MX2009002182A - Metodo de fabricacion de recubrimientos de oxido de zinc impurificado de baja resistividad y articulos formados mediante el mismo. - Google Patents
Metodo de fabricacion de recubrimientos de oxido de zinc impurificado de baja resistividad y articulos formados mediante el mismo.Info
- Publication number
- MX2009002182A MX2009002182A MX2009002182A MX2009002182A MX2009002182A MX 2009002182 A MX2009002182 A MX 2009002182A MX 2009002182 A MX2009002182 A MX 2009002182A MX 2009002182 A MX2009002182 A MX 2009002182A MX 2009002182 A MX2009002182 A MX 2009002182A
- Authority
- MX
- Mexico
- Prior art keywords
- containing compound
- zinc oxide
- doped zinc
- low resistivity
- articles formed
- Prior art date
Links
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 title abstract 6
- 238000000576 coating method Methods 0.000 title abstract 4
- 239000011787 zinc oxide Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- 150000001875 compounds Chemical class 0.000 abstract 6
- 239000011248 coating agent Substances 0.000 abstract 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 abstract 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 2
- 239000011521 glass Substances 0.000 abstract 2
- 229910052760 oxygen Inorganic materials 0.000 abstract 2
- 239000001301 oxygen Substances 0.000 abstract 2
- 239000011701 zinc Substances 0.000 abstract 2
- 229910052725 zinc Inorganic materials 0.000 abstract 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 229910052733 gallium Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/407—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/214—Al2O3
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/216—ZnO
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/228—Other specific oxides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/24—Doped oxides
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Vapour Deposition (AREA)
- Surface Treatment Of Glass (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Se describe un artículo de vidrio recubierto con óxido de zinc impurificado de baja resistividad que es formado al proporcionar un sustrato de vidrio caliente que tiene una superficie sobre la cual un recubrimiento va a ser depositado, la superficie está a una temperatura de por lo menos 400ºC. Un compuesto que contiene zinc, un compuesto que contiene oxígeno y un compuesto que contiene aluminio o galio son dirigidos a la superficie sobre la cual el recubrimiento va a ser depositado. El compuesto que contiene zinc, el compuesto que contiene oxígeno y el compuesto que contiene aluminio o galio son mezclados conjuntamente por un tiempo suficiente que se forma un recubrimiento de óxido de zinc impurificado con aluminio o galio sobre la superficie a una velocidad de deposición mayor que 5 nm/segundo.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US84091506P | 2006-08-29 | 2006-08-29 | |
| PCT/US2007/010621 WO2008027085A1 (en) | 2006-08-29 | 2007-05-03 | Method of making low resistivity doped zinc oxide coatings and the articles formed thereby |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| MX2009002182A true MX2009002182A (es) | 2009-04-22 |
Family
ID=38650023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MX2009002182A MX2009002182A (es) | 2006-08-29 | 2007-05-03 | Metodo de fabricacion de recubrimientos de oxido de zinc impurificado de baja resistividad y articulos formados mediante el mismo. |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US8163342B2 (es) |
| EP (1) | EP2061729A1 (es) |
| JP (1) | JP5541921B2 (es) |
| KR (1) | KR101429785B1 (es) |
| CN (1) | CN101547873A (es) |
| AU (1) | AU2007290842B2 (es) |
| BR (1) | BRPI0716386A2 (es) |
| MX (1) | MX2009002182A (es) |
| RU (1) | RU2445281C2 (es) |
| WO (1) | WO2008027085A1 (es) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010151430A1 (en) * | 2009-06-22 | 2010-12-29 | Arkema Inc. | Chemical vapor deposition using n,o polydentate ligand complexes of metals |
| WO2011047114A1 (en) * | 2009-10-15 | 2011-04-21 | Arkema Inc. | Deposition of doped zno films on polymer substrates by uv-assisted chemical vapor deposition |
| KR101642708B1 (ko) * | 2010-01-19 | 2016-07-28 | 삼성전자주식회사 | 화상형성장치와 그 프리뷰 이미지 디스플레이방법, 및 서버와 그 프리뷰 이미지 제공방법 |
| US8815420B2 (en) | 2010-09-17 | 2014-08-26 | Guardian Industries Corp. | Coated article having zinc oxide seed layer with reduced stress under functional layer and method of making the same |
