Krulevitch et al., 1996 - Google Patents
Thin film shape memory alloy microactuatorsKrulevitch et al., 1996
View PDF- Document ID
- 17650068756610334320
- Author
- Krulevitch P
- Lee A
- Ramsey P
- Trevino J
- Hamilton J
- Northrup M
- Publication year
- Publication venue
- Journal of microelectromechanical systems
External Links
Snippet
Thin film shape memory alloys (SMAs) have the potential to become a primary actuating mechanism for mechanical devices with dimensions in the micron-to-millimeter range requiring large forces over long displacements. The work output per volume of thin film SMA …
- 239000010409 thin film 0 title abstract description 24
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