[go: up one dir, main page]

MX2019014173A - Formación de imágenes con iluminación estructurada por selección espacial de ángulo de patrón. - Google Patents

Formación de imágenes con iluminación estructurada por selección espacial de ángulo de patrón.

Info

Publication number
MX2019014173A
MX2019014173A MX2019014173A MX2019014173A MX2019014173A MX 2019014173 A MX2019014173 A MX 2019014173A MX 2019014173 A MX2019014173 A MX 2019014173A MX 2019014173 A MX2019014173 A MX 2019014173A MX 2019014173 A MX2019014173 A MX 2019014173A
Authority
MX
Mexico
Prior art keywords
imaging system
sim
sim imaging
implementations
implemented
Prior art date
Application number
MX2019014173A
Other languages
English (en)
Inventor
Peter Clarke Newman
Stanley S Hong
Aaron Liu
Simon Prince
Merek C Siu
Danilo Condello
Shaoping Lu
Original Assignee
Illumina Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Illumina Inc filed Critical Illumina Inc
Priority claimed from PCT/US2019/013504 external-priority patent/WO2019143564A1/en
Publication of MX2019014173A publication Critical patent/MX2019014173A/es

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G01N21/6458—Fluorescence microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6486—Measuring fluorescence of biological material, e.g. DNA, RNA, cells
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0076—Optical details of the image generation arrangements using fluorescence or luminescence
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/18—Arrangements with more than one light path, e.g. for comparing two specimens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/361—Optical details, e.g. image relay to the camera or image sensor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365—Control or image processing arrangements for digital or video microscopes
    • G02B21/367—Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
    • G02B27/425—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application in illumination systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N2021/6463—Optics
    • G01N2021/6471—Special filters, filter wheel
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N2021/6463—Optics
    • G01N2021/6478—Special lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/58—Optics for apodization or superresolution; Optical synthetic aperture systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Multimedia (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Molecular Biology (AREA)
  • Biomedical Technology (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Magnetic Resonance Imaging Apparatus (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)

Abstract

La descripción proporciona sistemas formadores de imágenes de microscopia de iluminación estructurada (SIM). En un conjunto de implementaciones, un sistema formador de imágenes SIM puede implementarse como un sistema formador de imágenes SIM de múltiples brazos, por lo que cada brazo del sistema incluye un emisor de luz y un divisor de haz (por ejemplo, una rejilla de difracción transmisiva) que tiene una orientación específica y fija con respecto al eje óptico del sistema. En un segundo conjunto de implementaciones, un sistema formador de imagen SIM puede implementarse como un sistema formador de imágenes SIM de diapositiva de múltiples divisores de haz, donde se monta una plataforma de movimiento lineal con múltiples divisores de haz que tienen una orientación fija correspondiente con respecto al eje óptico del sistema. En un tercer conjunto de implementaciones, se puede implementar un sistema formador de imágenes SIM como un sistema formador de imágenes SIM de selección espacial de ángulo de patrón, mediante el cual se usa una rejilla de difracción bidimensional fija en combinación con una rueda de filtro espacial para proyectar patrones de franjas unidimensionales en una muestra.
MX2019014173A 2018-01-16 2019-01-14 Formación de imágenes con iluminación estructurada por selección espacial de ángulo de patrón. MX2019014173A (es)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862618059P 2018-01-16 2018-01-16
NL2020620A NL2020620B1 (en) 2018-01-16 2018-03-20 Pattern angle spatial selection structured illumination imaging
PCT/US2019/013504 WO2019143564A1 (en) 2018-01-16 2019-01-14 Pattern angle spatial selection structured illumination imaging

Publications (1)

Publication Number Publication Date
MX2019014173A true MX2019014173A (es) 2021-02-09

Family

ID=61868834

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2019014173A MX2019014173A (es) 2018-01-16 2019-01-14 Formación de imágenes con iluminación estructurada por selección espacial de ángulo de patrón.

Country Status (16)

