WO2025164402A1 - Plating composition and method for producing same - Google Patents
Plating composition and method for producing sameInfo
- Publication number
- WO2025164402A1 WO2025164402A1 PCT/JP2025/001558 JP2025001558W WO2025164402A1 WO 2025164402 A1 WO2025164402 A1 WO 2025164402A1 JP 2025001558 W JP2025001558 W JP 2025001558W WO 2025164402 A1 WO2025164402 A1 WO 2025164402A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- plating
- water
- plating composition
- metal
- concentrated liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
- C02F1/461—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B25/00—Obtaining tin
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B3/00—Extraction of metal compounds from ores or concentrates by wet processes
- C22B3/20—Treatment or purification of solutions, e.g. obtained by leaching
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/16—Regeneration of process solutions
- C25D21/18—Regeneration of process solutions of electrolytes
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/16—Regeneration of process solutions
- C25D21/22—Regeneration of process solutions by ion-exchange
Definitions
- the present invention relates to a plating composition and a method for producing the same.
- Japanese Patent Application Laid-Open No. 2003-213435 proposes a plating wastewater treatment system that consists of a wastewater storage tank for storing plating wastewater, an intermediate treatment device connected to the wastewater storage tank, a concentration and volume reduction device connected to the intermediate treatment device, and a recovery device for recovering concentrated fluid from the concentration and volume reduction device, and describes a method for concentrating plating wastewater under reduced pressure.
- One aspect of the present invention aims to provide a method for efficiently producing a plating composition by efficiently reducing highly oxidized metal ions in plating wastewater to less oxidized metal ions.
- a first aspect is a method for producing a plating composition, comprising: removing a portion of the water from the first plating composition containing first metal ions and water through a separation membrane to obtain a first concentrated solution; removing a portion of the water from the first concentrated solution in a low oxygen partial pressure environment to obtain a second concentrated solution; introducing the second concentrated solution into a working electrode chamber separated by a counter electrode chamber containing a counter electrode and at least one membrane selected from the group consisting of an ion exchange membrane, a reverse osmosis membrane, and a nanofiltration membrane and containing a working electrode, thereby reducing at least a portion of the first metal ions in the second concentrated solution to metal using the working electrode as the cathode; and oxidizing a metal of the same type as the reduced metal to a second metal ion having a lower oxidation number than the first metal ion using the working electrode as the anode to obtain a second plating composition containing the second metal ions and water.
- the second aspect is a plating composition produced by the plating composition production method.
- One aspect of the present invention provides a method for efficiently producing a plating composition by efficiently reducing highly oxidized metal ions in a plating wastewater solution to less oxidized metal ions.
- 1 is a flowchart showing an example of the order of steps in a method for producing a plating composition.
- 1A to 1C are schematic diagrams illustrating an example of a process for manufacturing an electronic component.
- the term "process” does not only refer to an independent process, but also includes processes that cannot be clearly distinguished from other processes, as long as the intended purpose of the process is achieved. Furthermore, when multiple substances corresponding to each component are present in the composition, the content of each component in the composition refers to the total amount of those multiple substances present in the composition, unless otherwise specified. Furthermore, the upper and lower limits of the numerical ranges described in this specification can be arbitrarily selected and combined from the numerical values exemplified as numerical ranges. Below, embodiments of the present invention are described in detail. However, the embodiments described below are merely examples of plating compositions and methods for producing the same that embody the technical concept of the present invention, and the present invention is not limited to the plating compositions and methods for producing the same shown below.
- a method for producing a plating composition includes a first concentration step of removing a portion of the water from a first plating composition containing first metal ions and water through a separation membrane to obtain a first concentrated solution, a second concentration step of removing a portion of the water from the first concentrated solution in a low-oxygen partial pressure environment to obtain a second concentrated solution, a first metal ion reduction step of introducing the second concentrated solution into a working electrode chamber separated by a counter electrode chamber containing a counter electrode and at least one diaphragm selected from the group consisting of an ion exchange membrane, a reverse osmosis membrane, and a nanofiltration membrane and containing a working electrode, and reducing at least a portion of the first metal ions in the second concentrated solution to metal using the working electrode as a cathode, and a second metal ion oxidation step of oxidizing a metal similar to the reduced metal to a second metal ion having a lower oxidation number than the first metal ion using the working
- the first metal ions can be reduced more efficiently by the metal. Furthermore, by removing water through a separation membrane, the first plating composition can be concentrated at high speed to obtain a first concentrated solution while suppressing oxidation of the metal ions. Furthermore, by removing water from the first concentrated solution in a low oxygen partial pressure environment, the oxidation of the low-oxidized metal ions contained in the first concentrated solution can be suppressed, while reducing the load on the reduction reaction in the first metal ion reduction step, allowing for more efficient production of the plating composition.
- the plating composition production method may also be a plating composition regeneration method that regenerates a plating composition (e.g., a second plating composition) that can be used in plating processing from a used plating composition or plating wastewater (e.g., a first plating composition).
- a plating composition e.g., a second plating composition
- plating wastewater e.g., a first plating composition
- FIG. 1 is a flowchart showing an example of the process sequence of the method for producing a plating composition.
- the method for producing a plating composition may include an impurity removal step S101, a first concentration step S102, a second concentration step S103, a first metal ion reduction step S104, and a second metal ion oxidation step S105, which are included as necessary.
- the impurity removal step S101 at least a portion of the impurities are removed from the first plating composition, which is the plating wastewater recovered from the plating tank or the water rinsing tank.
- first concentration step S102 a portion of the water is removed from the first plating composition after impurity removal through a separation membrane to obtain a first concentrated solution.
- second concentration step S103 a portion of the water is removed from the first concentrated solution in a low oxygen partial pressure environment to obtain a second concentrated solution.
- first metal ion reduction step S104 first metal ions (e.g., tin(IV) ions) with a high oxidation number (high oxidation state) contained in the second concentrated solution are reduced to a metal (e.g., metallic tin) using an electrochemical device.
- the electrochemical device is configured by separating a working electrode chamber containing a working electrode and a counter electrode chamber containing a counter electrode with a diaphragm.
- the first metal ions are reduced by introducing the second concentrated solution into the working electrode chamber and applying current to the working electrode as a cathode, resulting in metal deposition on the working electrode.
- the second metal ion oxidation step S105 current is applied to a metal of the same type as the metal deposited on the working electrode as an anode, resulting in oxidization of the metal to second metal ions (e.g., tin(II) ions) with a low oxidation number (low oxidation state) and dissolving them in the second concentrated solution in the working electrode chamber, resulting in a second plating composition usable for plating processing.
- second metal ions e.g., tin(II) ions
- second plating composition usable for plating processing.
- the first concentration step S102 and the second concentration step S103 are performed after the impurity removal step S101, but the impurity removal step S101 may be performed after the first concentration step S102 or the second concentration step S103, and then the first metal ion reduction step S104 may be performed. Also, the impurity removal step S101 may not be performed.
- the impurity removal step at least some of the impurities are removed from a first plating composition containing first metal ions and water.
- the plating composition from which at least some of the impurities have been removed is concentrated by removing some of the water, and the first metal ions are then electrochemically reduced using an electrochemical device including a counter electrode chamber and a working electrode chamber separated by a membrane, such as an ion exchange membrane, that is impermeable to the first metal ions.
- Removing at least some of the impurities contained in the first plating composition is thought to suppress inhibition of the reduction of the first metal ions due to interactions between the impurities and the cathode, thereby further improving the reduction efficiency of the first metal ions at the cathode. Furthermore, for example, it is thought that inhibition of reduction due to impurities adhering to or damaging the ion exchange membrane or the like is suppressed, thereby further improving the reduction efficiency of the first metal ions at the cathode. Furthermore, for example, it is thought that impurities clog or damage the separation membrane in the first concentration step, reducing the concentration efficiency. However, removing at least some of the impurities is thought to suppress this decrease in concentration efficiency.
- the first plating composition may be, for example, plating wastewater used in metal plating, or plating wastewater obtained by rinsing a metal-plated article with water.
- the first plating composition may contain impurities. Impurities refer to substances that may inhibit the reduction of the first metal ions in the first metal ion reduction step described below, substances that may inhibit concentration in the first concentration step described below, etc. Specific examples of impurities include additives such as surfactants, leveling agents, brighteners, and antioxidants, metal components other than the first metal ions, dust, precipitates, etc.
- the first plating composition may contain a surfactant as at least a portion of the impurities.
- the surfactant contained in the first plating composition may be any of a nonionic surfactant, a cationic surfactant, an anionic surfactant, an amphoteric surfactant, etc.
- the surfactant may also function as a brightener, leveler, etc. in the plating composition.
- the surfactant may contain at least one type selected from the group consisting of a nonionic surfactant, a cationic surfactant, and an amphoteric surfactant.
- the first plating composition may contain only one type of surfactant, or a combination of two or more types.
- Nonionic surfactants include, for example, ester surfactants in which a polyhydric alcohol such as glycerin, sorbitol, or sucrose is ester-bonded to a fatty acid; ether surfactants formed by adding ethylene oxide, propylene oxide, etc. to a compound having a hydroxyl group such as a higher alcohol or alkylphenol; and ester-ether surfactants formed by adding ethylene oxide, propylene oxide, etc. to an ester surfactant.
- ester surfactants in which a polyhydric alcohol such as glycerin, sorbitol, or sucrose is ester-bonded to a fatty acid
- ether surfactants formed by adding ethylene oxide, propylene oxide, etc. to a compound having a hydroxyl group such as a higher alcohol or alkylphenol
- ester-ether surfactants formed by adding ethylene oxide, propylene oxide, etc. to an ester surfactant.
- nonionic surfactants include polyethylene glycol, polypropylene glycol, polyoxyethylene octylphenol, polyoxyethylene ⁇ -naphthyl ether, polyoxyethylene alkylamine, polyoxyethylene alkyl ether, polyoxyethylene polyoxypropylene alkyl ether, glycerin fatty acid ester and its ethylene oxide adduct, sorbitan fatty acid ester, polyoxyethylene sorbitan fatty acid ester, fatty acid monoethanolamide and its ethylene oxide adduct, fatty acid N-methylmonoethanolamide and its ethylene oxide adduct, fatty acid diethanolamide and its ethylene oxide adduct, sucrose fatty acid ester, alkyl (poly)glycerin ether, polyglycerin fatty acid ester, polyethylene glycol fatty acid ester, fatty acid methyl ester ethoxylate, and N-long-chain alkyldimethylamine oxide.
