WO2025260379A1 - Coating device - Google Patents

Abstract

The present disclosure relates to the technical field of processing of semiconductors or photovoltaic materials, and particularly to a coating device, which solves the problem of low productivity of the coating device. The coating device comprises: a chamber, a furnace door, at least one furnace door conveying mechanism, and a furnace door sealing mechanism. The coating device is provided with the furnace door conveying mechanism, and is cooperatively provided with the furnace door sealing mechanism, and a furnace opening direction is cooperatively set, such that after coating of a previous batch of products is completed, the furnace door sealing mechanism can open a furnace opening and transport the previous batch of products out of the chamber, and is docked with one furnace door conveying mechanism, and the furnace door conveying mechanism transfers the previous batch of products. The furnace door conveying mechanism can transfer the next batch of products to the furnace door sealing mechanism in a timely manner, such that the furnace door sealing mechanism can convey the next batch of products into the chamber in a timely manner and seal the furnace opening for coating, thereby improving the product transportation efficiency, improving the coating efficiency, and improving the productivity of the coating device.

Description

Coating device Technical Field

This disclosure relates to the field of semiconductor or photovoltaic material processing technology, and specifically to a coating apparatus.

Background of the Invention

Semiconductor manufacturing equipment includes diffusion equipment, oxidation equipment, cleaning equipment, and coating equipment. The coating process involves depositing a thin film onto the semiconductor product using gaseous materials. Coating equipment primarily utilizes boat modules to carry and transport the products, placing them into or removing them from the furnace.

However, the complex structure, complicated transportation methods, and low transportation efficiency of the boat-moving and boat-pushing modules result in low production capacity of the coating equipment.

Summary of the Invention

In view of this, the present disclosure provides a coating apparatus that solves the problem of low production capacity of coating apparatus.

Embodiments of this disclosure provide a coating apparatus, comprising: a cavity having a downward-facing furnace opening, the cavity being configured to coat a product; a furnace door configured to carry the product and capable of closing the furnace opening; at least one furnace door conveying mechanism configured to buffer and/or transport the furnace door loaded with the product; and a furnace door closing mechanism disposed below the furnace opening, capable of connecting to each of the furnace door conveying mechanisms, configured to receive a furnace door loaded with uncoated product transported by at least one of the furnace door conveying mechanisms, and to raise the furnace door loaded with uncoated product to close the furnace opening, and to lower the furnace door loaded with coated product to separate the furnace door from the furnace opening, and to dock with at least one of the furnace door conveying mechanisms to transfer the furnace door loaded with coated product.

In some embodiments, there are multiple furnace door conveying mechanisms, which are spaced apart in a vertical direction; wherein, when the furnace door closing mechanism is raised or lowered to different preset positions, the furnace door closing mechanism can be located on the same horizontal plane as the furnace door conveying mechanisms located at different positions.

In some embodiments, the coating apparatus further includes: a loading and unloading mechanism configured to carry the furnace door and lift the furnace door to be connected to different furnace door conveying mechanisms; and a loading and unloading device configured to load uncoated products onto the furnace door carried by the loading and unloading mechanism, or to unload coated products from the furnace door carried by the loading and unloading mechanism; wherein, when the loading and unloading mechanism is lifted to different preset loading positions, the loading and unloading device loads uncoated products onto the furnace door carried by the loading and unloading mechanism, and the loading and unloading mechanism conveys the furnace door loaded with uncoated products to different furnace door conveying mechanisms; and when the loading and unloading mechanism is lifted to different preset unloading positions, different furnace door conveying mechanisms convey the furnace door loaded with coated products to the loading and unloading mechanism.

In some embodiments, the loading and unloading equipment includes: a mobile module assembly, wherein the mobile module assembly is positioned above the loading and unloading mechanism when the loading and unloading mechanism is located at the preset loading position. The module assembly is configured to move along a first horizontal direction, a second horizontal direction, and a vertical direction, wherein the first horizontal direction is the same as the horizontal movement direction of the furnace door on the loading and unloading mechanism, and the second horizontal direction is perpendicular to the first horizontal direction; a gripper, connected to the movable module assembly, moves with the movable module assembly and is configured to grip or place the product.

In some embodiments, the coating apparatus further includes: a feeding mechanism, disposed adjacent to the loading and unloading mechanism, configured to transport a carrier to a loading position, so that the loading and unloading equipment can load the carrier from the loading position to the furnace door carried by the loading and unloading mechanism, the carrier being configured to hold the product; wherein, the feeding mechanism includes: a first sub-feeding mechanism, configured to transport the carrier to a flipping position; a flipping device, connected to the first sub-feeding mechanism, configured to flip the carrier located at the flipping position; and a second sub-feeding mechanism, connected to the flipping device, configured to transport the flipped carrier to the loading position, so that the loading and unloading equipment can load the carrier from the loading position to the furnace door carried by the loading and unloading mechanism.

In some embodiments, the carrier has a first support surface and a second support surface arranged at an angle; wherein, the flipping device includes: a first rotating shaft, horizontally arranged, and the extending direction of the first rotating shaft is perpendicular to the moving direction of the carrier on the first sub-feeding mechanism; a first bearing plate, connected to the first rotating shaft, rotating under the drive of the first rotating shaft, configured to carry the carrier, and capable of contacting the first support surface of the carrier; a second bearing plate, connected to the first rotating shaft, rotating under the drive of the first rotating shaft, configured to carry the carrier, and capable of contacting the second support surface of the carrier; wherein, the second bearing plate is arranged at an angle to the first bearing plate to form a receiving space, the receiving space being used to receive the carrier, so that during the rotation of the first rotating shaft, the carrier is changed from being carried by the first bearing plate to being carried by the second bearing plate.

In some embodiments, the coating apparatus further includes: a feeding mechanism, adjacent to the loading and unloading mechanism and arranged side-by-side with the loading mechanism, so that the loading and unloading equipment can unload the carrier on the furnace door carried by the loading and unloading mechanism to the feeding mechanism; at least one loading and unloading device, disposed on the side of the feeding mechanism away from the loading mechanism or on the side of the loading mechanism away from the feeding mechanism, configured to place the uncoated product in the carrier on the loading mechanism, or remove the coated product from the carrier on the feeding mechanism, or transport the empty carrier on the feeding mechanism to the loading mechanism; and a traversing device, connecting the loading mechanism and the feeding mechanism, configured to move the carrier on the feeding mechanism to the loading mechanism.

