Xu et al., 1999 - Google Patents
Novel micropump actuated by thin film shape memory alloyXu et al., 1999
- Document ID
- 14160395440244817023
- Author
- Xu D
- Cai B
- Ding G
- Zhou Y
- Yu A
- Wang L
- Zhao X
- Publication year
- Publication venue
- Electronics and Structures for MEMS
External Links
Snippet
A novel micropump actuated by thin film shape memory alloy has been designed, fabricated and tested. It is one of the membrane reciprocating micropumps which is driven by shape recoverable force of NiTi thin film and biasing force of Si membrane. The micropump is …
- 239000010409 thin film 0 title abstract description 21
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Benard et al. | Thin-film shape-memory alloy actuated micropumps | |
Benard et al. | A titanium-nickel shape-memory alloy actuated micropump | |
US7444812B2 (en) | Shape memory alloy MEMS heat engine | |
Xu et al. | Characteristics and fabrication of NiTi/Si diaphragm micropump | |
Ishida et al. | Sputter-deposited shape-memory alloy thin films: properties and applications | |
US7411792B2 (en) | Thermal switch, methods of use and manufacturing methods for same | |
US7687108B2 (en) | Methods for manufacturing stressed material and shape memory material MEMS devices | |
US20070257766A1 (en) | Micro-Transducer and Thermal Switch for Same | |
Lisec et al. | Thermally driven microvalve with buckling behaviour for pneumatic applications | |
Xu et al. | Novel micropump actuated by thin film shape memory alloy | |
Yang et al. | A bimetallic thermally actuated micropump | |
Carlen et al. | Simple, high actuation power, thermally activated paraffin microactuator | |
HJ | A TiNiCu thin film micropump made by magnetron co-sputtered method | |
CN101255859B (en) | Subtense wimble structure micro-driver driven by titanium adnic alloy membrana as well as preparing method | |
Johnson et al. | Fabrication of silicon-based shape memory alloy micro-actuators | |
Kahn et al. | Titanium-nickel shape memory thin film actuators for micromachined valves | |
CN1081294C (en) | Micropump with shape-memory alloy/silicon double-layer driving diaphragm structure | |
Hesketh et al. | Microvalve for fuel cells and miniature gas chromatographic system | |
Ishida | Progress in thin-film shape-memory-alloy actuators | |
JPH06159250A (en) | Micropump | |
Xu et al. | Dynamic actuation behavior of NiTi/Si diaphragm micropump | |
Zhang et al. | Characteristic of TiNi (Cu) shape memory thin film based on micropump | |
Zhang et al. | Characterization of a Micropump Actuated by Ternary TiNiCu Shape Memory Thin Films | |
Fu et al. | TiNi shape memory alloy based micropumps | |
Kawada et al. | Thermally driven microactuator containing thermal isolation structure with polyimide and its application to microvalve |