- Nonionic surfactants may also have
- cationic surfactants include amine salts and quaternary ammonium salts.
- Specific examples of cationic surfactants include alkyl (or alkenyl) trimethyl ammonium salts, alkyl (or alkenyl) triethyl ammonium salts, dialkyl (or alkenyl) dimethyl ammonium salts, alkyl (or alkenyl) quaternary ammonium salts, mono- or dialkyl (or alkenyl) quaternary ammonium salts containing ether groups, ester groups, or amide groups, alkyl (or alkenyl) pyridinium salts, alkyl (or alkenyl) dimethyl benzyl ammonium salts, alkyl (or alkenyl) isoquinolinium salts, dialkyl (or alkenyl) morphonium salts, polyoxyethylene alkyl (or alkenyl) amines, alkyl (or alkenyl) amine salts
- Amphoteric surfactants exhibit the properties of anionic surfactants in the alkaline range and cationic surfactants in the acidic range.
- amphoteric surfactants include carboxylates and sulfonates, and may be either amino acid or betaine types.
- amphoteric surfactants include alkyldimethylaminoacetic acid betaine, alkyldimethylacetic acid betaine, alkyldimethylcarboxybetaine, alkyldimethylcarboxymethyleneammonium betaine, alkyldimethylammonioacetate, fatty acid amidopropyldimethylamino acid betaine, alkyloylamidopropyldimethylglycine, 2-alkyl-1-(2-hydroxyethyl)imidazolium-1-acetate, alkyldiaminoethylglycine, dialkyldiaminoethylglycine, and alkyldimethylamine oxide.
- Anionic surfactants include carboxylates, sulfonates, sulfates, and phosphates.
- the surfactant content in the first plating composition may be, for example, 0.01 g/L or more and 10 g/L or less, and preferably 0.1 g/L or more or 5 g/L or less.
- the surfactant content in the plating composition after the impurities have been removed in the impurity removal step may be, for example, 0.005 g/L or more.
- the surfactant content can be measured using surface tension as an index. Specifically, it can be measured using a drop meter, surface tensiometer, etc.
- the first metal ion contained in the first plating composition may be a metal ion in a more highly oxidized state than the second metal ion, or may be formed by the oxidation of the second metal ion constituting the plating composition prior to use.
- first metal ions include tin(IV) ions and iron(III) ions.
- the first metal ion contained in the first plating composition may be a simple metal ion or a complex ion.
- complexing agents that form complex ions include carboxylic acids including gluconic acid (including gluconolactone), citric acid, glutaric acid, succinic acid, malic acid, tartaric acid, lactic acid, and their salts or derivatives; phosphoric acids including tripolyphosphate, hydroxyethanediphosphonic acid, and their salts; sugars including sorbitol, mannitol, and their salts; amino acids including phenylalanine, glutamic acid, aspartic acid, alanine, glycine, and their salts; HEDTA, EDTA, etc.
- the complexing agent may contain at least one selected from the group consisting of these, and may contain at least gluconic acid.
- the complexing agents may be used alone or in combination of two or more.
- the pH of the plating composition used for plating can be set to a weakly acidic to weakly alkaline range, thereby suppressing corrosion of objects to be plated that are sensitive to strong acids or strong alkalis (for example, objects that use oxides as components, such as ceramic capacitors).
- the content of the first metal ion in the first plating composition may be, for example, 0.1 g/L or more and 100 g/L or less, and preferably 1 g/L or more.
- the content of the complexing agent in the plating composition may be, for example, equimolar to 20 times the molar amount of the first metal ion, and preferably 10 times the molar amount.
- the content of the first metal ion in the plating composition is measured, for example, using inductively coupled plasma atomic emission spectroscopy (ICP-AES) or oxidation-reduction titration with potassium iodate after reduction with iron powder.
- ICP-AES inductively coupled plasma atomic emission spectroscopy
- the first plating composition may contain a second metal ion in addition to the first metal ion.
- the second metal ion include tin(II) ions when the first metal ion is tin(IV) ions.
- specific examples of the second metal ion include iron(II) ions when the first metal ion is iron(III) ions.
- the second metal ion may be a simple metal ion or a complex ion.
- the complexing agent that forms the complex ion is the same as for the first metal ion.
- the content of the second metal ion contained in the first plating composition may be, for example, 100 g/L or less, and preferably 20 g/L or less.
- the content of the second metal ion contained in the plating composition is measured in the same manner as for the first metal ion.
- the second metal ion that constitutes the plating composition before use may be derived from a water-soluble metal salt.
- water-soluble metal salts include sulfates, chlorides, boron fluorides, alkanesulfonates, alkanolsulfonates, and aromatic sulfonates.
- the composition may contain at least one selected from the group consisting of these, and may contain at least an alkane sulfonate.
- alkane sulfonic acids in alkane sulfonates include alkanesulfonic acids having 1 to 3 carbon atoms, such as methanesulfonic acid, ethanesulfonic acid, propanesulfonic acid, and 2-propanesulfonic acid.
- the first plating composition may further contain alkali metal ions, ammonium ions, etc.
- alkali metal ions, ammonium ions, etc. increases conductivity, suppresses heat generation due to solution resistance during electroplating, and tends to improve electrodeposition uniformity.
- alkali metal ions include lithium ions, sodium ions, potassium ions, rubidium, and cesium.
- Alkali metal ions, ammonium ions, etc. may be added to the first plating composition, for example, as a salt with an acid component. The inclusion of an acid component in the first plating composition, for example, further improves the stability of the first plating composition.
- acid components include sulfuric acid, hydrochloric acid, alkanesulfonic acid, alkanolsulfonic acid, aromatic sulfonic acid, phosphoric acid, alkylcarboxylic acid, and arylcarboxylic acid, and the first plating composition may contain at least one selected from the group consisting of these. These acids may be used alone or in combination of two or more.
- the pH of the first plating composition may be, for example, 1 or more and 13 or less, preferably 3 or more or 4 or more, and preferably 11 or less or 9 or less. When the pH of the first plating composition is within this range, the first metal ions tend to be reduced more efficiently.
- the pH of the first plating composition may be adjusted to the desired range, for example, with a pH adjuster. Examples of pH adjusters include alkali metal hydroxides, ammonia, etc. in addition to the acid components described above.
- the first plating composition may further contain an antioxidant.
- an antioxidant can, for example, improve the stability of the first plating composition and extend the bath life.
- antioxidants include hydroquinone, ascorbic acid, catechol, hypophosphorous acid, and erythorbic acid.
- the content of the antioxidant in the first plating composition may be, for example, 0.01 g/L or more and 20 g/L or less, and preferably 0.1 g/L or more or 5 g/L or less.
- the impurity removal step may include removing at least a portion of the antioxidant.
- the antioxidant may be removed by activated carbon treatment.
- the first plating composition contains water as a solvent.
- the total concentration of solutes in the first plating composition may be, for example, 150 g/L or less, preferably 100 g/L or less, or 80 g/L or less.
- the total concentration of solutes in the first plating composition may be, for example, 1 g/L or more.
- Methods for removing impurities in the impurity removal step include, for example, thread-wound filter treatment, activated carbon treatment, microfiltration treatment, ultrafiltration treatment, and gel filtration treatment.
- the method for removing impurities in the impurity removal step may preferably include activated carbon treatment.
- a method for removing impurities using activated carbon treatment may, for example, include contacting the plating composition with activated carbon. By using activated carbon, at least a portion of the impurities can be more efficiently removed from the first plating composition.
- a method for electrostatically adsorbing impurities for example, a method for contacting with an ion exchange resin
- activated carbon treatment for example, a method for contacting with an ion exchange resin
- Activated carbon is a porous material whose main component is carbon and which has been subjected to a chemical or physical activation process.
- the activated carbon used in activated carbon treatment may be chemically activated or gas activated.
- Activated carbon may also be powdered activated carbon, granular activated carbon, or a combination of these.
- the specific surface area of the activated carbon may be, for example, 200 m 2 /g or more and 1500 m 2 /g or less, preferably 300 m 2 /g or more or 700 m 2 /g or less.
- the specific surface area is measured based on the BET (Brunauer Emmett Teller) theory using nitrogen gas after pretreatment at 200°C for 6 hours.
- the average pore diameter of the activated carbon may be, for example, 1.5 nm or more and 3.5 nm or less, preferably 2.0 nm or more and 3.0 nm or less.
- the mesopore shape of the activated carbon may be, for example, such that the average pore width on the adsorption side measured by the INNES method is, for example, 2 nm or more and 30 nm or less, preferably 4 nm or more and 10 nm or less.
- the average pore width on the desorption side measured by the INNES method may be, for example, 2 nm or more and 5 nm or less, preferably 2 nm or more and 3.5 nm or less.
- the amount of activated carbon used for contact with the first plating composition may be selected appropriately depending on the type of activated carbon.
- the amount of activated carbon used should be an amount that is sufficient to remove at least a portion of the impurities (e.g., surfactants) contained in the first plating composition, and is preferably an amount sufficient to remove 50% by mass or more, 70% by mass or more, or 90% by mass or more of the surfactants.
- the amount of activated carbon used may also be selected depending on the method of contact with the first plating composition. For example, when contacting in a single pass, a larger amount of activated carbon may be required than when contacting by circulating the first plating composition.
- the first plating composition may be brought into contact with the activated carbon by, for example, mixing the first plating composition with the activated carbon followed by solid-liquid separation, or by passing the plating composition through activated carbon held in a filter, cartridge, or the like.
- the contact temperature between the first plating composition and the activated carbon may be, for example, 0°C or higher or 70°C or lower.
- a first concentrated solution is obtained by removing a portion of the water from a first plating composition containing first metal ions and water through a separation membrane.
- a separation membrane may be a filtration membrane that can preferentially separate water from the first plating composition, and is preferably a filtration membrane that can selectively separate water.
- the separation membrane may be a filtration membrane known as a reverse osmosis membrane.
- a reverse osmosis membrane (hereinafter also referred to as an RO membrane) is a type of filtration membrane that allows water molecules to pass through while blocking substances other than water molecules, such as ions.