Country Link
US (1) US10996453B2 (es)
EP (1) EP3628075B1 (es)
JP (1) JP6916316B2 (es)
KR (1) KR102312777B1 (es)
CN (1) CN209979487U (es)
AU (1) AU2019209204B2 (es)
CA (1) CA3066483C (es)
IL (1) IL271048B (es)
MX (1) MX2019014173A (es)
MY (1) MY198394A (es)
NL (1) NL2020620B1 (es)
NZ (1) NZ759623A (es)
RU (1) RU2740206C1 (es)
SA (1) SA519410845B1 (es)
SG (1) SG11201911584YA (es)
TW (1) TWI710864B (es)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018115001A1 (de) * 2018-06-21 2019-12-24 Carl Zeiss Microscopy Gmbh Verfahren zum Kalibrieren einer Phasenmaske und Mikroskop
TWI792150B (zh) * 2018-06-29 2023-02-11 美商伊路米納有限公司 用於預測結構照明參數之方法、系統和非暫時性電腦可讀取媒體
US10704094B1 (en) 2018-11-14 2020-07-07 Element Biosciences, Inc. Multipart reagents having increased avidity for polymerase binding
US11408032B2 (en) 2020-01-17 2022-08-09 Element Biosciences, Inc. Tube lens design for improved depth-of-field
JP7449700B2 (ja) * 2020-01-20 2024-03-14 株式会社ミツトヨ 焦点距離可変光学系
US11716209B2 (en) * 2020-04-14 2023-08-01 The Regents Of The University Of Colorado, A Body Corporate Systems and methods for azimuthal multiplexing three-dimensional diffractive optics
CN112712585B (zh) * 2020-12-15 2024-02-09 四川川大智胜软件股份有限公司 基于弧形二值编码相移条纹投影的三维成像系统及方法
CA3183829A1 (en) 2021-03-19 2022-09-22 Hongji Ren Performing structured illumination microscopy on a patterned substrate
JP2023006004A (ja) * 2021-06-30 2023-01-18 株式会社エビデント 観察装置
KR20240063107A (ko) 2021-07-21 2024-05-10 엘리먼트 바이오사이언스, 인크. 핵산 시퀀싱을 위한 광학 시스템 및 이의 방법
JP2023116048A (ja) * 2022-02-09 2023-08-22 キオクシア株式会社 計測装置および計測方法
KR102786752B1 (ko) * 2022-09-29 2025-03-28 한국표준과학연구원 Ｄｕｖ 반사형 ｆｐｍ
KR102837212B1 (ko) * 2022-11-09 2025-07-22 울산과학기술원 광학 현미경 및 이의 광 입사각 조절방법
DE102023203731A1 (de) * 2023-04-24 2024-10-24 Carl Zeiss Smt Gmbh Vorrichtung und Verfahren zur Überprüfung eines Bauteils sowie Lithografiesystem
CN118226631B (zh) * 2024-03-12 2025-07-04 南京理工大学 用于显微成像的等波长周期光栅纵向深度结构光照明发生器
CN119395869B (zh) * 2024-10-24 2025-12-09 西湖大学 基于双物镜干涉的结构光照明显微镜的成像装置和方法

