De Laat et al., 2016 - Google Patents
A review on in situ stiffness adjustment methods in MEMSDe Laat et al., 2016
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- 5521929759995244345
- Author
- De Laat M
- Garza H
- Herder J
- Ghatkesar M
- Publication year
- Publication venue
- Journal of Micromechanics and Microengineering
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In situ stiffness adjustment in microelectromechanical systems is used in a variety of applications such as radio-frequency mechanical filters, energy harvesters, atomic force microscopy, vibration detection sensors. In this review we provide designers with an …
- 238000011065 in-situ storage 0 title abstract description 7
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