- a reverse osmosis membrane separates a solution A with a high salt concentration (e.g., a first plating composition) from a solution B with a low salt concentration (e.g., water).
- a pressure greater than the difference in osmotic pressure between solutions A and B is applied to the side of solution A with a high salt concentration, only water molecules move from solution A to solution B. This removes a portion of the water from the first plating composition to obtain a first concentrated solution, and water can be obtained as reverse osmosis membrane-treated water.
- Examples of materials for the separation membrane include polyamide, polysulfone, and cellulose acetate, and preferably polyamides including aromatic polyamides or crosslinked aromatic polyamides.
- a separation membrane for example, a tubular module or a spiral module equipped with a separation membrane can be used.
- the liquid feed pressure when concentrating the first plating composition using a separation membrane may be selected appropriately depending on the type of separation membrane used.
- the liquid feed pressure during concentration may be, for example, 0.1 MPa or more, and preferably 0.5 MPa or more, 1 MPa or more, or 2 MPa or more.
- the liquid feed pressure may be, for example, 10 MPa or less.
- the temperature during concentration may be, for example, 0°C or more and 50°C or less, and preferably 10°C or more and 40°C or less.
- the first plating composition subjected to concentration using a separation membrane may be the first plating composition from which at least some of the impurities have been removed in the impurity removal step, or it may be the first plating composition from which the impurities have not been removed. Preferably, it may be the first plating composition from which at least some of the impurities have been removed in the impurity removal step.
- the ratio of the volume of the first plating composition to the volume of the first concentrated solution from which some of the water has been removed via the separation membrane may be, for example, 2 or more, and preferably 3 or more.
- a portion of the water is removed from the first concentrate in a low-oxygen partial pressure environment to obtain a second concentrate.
- a second concentrate from which a portion of the water has been further removed can be obtained while effectively suppressing oxidation of metal ions contained in the first concentrate.
- the low oxygen partial pressure environment in the second concentration step is an environment in which the oxygen partial pressure is lower than that of the atmosphere, and can be achieved by replacing the atmosphere with an inert gas, reducing the pressure, etc.
- the oxygen partial pressure in the low oxygen partial pressure environment may be, for example, 10 kPa or less, and preferably 2 kPa or less, or 1 kPa or less.
- the low oxygen partial pressure environment in the second concentration step can be achieved as an inert gas atmosphere by replacing the atmosphere with an inert gas.
- inert gases in the inert gas atmosphere include rare gases such as argon, and nitrogen gas.
- the concentration of the inert gas in the inert gas atmosphere may be, for example, 80% by volume or more, and preferably 90% by volume or more, 95% by volume or more, 98% by volume or more, or 99% by volume or more.
- the pressure in the inert gas atmosphere may be normal pressure or may be reduced below atmospheric pressure. An inert gas atmosphere under reduced pressure may be reduced after replacement with an inert gas, or an inert gas atmosphere may be created by supplying an inert gas when adjusting the degree of vacuum.
- the low oxygen partial pressure environment in the second concentration step may be a low-pressure environment.
- a low-pressure environment may be an environment under reduced pressure lower than atmospheric pressure.
- the air pressure in a low-pressure environment may be, for example, 50 hPa or less, and preferably 10 hPa or less, or 1 hPa or less.
- the second concentration step may be a step of removing a portion of the water from the first concentrated liquid in a low oxygen partial pressure environment to obtain a second concentrated liquid.
- the low oxygen partial pressure environment may be, for example, an oxygen partial pressure of 10 kPa or an oxygen concentration of 10% by volume or less, and preferably an oxygen partial pressure of 2 kPa or less or an oxygen concentration of 2% by volume or less, or an oxygen partial pressure of 1 kPa or less or an oxygen concentration of 1% by volume or less.
- Methods for removing water in the second concentration step include a first concentration method in which a portion of the water is removed from the first concentrated liquid under reduced pressure, a second concentration method in which the first concentrated liquid is frozen and then a portion of the water is removed from the frozen first concentrated liquid under reduced pressure, and a third concentration method in which a mist containing water is generated from the first concentrated liquid under an inert gas atmosphere or reduced pressure and at least a portion of the generated mist is removed.
- the first concentration method a portion of the water is removed from the first concentrated liquid under reduced pressure.
- the degree of vacuum in the first concentration method can be, for example, 500 hPa or less, preferably 200 hPa or less, or 100 hPa or less.
- the degree of vacuum can also be, for example, 1 hPa or more, or 100 hPa or more.
- a portion of the water can be removed while the first concentrated liquid is heated under reduced pressure.
- the temperature can be, for example, 30°C or more and 80°C or less, preferably 35°C or more or 38°C or more, and preferably 70°C or less or 60°C or less.
- the first concentrated liquid can also be stirred.
- the stirring method can be appropriately selected from commonly used stirring methods.
- stirring methods include a method of rotating a container containing the first concentrated liquid to stir, a method of stirring the first concentrated liquid in a container using a rotor or the like, and a method of pouring the first concentrated liquid into a container while spraying it.
- some of the water can be removed under an inert gas atmosphere by replacing the atmosphere inside the container with an inert gas before reducing the pressure.
- the second concentration method includes freezing the first concentrated liquid and removing a portion of the water from the frozen first concentrated liquid under reduced pressure.
- the first concentrated liquid can be frozen by lowering the liquid temperature to, for example, -15°C or below, preferably -25°C or below. It is preferable to replace the atmosphere inside the container with an inert gas before freezing.
- the container containing the frozen first concentrated liquid is depressurized, and a portion of the water contained in the first concentrated liquid is removed by freeze-drying, which sublimes the solid state.
- the degree of vacuum in the second concentration method may be, for example, 10 hPa or below, preferably 1 hPa or below.
- the second concentration method can be performed using, for example, a freeze dryer.
- the second concentration method allows water to be removed at low temperatures under highly reduced pressure, thereby more effectively suppressing the oxidation of metal ions.
- the container can be purged with an inert gas before depressurizing, thereby removing a portion of the water under an inert gas atmosphere.
- the third concentration method involves generating a mist containing water from the first concentrated liquid (hereinafter also referred to as "atomization") and removing at least a portion of the generated mist.
- One method for generating a mist containing water from the first concentrated liquid is ultrasonic atomization, in which ultrasonic vibrations are applied to the first concentrated liquid.
- Ultrasonic atomization is a phenomenon in which, when ultrasonic vibrations are applied to a liquid, the vibrations create a fountain-like liquid column on the liquid surface, and fine droplets (mist), mainly measuring a few microns, are generated from the sides of the liquid column.
- the third concentration method can be performed, for example, using an atomization separation device (e.g., manufactured by NanoMist Technologies, Inc.).
- a portion of the water can be removed from the first concentrated liquid as follows. Ultrasonic vibrations are applied to the first concentrated liquid to generate a mist consisting of water clusters and a mist containing water and other components contained in the first concentrated liquid.
- a classification device such as a cyclone is used to separate the generated mist, with the "light mist” consisting of water clusters rising and the "heavy mist” containing components other than water falling.
- the light mist, consisting of water is liquefied by condensation through cooling or other means and removed from the first concentrated liquid. Meanwhile, the heavy mist is allowed to fall under its own weight and be liquefied, allowing it to be recovered.
- the third concentration method ultrasonic atomization is performed in an inert gas atmosphere, and an inert gas is used in the airflow used in the cyclone, thereby removing a portion of the water in an inert gas atmosphere. According to the third concentration method, a portion of the water can be removed in an inert gas atmosphere without heating the first concentrated liquid, thereby more effectively suppressing the oxidation of metal ions.
- ultrasonic atomization may be performed while heating the first concentrated liquid.
- the liquid temperature of the first concentrated liquid may be, for example, 20°C or higher and 80°C or lower, preferably 20°C or higher or 30°C or higher, and preferably 70°C or lower.
- the total concentration of solutes in the second concentrated liquid obtained by removing a portion of the water from the first concentrated liquid may be, for example, 30 g/L or more, and preferably 50 g/L or more, or 80 g/L or more.
- the total concentration of solutes in the second concentrated liquid may be, for example, 500 g/L or less.
- the ratio of the volume of the first concentrated liquid to the volume of the second concentrated liquid may be, for example, 2 or more and 20 or less, and preferably 3 or more, or 10 or less.
- Examples of materials for the working electrode provided in the working electrode chamber include gold, platinum, platinum-coated titanium, silver, nickel, graphite, tin, titanium, iridium oxide, and ruthenium oxide.
- Examples of materials for the counter electrode include platinum, platinum-coated titanium, gold, nickel, iridium oxide, ruthenium oxide, titanium, graphite, and palladium.
- the working electrode chamber and the counter electrode chamber are separated, for example, by an ion exchange membrane. This allows for more efficient reduction of the first metal ion.
- the ion exchange membrane may be a cation exchange membrane, an anion exchange membrane, or a combination of both.
- the ion exchange membrane can be appropriately selected from commercially available ion exchange membranes.
- the ion exchange membrane may include at least a cation exchange membrane from the perspective of the reduction efficiency of the first metal ion.
- the cation exchange membrane may include a fluororesin copolymer based on sulfonated tetrafluoroethylene.
- a membrane that is difficult for the first metal ions to pass through such as a reverse osmosis membrane (RO membrane) or a nanofiltration membrane (NF membrane, loose RO membrane, may be used.
- RO membrane reverse osmosis membrane
- NF membrane nanofiltration membrane
- the conductive ion-containing aqueous solution may contain at least water and a water-soluble metal salt.
- the water-soluble metal salt may contain metal ions such as alkali metal ions and alkaline earth metal ions.
- the water-soluble metal salt may also contain anions such as sulfate ions, nitrate ions, and phosphate ions.
- the first metal ion reduction step at least a portion of the first metal ions in the second concentrate introduced into the working electrode chamber are reduced to elemental metals by a first electrolysis process using the working electrode as a cathode.
- the elemental metals produced by the reduction may be deposited on the working electrode, for example.
- the current density in the electrolysis of the first metal ions may be appropriately selected depending on the type of first metal ions.
- the current density may be, for example, 0.05 A/dm2 or more and 10 A/dm2 or less, and preferably 0.1 A/ dm2 or more or 5 A/dm2 or less .