Family Cites Families (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3856986A (en) 1968-12-06 1974-12-24 American Express Invest Scanned holography systems using temporal modulation
US4213706A (en) 1977-08-19 1980-07-22 The University Of Arizona Foundation Background compensating interferometer
US5761085A (en) 1996-11-12 1998-06-02 The United States Of America As Represented By The Secretary Of The Navy Method for monitoring environmental parameters at network sites
US6438272B1 (en) 1997-12-31 2002-08-20 The Research Foundation Of State University Of Ny Method and apparatus for three dimensional surface contouring using a digital video projection system
US6188478B1 (en) 1998-10-21 2001-02-13 Philips Electronics North America Corporation Method and apparatus for film-thickness measurements
US6711283B1 (en) 2000-05-03 2004-03-23 Aperio Technologies, Inc. Fully automatic rapid microscope slide scanner
US7274446B2 (en) 2001-04-07 2007-09-25 Carl Zeiss Jena Gmbh Method and arrangement for the deep resolved optical recording of a sample
JP5048899B2 (ja) 2001-09-28 2012-10-17 オリンパス株式会社 顕微鏡
US6947127B2 (en) 2001-12-10 2005-09-20 Carl Zeiss Jena Gmbh Arrangement for the optical capture of excited and/or back scattered light beam in a sample
KR100489431B1 (ko) 2002-06-28 2005-05-12 학교법인연세대학교 스캔식 위상천이 3차원 형상측정 장치 및 측정 방법
JP2005080181A (ja) 2003-09-03 2005-03-24 Nikon Corp 画像読み取り装置および画像読み取りプログラム
WO2005043197A2 (en) 2003-10-28 2005-05-12 University Of Maryland, Baltimore Spatial light modulator apparatus and method
US20050221351A1 (en) 2004-04-06 2005-10-06 Affymetrix, Inc. Methods and devices for microarray image analysis
JP4899408B2 (ja) 2005-02-25 2012-03-21 株式会社ニコン 顕微鏡装置
CN1292227C (zh) 2005-07-12 2006-12-27 中国科学院上海光学精密机械研究所 高分辨数字干涉仪空间分辨率的标定方法
CN101466998B (zh) 2005-11-09 2015-09-16 几何信息学股份有限公司 三维绝对坐标表面成像的方法和装置
JP2007199572A (ja) 2006-01-30 2007-08-09 Nikon Corp 顕微鏡装置
US7803609B2 (en) 2006-07-21 2010-09-28 Affymetrix, Inc. System, method, and product for generating patterned illumination
DE102006044229B4 (de) 2006-09-20 2023-09-28 Carl Zeiss Microscopy Gmbh Verfahren und Vorrichtung zur Bildverarbeitung mit höheren Harmonischen eines Beleuchtungsgitters
DE102006047912A1 (de) 2006-10-06 2008-04-10 Carl Zeiss Microimaging Gmbh Verfahren und Anordnung zur parallelisierten mikroskopischen Bildgebung
JP5136422B2 (ja) 2006-12-12 2013-02-06 株式会社ニコン 顕微鏡装置及び画像処理方法
US8848199B2 (en) 2007-07-10 2014-09-30 Massachusetts Institute Of Technology Tomographic phase microscopy
US8759077B2 (en) 2007-08-28 2014-06-24 Lightspeed Genomics, Inc. Apparatus for selective excitation of microparticles
US8222040B2 (en) 2007-08-28 2012-07-17 Lightspeed Genomics, Inc. Nucleic acid sequencing by selective excitation of microparticles
WO2009031418A1 (ja) 2007-09-05 2009-03-12 Nikon Corporation 顕微鏡装置
US8509879B2 (en) 2007-11-06 2013-08-13 The Regents Of The University Of California Apparatus and method for widefield functional imaging (WiFI) using integrated structured illumination and laser speckle imaging
US8537461B2 (en) * 2007-11-26 2013-09-17 Carl Zeiss Microimaging Gmbh Method and configuration for the optical detection of an illuminated specimen
US20090219607A1 (en) 2008-01-17 2009-09-03 Baylor College Of Medicine Method and apparatus for enhanced resolution microscopy of living biological nanostructures
CN103760682B (zh) * 2008-01-21 2016-08-31 苹果公司 用于使零级减少的光学设计
DE102008009216A1 (de) 2008-02-13 2009-08-20 Carl Zeiss Microimaging Gmbh Vorrichtung und Verfahren zum räumlich hochauflösenden Abbilden einer Struktur einer Probe
US8773635B2 (en) 2008-12-19 2014-07-08 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
TWI426296B (zh) * 2009-06-19 2014-02-11 Ind Tech Res Inst 利用光學偏極特性之三維顯微共焦量測系統與方法
CN102576209B (zh) * 2009-10-08 2016-08-10 布鲁塞尔大学 离轴数字全息显微镜
KR101117501B1 (ko) * 2010-02-12 2012-03-07 한국과학기술원 십자형 구조 조명 선형 패턴을 이용한 구조 조명 공초점 현미경
US9465228B2 (en) 2010-03-19 2016-10-11 Optical Biosystems, Inc. Illumination apparatus optimized for synthetic aperture optics imaging using minimum selective excitation patterns
US8502867B2 (en) 2010-03-19 2013-08-06 Lightspeed Genomics, Inc. Synthetic aperture optics imaging method using minimum selective excitation patterns
JP5412394B2 (ja) * 2010-09-30 2014-02-12 オリンパス株式会社 標本観察装置
WO2012062858A1 (en) * 2010-11-12 2012-05-18 Asml Netherlands B.V. Metrology method and apparatus, lithographic system and device manufacturing method
US8796185B2 (en) 2011-03-08 2014-08-05 Lightspeed Genomics, Inc. Self-assembling high density ordered patterned biomolecule array and method for making and using the same
US8817362B2 (en) 2011-04-29 2014-08-26 Lightspeed Genomics, Inc. Modular pattern illumination and light beam multiplexing for selective excitation of microparticles
US8778848B2 (en) 2011-06-09 2014-07-15 Illumina, Inc. Patterned flow-cells useful for nucleic acid analysis
WO2013010023A2 (en) 2011-07-13 2013-01-17 Aperio Technologies, Inc. Standardizing fluorescence microscopy systems
EP2802861A4 (en) 2012-01-11 2015-08-19 Hughes Howard Med Inst MULTI-DIMENSIONAL IMAGING WITH MULTIFOCAL MICROSCOPY
JP5900515B2 (ja) * 2012-01-18 2016-04-06 株式会社ニコン 構造化照明装置、構造化照明顕微鏡装置、構造化照明方法
TWI467227B (zh) * 2012-04-12 2015-01-01 Univ Nat Formosa 穿透式三維顯微裝置及方法
WO2014013720A1 (ja) * 2012-07-19 2014-01-23 株式会社ニコン 構造化照明顕微鏡装置
EP2801854B1 (en) * 2013-05-10 2017-07-19 Ruprecht-Karls-Universität Heidelberg Method and apparatus for combination of localization microscopy and structured illumination microscopy
KR101541610B1 (ko) 2013-12-09 2015-08-03 한양대학교 산학협력단 공간 필터 기반 구조 조명 현미경
WO2016125281A1 (ja) 2015-02-05 2016-08-11 株式会社ニコン 構造化照明顕微鏡、観察方法、及び制御プログラム
US10487356B2 (en) 2015-03-16 2019-11-26 Pacific Biosciences Of California, Inc. Integrated devices and systems for free-space optical coupling
CN104793329B (zh) * 2015-04-15 2017-06-06 黑龙江大学 一种飞秒激光旋转操控光镊的装置及方法
DE102016007839A1 (de) * 2016-06-28 2017-12-28 Horst Wochnowski Hochauflösendes Verfahren zur Mikroskopie und Nanostrukturierung von Substratoberflächen basierend auf dem SIM-Verfahren (Structured Illumination Microscopy)
CN114921537A (zh) 2017-03-17 2022-08-19 雅普顿生物系统公司 测序和高分辨率成像

