Pustan et al., 2017 - Google Patents
Reliability design of thermally actuated MEMS switches based on V-shape beamsPustan et al., 2017
View PDF- Document ID
- 11650979024805304621
- Author
- Pustan M
- Chiorean R
- Birleanu C
- Dudescu C
- Muller R
- Baracu A
- Voicu R
- Publication year
- Publication venue
- Microsystem Technologies
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Snippet
This paper presents the design and fabrication of the thermally actuated MEMS switches based on out-of-plane V-beams. The purpose of this research is to analyze the mechanical response of a V-thermal actuator fabricated from aluminum in order to improve the accuracy …
- 238000006073 displacement reaction 0 abstract description 28
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