- the temperature in the electrolysis may be, for example, 20°C or more and 80°C or less, and preferably 30°C or more or 75°C or less.
- the time required for the electrolysis may be, for example, 10 minutes to 200 hours.
- a metal of the same type as the metal produced by reduction in the first metal ion reduction step is oxidized to second metal ions by a second electrolysis process using the working electrode as the anode.
- a metal of the same type as the metal deposited on the working electrode in the first metal ion reduction step may be oxidized to second metal ions by electrolysis using the working electrode as the anode.
- the second metal ion oxidation step may be performed using the same electrochemical device subsequent to the reduction of the first metal ions in the first metal ion reduction step. That is, the metal deposited on the working electrode in the first metal ion reduction step may be oxidized to second metal ions by electrolysis using the working electrode as the anode.
- the current density in the electrolysis of a metal may be appropriately selected depending on the type of metal.
- the current density may be, for example, 0.5 A/dm2 or more and 100 A/dm2 or less .
- the temperature in the electrolysis of a metal may be, for example, 10°C or more and 80°C or less, preferably 15°C or more or 75°C or less.
- the time required for the electrolysis may be, for example, 0.2 hours or more and 10 hours or less.
- the method for producing a plating composition may further include a step of adding a surfactant to the second plating composition obtained in the second metal ion oxidation step.
- a surfactant added may be the same type as the surfactant removed in the impurity removal step.
- the amount of surfactant added may be approximately the same as the amount of surfactant removed in the impurity removal step.
- the method for producing a plating composition according to this embodiment may be used in combination with a plating method or a method for producing electronic components that includes a plating step.
- a plating method or a method for producing electronic components that includes a plating step.
- the plating method includes a plating composition production step and a plating step of contacting an object to be plated with a plating solution containing at least a portion of the plating composition obtained in the production step to form a plating layer on the surface of the object to be plated.
- the plating composition production step is the same as the plating composition production method described above.
- a plating solution is brought into contact with the object to be plated to form a plating layer on the surface of the object to be plated.
- the plating layer may be, for example, a tin plating layer.
- the plating process may be electrolytic plating or electroless plating, preferably electrolytic plating.
- the plating solution may be a commonly used tin plating solution, except that it contains at least a portion of the plating composition produced in the manufacturing process.
- the plating solution may be composed of, for example, tin (II) ions, a surfactant, a complexing agent, etc. In addition to the plating composition produced, the plating solution may further contain surfactants, etc. that may be removed in the manufacturing process, as needed.
- the thickness of the plating layer formed in the plating process is not particularly limited and may be selected appropriately depending on the purpose, etc.
- the thickness of the plating layer may be, for example, 0.01 ⁇ m or more and 100 ⁇ m or less, preferably 0.1 ⁇ m or more and 50 ⁇ m or less, more preferably 0.3 ⁇ m or more and 10 ⁇ m or less, for example, 0.3 ⁇ m or more and 3 ⁇ m or less, or 1 ⁇ m or more and 5 ⁇ m or less.
- the plating process can be carried out using known plating methods, such as barrel plating, centrifugal plating, and rack plating.
- the method for manufacturing electronic components includes a step of manufacturing a plating composition, and a step of contacting a substrate having a conductive layer on its surface with a plating solution containing at least a portion of the plating composition obtained in the manufacturing step, to form an electrode layer including a plating layer on the surface of the conductive layer.
- the manufacturing step of the plating composition is the same as in the manufacturing method of the plating composition described above.
- a plating solution is brought into contact with an element having a conductive layer on its surface to form an electrode layer including a plating layer.
- the plating method in the electrode formation process may be electrolytic plating or electroless plating, and preferably electrolytic plating.
- the plating solution may be a commonly used plating solution, except that it contains at least a portion of the plating composition obtained in the plating composition production process.
- the plating solution may be composed of, for example, tin (II) ions, a surfactant, a complexing agent, etc.
- the plating solution may further contain, as necessary, surfactants and the like that may be removed in the production process.
- the element body subjected to the electrode formation process may be the component body of an electronic component.
- the component body is not particularly limited, and may be, for example, a multilayer ceramic capacitor, an inductor, a resistor, an LC composite component, a thermistor, etc.
- the component body may be a multilayer ceramic capacitor.
- the component body may be constructed using a method commonly used depending on the type of component body.
- the material of the component body is not particularly limited, and may be a material commonly used depending on the type of component body. Examples of materials include ceramic, resin, metal, and composites of these. In one embodiment, the material of the component body may be ceramic.
- the thickness of the plating layer included in the electrode layer formed in the electrode formation process is not particularly limited and may be selected appropriately depending on the purpose, etc.
- the thickness of the electrode layer may be, for example, 0.01 ⁇ m or more and 100 ⁇ m or less, preferably 0.1 ⁇ m or more and 50 ⁇ m or less, more preferably 0.3 ⁇ m or more and 10 ⁇ m or less, for example, 0.3 ⁇ m or more and 3 ⁇ m or less, or 1 ⁇ m or more and 5 ⁇ m or less.
- the electrode formation process can be performed using known plating methods, such as barrel plating, centrifugal plating, and rack plating.
- FIG. 2 is a schematic diagram showing part of the steps of a method for manufacturing electronic components, which is one aspect of this embodiment.
- element bodies having a conductive layer on their surface are introduced into a tin plating tank 10 using an introduction means 12, and an electrode layer including a tin plating layer is formed on the conductive layer of the element body introduced into the tin plating tank 10.
- the element bodies with the electrode layer formed thereon are pumped out of the tin plating tank by an extraction means 14 into a water rinsing tank 20 using a pump.
- the water rinsing tank 20 may be, for example, a countercurrent multi-stage water rinsing tank.
- the element bodies are pumped downstream of the countercurrent multi-stage water rinsing tank and move upstream.
- the element bodies with the electrode layer formed thereon are separated from the countercurrent multi-stage water rinsing tank in the most upstream tank by a separation means 24.
- the element bodies with the separated electrode layer formed thereon are subjected to a drying process.
- water is supplied from the upstream side by a water supply means 22, and the rinsing water moves downstream.
- the rinsing water (first plating composition) 26 extracted from the most downstream tank is introduced into the plating composition manufacturing apparatus 30.
- At least some impurities are removed from the tin-containing wash water using an impurity removal means 32 that uses activated carbon.
- a first concentrator 36 using a separation membrane removes some of the water from the wash water, yielding a first concentrated solution.
- the water 36a removed from the wash water is supplied to the wash tank 20 as reclaimed water 26.
- the first concentrated solution, from which some of the water has been removed via the separation membrane is further removed by a second concentrator 37 in a low-oxygen partial pressure environment, yielding a second concentrated solution.
- the water 37a removed from the second concentrated solution is supplied to the wash tank 20 as reclaimed water 26, along with the water 36a removed from the wash water.
- the second concentrated solution is introduced into an electrochemical device 34 that includes a working electrode chamber and a counter electrode chamber separated by a membrane.
- the second concentrated solution may contain tin(IV) ions as the first metal ions and may further contain tin(II) ions as the second metal ions.
- the electrochemical device 34 at least a portion of the tin(IV) ions in the rinse water are reduced to metallic tin using the working electrode as the cathode. If the second concentrate contains tin(II) ions, at least a portion of the tin(II) ions in the second concentrate may be reduced to metallic tin using the working electrode as the cathode.
- a portion of the reduced metallic tin or the tin substrate is oxidized to tin(II) ions using the working electrode as the anode to produce a second plating composition 38 that can be reused in plating processes.
- the produced second plating composition 36 is optionally supplemented with additives such as surfactants and introduced into the tin plating tank 10 for reuse.
- tin-containing rinse water that would previously have been discarded can be reused as a regenerated plating composition, contributing to waste reduction.
- a method for producing a plating composition comprising: removing at least a portion of impurities from a first plating composition containing first metal ions and water; removing a portion of the water from the first plating composition through a separation membrane to obtain a first concentrated solution; removing a portion of the water from the first concentrated solution in a low oxygen partial pressure environment to obtain a second concentrated solution; introducing the second concentrated solution into a working electrode chamber separated by a counter electrode chamber having a counter electrode and at least one membrane selected from the group consisting of an ion exchange membrane, a reverse osmosis membrane, and a nanofiltration membrane and having a working electrode, and reducing at least a portion of the first metal ions in the second concentrated solution to metal using the working electrode as a cathode; and oxidizing a metal similar to the reduced metal to a second metal ion having a lower oxidation number than the first metal ion using the working electrode as
- a manufacturing method according to any one of [1] to [4], wherein obtaining the second concentrated liquid includes generating a mist containing water from the first concentrated liquid and removing at least a portion of the generated mist.
- Plating Composition having the composition shown below was prepared using purified water, potassium stannate (IV) as a tin (IV) ion source, tin (II) methanesulfonate as a tin (II) ion source, gluconic acid, a cationic surfactant containing decyltrimethylammonium chloride, hydroquinone, and sodium methanesulfonate.
- Tin (IV) ion 0.16 mol/L Tin (II) ion: 0.04 mol/L
- Gluconic acid 0.8 mol/L Methanesulfonic acid: 1.2 mol/L
- Surfactant 1 g/L Hydroquinone: 1g/L Sodium ion: 1.4 mol/L
- Example 1 The plating composition prepared above was diluted 30 times with purified water to prepare a first plating composition, which was then passed through an activated carbon filter (FCC-S, manufactured by Nippon Filter Co., Ltd.) at a feed pressure of 0.1 MPa to remove the surfactant and obtain a filtered solution.
- the filtered solution was then passed through a reverse osmosis membrane (RO membrane; DRA991C, manufactured by Daisen Membrane Systems Co., Ltd.) at a feed pressure of 2 MPa to remove a portion of the water and concentrate the solution, thereby obtaining a first concentrated solution concentrated to a concentration of approximately 1/5 of the target concentration.
- RO membrane reverse osmosis membrane
- the resulting first concentrated solution was then purged with nitrogen gas and then concentrated using a rotary evaporator (N-2110, manufactured by Tokyo Rikakikai Co., Ltd.) under a nitrogen atmosphere at 100 hPa, 60°C, and 60 rpm to obtain a second concentrated solution with component concentrations equal to those of the prepared plating composition.