Also Published As

Publication number Publication date
SG11201911584YA (en) 2020-01-30
JP6916316B2 (ja) 2021-08-11
CA3066483A1 (en) 2019-07-25
RU2740206C1 (ru) 2021-01-12
IL271048B (en) 2022-05-01
SA519410845B1 (ar) 2022-06-16
CA3066483C (en) 2022-06-28
IL271048A (en) 2020-01-30
TW201932991A (zh) 2019-08-16
JP2020532758A (ja) 2020-11-12
KR102312777B1 (ko) 2021-10-14
CN209979487U (zh) 2020-01-21
AU2019209204B2 (en) 2021-06-17
AU2019209204A1 (en) 2020-11-26
BR112019028316A2 (pt) 2020-07-14
TWI710864B (zh) 2020-11-21
NL2020620B1 (en) 2019-07-25
KR20200019148A (ko) 2020-02-21
US20200218050A1 (en) 2020-07-09
MY198394A (en) 2023-08-28
US10996453B2 (en) 2021-05-04
EP3628075A1 (en) 2020-04-01
NZ759623A (en) 2022-05-27
EP3628075A4 (en) 2020-07-15
EP3628075B1 (en) 2023-01-25

Similar Documents

Publication Publication Date Title
MX2019014173A (es) Formación de imágenes con iluminación estructurada por selección espacial de ángulo de patrón.
MX2019014570A (es) Formacion de imágenes de iluminación estructurada de multiples brazos.
MX2019014571A (es) Formacion de imágenes de iluminacion estructurada de multiples brazos.
CN107024763B (zh) 一种双通道结构光数字相衬显微成像系统及其实现方法
US20200209604A1 (en) Programmable annular led illumination-based high efficiency quantitative phase microscopy imaging method
US12265033B2 (en) Method, computer program and apparatus for determining positions of molecules in a sample
DE60125025D1 (de) System für simultanprojektionen von mehrfach phasenverschobenen mustern für die dreidimensionale inspektion eines objektes
JP2015132848A5 (ja) 照明光学系、露光装置、照明方法、露光方法、およびデバイス製造方法
JP2010062281A5 (es)
CN103018173B (zh) 结构光照明层析显微成像系统
KR101356706B1 (ko) 광량 변조와 스캐닝 시스템 기반의 구조 조명 현미경
CN104459971A (zh) 一种基于集成光子芯片的结构光照明显微成像系统
JP2023060003A (ja) コントラストを増進し、かつ焦点を見出すための干渉縞の使用を伴う透過照明撮像
CN106707485B (zh) 一种小型结构光显微照明系统
WO2017191011A3 (de) Artefaktreduktion bei der winkelselektiven beleuchtung
WO2014034959A1 (en) Illumination optical system and microscope
CN104748855B (zh) 双通道高通量干涉成像光谱装置及方法
US8764241B2 (en) Ring light source system for interferometer with adjustable ring radius and ring radial width
Heist et al. Experimental comparison of laser speckle projection and array projection for high-speed 3D measurements
CN112930468A (zh) 三维测量设备
TH1901008137A (th) การสร้างภาพของการส่องสว่างเชิงโครงสร้างแบบหลายแขน
RU124384U1 (ru) Устройство для исследования оптической анизотропии объекта интерферометрическим методом
JP3628663B2 (ja) 合成光源を有する光波コヒーレンス断層画像測定システム
CN206920698U (zh) 一种双通道结构光数字相衬显微成像系统
DE602006004890D1 (de) Beleuchtungsvorrichtung einer fotolithographievorrichtung