Joshitha et al., 2017 - Google Patents
Fabrication and investigation of low actuation voltage curved beam bistable MEMS switchJoshitha et al., 2017
View PDF- Document ID
- 1328314688820423781
- Author
- Joshitha C
- Sreeja B
- Sasi Princy S
- Radha S
- Publication year
- Publication venue
- Microsystem Technologies
External Links
Snippet
Fabrication and characterization of a novel bistable MEMS (MicroElectroMechanical Systems)-based switch is reported in this paper. The bistable switch is fabricated on SOI wafer with 10 µm thick device Si layer using Silicon-On-Insulator Multi User MEMS Process …
- 238000004519 manufacturing process 0 title abstract description 23
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