MX2018008315A - Metodo optico para medir el espesor de recubrimientos depositados en sustratos. - Google Patents
Metodo optico para medir el espesor de recubrimientos depositados en sustratos.Info
- Publication number
- MX2018008315A MX2018008315A MX2018008315A MX2018008315A MX2018008315A MX 2018008315 A MX2018008315 A MX 2018008315A MX 2018008315 A MX2018008315 A MX 2018008315A MX 2018008315 A MX2018008315 A MX 2018008315A MX 2018008315 A MX2018008315 A MX 2018008315A
- Authority
- MX
- Mexico
- Prior art keywords
- thickness
- substrates
- measure
- optical method
- coatings deposited
- Prior art date
Links
- 238000000576 coating method Methods 0.000 title abstract 3
- 238000000034 method Methods 0.000 title abstract 2
- 230000003287 optical effect Effects 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
- 239000011248 coating agent Substances 0.000 abstract 2
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
- G01B11/0633—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C21/00—Accessories or implements for use in connection with applying liquids or other fluent materials to surfaces, not provided for in groups B05C1/00 - B05C19/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Se proporcionan métodos y aparatos para medir un espesor de un recubrimiento en un objeto. La luz se dirige hacia el objeto en una ubicación predeterminada en el objeto tal que una porción de la luz interactúa con el objeto. Una imagen que tiene al menos dos canales de longitud de onda (por ejemplo, canales de color) se captura esa se produce por la porción de la luz que interactúa con el objeto. Un cambio relativo se determina entre cada uno de al menos dos canales de longitud de onda, con base en un histograma de cada canal de longitud de onda de al menos dos canales de longitud de onda. Al menos uno del espesor o una aceptabilidad del recubrimiento en el objeto se determina con base en el cambio relativo determinado.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662275905P | 2016-01-07 | 2016-01-07 | |
| PCT/US2017/012086 WO2017120160A1 (en) | 2016-01-07 | 2017-01-04 | Optical method to measure the thickness of coatings deposited on substrates |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| MX2018008315A true MX2018008315A (es) | 2018-12-06 |
| MX389628B MX389628B (es) | 2025-03-11 |
Family
ID=59274525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MX2018008315A MX389628B (es) | 2016-01-07 | 2017-01-04 | Metodo optico para medir el espesor de recubrimientos depositados en sustratos. |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US10753728B2 (es) |
| EP (1) | EP3400431B1 (es) |
| CN (1) | CN108474739B (es) |
| AR (1) | AR107318A1 (es) |
| ES (1) | ES2917217T3 (es) |
| MX (1) | MX389628B (es) |
| PT (1) | PT3400431T (es) |
| TW (1) | TWI723113B (es) |
| WO (1) | WO2017120160A1 (es) |
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| US11836911B2 (en) * | 2017-07-26 | 2023-12-05 | Canon Kabushiki Kaisha | Image data management method, production apparatus, production system, image data management method for production system, and non-transitory computer-readable recording medium |
| DE102018103171A1 (de) * | 2017-11-23 | 2019-05-23 | Tdk Electronics Ag | Verfahren zum Bestimmen von Eigenschaften einer Beschichtung auf einer transparenten Folie, Verfahren zur Herstellung einer Kondensatorfolie und Einrichtung zum Bestimmen von Eigenschaften einer Beschichtung auf einer transparenten Folie |
| JP6687656B2 (ja) * | 2018-03-19 | 2020-04-28 | ファナック株式会社 | 検査装置およびその検査方法 |
| JP6996413B2 (ja) * | 2018-04-27 | 2022-01-17 | トヨタ自動車株式会社 | 解析装置および解析プログラム |
