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Xu et al., 1999 - Google Patents

Novel micropump actuated by thin film shape memory alloy

Xu et al., 1999

Document ID
14160395440244817023
Author
Xu D
Cai B
Ding G
Zhou Y
Yu A
Wang L
Zhao X
Publication year
Publication venue
Electronics and Structures for MEMS

External Links

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A novel micropump actuated by thin film shape memory alloy has been designed, fabricated and tested. It is one of the membrane reciprocating micropumps which is driven by shape recoverable force of NiTi thin film and biasing force of Si membrane. The micropump is …
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