Cabrera et al., 2013 - Google Patents
Performance of electro-thermally driven ${\rm VO} _ {2} $-based MEMS actuatorsCabrera et al., 2013
View PDF- Document ID
- 13375963825879493441
- Author
- Cabrera R
- Merced E
- Sepúlveda N
- Publication year
- Publication venue
- Journal of microelectromechanical systems
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Snippet
The integration of VO 2 thin films in a MEMS actuator device is presented. The structural phase transition of VO 2 was induced electro-thermally by resistive heaters monolithically integrated in the MEMS actuator. The drastic mechanical displacements generated by the …
- 239000010409 thin film 0 abstract description 13
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