individual load-carriers; Endless-chain conveyors in which the chains form the load-carrying surface
    • B65G17/30—Details; Auxiliary devices
    • B65G17/38—Chains or like traction elements; Connections between traction elements and load-carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H10P72/3222—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Chain Conveyers (AREA)

Abstract

A CONVEYOR ASSEMBLY 100) FOR USE IN A VAPOR DEPOSITION APPARATUS INCLUDES A HOUSING (104) DEFINING AN ENCLOSED INTERIOR VOLUME. A CONVEYOR (102) IS DRIVEN IN AN ENDLESS LOOP PATH WITHIN THE HOUSING.THE HOUSING HAS A TOP MEMBER (110) THAT DEFINES AN OPEN DEPOSITION AREA (112) IN AN UPPER CONVEYANCE LEG OF THE CONVEYOR (102) .THE CONVEYOR (102) INCLUDES A PLURALITY OF INTERCONNECTED SLATS (130), WITH EACH SLAT HAVING A RESPECTIVE FLAT, PLANAR OUTER SURFACE (132) AND TRANSVERSE EDGE PROFILES (135, 136) SUCH THAT, IN THE UPPER CONVEYANCE LEG OF THE CONVEYOR, THE OUTER SURFACES OF THE SLATS LIE IN A COMMON HORIZONTAL PLANE AND DEFINE AN UNINTERRUPTED FLAT SUPPORT SURFACE FOR A SUBSTRATE CONVEYED THROUGH THE VAPOR DEPOSITION APPARATUS.
MYPI2010005812A 2009-12-15 2010-12-08 Conveyor assembly for a deposition apparatus MY161014A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/638,772 US20110139073A1 (en) 2009-12-15 2009-12-15 Conveyor assembly for a vapor deposition apparatus

Publications (1)

Publication Number Publication Date
MY161014A true MY161014A (en) 2017-03-31

Family

ID=43993106

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2010005812A MY161014A (en) 2009-12-15 2010-12-08 Conveyor assembly for a deposition apparatus

Country Status (7)

Country Link
US (1) US20110139073A1 (en)
KR (1) KR20110068917A (en)
CN (1) CN102094181B (en)
DE (1) DE102010061125A1 (en)
MY (1) MY161014A (en)
SG (2) SG172551A1 (en)
TW (1) TWI553766B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201202454A (en) * 2010-07-07 2012-01-16 Hon Hai Prec Ind Co Ltd Processing apparatus for smoothing film material and evaporation deposition device with same
TW201204845A (en) * 2010-07-16 2012-02-01 Hon Hai Prec Ind Co Ltd Processing apparatus for smoothing film material and evaporation deposition device with same
WO2012112498A1 (en) * 2011-02-18 2012-08-23 Laitram, L.L.C. Small-diameter-roller conveyor
DE102011080202A1 (en) * 2011-08-01 2013-02-07 Gebr. Schmid Gmbh Apparatus and method for producing thin films
US20130084668A1 (en) * 2011-09-30 2013-04-04 Primestar Solar, Inc. Temporary arc inducement of glass substrate during diffusive transport deposition
US8697582B2 (en) * 2011-11-22 2014-04-15 Panasonic Corporation Substrate conveying roller, thin film manufacturing device, and thin film manufacturing method
KR101245368B1 (en) * 2012-01-02 2013-03-19 주식회사 에스에프에이 Thin layers deposition apparatus for flat panel display
US20140110225A1 (en) * 2012-10-24 2014-04-24 Primestar Solar, Inc. Conveyor assembly with geared, removable rollers for a vapor deposition system
DE102012111338B4 (en) * 2012-11-23 2017-05-04 Von Ardenne Gmbh Coating method, substrate carrier and coating device for disc-shaped substrates
TWI514501B (en) * 2013-09-17 2015-12-21 Hon Tech Inc Electronic component moving mechanism and its application of the picking methods and test equipment
DE102015105909A1 (en) * 2015-04-17 2016-10-20 Von Ardenne Gmbh Processing arrangement and method for producing a process chamber
CN109082633B (en) * 2018-07-27 2020-11-06 上海金科纳米涂层技术有限公司 Plane type arc deposition coating production line for wear-resistant layer on surface of cutter
US11072503B1 (en) * 2020-04-28 2021-07-27 Jason Heida Discarding rail for unloading material from a continuously moving conveyor belt
CN112992690B (en) * 2021-02-08 2024-03-19 杭州航鹏机电科技有限公司 An integrated circuit manufacturing process