- a rotary evaporator N-2110, manufactured by Tokyo Rikakikai Co., Ltd.
- Metallic tin was reductively deposited from the second concentrated solution as follows.
- An electrochemical device was prepared, equipped with a Pt plate as the working electrode and a Pt/Ti mesh plate as the counter electrode, with the working electrode chamber and the counter electrode chamber separated by a cation exchange membrane (Nafion TM 424).
- the second concentrated solution was introduced into the working electrode chamber of the electrochemical device, and a methanesulfonic acid solution was introduced into the counter electrode chamber.
- a reduction reaction of tin ions was carried out at a current density of 1 A/ dm2 , with the working electrode as the cathode and the counter electrode as the anode.
- the solution temperature was kept at 65°C or lower.
- an oxidation reaction of the deposited metallic tin was carried out at a current density of 1 A/ dm2 , with the working electrode as the anode and the counter electrode as the cathode, to obtain a second plating composition.
- Comparative Example 1 A second concentrated liquid was obtained in the same manner as in Example 1, except that the first concentrated liquid was concentrated in the air.
- Example 1 The tin(II) ion concentrations of the second concentrated solutions obtained in Example 1 and Comparative Example 1 were evaluated as follows. The results are shown in Table 1.
- the first plating composition before concentration was designated Reference Example 0, a sample that was left for 8 hours at room temperature (27°C) in a nitrogen atmosphere without being concentrated using a rotary evaporator was designated Reference Example 1, and a sample that was left for 8 hours at room temperature (27°C) in an air atmosphere without being concentrated using a rotary evaporator was designated Reference Example 2.
- Table 1 shows the relative concentrations, with the tin(II) ion concentration in Reference Example 0 set to 100%.
- the concentrations of tin(IV) ions and tin(II) ions were evaluated using a combination of redox titration and inductively coupled plasma atomic emission spectroscopy (ICP-AES). Specifically, the redox titration was performed using starch as an indicator in 2M hydrochloric acid with an iodine standard solution to calculate the concentration of tin(II) ions. Additionally, the total concentration of tin ions was calculated using ICP-AES, and the concentration of tin(IV) ions was calculated by subtracting the concentration of tin(II) ions.
- ICP-AES inductively coupled plasma atomic emission spectroscopy
- Table 1 shows that concentrating under a nitrogen atmosphere suppresses the oxidation of tin(II) ions.
- Example 2 Instead of concentration using a rotary evaporator, a freeze dryer (freeze dryer FDU-1110 manufactured by Tokyo Rikakikai Co., Ltd.) was used to carry out concentration as follows: 1500 mL of the first concentrate was placed in a container, frozen in a freezer set to -30°C, and set in the freeze dryer. The freeze dryer was set to -40°C and the degree of vacuum was 10 Pa. The atmosphere inside the device was replaced with nitrogen before reducing the pressure. After processing in the freeze dryer for about one day, the concentrate was concentrated to 300 mL.
- a freeze dryer freeze dryer FDU-1110 manufactured by Tokyo Rikakikai Co., Ltd.
- the tin(II) ion concentration in the second concentrate after concentration by freeze-drying was five times that of the first concentrate before concentration. Considering the concentration ratio, it is believed that there was no oxidation of tin(II) ions during freeze-drying.
- Example 3 Instead of concentration using a rotary evaporator, concentration was carried out using an atomization separation device (NanoMist Technologies Inc., USA-L5 atomization separation device) that removes water by misting using ultrasonic vibrations, as follows. 1500 mL of the first concentrated liquid was placed in a container connected to the device. The inside of the device was purged with nitrogen gas to replace the nitrogen atmosphere. The bath was heated to a liquid temperature of 60°C, and the liquid was concentrated to 300 mL by treating for approximately 8 hours.
- an atomization separation device NanoMist Technologies Inc., USA-L5 atomization separation device
- the tin (II) ion concentration in the second concentrate after concentration using the atomization separation device was five times that of the first concentrate before concentration. Considering the concentration ratio, it is believed that there was no oxidation of tin (II) ions in the atomization separation device.
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Abstract
Description
本発明は、めっき組成物およびその製造方法に関する。 The present invention relates to a plating composition and a method for producing the same.
金属めっきに用いられるめっき組成物に関連して、特開2003-213435号公報には、めっき排液を貯留する排液貯留槽と、排液貯留槽に接続した中間処理装置と、中間処理装置に接続した濃縮減容化装置と、濃縮減容化装置の濃縮流体を回収する回収装置と、で構成されるめっき排液の処理システムが提案され、減圧下においてめっき排液を濃縮する方法が記載されている。 In relation to plating compositions used in metal plating, Japanese Patent Application Laid-Open No. 2003-213435 proposes a plating wastewater treatment system that consists of a wastewater storage tank for storing plating wastewater, an intermediate treatment device connected to the wastewater storage tank, a concentration and volume reduction device connected to the intermediate treatment device, and a recovery device for recovering concentrated fluid from the concentration and volume reduction device, and describes a method for concentrating plating wastewater under reduced pressure.
しかしながら、特開2003-213435号公報に記載の発明では、めっき排液を濃縮・減容化できるものの、めっき排液自体の排出を防ぐことはできない。本発明の一態様は、めっき排液中の高酸化状態の金属イオンを低酸化状態の金属イオンに効率的に還元することで、めっき組成物を効率的に製造する方法を提供することを目的とする。 However, while the invention described in JP 2003-213435 A can concentrate and reduce the volume of plating wastewater, it cannot prevent the plating wastewater itself from being discharged. One aspect of the present invention aims to provide a method for efficiently producing a plating composition by efficiently reducing highly oxidized metal ions in plating wastewater to less oxidized metal ions.
第1態様は、第1金属イオンと水とを含む前記第1めっき組成物から、分離膜を介して前記水の一部を除去して第1濃縮液を得ることと、前記第1濃縮液から、低酸素分圧環境下で前記水の一部を除去して第2濃縮液を得ることと、対向電極を備える対向電極室とイオン交換膜、逆浸透膜及びナノろ過膜からなる群から選択される少なくとも1種の膜で隔離され、作用電極を備える作用電極室に、前記第2濃縮液を導入し、前記第2濃縮液中の前記第1金属イオンの少なくとも一部を、前記作用電極をカソードとして金属に還元することと、前記還元された金属と同種の金属を、前記作用電極をアノードとして、前記第1金属イオンよりも酸化数の低い第2金属イオンに酸化して、前記第2金属イオンと水とを含む第2めっき組成物を得ることと、を含むめっき組成物の製造方法である。 A first aspect is a method for producing a plating composition, comprising: removing a portion of the water from the first plating composition containing first metal ions and water through a separation membrane to obtain a first concentrated solution; removing a portion of the water from the first concentrated solution in a low oxygen partial pressure environment to obtain a second concentrated solution; introducing the second concentrated solution into a working electrode chamber separated by a counter electrode chamber containing a counter electrode and at least one membrane selected from the group consisting of an ion exchange membrane, a reverse osmosis membrane, and a nanofiltration membrane and containing a working electrode, thereby reducing at least a portion of the first metal ions in the second concentrated solution to metal using the working electrode as the cathode; and oxidizing a metal of the same type as the reduced metal to a second metal ion having a lower oxidation number than the first metal ion using the working electrode as the anode to obtain a second plating composition containing the second metal ions and water.
第2態様は、前記めっき組成物の製造方法で製造されるめっき組成物である。 The second aspect is a plating composition produced by the plating composition production method.
本発明の一態様によれば、めっき排液中の高酸化状態の金属イオンを低酸化状態の金属イオンに効率的に還元することで、めっき組成物を効率的に製造する方法を提供することができる。 One aspect of the present invention provides a method for efficiently producing a plating composition by efficiently reducing highly oxidized metal ions in a plating wastewater solution to less oxidized metal ions.
本明細書において「工程」との語は、独立した工程だけではなく、他の工程と明確に区別できない場合であってもその工程の所期の目的が達成されれば、本用語に含まれる。また組成物中の各成分の含有量は、組成物中に各成分に該当する物質が複数存在する場合、特に断らない限り、組成物中に存在する当該複数の物質の合計量を意味する。さらに本明細書に記載される数値範囲の上限及び下限は、数値範囲として例示された数値をそれぞれ任意に選択して組み合わせることが可能である。以下、本発明の実施形態を詳細に説明する。ただし、以下に示す実施形態は、本発明の技術思想を具体化するための、めっき組成物およびその製造方法を例示するものであって、本発明は、以下に示すめっき組成物およびその製造方法に限定されない。 In this specification, the term "process" does not only refer to an independent process, but also includes processes that cannot be clearly distinguished from other processes, as long as the intended purpose of the process is achieved. Furthermore, when multiple substances corresponding to each component are present in the composition, the content of each component in the composition refers to the total amount of those multiple substances present in the composition, unless otherwise specified. Furthermore, the upper and lower limits of the numerical ranges described in this specification can be arbitrarily selected and combined from the numerical values exemplified as numerical ranges. Below, embodiments of the present invention are described in detail. However, the embodiments described below are merely examples of plating compositions and methods for producing the same that embody the technical concept of the present invention, and the present invention is not limited to the plating compositions and methods for producing the same shown below.
めっき組成物の製造方法
めっき組成物の製造方法は、第1金属イオンと水とを含む第1めっき組成物から、分離膜を介して水の一部を除去して第1濃縮液を得る第1濃縮工程と、第1濃縮液から、低酸素分圧環境下で水の一部を除去して第2濃縮液を得る第2濃縮工程と、対向電極を備える対向電極室とイオン交換膜、逆浸透膜及びナノろ過膜からなる群から選択される少なくとも1種の隔膜で隔離され、作用電極を備える作用電極室に、第2濃縮液を導入し、第2濃縮液中の第1金属イオンの少なくとも一部を、作用電極をカソードとして金属に還元する第1金属イオン還元工程と、還元された金属と同種の金属を、作用電極をアノードとして、第1金属イオンよりも酸化数の低い第2金属イオンに酸化して、第2金属イオンと水とを含む第2めっき組成物を得る第2金属イオン酸化工程と、を含む。一態様においてめっき組成物の製造方法は、第1めっき組成物から不純物の少なくとも一部を除去する不純物除去工程をさらに含んでいてもよい。
A method for producing a plating composition includes a first concentration step of removing a portion of the water from a first plating composition containing first metal ions and water through a separation membrane to obtain a first concentrated solution, a second concentration step of removing a portion of the water from the first concentrated solution in a low-oxygen partial pressure environment to obtain a second concentrated solution, a first metal ion reduction step of introducing the second concentrated solution into a working electrode chamber separated by a counter electrode chamber containing a counter electrode and at least one diaphragm selected from the group consisting of an ion exchange membrane, a reverse osmosis membrane, and a nanofiltration membrane and containing a working electrode, and reducing at least a portion of the first metal ions in the second concentrated solution to metal using the working electrode as a cathode, and a second metal ion oxidation step of oxidizing a metal similar to the reduced metal to a second metal ion having a lower oxidation number than the first metal ion using the working electrode as an anode to obtain a second plating composition containing the second metal ions and water. In one embodiment, the method for producing a plating composition may further include an impurity removal step of removing at least a portion of impurities from the first plating composition.