In some embodiments, the coating apparatus further includes: a first material box buffer mechanism, disposed adjacent to the loading/unloading device, configured to buffer a material box containing uncoated products; and a second material box buffer mechanism, disposed above or below the first material box buffer mechanism, configured to buffer a material box containing coated products or an empty material box; wherein the loading/unloading device transports uncoated products from the material box in the first material box buffer mechanism to the carrier on the loading mechanism, or transports coated products from the carrier on the unloading mechanism to the material box on the second material box buffer mechanism.

In some embodiments, the cavity has a cubic shape, and the horizontal cross-sectional shape of the furnace door has a rectangular shape; wherein, when there are multiple coating devices, the multiple coating devices are arranged vertically and/or side by side.

In some embodiments, the coating apparatus further includes: a first purification chamber configured to house the loading and unloading mechanism and the loading device; a second purification chamber configured to house a plurality of the furnace door conveying mechanisms; a cooling device disposed at the top of the first purification chamber and configured to cool the first purification chamber; and a cleaning device disposed at the top of the first purification chamber and configured to clean the furnace doors on the loading and unloading mechanism.

The coating apparatus provided in this embodiment includes a furnace door conveying mechanism, a furnace door closing mechanism, and a furnace opening direction. After the previous batch of products is coated, the furnace door closing mechanism opens the furnace opening and transports the previous batch of products out of the cavity. This then connects with a furnace door conveying mechanism, which transfers the previous batch of products. The furnace door conveying mechanism can promptly transfer the next batch of products to the furnace door closing mechanism, allowing the closing mechanism to promptly feed the next batch of products into the cavity and close the furnace opening for coating. This improves product transport efficiency, coating efficiency, and ultimately, the production capacity of the coating apparatus.

Brief description of the attached figures

Figure 1 shows a schematic diagram of the coating apparatus provided in an embodiment of this disclosure.

Figure 2 shows a magnified view of region A shown in Figure 1.

Figure 3 shows a magnified view of region B shown in Figure 2.

Figure 4 shows a top view of a furnace door and carrier provided in an embodiment of this disclosure.

Figure 5 shows a schematic diagram of the structure of a vehicle provided in an embodiment of this disclosure.

Figure 6 shows a schematic diagram of the coating apparatus provided in another embodiment of this disclosure.

Figure label:
10. Coating device; 100. Cavity; 110. Furnace opening; 200. Furnace door; 350. Furnace door conveying mechanism;
300. First furnace door conveying mechanism; 400. Furnace door closing mechanism; 500. Second furnace door conveying mechanism; 600. Loading and unloading mechanism; 700. Loading and unloading equipment; 710. Moving module assembly; 7110. First horizontal module; 7120. Second horizontal module; 7130. Vertical module; 720. Gripper; 800. Feeding mechanism; 810. First sub-feeding mechanism; 820. First tilting device; 8210. First rotating shaft; 8220. First bearing plate; 8230. Second bearing plate; 830. Second sub-feeding mechanism; 900. Carrier; 901. Opening; 910. First support surface; 920. Second support surface; 93 0. Third support surface; 1000. Feeding mechanism; 1001. First sub-feeding mechanism; 1002. Second tilting device; 1012. Second rotating shaft; 1022. Third bearing plate; 1032. Fourth bearing plate; 1003. Second sub-feeding mechanism; 1100. Loading and unloading equipment; 1110. First robotic arm; 1120. Second robotic arm; 1200. Lateral movement device; 1300. First material box buffer mechanism; 1400. Second material box buffer mechanism; 1500. First purification chamber; 1600. Second purification chamber; 1700. Cooling device; 1800. Cleaning device; 1900. Pump equipment; 2000. Heat dissipation device.

Method of implementing this application

The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

The manufacturing of solar cells typically involves processes such as texturing, diffusion, etching, coating, screen printing, and sintering, all of which must be performed on specific manufacturing equipment. Specifically, the manufacturing equipment includes diffusion... Equipment includes oxidation equipment, dry cleaning equipment, and coating equipment. The coating process involves depositing a thin film onto a silicon wafer using gaseous substances to reduce sunlight reflection and passivate the wafer surface. Coating equipment includes plasma-enhanced chemical vapor deposition (PECVD) equipment, low-pressure chemical vapor deposition (LPCVD) equipment, and atomic layer deposition (ALD) equipment. All of these systems include clean benches, furnaces, gas supply cabinets, and automation systems. The clean benches hold and transport products, and cool and purify processed products. Processing takes place within a sealed furnace, the gas supply cabinet provides the reaction gases, and the automation system handles product handling.

The clean bench equipment in the coating unit generally includes a boat pushing module, a boat moving module, a side boat unloading module, a buffer rack, a cooling system, a heat dissipation system, etc. It mainly uses each boat module to carry and transport products so that the products can be put into the furnace or taken out of the furnace. The boat module has a complex structure, a complex transportation method, and low transportation efficiency, resulting in low production capacity of the coating unit.

To address the aforementioned problems, this disclosure provides a coating apparatus. This apparatus includes a furnace door conveying mechanism, a furnace door closing mechanism, and a furnace opening direction. After the previous batch of products is coated, the furnace door closing mechanism opens the furnace opening and transports the previous batch of products out of the cavity. This then connects with the furnace door conveying mechanism, which transfers the previous batch of products. The furnace door conveying mechanism can promptly transfer the next batch of products to the furnace door closing mechanism, allowing the closing mechanism to promptly feed the next batch of products into the cavity and close the furnace opening for coating. This improves product transport efficiency, coating efficiency, and ultimately, the production capacity of the coating apparatus.

The specific structure of the coating apparatus is described below with reference to embodiments.

Figure 1 shows a schematic diagram of a coating apparatus provided in an embodiment of this disclosure. As shown in Figure 1, the coating apparatus 10 includes: a cavity 100, a furnace door 200, at least one furnace door conveying mechanism 350, and a furnace door closing mechanism 400. The cavity 100 has a downward-facing furnace opening 110. The cavity 100 is configured to coat a product, and the furnace door 200 is configured to carry the product and close the furnace opening 110. The furnace door conveying mechanism 350 is configured to buffer or transport the furnace door 200 loaded with the product, or to buffer and transport the furnace door 200 loaded with the product. A furnace door closing mechanism 400 is disposed below the furnace opening 110 and can be connected to each furnace door conveying mechanism 350. It is configured to receive a furnace door 200 loaded with uncoated products transported by at least one furnace door conveying mechanism 350, raise the furnace door 200 loaded with uncoated products to close the furnace door 200 with the furnace opening 110, and lower the furnace door 200 loaded with coated products to separate the furnace door 200 from the furnace opening 110. It also docks with at least one furnace door conveying mechanism 350 to transfer the furnace door 200 loaded with coated products.

