Cao et al., 2021 - Google Patents
Dynamic thermal characterization of MEMS electrothermal actuators in airCao et al., 2021
- Document ID
- 16054095972209975560
- Author
- Cao Y
- Liu H
- Chen H
- Zhu H
- Nie W
- Xi Z
- Publication year
- Publication venue
- IEEE Sensors Journal
External Links
Snippet
Dynamic performance of microelectromechanical system (MEMS) electrothermal actuators is directly determined by thermal principle and thermal characteristics at microscale differed from macroscale. To study and deeply understand the heat transfer mechanism and …
- 238000010192 crystallographic characterization 0 title description 7
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