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Elkurdi et al., 2002 - Google Patents

Near-infrared waveguide photodetector with Ge/Si self-assembled quantum dots

Elkurdi et al., 2002

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Document ID
527957699796853623
Author
Elkurdi M
Boucaud P
Sauvage S
Kermarrec O
Campidelli Y
Bensahel D
Saint-Girons G
Sagnes I
Publication year
Publication venue
Applied Physics Letters

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We have investigated near-infrared pin photodetectors with Ge/Si self-assembled quantum dots. The self-assembled quantum dots were grown by chemical vapor deposition on Si (001). A vertical stacking of 20 layers of quantum dots was inserted into a near-infrared …
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