The coating apparatus 10 is equipped with at least one furnace door conveying mechanism 350, and is coordinated with a furnace door closing mechanism 400 and a furnace opening 110. After the previous batch of products is coated, the furnace door closing mechanism 400 can open the furnace opening 110 and transport the previous batch of products out of the cavity 100, connecting with the furnace door conveying mechanism 350, which then transfers the previous batch of products. The furnace door conveying mechanism 350 can promptly transfer the next batch of products to the furnace door closing mechanism 400, enabling the furnace door closing mechanism 400 to promptly send the next batch of products into the cavity 100 and close the furnace opening 110 for coating. This improves product transport efficiency, coating efficiency, and thus increases the production capacity of the coating apparatus.

The product can be a silicon wafer, a silicon wafer, a solar panel, a glass substrate, or the like. For example, the product can be a silicon wafer with a cross section, and the coating apparatus 10 can passivate the cross section of the silicon wafer.

The cavity 100 can be rectangular or cylindrical in shape, and this disclosure does not specifically limit the shape of the cavity 100. The furnace door 200 can be rectangular or circular in shape, as long as the furnace door 200 can carry the product and cover the furnace opening 110. This disclosure does not specifically limit the shape of the cavity 100.

In some embodiments, the cavity 100 is cubic in shape, and the horizontal cross-sectional shape of the furnace door 200 is rectangular. The cavity 100 is generally horizontal, with multiple furnace tubes stacked inside. These furnace tubes are made of quartz, which is easily damaged. As a reaction chamber, the furnace tubes are cylindrical due to process limitations. Due to space constraints, the number and size of the furnace tubes are limited, thus restricting the number of products the cavity 100 can hold. The product or the carrier 900 holding the product is mostly rectangular. Therefore, in the same space, compared to cylindrical furnace tubes, the cubic cavity 100 can hold more products, thereby further increasing the production capacity of the coating apparatus 10. Furthermore, the cubic cavity 100 facilitates the vertical or side-by-side arrangement of the coating apparatus 10, saving space. Therefore, when there are multiple coating apparatuses 10, they can be arranged vertically and/or side-by-side to improve the production efficiency of the coating apparatus 10.

The furnace door conveying mechanism 350 can be a conveyor belt transfer line, which may include a first power source, a first transmission assembly, and a first conveyor belt. The first power source drives the first transmission assembly to move, and the first transmission assembly carries the first conveyor belt to move, so that the first conveyor belt transports the furnace door 200 loaded with uncoated products. The first power source may be a motor, electric cylinder, pneumatic cylinder, or other equipment capable of providing power. The first transmission assembly may be a roller, pulley, synchronous pulley, gear, or other transmission equipment. The first conveyor belt may be a belt, mesh belt, synchronous belt, or other conveying equipment.

The furnace door closing mechanism 400 may include a conveyor belt circulation line and a first lifting device located below the conveyor belt mechanism. Exemplarily, the furnace door closing mechanism 400 may include a second power source, a second transmission assembly, and a second conveyor belt. The second power source drives the second transmission assembly to move, and the second transmission assembly carries the second conveyor belt to move, so that the second conveyor belt transports the furnace door 200 loaded with uncoated products. The second power source may be a motor, electric cylinder, pneumatic cylinder, or other equipment capable of providing power. The second transmission assembly may be a roller, pulley, synchronous pulley, gear, or other transmission equipment. The second conveyor belt may be a belt, mesh belt, synchronous belt, or other conveying equipment. Exemplarily, the first lifting device is located below the conveyor belt circulation line and connected to the conveyor belt circulation line to drive the conveyor belt circulation line to rise, so that the furnace door 200 loaded with uncoated products on the second conveyor belt closes with the furnace opening 110, or drives the furnace door 200 loaded with coated products on the second conveyor belt to fall, so that the furnace door 200 loaded with coated products on the second conveyor belt separates from the furnace opening 110.

The coating apparatus 10 also includes a pump device 1900, which is connected to the cavity 100 and configured to deliver a reaction gas into the cavity 100 for the cavity 100 to coat the product.

The product is contained in a carrier 900, which has an opening 901. The reaction gas enters the carrier 900 from the cavity 100 through the opening 901 to coat the product inside the carrier 900.

In some embodiments, there are multiple furnace door conveying mechanisms 350, which are spaced apart in a vertical direction. When the furnace door closing mechanism 400 is raised or lowered to different preset positions, the furnace door closing mechanism 400 can be located on the same horizontal plane as one of the furnace door conveying mechanisms 350 located at different positions.

For example, continuing to refer to Figure 1, there are two furnace door conveying mechanisms 350, namely a first furnace door conveying mechanism 300 and a second furnace door conveying mechanism 500. The first furnace door conveying mechanism 300... The second furnace door conveying mechanism 500 can be located on the same side of the furnace door closing mechanism 400, and the pump device 1900 is located on the other side of the furnace door closing mechanism 400.

For example, the first furnace door conveying mechanism 300 and the second furnace door conveying mechanism 500 may also be disposed on different sides of the furnace door closing mechanism 400. For instance, the first furnace door conveying mechanism 300 and the second furnace door conveying mechanism 500 may be disposed on opposite sides of the furnace door closing mechanism 400. Another example is that the first furnace door conveying mechanism 300 and the second furnace door conveying mechanism 500 may be disposed on adjacent sides of the furnace door closing mechanism 400.

The first furnace door conveying mechanism 300 horizontally transports the furnace door 200 loaded with uncoated products to the furnace door closing mechanism 400. The furnace door closing mechanism 400 horizontally transports the furnace door 200 loaded with uncoated products to a position below the furnace opening 110. The furnace door closing mechanism 400 then rises to allow the uncoated products loaded on the furnace door 200 to enter the cavity 100, and simultaneously closes the furnace door 200 with the furnace opening 110, thus sealing the cavity 100. The products are then coated within the sealed cavity 100.

After coating is completed, the furnace door closing mechanism 400 descends to separate the furnace door 200, which is loaded with coated products, from the furnace opening 110, and the coated products loaded on the furnace door 200 exit the cavity 100 and dock with the second furnace door conveying mechanism 500. The furnace door closing mechanism 400 transports the furnace door 200 loaded with coated products in the horizontal direction so that the furnace door 200 loaded with coated products is transported by the furnace door closing mechanism 400 to the second furnace door conveying mechanism 500.