| US8808882B2 (en) | 2010-09-17 | 2014-08-19 | Guardian Industries Corp. | Coated article having boron doped zinc oxide based seed layer with enhanced durability under functional layer and method of making the same |
| US20120240634A1 (en) * | 2011-03-23 | 2012-09-27 | Pilkington Group Limited | Method of depositing zinc oxide coatings by chemical vapor deposition |
| EP2688851B1 (en) | 2011-03-23 | 2019-01-23 | Pilkington Group Limited | Apparatus for depositing thin film coatings and method of deposition utilizing such apparatus |
| CN104379806B (zh) * | 2012-03-16 | 2017-06-09 | 皮尔金顿集团有限公司 | 用于沉积氧化锌涂层的化学气相沉积工艺、用于形成导电玻璃制品的方法以及由此制成的涂覆玻璃制品 |
| KR20140046617A (ko) | 2012-10-09 | 2014-04-21 | 삼성코닝정밀소재 주식회사 | 산화아연 전구체 및 이를 이용한 산화아연계 박막 증착방법 |
| RU2529443C2 (ru) * | 2012-10-31 | 2014-09-27 | Олег Петрович Ксенофонтов | Способ изготовления стекловидной композиции |
| CN109913812A (zh) * | 2017-12-13 | 2019-06-21 | 湘潭宏大真空技术股份有限公司 | 一种用于制备cigs薄膜的磁控溅射法 |
| US10519595B2 (en) | 2017-12-29 | 2019-12-31 | Industrial Technology Research Institute | Composite textile |
| CN113354297A (zh) * | 2021-06-02 | 2021-09-07 | 中国科学院宁波材料技术与工程研究所 | 抗菌化合物材料、抗菌玻璃及制备方法与应用 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH640571A5 (fr) * | 1981-03-06 | 1984-01-13 | Battelle Memorial Institute | Procede et dispositif pour deposer sur un substrat une couche de matiere minerale. |
| JPH0682625B2 (ja) * | 1985-06-04 | 1994-10-19 | シーメンス ソーラー インダストリーズ,エル.ピー. | 酸化亜鉛膜の蒸着方法 |
| US4928627A (en) * | 1985-12-23 | 1990-05-29 | Atochem North America, Inc. | Apparatus for coating a substrate |
| JPH01249634A (ja) * | 1988-03-30 | 1989-10-04 | Nippon Sheet Glass Co Ltd | 導電性ガラスおよびその製造方法 |
| US4990286A (en) * | 1989-03-17 | 1991-02-05 | President And Fellows Of Harvard College | Zinc oxyfluoride transparent conductor |
| FR2684095B1 (fr) * | 1991-11-26 | 1994-10-21 | Saint Gobain Vitrage Int | Produit a substrat en verre muni d'une couche a basse emissivite. |
| JP3485918B2 (ja) * | 1991-12-26 | 2004-01-13 | アトフィナ・ケミカルズ・インコーポレイテッド | ガラス基体の被覆法 |
| US6238738B1 (en) * | 1996-08-13 | 2001-05-29 | Libbey-Owens-Ford Co. | Method for depositing titanium oxide coatings on flat glass |
| US6268019B1 (en) * | 1998-06-04 | 2001-07-31 | Atofina Chemicals, Inc. | Preparation of fluorine modified, low haze, titanium dioxide films |
| JP3904378B2 (ja) * | 2000-08-02 | 2007-04-11 | ローム株式会社 | 酸化亜鉛透明導電膜 |
| US6416814B1 (en) | 2000-12-07 | 2002-07-09 | First Solar, Llc | Volatile organometallic complexes of lowered reactivity suitable for use in chemical vapor deposition of metal oxide films |
| US20020117199A1 (en) * | 2001-02-06 | 2002-08-29 | Oswald Robert S. | Process for producing photovoltaic devices |
| US20020189536A1 (en) * | 2001-06-15 | 2002-12-19 | Bridgestone Corporation | Silicon carbide single crystal and production thereof |
| WO2005072947A1 (en) * | 2004-01-23 | 2005-08-11 | Arkema Inc. | Solar control films composed of metal oxide heterostructures, and method of making same |
| GB0518383D0 (en) | 2005-09-09 | 2005-10-19 | Pilkington Plc | Deposition process |
-
2007
- 2007-05-03 BR BRPI0716386-0A patent/BRPI0716386A2/pt not_active IP Right Cessation
- 2007-05-03 MX MX2009002182A patent/MX2009002182A/es active IP Right Grant
- 2007-05-03 CN CNA2007800393047A patent/CN101547873A/zh active Pending
- 2007-05-03 US US11/800,410 patent/US8163342B2/en active Active
- 2007-05-03 RU RU2009111380/03A patent/RU2445281C2/ru not_active IP Right Cessation
- 2007-05-03 AU AU2007290842A patent/AU2007290842B2/en not_active Ceased
- 2007-05-03 JP JP2009526589A patent/JP5541921B2/ja active Active
- 2007-05-03 WO PCT/US2007/010621 patent/WO2008027085A1/en not_active Ceased
- 2007-05-03 EP EP07794486A patent/EP2061729A1/en not_active Withdrawn
- 2007-05-03 KR KR1020097006349A patent/KR101429785B1/ko active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20080057225A1 (en) | 2008-03-06 |
| AU2007290842A1 (en) | 2008-03-06 |
| WO2008027085A1 (en) | 2008-03-06 |
| JP2010502831A (ja) | 2010-01-28 |
| JP5541921B2 (ja) | 2014-07-09 |
| KR20090057067A (ko) | 2009-06-03 |
| CN101547873A (zh) | 2009-09-30 |
| RU2445281C2 (ru) | 2012-03-20 |
| KR101429785B1 (ko) | 2014-08-18 |
| BRPI0716386A2 (pt) | 2013-01-01 |
| US8163342B2 (en) | 2012-04-24 |
| AU2007290842B2 (en) | 2012-08-23 |
| EP2061729A1 (en) | 2009-05-27 |
| RU2009111380A (ru) | 2010-10-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| HH | Correction or change in general | ||
| FG | Grant or registration |