MXPA02004621A - PREPARATION OF A RELAXED SiGe LAYER ON AN INSULATOR. - Google Patents
PREPARATION OF A RELAXED SiGe LAYER ON AN INSULATOR.Info
- Publication number
- MXPA02004621A MXPA02004621A MXPA02004621A MXPA02004621A MXPA02004621A MX PA02004621 A MXPA02004621 A MX PA02004621A MX PA02004621 A MXPA02004621 A MX PA02004621A MX PA02004621 A MXPA02004621 A MX PA02004621A MX PA02004621 A MXPA02004621 A MX PA02004621A
- Authority
- MX
- Mexico
- Prior art keywords
- layer
- insulator
- hydrogen
- relaxed sige
- preparation
- Prior art date
Links
- 229910000577 Silicon-germanium Inorganic materials 0.000 title abstract 3
- 239000012212 insulator Substances 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 4
- 229910052739 hydrogen Inorganic materials 0.000 abstract 3
- 239000001257 hydrogen Substances 0.000 abstract 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 2
- 230000002950 deficient Effects 0.000 abstract 2
- 150000002431 hydrogen Chemical class 0.000 abstract 2
- 230000008021 deposition Effects 0.000 abstract 1
- 238000009499 grossing Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000005498 polishing Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 238000007669 thermal treatment Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C13—SUGAR INDUSTRY
- C13B—PRODUCTION OF SUCROSE; APPARATUS SPECIALLY ADAPTED THEREFOR
- C13B30/00—Crystallisation; Crystallising apparatus; Separating crystals from mother liquors ; Evaporating or boiling sugar juice
- C13B30/04—Separating crystals from mother liquor
- C13B30/12—Recycling mother liquor or wash liquors
-
- C—CHEMISTRY; METALLURGY
- C13—SUGAR INDUSTRY
- C13B—PRODUCTION OF SUCROSE; APPARATUS SPECIALLY ADAPTED THEREFOR
- C13B20/00—Purification of sugar juices
- C13B20/16—Purification of sugar juices by physical means, e.g. osmosis or filtration
- C13B20/165—Purification of sugar juices by physical means, e.g. osmosis or filtration using membranes, e.g. osmosis, ultrafiltration
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Sustainable Development (AREA)
- Water Supply & Treatment (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Jellies, Jams, And Syrups (AREA)
- Saccharide Compounds (AREA)
- External Artificial Organs (AREA)
- Recrystallisation Techniques (AREA)
Abstract
A method for forming strained Si or SiGe on relaxed SiGe on insulator (74) (SGOI) is described incorporating growing a graded Si1-x Gex layer (20) and an epitaxial Si1-y Gey layer on a semiconductor substrate, implanting hydrogen (70) into said Si1-y Gey layer (30) to form a hydrogen-rich defective layer, smoothing surfaces by Chemo-Mechanical Polishing, bonding two substrates together via thermal treatments and separating the two bonded substrates at the hydrogen-rich defective layer. The separated substrates may have its upper surface (75) smoothed by CMP for epitaxial deposition of further layer.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/441,988 US6355110B1 (en) | 1999-11-17 | 1999-11-17 | Process for purification of low grade sugar syrups using nanofiltration |
| US09/618,234 US6406546B1 (en) | 1999-11-17 | 2000-07-18 | Process for purification of low grade sugar syrups using nanofiltration |
| PCT/GB2000/004321 WO2001036690A1 (en) | 1999-11-17 | 2000-11-13 | Process for purification of low grade sugar syrups using nanofiltration |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| MXPA02004621A true MXPA02004621A (en) | 2004-09-10 |
Family
ID=27033027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MXPA02004621A MXPA02004621A (en) | 1999-11-17 | 2000-11-13 | PREPARATION OF A RELAXED SiGe LAYER ON AN INSULATOR. |
Country Status (10)
| Country | Link |
|---|---|
| EP (1) | EP1230401B1 (en) |
| AT (1) | ATE253129T1 (en) |
| AU (1) | AU1290201A (en) |
| BR (1) | BR0015571A (en) |
| CA (1) | CA2390860C (en) |
| DE (1) | DE60006277T2 (en) |
| DK (1) | DK1230401T3 (en) |
| MX (1) | MXPA02004621A (en) |
| PT (1) | PT1230401E (en) |
| WO (1) | WO2001036690A1 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2662364C (en) * | 2006-09-19 | 2016-10-18 | Horizon Science Pty Ltd | Extracts derived from sugar cane and a process for their manufacture |
| CN101331924B (en) * | 2007-06-28 | 2011-01-12 | 定西市陇海乳品有限责任公司 | Method for producing inulin syrupy using waste fluid of producing inulin |
| US9572852B2 (en) | 2011-02-08 | 2017-02-21 | The Product Makers (Australia) Pty Ltd | Sugar extracts |
| JP6239622B2 (en) | 2012-08-28 | 2017-11-29 | ザ プロダクト メーカーズ （オーストラリア） プロプライエタリー リミテッド | Extraction method |
| WO2015021512A1 (en) | 2013-08-16 | 2015-02-19 | Horizon Science Pty Ltd | Sugar cane derived extracts and methods of treatment |