第1めっき組成物から水の一部を除去して濃縮することで、第1金属イオンを金属により効率的に還元することができる。また分離膜を介して水を除去することで、金属イオンの酸化を抑制しつつ、高速度で第1めっき組成物を濃縮して第1濃縮液を得ることができる。さらに第1濃縮液から低酸素分圧環境下で水を除去することで、第1濃縮液に含まれる低酸化状態の金属イオンの酸化を抑制しつつ、第1金属イオン還元工程における還元反応の負荷を低減して、より効率的にめっき組成物を製造することができる。めっき組成物の製造方法は、使用済みのめっき組成物またはめっき排液(例えば、第1めっき組成物)から、めっき処理に利用可能なめっき組成物(例えば、第2めっき組成物)を再生するめっき組成物の再生方法であってもよい。 By removing a portion of the water from the first plating composition and concentrating it, the first metal ions can be reduced more efficiently by the metal. Furthermore, by removing water through a separation membrane, the first plating composition can be concentrated at high speed to obtain a first concentrated solution while suppressing oxidation of the metal ions. Furthermore, by removing water from the first concentrated solution in a low oxygen partial pressure environment, the oxidation of the low-oxidized metal ions contained in the first concentrated solution can be suppressed, while reducing the load on the reduction reaction in the first metal ion reduction step, allowing for more efficient production of the plating composition. The plating composition production method may also be a plating composition regeneration method that regenerates a plating composition (e.g., a second plating composition) that can be used in plating processing from a used plating composition or plating wastewater (e.g., a first plating composition).
めっき組成物の製造方法の一態様を、図面を参照して説明する。図1は、めっき組成物の製造方法の工程順の一例を示すフローチャートである。めっき組成物の製造方法は、必要に応じて含まれる不純物除去工程S101と、第1濃縮工程S102と、第2濃縮工程S103と、第1金属イオン還元工程S104と、第2金属イオン酸化工程S105と、を含んでいてよい。不純物除去工程S101では、めっき槽または水洗槽から回収されるめっき排液である第1めっき組成物から不純物の少なくとも一部を除去する。第1濃縮工程S102では、不純物除去後の第1めっき組成物から分離膜を介して水の一部を除去して第1濃縮液を得る。第2濃縮工程S103では、第1濃縮液から低酸素分圧環境下で水の一部を除去して第2濃縮液を得る。第1金属イオン還元工程S104では、第2濃縮液に含まれる高酸化数(高酸化状態)の第1金属イオン(例えば、スズ(IV)イオン)を、電気化学装置を用いて金属(例えば、金属スズ)に還元する。電気化学装置は、作用電極を備える作用電極室および対向電極を備える対向電極室が隔膜で隔離されて構成される。第1金属イオンの還元は、作用電極室に第2濃縮液を導入し、作用電極をカソードとして通電することで行われ、作用電極に金属が析出する。第2金属イオン酸化工程S105では、作用電極に析出した金属と同種の金属をアノードとして通電することで行われ、作用電極に析出した金属と同種の金属が低酸化数(低酸化状態)の第2金属イオン(例えば、スズ(II)イオン)に酸化されて作用電極室の第2濃縮液に溶解して、めっき処理に使用可能な第2めっき組成物が得られる。 One embodiment of a method for producing a plating composition will be described with reference to the drawings. Figure 1 is a flowchart showing an example of the process sequence of the method for producing a plating composition. The method for producing a plating composition may include an impurity removal step S101, a first concentration step S102, a second concentration step S103, a first metal ion reduction step S104, and a second metal ion oxidation step S105, which are included as necessary. In the impurity removal step S101, at least a portion of the impurities are removed from the first plating composition, which is the plating wastewater recovered from the plating tank or the water rinsing tank. In the first concentration step S102, a portion of the water is removed from the first plating composition after impurity removal through a separation membrane to obtain a first concentrated solution. In the second concentration step S103, a portion of the water is removed from the first concentrated solution in a low oxygen partial pressure environment to obtain a second concentrated solution. In the first metal ion reduction step S104, first metal ions (e.g., tin(IV) ions) with a high oxidation number (high oxidation state) contained in the second concentrated solution are reduced to a metal (e.g., metallic tin) using an electrochemical device. The electrochemical device is configured by separating a working electrode chamber containing a working electrode and a counter electrode chamber containing a counter electrode with a diaphragm. The first metal ions are reduced by introducing the second concentrated solution into the working electrode chamber and applying current to the working electrode as a cathode, resulting in metal deposition on the working electrode. In the second metal ion oxidation step S105, current is applied to a metal of the same type as the metal deposited on the working electrode as an anode, resulting in oxidization of the metal to second metal ions (e.g., tin(II) ions) with a low oxidation number (low oxidation state) and dissolving them in the second concentrated solution in the working electrode chamber, resulting in a second plating composition usable for plating processing.
図1では、不純物除去工程S101の後に、第1濃縮工程S102および第2濃縮工程S103を実施しているが、第1濃縮工程S102または第2濃縮工程S103を実施した後に不純物除去工程S101を実施し、次いで第1金属イオン還元工程S104を実施してもよい。また、不純物除去工程S101を実施しなくてもよい。 In FIG. 1, the first concentration step S102 and the second concentration step S103 are performed after the impurity removal step S101, but the impurity removal step S101 may be performed after the first concentration step S102 or the second concentration step S103, and then the first metal ion reduction step S104 may be performed. Also, the impurity removal step S101 may not be performed.
不純物除去工程
不純物除去工程では、第1金属イオンと水とを含む第1めっき組成物から不純物の少なくとも一部を除去する。不純物の少なくとも一部が除去されためっき組成物について、水の一部を除去して濃縮した後、イオン交換膜等の第1金属イオンを透過し難い膜で隔離された対向電極室と作用電極室とを備える電気化学装置を用いて、第1金属イオンを電気化学的に還元することで、第1金属イオンを金属単体に、より効率的に還元することができる。これは例えば以下のように考えることができる。第1めっき組成物に含まれる不純物の少なくとも一部が除去されることで、不純物とカソードとの相互作用による第1金属イオンの還元阻害が抑制され、カソードにおける第1金属イオンの還元効率がより向上すると考えられる。また例えば、不純物がイオン交換膜等に付着したり、ダメージを与えたりすることによる還元阻害が抑制され、カソードにおける第1金属イオンの還元効率がより向上すると考えられる。また例えば、不純物が第1濃縮工程において分離膜を詰まらせたり、ダメージを与えたりして、濃縮効率が低下することが考えられるが、不純物の少なくとも一部が除去されることで、濃縮効率の低下が抑制されると考えられる。
Impurity Removal Step In the impurity removal step, at least some of the impurities are removed from a first plating composition containing first metal ions and water. The plating composition from which at least some of the impurities have been removed is concentrated by removing some of the water, and the first metal ions are then electrochemically reduced using an electrochemical device including a counter electrode chamber and a working electrode chamber separated by a membrane, such as an ion exchange membrane, that is impermeable to the first metal ions. This can be explained, for example, as follows: Removing at least some of the impurities contained in the first plating composition is thought to suppress inhibition of the reduction of the first metal ions due to interactions between the impurities and the cathode, thereby further improving the reduction efficiency of the first metal ions at the cathode. Furthermore, for example, it is thought that inhibition of reduction due to impurities adhering to or damaging the ion exchange membrane or the like is suppressed, thereby further improving the reduction efficiency of the first metal ions at the cathode. Furthermore, for example, it is thought that impurities clog or damage the separation membrane in the first concentration step, reducing the concentration efficiency. However, removing at least some of the impurities is thought to suppress this decrease in concentration efficiency.
第1めっき組成物は、例えば金属めっきで使用しためっき排液であってもよく、金属めっきした物品を水洗して得られるめっき排液であってもよい。第1めっき組成物は不純物を含んでいることがある。不純物は、後述する第1金属イオン還元工程における第1金属イオンの還元を阻害し得る物質、後述する第1濃縮工程において濃縮を阻害し得る物質等を意味する。不純物として具体的には例えば、界面活性剤、レベリング剤、光沢剤、酸化防止剤等の添加剤、第1金属イオンとは異なる金属成分、ゴミ、析出物等が挙げられる。 The first plating composition may be, for example, plating wastewater used in metal plating, or plating wastewater obtained by rinsing a metal-plated article with water. The first plating composition may contain impurities. Impurities refer to substances that may inhibit the reduction of the first metal ions in the first metal ion reduction step described below, substances that may inhibit concentration in the first concentration step described below, etc. Specific examples of impurities include additives such as surfactants, leveling agents, brighteners, and antioxidants, metal components other than the first metal ions, dust, precipitates, etc.
第1めっき組成物は、不純物の少なくとも一部として、界面活性剤を含んでいてもよい。第1めっき組成物に含まれる界面活性剤は、ノニオン系界面活性剤、カチオン系界面活性剤、アニオン系界面活性剤、両性界面活性剤等のいずれであってもよい。また界面活性剤は、めっき組成物において、いわゆる光沢剤、レベラー等として機能するものであってよい。界面活性剤は、第1金属イオンの還元効率の観点から、ノニオン系界面活性剤、カチオン系界面活性剤及び両性界面活性剤からなる群から選択される少なくとも1種を含んでいてよい。第1めっき組成物に含まれる界面活性剤は1種のみであってもよく、2種以上の組み合わせであってもよい。 The first plating composition may contain a surfactant as at least a portion of the impurities. The surfactant contained in the first plating composition may be any of a nonionic surfactant, a cationic surfactant, an anionic surfactant, an amphoteric surfactant, etc. The surfactant may also function as a brightener, leveler, etc. in the plating composition. From the viewpoint of the reduction efficiency of the first metal ion, the surfactant may contain at least one type selected from the group consisting of a nonionic surfactant, a cationic surfactant, and an amphoteric surfactant. The first plating composition may contain only one type of surfactant, or a combination of two or more types.