For example, the first furnace door conveying mechanism 300 is located below or above the second furnace door conveying mechanism 500. When the furnace door closing mechanism 400 is raised or lowered to the first preset position, the furnace door closing mechanism 400 and the first furnace door conveying mechanism 300 are on the same horizontal plane. When the furnace door closing mechanism 400 is raised or lowered to the second preset position, the furnace door closing mechanism 400 and the second furnace door conveying mechanism 500 are on the same horizontal plane. Therefore, the arrangement of the first furnace door conveying mechanism 300 and the second furnace door conveying mechanism 500 saves space, thereby facilitating an increase in the production capacity of the coating apparatus 10 within a limited space.

The first preset position can be the position of the first furnace door conveyor 300 when the distance between the first furnace door conveyor 300 and the ground is a first preset distance. The first preset position and the first preset distance can be determined according to actual needs, and this disclosure does not impose specific limitations.

The second preset position can be the position of the second furnace door conveying mechanism 500 when the distance between the second furnace door conveying mechanism 500 and the ground is a second preset distance. The second preset position and the second preset distance can be determined according to actual needs, and this disclosure does not impose specific limitations.

When the first furnace door conveyor 300 is below the second furnace door conveyor 500, the first preset position is below the second preset position. When the first furnace door conveyor 300 is above the second furnace door conveyor 500, the first preset position is above the second preset position.

In some embodiments, as shown in Figures 1 and 2, the coating apparatus 10 further includes a loading/unloading mechanism 600 and a loading/unloading device 700. The loading/unloading mechanism 600 is configured to carry the furnace door 200 and lift the furnace door 200 to dock with different furnace door conveying mechanisms 350. Exemplarily, the loading/unloading mechanism 600 can be connected to a first furnace door conveying mechanism 300 and a second furnace door conveying mechanism 500. The loading/unloading device 700 is configured to load uncoated products onto the furnace door 200 carried by the loading/unloading mechanism 600, or unload coated products from the furnace door 200 carried by the loading/unloading mechanism 600. The loading/unloading mechanism 600 lifts and lowers the furnace door 200 to dock with different furnace door conveying mechanisms 350. At different preset loading positions, the loading/unloading equipment 700 loads uncoated products onto the furnace door 200 carried by the loading/unloading mechanism 600. The loading/unloading mechanism 600 then conveys the furnace door 200 loaded with uncoated products to different furnace door conveying mechanisms 350. When the loading/unloading mechanism 600 moves to different preset unloading positions, different furnace door conveying mechanisms 350 convey the furnace door 200 loaded with coated products to the loading/unloading mechanism 600. Through automated loading and unloading, loading and unloading efficiency is improved, thereby increasing the production efficiency of the coating unit 10.

The loading and unloading equipment 700 can be a robotic arm or other components, as long as it can load uncoated products onto the furnace door 200 carried by the loading and unloading mechanism 600, or unload coated products from the furnace door 200 carried by the loading and unloading mechanism 600. This disclosure does not specifically limit the structure of the loading and unloading equipment 700.

The loading and unloading mechanism 600 is located on the side of the first furnace door conveying mechanism 300 and the second furnace door conveying mechanism 500 away from the furnace door closing mechanism 400. When the loading and unloading mechanism 600 is raised or lowered to the third preset position, the loading and unloading mechanism 600 and the first furnace door conveying mechanism 300 are on the same horizontal plane. The loading and unloading mechanism 600 transports the furnace door 200 loaded with uncoated products in the horizontal direction so that the furnace door 200 loaded with uncoated products is transported by the loading and unloading mechanism 600 to the first furnace door conveying mechanism 300. When the loading and unloading mechanism 600 is raised and lowered to the fourth preset position, the loading and unloading mechanism 600 and the second furnace door conveying mechanism 500 are on the same horizontal plane. The second furnace door conveying mechanism 500 transports the furnace door 200 loaded with coated products in the horizontal direction and away from the furnace door closing mechanism 400. The furnace door 200 loaded with coated products is transported by the second furnace door conveying mechanism 500 to the loading and unloading mechanism 600. The loading and unloading mechanism 600 transports the furnace door 200 loaded with coated products in the horizontal direction and away from the second furnace door conveying mechanism 500. The third preset position is the preset loading position, and the fourth preset position is the preset unloading position.

The third preset position can be the position of the first furnace door conveyor 300 when the distance between the first furnace door conveyor 300 and the ground is the first preset distance. The third preset position and the first preset distance can be determined according to actual needs, and this disclosure does not impose specific limitations.

The fourth preset position can be the position of the second furnace door conveying mechanism 500 when the distance between the second furnace door conveying mechanism 500 and the ground is the second preset distance. The fourth preset position and the second preset distance can be determined according to actual needs, and this disclosure does not impose specific limitations.

When the first furnace door conveyor 300 is below the second furnace door conveyor 500, the third preset position is below the fourth preset position. When the first furnace door conveyor 300 is above the second furnace door conveyor 500, the third preset position is above the fourth preset position.

The loading and unloading mechanism 600 may include a conveyor belt circulation line and a second lifting device. Exemplarily, the loading and unloading mechanism 600 may include a fourth power source, a fourth transmission assembly, and a fourth conveyor belt. The fourth power source drives the fourth transmission assembly to move, and the fourth transmission assembly carries the fourth conveyor belt to move, so that the fourth conveyor belt transports the furnace door 200 loaded with uncoated products, or transports the furnace door 200 loaded with coated products. The fourth power source may be a motor, electric cylinder, pneumatic cylinder, or other equipment capable of providing power. The fourth transmission assembly may be a roller, pulley, synchronous pulley, gear, or other transmission equipment. The fourth conveyor belt may be a belt, mesh belt, synchronous belt, or other conveying equipment. Exemplarily, the second lifting device is disposed below the conveyor belt circulation line and connected to the conveyor belt circulation line, driving the fourth conveyor belt to rise and fall to a third preset position, or driving the fourth conveyor belt to rise and fall to a fourth preset position.

In some embodiments, continuing to refer to FIG2, the loading/unloading device 700 includes a movable module assembly 710 and a gripper 720. When the loading/unloading mechanism 600 is in a preset loading position, the movable module assembly 710 is located... Above the loading/unloading mechanism 600, the moving module assembly 710 is configured to move along a first horizontal direction X1, a second horizontal direction X2, and a vertical direction Y1. The first horizontal direction X1 is the same as the horizontal movement direction of the furnace door 200 on the loading/unloading mechanism 600, and the second horizontal direction X2 is perpendicular to the first horizontal direction X1. A gripper 720 is connected to the moving module assembly 710 and moves with it, configured to grip or place products. The loading/unloading device 700 has a simple structure and is located above the loading/unloading mechanism 600, reducing the floor space occupied by the coating device 10.