Family Cites Families (20)

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US3981389A (en) * 1974-12-20 1976-09-21 Barry-Wehmiller Company Tandem bottle carrier assembly
GB8603408D0 (en) * 1986-02-12 1986-03-19 Alfa Laval Cheese Systems Slat conveyor
DE4132882C2 (en) * 1991-10-03 1996-05-09 Antec Angewandte Neue Technolo Process for the production of pn CdTe / CdS thin-film solar cells
US5248349A (en) * 1992-05-12 1993-09-28 Solar Cells, Inc. Process for making photovoltaic devices and resultant product
US5366764A (en) * 1992-06-15 1994-11-22 Sunthankar Mandar B Environmentally safe methods and apparatus for depositing and/or reclaiming a metal or semi-conductor material using sublimation
JP3011366B2 (en) * 1995-10-26 2000-02-21 株式会社ノリタケカンパニーリミテド Method and apparatus for firing a substrate containing a film forming material
US5712187A (en) * 1995-11-09 1998-01-27 Midwest Research Institute Variable temperature semiconductor film deposition
US5994642A (en) * 1996-05-28 1999-11-30 Matsushita Battery Industrial Co., Ltd. Method for preparing CdTe film and solar cell using the same
DE29807758U1 (en) * 1998-04-29 1999-09-09 Joh. Winklhofer & Söhne GmbH und Co KG, 81369 München Apron chain
EP1041169B1 (en) * 1999-03-29 2007-09-26 ANTEC Solar Energy AG Apparatus and method for coating substrates by a PVD process
EP1149932A3 (en) * 2000-01-26 2003-09-10 Iljin Nanotech Co., Ltd. Thermal chemical vapor deposition apparatus and method of synthesizing carbon nanotubes using the same
US7194197B1 (en) * 2000-03-16 2007-03-20 Global Solar Energy, Inc. Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer
US6423565B1 (en) * 2000-05-30 2002-07-23 Kurt L. Barth Apparatus and processes for the massproduction of photovotaic modules
US6719848B2 (en) * 2001-08-16 2004-04-13 First Solar, Llc Chemical vapor deposition system
US6669001B1 (en) * 2002-11-12 2003-12-30 Mathews Conveyor, Inc. Linear belt sorter and methods of using linear belt sorter
US20060225654A1 (en) * 2005-03-29 2006-10-12 Fink Steven T Disposable plasma reactor materials and methods
US20070169630A1 (en) * 2006-01-20 2007-07-26 David Auyoung Thermal processing chamber and conveyor belt for use therein and method of processing product
WO2007140242A2 (en) * 2006-05-24 2007-12-06 Span Tech Llc Side-flexing conveyor chain with pivoting slats and related methods
US20090194165A1 (en) * 2008-01-31 2009-08-06 Primestar Solar, Inc. Ultra-high current density cadmium telluride photovoltaic modules
US8628617B2 (en) * 2008-12-03 2014-01-14 First Solar, Inc. System and method for top-down material deposition

Also Published As

Publication number Publication date
KR20110068917A (en) 2011-06-22
TW201138006A (en) 2011-11-01
CN102094181A (en) 2011-06-15
US20110139073A1 (en) 2011-06-16
DE102010061125A1 (en) 2011-06-16
SG191668A1 (en) 2013-07-31
CN102094181B (en) 2015-04-29
TWI553766B (en) 2016-10-11
SG172551A1 (en) 2011-07-28

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