| PL3318281T3 (en) * | 2016-11-04 | 2023-05-15 | Coriolis Pharma Research GmbH | Highly purified sugars and sugar compositions |
| CN117248080A (en) * | 2023-10-08 | 2023-12-19 | 安徽金禾实业股份有限公司 | Sucrose recovery method in fructo-oligosaccharide production |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU635352B2 (en) * | 1990-11-09 | 1993-03-18 | Applied Membrane Systems Pty Ltd | A method and apparatus for fractionation of sugar containing solution |
| FR2701359B1 (en) * | 1993-02-15 | 1995-05-12 | Bretagne Aromes | Process for denitrifying and demineralizing, at least partially, a vegetable juice and juice thus obtained. |
| US6096136A (en) * | 1996-10-18 | 2000-08-01 | Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College | Method for producing white sugar |
| FR2754737B1 (en) * | 1996-10-21 | 1999-01-15 | Tech Sep | INORGANIC NANOFILTRATION MEMBRANE AND ITS APPLICATION IN THE SUGAR INDUSTRY |
-
2000
- 2000-11-13 AT AT00974685T patent/ATE253129T1/en not_active IP Right Cessation
- 2000-11-13 AU AU12902/01A patent/AU1290201A/en not_active Abandoned
- 2000-11-13 EP EP00974685A patent/EP1230401B1/en not_active Expired - Lifetime
- 2000-11-13 DK DK00974685T patent/DK1230401T3/en active
- 2000-11-13 CA CA002390860A patent/CA2390860C/en not_active Expired - Fee Related
- 2000-11-13 BR BR0015571-3A patent/BR0015571A/en not_active IP Right Cessation
- 2000-11-13 DE DE60006277T patent/DE60006277T2/en not_active Expired - Fee Related
- 2000-11-13 WO PCT/GB2000/004321 patent/WO2001036690A1/en not_active Ceased
- 2000-11-13 MX MXPA02004621A patent/MXPA02004621A/en active IP Right Grant
- 2000-11-13 PT PT00974685T patent/PT1230401E/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| EP1230401A1 (en) | 2002-08-14 |
| DE60006277D1 (en) | 2003-12-04 |
| AU1290201A (en) | 2001-05-30 |
| DE60006277T2 (en) | 2004-07-15 |
| CA2390860C (en) | 2008-10-07 |
| ATE253129T1 (en) | 2003-11-15 |
| PT1230401E (en) | 2004-03-31 |
| EP1230401B1 (en) | 2003-10-29 |
| WO2001036690A1 (en) | 2001-05-25 |
| DK1230401T3 (en) | 2004-03-01 |
| CA2390860A1 (en) | 2001-05-25 |
| BR0015571A (en) | 2002-07-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| AU2001292024A1 (en) | Preparation of a relaxed sige layer on an insulator | |
| US7427773B2 (en) | Layer transfer of low defect SiGe using an etch-back process | |
| WO2003069658B1 (en) | Strained si based layer made by uhv-cvd, and devices therein | |
| AU2003249475A1 (en) | Transfer of a thin layer from a wafer comprising a buffer layer | |
| US20040072409A1 (en) | Coplanar integration of lattice-mismatched semiconductor with silicon via wafer bonding virtual substrates | |
| WO2005057612A3 (en) | SILICON DEVICE ON Si:C-OI and SGOI AND METHOD OF MANUFACTURE | |
| ATE283549T1 (en) | CONTROL OF STRESS DENSITY BY USING GRADIENT LAYERS AND THROUGH PLANARIZATION | |
| EP0993048A3 (en) | Nitride semiconductor device and its manufacturing method | |
| WO2005104192A3 (en) | A METHOD FOR THE FABRICATION OF GaAs/Si AND RELATED WAFER BONDED VIRTUAL SUBSTRATES | |
| WO2004001798A3 (en) | A silicon-on-insulator device with strained device film and method for making the same with partial replacement of isolation oxide | |
| CA2075020A1 (en) | Method for preparing semiconductor member | |
| WO2014020906A1 (en) | Method for manufacturing composite substrate and method for manufacturing semiconductor crystal layer formation substrate | |
| SG145557A1 (en) | A method of fabricating a wafer with strained channel layers for increased electron and hole mobility for improving device performance | |
| GB0326321D0 (en) | Formation of lattice-tuning semiconductor substrates | |
| TW354855B (en) | Connecting structure of semiconductor element | |
| MXPA02004621A (en) | PREPARATION OF A RELAXED SiGe LAYER ON AN INSULATOR. | |
| TW200520212A (en) | Method for manufacturing compound semiconductor substrate | |
| TW200721373A (en) | Method for recycling an epitaxied donor wafer | |
| TW200631078A (en) | A method of making a semiconductor structure for high power semiconductor devices | |
| WO2003015138A3 (en) | Optimized buried-channel fets based on sige heterostructures | |
| KR100576684B1 (en) | A method for fabricating a strained crystalline layer on an insulator, a semiconductor structure therefor, and a fabricated semiconductor structure | |
| EP1443550A1 (en) | A method for fabricating a strained crystalline layer on an insulator, a semiconductor structure therefor, and a fabricated semiconductor structure | |
| TW430898B (en) | Planarization process | |
| TW291580B (en) | Manufacturing process of shallow isolation trench | |
| WO2002056417A3 (en) | Tunable structure utilizing a compliant substrate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FG | Grant or registration |