| RU2687312C1 (ru) * | 2018-07-23 | 2019-05-13 | Общество С Ограниченной Ответственностью "С-Инновации" (Ооо "С-Инновации") | Способ гравиметрического определения толщины сверхпроводящего слоя втсп проводов второго поколения |
| KR102056759B1 (ko) * | 2018-09-03 | 2019-12-17 | 재단법인 오송첨단의료산업진흥재단 | 영상처리 기반의 수분 및 광 투과도 측정 시스템 및 이를 이용한 수분 및 광 투과도 측정 방법 |
| US10746530B2 (en) * | 2018-12-07 | 2020-08-18 | Onto Innovation Inc. | Optical metrology device for measuring samples having thin or thick films |
| CN110068278A (zh) * | 2019-04-22 | 2019-07-30 | 南京理工大学 | 基于fpga的非接触式光纤预制棒尺寸实时测量系统及方法 |
| US11216928B2 (en) * | 2019-09-10 | 2022-01-04 | The Boeing Company | Method and apparatus for coating thickness inspection of a surface and coating defects of the surface |
| JP7536517B2 (ja) * | 2019-10-08 | 2024-08-20 | キヤノン株式会社 | 教師データの生成方法、学習済の学習モデル、及びシステム |
| US11633763B2 (en) * | 2019-12-16 | 2023-04-25 | Applied Vision Corporation | Sequential imaging for container sidewall inspection |
| JP2023015418A (ja) * | 2019-12-27 | 2023-02-01 | パナソニックＩｐマネジメント株式会社 | 検査方法、プログラム、及び、検査システム |
| CN111750786B (zh) * | 2020-07-06 | 2022-03-01 | 上海新昇半导体科技有限公司 | 厚度量测设备、抛光系统及抛光物料管理方法 |
| CN111833345B (zh) * | 2020-07-29 | 2024-03-26 | 广东电网有限责任公司 | 一种基于光学图像的金属表面氧化层厚度的监控方法 |
| US12254383B2 (en) * | 2021-03-30 | 2025-03-18 | Accenture Global Solutions Limited | Intelligent real-time defect prediction, detection, and AI driven automated correction solution |
| CN113790674B (zh) * | 2021-08-06 | 2024-10-08 | 东旭药玻(北京)科技有限公司 | 用于玻璃制品的测量方法、处理器和测量装置 |
| TWI800002B (zh) * | 2021-09-22 | 2023-04-21 | 易學科技股份有限公司 | 數位化色度尺規系統之設計方法及其數位化色度尺規系統 |
| JPWO2023195215A1 (es) * | 2022-04-08 | 2023-10-12 | ||
| CN116045791B (zh) * | 2023-04-03 | 2023-07-21 | 成都飞机工业（集团）有限责任公司 | 一种金属漆涂层厚度评估方法 |
| FR3163151A1 (fr) * | 2024-06-05 | 2025-12-12 | Centre National De La Recherche Scientifique | Procédé de détermination d’une cartographie en épaisseur d’une couche à mesurer |
| CN119747125B (zh) * | 2024-11-28 | 2025-09-05 | 南通林慧机械设备制造有限公司 | 用于五金件喷涂装置的控制优化方法 |
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| GB9219450D0 (en) * | 1992-09-15 | 1992-10-28 | Glaverbel | Thin film thickness monitoring and control |
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| US5619330A (en) | 1995-12-22 | 1997-04-08 | Thomson Consumer Electronics, Inc. | Method and apparatus for determining thickness of an OPC layer on a CRT faceplate panel |
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| KR101775195B1 (ko) * | 2011-06-15 | 2017-09-05 | 기린 테크노시스템 가부시끼가이샤 | 글래스 보틀의 검사 방법 및 장치 |
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-
2017
- 2017-01-04 CN CN201780005995.2A patent/CN108474739B/zh not_active Expired - Fee Related
- 2017-01-04 WO PCT/US2017/012086 patent/WO2017120160A1/en not_active Ceased
- 2017-01-04 PT PT177362092T patent/PT3400431T/pt unknown
- 2017-01-04 US US16/065,839 patent/US10753728B2/en not_active Expired - Fee Related
- 2017-01-04 ES ES17736209T patent/ES2917217T3/es active Active
- 2017-01-04 EP EP17736209.2A patent/EP3400431B1/en active Active
- 2017-01-04 MX MX2018008315A patent/MX389628B/es unknown
- 2017-01-06 AR ARP170100042A patent/AR107318A1/es active IP Right Grant
- 2017-01-06 TW TW106100484A patent/TWI723113B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| MX389628B (es) | 2025-03-11 |
| TW201733688A (zh) | 2017-10-01 |
| US20190011252A1 (en) | 2019-01-10 |
| US10753728B2 (en) | 2020-08-25 |
| EP3400431B1 (en) | 2022-03-23 |
| AR107318A1 (es) | 2018-04-18 |
| CN108474739A (zh) | 2018-08-31 |
| WO2017120160A1 (en) | 2017-07-13 |
| ES2917217T3 (es) | 2022-07-07 |
| CN108474739B (zh) | 2021-10-01 |
| TWI723113B (zh) | 2021-04-01 |
| PT3400431T (pt) | 2022-06-20 |
| EP3400431A4 (en) | 2019-08-28 |
| EP3400431A1 (en) | 2018-11-14 |
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