Johnson et al., 1992 - Google Patents
Fabrication of silicon-based shape memory alloy micro-actuatorsJohnson et al., 1992
- Document ID
- 18006487770890290160
- Author
- Johnson A
- Busch J
- Ray C
- Sloan C
- Publication year
- Publication venue
- MRS Online Proceedings Library (OPL)
External Links
Snippet
Thin film shape memory alloy has been integrated with silicon in a new actuation mechanism for micro-electro-mechanical systems. This paper compares nickel-titanium film with other actuators, describes recent results of chemical milling processes developed to …
- 229910052710 silicon 0 title abstract description 20
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