In some embodiments, the moving module assembly 710 includes a first horizontal module 7110, a second horizontal module 7120, and a vertical module 7130. The first horizontal module 7110 is connected to and perpendicular to the second horizontal module 7120, the vertical module 7130 is connected to the second horizontal module 7120, and the vertical module 7130 is connected to the gripper 720. The first horizontal module 7110 drives the second horizontal module 7120 and the vertical module 7130 to move along a first horizontal direction X1, the second horizontal module 7120 drives the vertical module 7130 to move along a second horizontal direction X2, and the vertical module 7130 drives the gripper 720 to move along a vertical direction Y1, thereby enabling the gripper 720 to accurately grasp or place products.

In some embodiments, as shown in Figures 1, 2, and 6, the coating apparatus 10 further includes a loading mechanism 800. The loading mechanism 800 is disposed adjacent to the loading/unloading mechanism 600 and is configured to transport a carrier 900 to a loading position, enabling the loading/unloading equipment 700 to load the carrier 900 from the loading position onto the furnace door 200 carried by the loading/unloading mechanism 600. The carrier 900 is configured to hold products. The loading mechanism 800 includes a first sub-loading mechanism 810, a first tilting device 820, and a second sub-loading mechanism 830. The first sub-feeding mechanism 810 is configured to transport the carrier 900 to the first flipping position. A first flipping device 820, connected to the first sub-feeding mechanism 810, is configured to flip the carrier 900 located at the first flipping position. A second sub-feeding mechanism 830, connected to the first flipping device 820, is configured to transport the flipped carrier 900 to the loading position, so that the loading/unloading equipment 700 can load the carrier 900 from the loading position onto the furnace door 200 carried by the loading/unloading mechanism 600. The position of the carrier 900 is adjusted by the feeding mechanism 800, thereby adjusting the orientation of the opening 901 of the carrier 900 in preparation for subsequent coating.

The feeding mechanism 800 can be a conveyor belt conveyor line. Exemplarily, the feeding mechanism 800 may include a fifth power source, a fifth transmission assembly, and a fifth conveyor belt. The fifth power source drives the fifth transmission assembly to move, and the fifth transmission assembly carries the fifth conveyor belt to move, so that the fifth conveyor belt transports a carrier 900 containing uncoated products. The fifth power source can be a motor, electric cylinder, pneumatic cylinder, or other equipment capable of providing power. The fifth transmission assembly can be a roller, pulley, synchronous pulley, gear, or other transmission equipment. The fifth conveyor belt can be a belt, mesh belt, synchronous belt, or other conveying equipment.

In some embodiments, the first flipping device 820 can flip the carrier 900 located in the first flipping position by 90 degrees or 180 degrees, so that the opening 901 of the carrier 900 is exposed in the cavity 100, facilitating the entry of the reaction gas into the carrier 900 in the cavity 100 through the opening 901. Exemplarily, the flipping angle of the carrier 900 located in the first flipping position by the first flipping device 820 can be selected according to the actual situation, for example, 30 degrees, 60 degrees, 150 degrees, etc., and this disclosure does not make a specific limitation.

The loading mechanism 800 is located on the side of the unloading mechanism 600 away from the furnace door conveyor mechanism 350. When the unloading mechanism 600 is raised or lowered to the fifth preset position, the loading mechanism 600 and the loading mechanism 800 are on the same horizontal plane. The loading mechanism 800 transports the carrier 900 containing the uncoated product in the horizontal direction to transport the carrier 900 to the loading position. Exemplarily, the second lifting device drives the fourth conveyor belt to rise or fall to the fifth preset position.

The fifth preset position can be the position of the feeding mechanism 800 when the distance between the feeding mechanism 800 and the ground is the third preset distance. The fifth preset position and the third preset distance can be determined according to actual needs, and this disclosure does not make specific limitations.

The second sub-feeding mechanism 830 is arranged adjacent to the loading and unloading mechanism 600, and is located on the side of the loading and unloading mechanism 600 away from the furnace door conveying mechanism 350. The first tilting device 820 is connected to the second sub-feeding mechanism 830, and is located on the side of the second sub-feeding mechanism 830 away from the loading and unloading mechanism 600. The first sub-feeding mechanism 810 is connected to the first tilting device 820, and is located on the side of the first tilting device 820 away from the second sub-feeding mechanism 830. The first sub-feeding mechanism 810 transports the carrier 900 containing uncoated products to the first flipping position. The first flipping device 820 flips the carrier 900 containing uncoated products at the first flipping position so that the carrier 900 containing uncoated products is flipped from the first sub-feeding mechanism 810 to the second sub-feeding mechanism 830, exposing the opening 901. The second sub-feeding mechanism 830 transports the flipped carrier 900 containing uncoated products to the loading position so that the loading and unloading equipment 700 can load the carrier 900 containing uncoated products from the loading position to the furnace door 200 carried by the loading and unloading mechanism 600.

In some embodiments, the carrier 900 has a first support surface 910 and a second support surface 920 arranged at an angle. The first tilting device 820 includes a first rotating shaft 8210, a first support plate 8220, and a second support plate 8230. The first rotating shaft 8210 is horizontally arranged, and the extending direction of the first rotating shaft 8210 is perpendicular to the moving direction of the carrier 900 on the first sub-feeding mechanism 810. The first support plate 8220 is connected to the first rotating shaft 8210, rotates under the drive of the first rotating shaft 8210, is configured to support the carrier 900, and is capable of contacting the first support surface 910 of the carrier 900. The second support plate 8230 is connected to the first rotating shaft 8210, rotates under the drive of the first rotating shaft 8210, is configured to support the carrier 900, and is capable of contacting the second support surface 920 of the carrier 900. The second support plate 8230 is angled to the first support plate 8220 to form a receiving space, which is used to accommodate the carrier 900, so that during the rotation of the first rotating shaft 8210, the carrier 900 is switched from being supported by the first support plate 8220 to being supported by the second support plate 8230. The first flipping device 820 has a simple structure and high flipping efficiency.

For example, as shown in Figures 3 to 6, the carrier 900 has a rectangular structure. The first support surface 910 and the second support surface 920 are set at 90 degrees. An opening 901 is provided on the first support surface 910. The second support plate 8230 is set at 90 degrees to the first support plate 8220. The first sub-feeding mechanism 810 transports the carrier 900 to the first flipping position. The first support plate 8220 supports the first support surface 910, and the second support plate 8230 supports the second support surface 920. During the rotation of the first rotating shaft 8210 by 90 degrees, the carrier 900 changes from being supported by the first support surface 910 and the first support plate 8220 to being supported by the second support surface 920 and the second support plate 8230. When the first rotating shaft 8210 rotates to 90 degrees, the carrier 900 is flipped to the second sub-feeding mechanism 830, which then transports the flipped carrier 900 to the loading position.