ノニオン系界面活性剤としては、例えばグリセリン、ソルビトール、ショ糖などの多価アルコールと脂肪酸がエステル結合したエステル型界面活性剤;高級アルコール、アルキルフェノールなど水酸基を有する化合物に、エチレンオキシド、プロピレンオキシド等を付加して形成されるエーテル型界面活性剤;エステル型界面活性剤にエチレンオキシド、プロピレンオキシド等を付加して形成されるエステル・エーテル型界面活性剤などが挙げられる。ノニオン系界面活性剤として具体的には、ポリエチレングリコール、ポリプロピレングリコール、ポリオキシエチレンオクチルフェノール、ポリオキシエチレンβナフチルエーテル、ポリオキシエチレンアルキルアミン、ポリオキシエチレンアルキルエーテル、ポリオキシエチレンポリオキシプロピレンアルキルエーテル、グリセリン脂肪酸エステルおよびそのエチレンオキシド付加物、ソルビタン脂肪酸エステル、ポリオキシエチレンソルビタン脂肪酸エステル、脂肪酸モノエタノールアミドおよびそのエチレンオキシド付加物、脂肪酸-N-メチルモノエタノールアミドおよびそのエチレンオキサイド付加物、脂肪酸ジエタノールアミドおよびそのエチレンオキサイド付加物、ショ糖脂肪酸エステル、アルキル(ポリ)グリセリンエーテル、ポリグリセリン脂肪酸エステル、ポリエチレングリコール脂肪酸エステル、脂肪酸メチルエステルエトキシレート、N-長鎖アルキルジメチルアミンオキサイドなどが挙げられる。ノニオン系界面活性剤は、これらの構造中にフッ素原子が置換していてもよい。 Nonionic surfactants include, for example, ester surfactants in which a polyhydric alcohol such as glycerin, sorbitol, or sucrose is ester-bonded to a fatty acid; ether surfactants formed by adding ethylene oxide, propylene oxide, etc. to a compound having a hydroxyl group such as a higher alcohol or alkylphenol; and ester-ether surfactants formed by adding ethylene oxide, propylene oxide, etc. to an ester surfactant. Specific examples of nonionic surfactants include polyethylene glycol, polypropylene glycol, polyoxyethylene octylphenol, polyoxyethylene β-naphthyl ether, polyoxyethylene alkylamine, polyoxyethylene alkyl ether, polyoxyethylene polyoxypropylene alkyl ether, glycerin fatty acid ester and its ethylene oxide adduct, sorbitan fatty acid ester, polyoxyethylene sorbitan fatty acid ester, fatty acid monoethanolamide and its ethylene oxide adduct, fatty acid N-methylmonoethanolamide and its ethylene oxide adduct, fatty acid diethanolamide and its ethylene oxide adduct, sucrose fatty acid ester, alkyl (poly)glycerin ether, polyglycerin fatty acid ester, polyethylene glycol fatty acid ester, fatty acid methyl ester ethoxylate, and N-long-chain alkyldimethylamine oxide. Nonionic surfactants may also have fluorine atoms substituted into their structures.
カチオン系界面活性剤としては、例えばアミン塩型、第4級アンモニウム塩型等が挙げられる。カチオン性界面活性剤として具体的には、例えば、アルキル(またはアルケニル)トリメチルアンモニウム塩、アルキル(またはアルケニル)トリエチルアンモニウム塩、ジアルキル(またはアルケニル)ジメチルアンモニウム塩、アルキル(またはアルケニル)4級アンモニウム塩、エーテル基もしくはエステル基もしくはアミド基を含有するモノもしくはジアルキル(またはアルケニル)四級アンモニウム塩、アルキル(またはアルケニル)ピリジニウム塩、アルキル(またはアルケニル)ジメチルベンジルアンモニウム塩、アルキル(またはアルケニル)イソキノリニウム塩、ジアルキル(またはアルケニル)モルホニウム塩、ポリオキシエチレンアルキル(またはアルケニル)アミン、アルキル(またはアルケニル)アミン塩、ポリアミン脂肪酸誘導体、アミルアルコール脂肪酸誘導体、塩化ベンザルコニウム、塩化ベンゼトニウム等が挙げられる。カチオン系界面活性剤は、これらの構造中にフッ素原子が置換していてもよい。 Examples of cationic surfactants include amine salts and quaternary ammonium salts. Specific examples of cationic surfactants include alkyl (or alkenyl) trimethyl ammonium salts, alkyl (or alkenyl) triethyl ammonium salts, dialkyl (or alkenyl) dimethyl ammonium salts, alkyl (or alkenyl) quaternary ammonium salts, mono- or dialkyl (or alkenyl) quaternary ammonium salts containing ether groups, ester groups, or amide groups, alkyl (or alkenyl) pyridinium salts, alkyl (or alkenyl) dimethyl benzyl ammonium salts, alkyl (or alkenyl) isoquinolinium salts, dialkyl (or alkenyl) morphonium salts, polyoxyethylene alkyl (or alkenyl) amines, alkyl (or alkenyl) amine salts, polyamine fatty acid derivatives, amyl alcohol fatty acid derivatives, benzalkonium chloride, and benzethonium chloride. Fluorine atoms may be substituted into the structure of these cationic surfactants.
両性界面活性剤は、アルカリ性領域ではアニオン界面活性剤の性質を、酸性領域ではカチオン界面活性剤の性質を示す。両性界面活性剤としては、カルボン酸塩、スルホン酸塩等が挙げられ、アミノ酸型、ベタイン型等のいずれであってもよい。両性界面活性剤として具体的には、アルキルジメチルアミノ酢酸ベタイン、アルキルジメチル酢酸ベタイン、アルキルジメチルカルボキシベタイン、アルキルジメチルカルボキシメチレンアンモニウムベタイン、アルキルジメチルアンモニオアセタート、脂肪酸アミドプロピルジメチルアミノ酸ベタイン、アルキロイルアミドプロピルジメチルグリシン、2-アルキル-1-(2-ヒドロキシエチル)イミダゾリウム-1-アセテート、アルキルジアミノエチルグリシン、ジアルキルジアミノエチルグリシン、アルキルジメチルアミンオキシド等が挙げられる。 Amphoteric surfactants exhibit the properties of anionic surfactants in the alkaline range and cationic surfactants in the acidic range. Examples of amphoteric surfactants include carboxylates and sulfonates, and may be either amino acid or betaine types. Specific examples of amphoteric surfactants include alkyldimethylaminoacetic acid betaine, alkyldimethylacetic acid betaine, alkyldimethylcarboxybetaine, alkyldimethylcarboxymethyleneammonium betaine, alkyldimethylammonioacetate, fatty acid amidopropyldimethylamino acid betaine, alkyloylamidopropyldimethylglycine, 2-alkyl-1-(2-hydroxyethyl)imidazolium-1-acetate, alkyldiaminoethylglycine, dialkyldiaminoethylglycine, and alkyldimethylamine oxide.
アニオン系界面活性剤としては、カルボン酸塩、スルホン酸塩、硫酸エステル塩、リン酸エステル塩等が挙げられる。 Anionic surfactants include carboxylates, sulfonates, sulfates, and phosphates.
第1めっき組成物が界面活性剤を含む場合、第1めっき組成物における界面活性剤の含有率は、例えば0.01g/L以上10g/L以下であってよく、好ましくは0.1g/L以上、又は5g/L以下であってよい。不純物除去工程で除去された後のめっき組成物における界面活性剤の含有率は、例えば0.005g/L以上であってよい。なお、界面活性剤の含有率は、表面張力を指標として測定することができる。具体的には滴数計、表面張力計等を用いて測定することができる。 If the first plating composition contains a surfactant, the surfactant content in the first plating composition may be, for example, 0.01 g/L or more and 10 g/L or less, and preferably 0.1 g/L or more or 5 g/L or less. The surfactant content in the plating composition after the impurities have been removed in the impurity removal step may be, for example, 0.005 g/L or more. The surfactant content can be measured using surface tension as an index. Specifically, it can be measured using a drop meter, surface tensiometer, etc.
第1めっき組成物に含まれる第1金属イオンは、第2金属イオンよりも高酸化状態の金属イオンであってよく、使用前のめっき組成物を構成する第2金属イオンが酸化されて生成したものであってよい。第1金属イオンとしては、例えばスズ(IV)イオン、鉄(III)イオン等を挙げることができる。また、第1めっき組成物に含まれる第1金属イオンは、単純な金属イオンであっても、錯イオンであってもよい。錯イオンを形成する錯化剤としては、例えばグルコン酸(グルコノラクトンを含む)、クエン酸、グルタル酸、コハク酸、リンゴ酸、酒石酸、乳酸及びこれらの塩または誘導体等を含むカルボン酸類;トリポリリン酸、ヒドロキシエタンジホスホン酸及びこれらの塩を含むリン酸類;ソルビトール、マンニトール及びこれらの塩等を含む糖類;フェニルアラニン、グルタミン酸、アスパラギン酸、アラニン、グリシン及びこれらの塩等を含むアミノ酸類;HEDTA、EDTA等が挙げられる。錯化剤は、これらからなる群から選択される少なくとも1種を含んでいてよく、少なくともグルコン酸を含んでいてよい。錯化剤は1種単独でも2種以上の組み合わせで用いてもよい。第1金属イオンが錯イオンであることで、めっきに使用するめっき組成物のpHを弱酸性から弱アルカリ性に設定することが可能となり、強酸又は強アルカリに弱い被めっき物(例えば、セラミックコンデンサなど、部材として酸化物を用いている物等)に対する浸食を抑制できる。 The first metal ion contained in the first plating composition may be a metal ion in a more highly oxidized state than the second metal ion, or may be formed by the oxidation of the second metal ion constituting the plating composition prior to use. Examples of first metal ions include tin(IV) ions and iron(III) ions. The first metal ion contained in the first plating composition may be a simple metal ion or a complex ion. Examples of complexing agents that form complex ions include carboxylic acids including gluconic acid (including gluconolactone), citric acid, glutaric acid, succinic acid, malic acid, tartaric acid, lactic acid, and their salts or derivatives; phosphoric acids including tripolyphosphate, hydroxyethanediphosphonic acid, and their salts; sugars including sorbitol, mannitol, and their salts; amino acids including phenylalanine, glutamic acid, aspartic acid, alanine, glycine, and their salts; HEDTA, EDTA, etc. The complexing agent may contain at least one selected from the group consisting of these, and may contain at least gluconic acid. The complexing agents may be used alone or in combination of two or more. When the first metal ion is a complex ion, the pH of the plating composition used for plating can be set to a weakly acidic to weakly alkaline range, thereby suppressing corrosion of objects to be plated that are sensitive to strong acids or strong alkalis (for example, objects that use oxides as components, such as ceramic capacitors).
