Chow et al., 2009 - Google Patents
Displacement sensing of a micro-electro-thermal actuator using a monolithically integrated thermal sensorChow et al., 2009
- Document ID
- 2976669449414874043
- Author
- Chow J
- Lai Y
- Publication year
- Publication venue
- Sensors and Actuators A: Physical
External Links
Snippet
The present paper describes a novel concept that employs a thermal-based approach for in- situ displacement sensing of electro-thermal actuators. A device encompassing an in-plane electro-thermal actuator and a thermal sensor was monolithically fabricated using the …
- 238000006073 displacement reaction 0 title abstract description 44
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