For example, the first support surface 910 and the third support surface 930 have a gap in the vertical direction, which forms an opening 901, wherein the third support surface 930 and the second support surface 920 are disposed opposite to each other.

In some embodiments, the coating apparatus 10 further includes a feeding mechanism 1000, at least one loading/unloading device 1100, and a traversing device 1200. The feeding mechanism 1000 is adjacent to the loading/unloading mechanism 600 and arranged side-by-side with the loading mechanism 800, so that the loading/unloading device 700 can unload the carrier 900 from the furnace door 200 carried by the loading/unloading mechanism 600 to the feeding mechanism 1000. The feeding mechanism 1000 transports the carrier 900 containing the coated product in a horizontal direction and away from the loading/unloading mechanism 600. The loading/unloading device 1100 is configured... The unloading mechanism 1000, located on the side of the unloading mechanism 1000 away from the loading mechanism 800, or on the side of the loading mechanism 800 away from the unloading mechanism 1000, is configured to place the carrier 900 of the uncoated product into the carrier 900 on the loading mechanism 800, or remove the coated product from the carrier 900 on the unloading mechanism 1000, or transport the empty carrier 900 on the unloading mechanism 1000 to the loading mechanism 800. The transverse transfer device 1200 connects the loading mechanism 800 and the unloading mechanism 1000 and is configured to move the carrier 900 on the unloading mechanism 1000 to the loading mechanism 800. Automatic unloading is achieved through the unloading mechanism 1000, the loading/unloading device 1100, and the transverse transfer device 1200, improving the production efficiency of the coating apparatus 10.

The unloading mechanism 1000 can be a conveyor belt conveyor line. Exemplarily, the unloading mechanism 1000 may include a sixth power source, a sixth transmission assembly, and a sixth conveyor belt. The sixth power source drives the sixth transmission assembly to move, and the sixth transmission assembly carries the sixth conveyor belt to move, so that the sixth conveyor belt transports a carrier 900 containing the coated product. The sixth power source can be a motor, electric cylinder, pneumatic cylinder, or other equipment capable of providing power. The sixth transmission assembly can be a roller, pulley, synchronous pulley, gear, or other transmission equipment. The sixth conveyor belt can be a belt, mesh belt, synchronous belt, or other conveying equipment.

In some embodiments, as shown in Figures 1, 2, and 6, the unloading mechanism 1000 includes: a first sub-unloading mechanism 1001, a second flipping device 1002, and a second sub-unloading mechanism 1003. The first sub-unloading mechanism 1001 is disposed adjacent to the loading and unloading mechanism 600 and parallel to the second sub-loading mechanism 830, so that the loading and unloading equipment 700 can unload the carrier 900 on the furnace door 200 carried by the loading and unloading mechanism 600 to the first sub-unloading mechanism 1001. The first sub-unloading mechanism 1001 transports the carrier 900 containing the coated product to the second flipping position. The second flipping device 1002 is connected to the first sub-unloading mechanism 1001 and is disposed parallel to the first flipping device 820, and is configured to flip the carrier 900 located at the second flipping position. The second sub-discharging mechanism 1003 is connected to the second tilting device 1002 and is arranged side by side with the first sub-loading mechanism 810. It is configured to transport the tilted carrier 900 to achieve unloading.

In some embodiments, the second flipping device 1002 can flip the carrier 900 located in the second flipping position by 90 degrees or 180 degrees so that the carrier 900 is in a unloading state. Exemplarily, the flipping angle of the carrier 900 located in the second flipping position by the second flipping device 1002 can be selected according to the actual situation, such as 30 degrees, 60 degrees, 150 degrees, etc., and this disclosure does not make specific limitations.

For example, the second tilting device 1002 may include a second rotating shaft 1012, a third support plate 1022, and a fourth support plate 1032. The second rotating shaft 1012 is horizontally arranged, and its extending direction is perpendicular to the moving direction of the carrier 900 on the second sub-feeding mechanism 1003. The third support plate 1022 is connected to the second rotating shaft 1012, rotates under the drive of the second rotating shaft 1012, is configured to support the carrier 900, and is able to contact the second support surface 920 of the carrier 900. The fourth support plate 1032 is connected to the second rotating shaft 1012, rotates under the drive of the second rotating shaft 1012, is configured to support the carrier 900, and is able to contact the first support surface 910 of the carrier 900. The third support plate 1022 and the fourth support plate 1032 are set at an angle to form a receiving space, which is used to accommodate the carrier 900, so that during the rotation of the second rotating shaft 1012, the carrier 900 is changed from being supported by the third support plate 1022 to being supported by the fourth support plate 1032. The second tilting device 1002 has a simple structure and high tilting efficiency.

The third support plate 1022 and the fourth support plate 1032 are set at a 90-degree angle. The first sub-feeding mechanism 1001 transports the carrier 900 to the second flipping position. The third support plate 1022 supports the second support surface 920, and the fourth support plate 1032 supports the first support surface 910. During the process of the second rotating shaft 1012 rotating 90 degrees, the carrier 900 changes from being supported by the third support plate 1022 on the second support surface 920 to being supported by the first support surface 910. The fourth bearing plate 1032 carries the carrier. When the second rotating shaft 1012 rotates to 90 degrees, the carrier 900 is flipped to the second sub-unloading mechanism 1003, which then transports the carrier 900 after it has been flipped 90 degrees.

For example, the transverse movement device 1200 is connected to the first sub-feeding mechanism 810 and the second sub-unfeeding mechanism 1003.

In some embodiments, when the loading/unloading device 1100 is located on the side of the loading mechanism 800 away from the unloading mechanism 1000, the loading/unloading device 1100 removes the coated product from the carrier 900 on the second sub-unloading mechanism 1003 and transports the empty carrier 900 on the second sub-unloading mechanism 1003 to the first sub-loading mechanism 810.

In some embodiments, when the loading/unloading device 1100 is located on the side of the loading mechanism 800 away from the unloading mechanism 1000, the traversing device 1200 moves the carrier 900 on the second sub-unloading mechanism 1003 to the first sub-loading mechanism 810, so that the loading/unloading device 1100 can remove the coated product from the carrier 900 and place the uncoated product into the empty carrier 900 on the first sub-loading mechanism 810.

In some embodiments, when the loading/unloading device 1100 is located on the side of the unloading mechanism 1000 away from the loading mechanism 800, the loading/unloading device 1100 removes the coated product from the carrier 900 on the second sub-unloading mechanism 1003 and transports the empty carrier 900 on the second sub-unloading mechanism 1003 to the first sub-loading mechanism 810.

In some embodiments, when the loading/unloading device 1100 is located on the side of the unloading mechanism 1000 away from the loading mechanism 800, the loading/unloading device 1100 removes the coated product from the carrier 900 on the second sub-unloading mechanism 1003 so that the loading/unloading device 1100 can place the uncoated product into the empty carrier 900 on the second sub-unloading mechanism 1003, and the traversing device 1200 moves the carrier 900 containing the uncoated product from the second sub-unloading mechanism 1003 to the first sub-loading mechanism 810.

The loading/unloading equipment 1100 may include a first robotic arm 1110 and a second robotic arm 1120. The first robotic arm 1110 and the second robotic arm 1120 may be simultaneously disposed on the side of the unloading mechanism 1000 away from the loading mechanism 800, or simultaneously disposed on the side of the loading mechanism 800 away from the unloading mechanism 1000. The first robotic arm 1110 and the second robotic arm 1120 may work together to place uncoated products into the carrier 900 on the first sub-loading mechanism 810, or to remove coated products from the carrier 900 on the second sub-unloading mechanism 1003, or to transport the empty carrier 900 on the second sub-unloading mechanism 1003 to the first sub-loading mechanism 810. The first robotic arm 1110 and the second robotic arm 1120 can also work separately. The first robotic arm 1110 places the uncoated product into the carrier 900 on the first sub-feeding mechanism 810, and the second robotic arm 1120 removes the coated product from the carrier 900 on the second sub-unloading mechanism 1003, and transports the empty carrier 900 on the second sub-unloading mechanism 1003 to the first sub-feeding mechanism 810. Alternatively, the second robotic arm 1120 places the uncoated product into the carrier 900 on the first sub-feeding mechanism 810, and the first robotic arm 1110 removes the coated product from the carrier 900 on the second sub-unloading mechanism 1003, and transports the empty carrier 900 on the second sub-unloading mechanism 1003 to the first sub-feeding mechanism 810.

In some embodiments, as shown in FIG6, the coating apparatus 10 further includes a first material tray buffer mechanism 1300 and a second material tray buffer mechanism 1400. The first material tray buffer mechanism 1300 and the second material tray buffer mechanism 1400 are stacked vertically. FIG6 shows a top view of the coating apparatus 10, due to the first material tray buffer mechanism... The first material box buffer mechanism 1300 and the second material box buffer mechanism 1400 are stacked vertically. Therefore, the first material box buffer mechanism 1300 is represented by a dashed box in Figure 6. That is, in the embodiment shown in Figure 6, the first material box buffer mechanism 1300 is located below the second material box buffer mechanism 1400. In other embodiments, the first material box buffer mechanism 1300 may also be located above the second material box buffer mechanism 1400.

The first material box buffer mechanism 1300 is disposed adjacent to the loading/unloading device 1100 and is configured to buffer material boxes containing uncoated products. The second material box buffer mechanism 1400 is disposed above or below the first material box buffer mechanism 1300 and is configured to buffer material boxes containing coated products or empty material boxes.

The loading/unloading equipment 1100 transports uncoated products from the boxes on the first material box buffer mechanism 1300 to the carrier 900 on the loading mechanism 800, or transports coated products from the carrier 900 on the unloading mechanism 1000 to the boxes on the second material box buffer mechanism 1400. The first material box buffer mechanism 1300 buffers uncoated products to prevent untimely loading, the second material box buffer mechanism 1400 buffers empty boxes for easy unloading, and the second material box buffer mechanism 1400 buffers and transports boxes containing coated products to achieve unloading, thus realizing automatic loading/unloading and improving production efficiency.

As shown in Figure 4, several rows, columns and layers of carriers 900 can be arranged side by side on the furnace door 200. Each carrier 900 holds several stacked products to increase the number of products that the furnace door 200 can carry, further improve the coating efficiency, and thus further increase the production capacity of the coating device 10.

In some embodiments, as shown in FIG1, the coating apparatus 10 further includes: a first purification chamber 1500, a second purification chamber 1600, a cooling device 1700, and a cleaning device 1800. The first purification chamber 1500 is configured to accommodate the loading and unloading mechanism 600 and the loading device 700, the second purification chamber 1600 is configured to accommodate a plurality of furnace door conveying mechanisms 350, the cooling device 1700 is disposed on the top of the first purification chamber 1500 and is configured to cool the first purification chamber 1500, and the cleaning device 1800 is disposed on the top of the first purification chamber 1500 and is configured to clean the furnace door 200 on the loading and unloading mechanism 600.

The cooling device 1700 includes a water-cooling mechanism and an air-cooling mechanism. When the furnace door 200, which is loaded with coated products, is conveyed to the loading and unloading mechanism 600 by the second furnace door buffer mechanism 500, the water-cooling mechanism and the air-cooling mechanism simultaneously cool the furnace door 200 and the products. Heat dissipation devices 2000 are installed at the top of the cavity 100, the first purification chamber 1500, and the second purification chamber 1600 to dissipate heat from these chambers.

The cleaning device 1800 includes a vacuuming and cleaning roller assembly for cleaning the oven door 200 carried by the loading and unloading mechanism 600. Exemplarily, the loading and unloading mechanism 600 raises and lowers the oven door 200, which is loaded with uncoated products, to a sixth preset position. The vacuuming and cleaning roller assembly is rolledly connected to the edge of the upper surface of the oven door 200 loaded with uncoated products, and the rolling of the vacuuming and cleaning roller assembly cleans the edge of the upper surface of the oven door 200 loaded with uncoated products.

The sixth preset position can be when the distance between the cleaning device 1800 and the ground is the fourth preset distance, and the loading and unloading mechanism 600 raises and lowers the furnace door 200 loaded with uncoated products to the position where the loading and unloading mechanism 600 is in contact with the cleaning device 1800. The sixth preset position and the fourth preset distance can be determined according to actual needs, and this disclosure does not make specific limitations.

The terms "an embodiment" or "an embodiment" used in the specification indicate that the described embodiment may include a specific feature, structure, or characteristic, but not every embodiment necessarily includes that specific feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Additionally, when describing a specific feature, structure, or characteristic in conjunction with an embodiment, such feature, structure, or characteristic may be implemented in conjunction with other embodiments, whether explicitly described or not. The characteristics are within the knowledge of those skilled in the art.

It should be understood that “on,” “above,” and “on top of” in this disclosure should be interpreted in the broadest manner, such that “on” means not only “directly on something” but also “on something” with an intermediate feature or layer therebetween, and that “above” or “on top of” means not only “on top of something” but also “on top of something” without an intermediate feature or layer therebetween (i.e., directly on something).

Furthermore, for ease of explanation, spatial relative terms such as "below," "below," "under," "above," and "above" may be used to describe the relationship of a component or feature relative to other components or features as shown in the figures. Spatial relative terms are intended to encompass different orientations of components in use or operation other than those shown in the figures. Devices may have other orientations (rotated 90 degrees or in other orientations), and the spatial relative descriptive terms used herein may be interpreted accordingly.

It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

The above description is merely a preferred embodiment of this disclosure and is not intended to limit this disclosure. Any modifications or equivalent substitutions made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.

Claims (10)

A coating apparatus, characterized in that it comprises: A cavity having a downward-facing furnace opening, the cavity being configured to coat a product; The furnace door is configured to carry the product and to cover the furnace opening; At least one furnace door conveying mechanism is configured to buffer and/or transport the furnace door loaded with the product; A furnace door closing mechanism, disposed below the furnace opening, is connected to each of the furnace door conveying mechanisms. It is configured to receive a furnace door loaded with uncoated products transported by at least one of the furnace door conveying mechanisms, raise the furnace door loaded with uncoated products to close the furnace door to the furnace opening, and lower the furnace door loaded with coated products to separate the furnace door from the furnace opening. It also docks with at least one of the furnace door conveying mechanisms to transfer the furnace door loaded with coated products. According to claim 1, the coating apparatus is characterized in that the number of furnace door conveying mechanisms is multiple, and the multiple furnace door conveying mechanisms are arranged at intervals along the vertical direction; When the furnace door closing mechanism is raised or lowered to different preset positions, the furnace door closing mechanism can be located on the same horizontal plane as the furnace door conveying mechanism located at different positions. The coating apparatus according to claim 2, characterized in that it further comprises: The loading and unloading mechanism is configured to carry the furnace door and carry the furnace door to lift, and is connected to different furnace door conveying mechanisms respectively; The loading and unloading equipment is configured to load the uncoated product onto the furnace door carried by the loading and unloading mechanism, or to unload the coated product from the furnace door carried by the loading and unloading mechanism. Specifically, when the loading and unloading mechanism is raised and lowered to different preset loading positions, the loading and unloading equipment loads the uncoated product onto the furnace door carried by the loading and unloading mechanism, and the loading and unloading mechanism transports the furnace door loaded with the uncoated product to different furnace door conveying mechanisms; when the loading and unloading mechanism is raised and lowered to different preset unloading positions, different furnace door conveying mechanisms transport the furnace door loaded with the coated product to the loading and unloading mechanism. The coating apparatus according to claim 3, wherein the loading and unloading equipment comprises: The mobile module assembly is located above the loading and unloading mechanism when the loading and unloading mechanism is located at the preset loading position. The mobile module assembly is configured to move along a first horizontal direction, a second horizontal direction, and a vertical direction, wherein the first horizontal direction is the same as the horizontal movement direction of the furnace door on the loading and unloading mechanism, and the second horizontal direction is perpendicular to the first horizontal direction. The gripper, connected to the mobile module assembly, moves with the mobile module assembly and is configured to grip or place the product. The coating apparatus according to claim 3, characterized in that it further comprises: A feeding mechanism, disposed adjacent to the loading and unloading mechanism, is configured to transport a carrier to a loading position so that the loading and unloading equipment can load the carrier from the loading position to the furnace door carried by the loading and unloading mechanism, the carrier being configured to hold the product; The feeding mechanism includes: The first sub-feeding mechanism is configured to transport the carrier to the tilting position; A flipping device, connected to the first sub-feeding mechanism, is configured to flip the carrier located at the flipping position; The second sub-feeding mechanism, connected to the tilting device, is configured to transport the tilted carrier to the loading position so that the loading and unloading equipment can load the carrier from the loading position to the furnace door carried by the loading and unloading mechanism. The coating apparatus according to claim 5 is characterized in that the carrier has a first support surface and a second support surface arranged at an angle; The flipping device includes: The first rotating shaft is horizontally positioned, and the extending direction of the first rotating shaft is perpendicular to the moving direction of the carrier on the first sub-loading mechanism. A first bearing plate is connected to the first rotating shaft and rotates under the drive of the first rotating shaft. It is configured to support the vehicle and can contact the first supporting surface of the vehicle. The second bearing plate is connected to the first rotating shaft and rotates under the drive of the first rotating shaft. It is configured to support the carrier and can contact the second support surface of the carrier. The second support plate is angled to the first support plate to form a receiving space, which is used to receive the vehicle so that during the rotation of the first shaft, the vehicle is switched from being supported by the first support plate to being supported by the second support plate. The coating apparatus according to claim 5, characterized in that it further comprises: The unloading mechanism is adjacent to the loading and unloading mechanism and is arranged side by side with the loading mechanism, so that the loading and unloading equipment can unload the carrier on the furnace door carried by the loading and unloading mechanism to the unloading mechanism. At least one loading/unloading device, located on the side of the unloading mechanism away from the loading mechanism or on the side of the loading mechanism away from the unloading mechanism, is configured to place the uncoated product into the carrier on the loading mechanism, or remove the coated product from the carrier on the unloading mechanism, or transport an empty carrier on the unloading mechanism to the loading mechanism. A traversing device, connecting the loading mechanism and the unloading mechanism, is configured to move the carrier on the unloading mechanism to the loading mechanism. The coating apparatus according to claim 7, characterized in that it further comprises: The first material box buffer mechanism is arranged adjacent to the loading and unloading equipment and is configured to buffer the material box containing the uncoated product; The second material box buffer mechanism is disposed above or below the first material box buffer mechanism and is configured to buffer the material box containing the coated product or the empty material box. The loading and unloading equipment transports the uncoated product in the material box on the first material box buffer mechanism to the carrier on the loading mechanism, or transports the coated product in the carrier on the unloading mechanism to the material box on the second material box buffer mechanism. The coating apparatus according to any one of claims 1 to 8 is characterized in that the cavity has a cubic shape and the horizontal cross-sectional shape of the furnace door has a rectangular shape; In the case where there are multiple coating devices, the multiple coating devices are arranged vertically and horizontally. Set in a single position and/or side by side. The coating apparatus according to any one of claims 3 to 7, characterized in that it further comprises: A first purification chamber is configured to house the loading and unloading mechanism and the loading equipment; The second purification chamber is configured to accommodate multiple furnace door conveying mechanisms; A cooling device is disposed at the top of the first purification chamber and is configured to cool the first purification chamber. A cleaning device, located at the top of the first purification chamber, is configured to clean the furnace door on the loading and unloading mechanism.