第1めっき組成物に含まれる第1金属イオンの含有率は、例えば0.1g/L以上100g/L以下であってよく、好ましくは1g/L以上であってよい。また、めっき組成物に含まれる錯化剤の含有率は、例えば第1金属イオンと等モル以上20倍モル以下であってよく、好ましくは10倍モル以下であってよい。なお、めっき組成物に含まれる第1金属イオンの含有率は、例えば高周波誘導結合プラズマ発光分光分析法(ICP-AES)、又は鉄粉による還元の後にヨウ素酸カリウムによる酸化還元滴定を用いて測定される。 The content of the first metal ion in the first plating composition may be, for example, 0.1 g/L or more and 100 g/L or less, and preferably 1 g/L or more. The content of the complexing agent in the plating composition may be, for example, equimolar to 20 times the molar amount of the first metal ion, and preferably 10 times the molar amount. The content of the first metal ion in the plating composition is measured, for example, using inductively coupled plasma atomic emission spectroscopy (ICP-AES) or oxidation-reduction titration with potassium iodate after reduction with iron powder.
第1めっき組成物は、第1金属イオンに加えて第2金属イオンを含んでいてもよい。第2金属イオンの具体例としては、第1金属イオンがスズ(IV)イオンの場合は、スズ(II)イオンを挙げることができる。また第1金属イオンが鉄(III)イオンの場合、鉄(II)イオンを挙げることができる。第2金属イオンは、単純な金属イオンであっても、錯イオンであってもよい。錯イオンを形成する錯化剤は、第1金属イオンと同様である。第1めっき組成物が第2金属イオンを含む場合、第1めっき組成物に含まれる第2金属イオンの含有率は、例えば100g/L以下であってよく、好ましくは20g/L以下であってよい。なお、めっき組成物に含まれる第2金属イオンの含有率は、第1金属イオンと同様にして測定される。 The first plating composition may contain a second metal ion in addition to the first metal ion. Specific examples of the second metal ion include tin(II) ions when the first metal ion is tin(IV) ions. Furthermore, specific examples of the second metal ion include iron(II) ions when the first metal ion is iron(III) ions. The second metal ion may be a simple metal ion or a complex ion. The complexing agent that forms the complex ion is the same as for the first metal ion. When the first plating composition contains a second metal ion, the content of the second metal ion contained in the first plating composition may be, for example, 100 g/L or less, and preferably 20 g/L or less. The content of the second metal ion contained in the plating composition is measured in the same manner as for the first metal ion.
使用前のめっき組成物を構成する第2金属イオンの由来は、水溶性の金属塩であればよい。水溶性の金属塩として具体的には、例えば、硫酸塩、塩化物塩、ホウフッ化物塩、アルカンスルホン酸塩、アルカノールスルホン酸塩、芳香族スルホン酸塩等が挙げられ、これらからなる群から選択される少なくとも1種を含んでいてよく、少なくともアルカンスルホン酸塩を含んでいてよい。アルカンスルホン酸塩におけるアルカンスルホン酸としては、例えば炭素数1から3のアルカンスルホン酸が挙げられ、具体的にはメタンスルホン酸、エタンスルホン酸、プロパンスルホン酸、2-プロパンスルホン酸等が挙げられる。 The second metal ion that constitutes the plating composition before use may be derived from a water-soluble metal salt. Specific examples of water-soluble metal salts include sulfates, chlorides, boron fluorides, alkanesulfonates, alkanolsulfonates, and aromatic sulfonates. The composition may contain at least one selected from the group consisting of these, and may contain at least an alkane sulfonate. Examples of alkane sulfonic acids in alkane sulfonates include alkanesulfonic acids having 1 to 3 carbon atoms, such as methanesulfonic acid, ethanesulfonic acid, propanesulfonic acid, and 2-propanesulfonic acid.
第1めっき組成物は、アルカリ金属イオン、アンモニウムイオン等を更に含んでいてもよい。アルカリ金属イオン、アンモニウムイオン等を含むことで、導電率が高くなり、電解めっき時に液抵抗による発熱が抑えられるとともに均一電着性が向上する傾向がある。アルカリ金属イオンとしては、リチウムイオン、ナトリウムイオン、カリウムイオン、ルビジウム、セシウム等が挙げられる。アルカリ金属イオン、アンモニウムイオン等は、例えば酸成分との塩として第1めっき組成物に添加されてもよい。第1めっき組成物が、酸成分を含むことで、例えば第1めっき組成物の安定性がより向上する。酸成分としては、例えば硫酸、塩酸、アルカンスルホン酸、アルカノールスルホン酸、芳香族スルホン酸、リン酸、アルキルカルボン酸、アリールカルボン酸等を挙げることができ、これらからなる群から選択される少なくとも1種を含んでいてよい。これらの酸は1種単独でも2種以上の組み合わせで用いてもよい。 The first plating composition may further contain alkali metal ions, ammonium ions, etc. The inclusion of alkali metal ions, ammonium ions, etc. increases conductivity, suppresses heat generation due to solution resistance during electroplating, and tends to improve electrodeposition uniformity. Examples of alkali metal ions include lithium ions, sodium ions, potassium ions, rubidium, and cesium. Alkali metal ions, ammonium ions, etc. may be added to the first plating composition, for example, as a salt with an acid component. The inclusion of an acid component in the first plating composition, for example, further improves the stability of the first plating composition. Examples of acid components include sulfuric acid, hydrochloric acid, alkanesulfonic acid, alkanolsulfonic acid, aromatic sulfonic acid, phosphoric acid, alkylcarboxylic acid, and arylcarboxylic acid, and the first plating composition may contain at least one selected from the group consisting of these. These acids may be used alone or in combination of two or more.
第1めっき組成物のpHは、例えば1以上13以下であってよく、好ましくは3以上、又は4以上であってよく、また好ましくは11以下、又は9以下であってよい。第1めっき組成物のpHが前記範囲内であると、より効率的に第1金属イオンを還元できる傾向がある。第1めっき組成物のpHは、例えばpH調整剤で所望の範囲に調整されてよい。pH調整剤としては、例えば上述した酸成分に加えて、アルカリ金属水酸化物、アンモニア等が挙げられる。 The pH of the first plating composition may be, for example, 1 or more and 13 or less, preferably 3 or more or 4 or more, and preferably 11 or less or 9 or less. When the pH of the first plating composition is within this range, the first metal ions tend to be reduced more efficiently. The pH of the first plating composition may be adjusted to the desired range, for example, with a pH adjuster. Examples of pH adjusters include alkali metal hydroxides, ammonia, etc. in addition to the acid components described above.
第1めっき組成物は、酸化防止剤を更に含んでいてもよい。酸化防止剤を含むことで、例えば、第1めっき組成物の安定性が向上し、浴寿命を延長できる。酸化防止剤としては、例えばヒドロキノン、アスコルビン酸、カテコール、次亜リン酸、エリソルビン酸等が挙げられる。第1めっき組成物が酸化防止剤を含む場合、第1めっき組成物に含まれる酸化防止剤の含有率は、例えば0.01g/L以上20g/L以下であってよく、好ましくは0.1g/L以上、又は5g/L以下であってよい。 The first plating composition may further contain an antioxidant. The inclusion of an antioxidant can, for example, improve the stability of the first plating composition and extend the bath life. Examples of antioxidants include hydroquinone, ascorbic acid, catechol, hypophosphorous acid, and erythorbic acid. When the first plating composition contains an antioxidant, the content of the antioxidant in the first plating composition may be, for example, 0.01 g/L or more and 20 g/L or less, and preferably 0.1 g/L or more or 5 g/L or less.
第1めっき組成物が酸化防止剤を含む場合、不純物除去工程は酸化防止剤の少なくとも一部を除去することを含んでいてもよい。酸化防止剤の除去は、活性炭処理で行われてもよい。 If the first plating composition contains an antioxidant, the impurity removal step may include removing at least a portion of the antioxidant. The antioxidant may be removed by activated carbon treatment.
第1めっき組成物は、溶媒として水を含む。第1めっき組成物における溶質の総濃度は、例えば150g/L以下であってよく、好ましくは100g/L以下、または80g/L以下であってよい。第1めっき組成物における溶質の総濃度は、例えば1g/L以上であってよい。 The first plating composition contains water as a solvent. The total concentration of solutes in the first plating composition may be, for example, 150 g/L or less, preferably 100 g/L or less, or 80 g/L or less. The total concentration of solutes in the first plating composition may be, for example, 1 g/L or more.
不純物除去工程における不純物の除去方法としては、例えば糸巻フィルター処理、活性炭処理、精密ろ過処理、限外ろ過処理、ゲル濾過処理等を挙げることができる。不純物除去工程における不純物の除去方法は、好ましくは活性炭処理を含んでいてよい。活性炭処理による不純物の除去方法は、例えばめっき組成物と活性炭とを接触させることを含んでいてよい。活性炭を用いることで、第1めっき組成物から不純物の少なくとも一部をより効率的に除去することができる。不純物除去工程では、不純物を静電的に吸着させる方法(例えば、イオン交換樹脂と接触させる方法)と活性炭処理とを組み合わせてもよい。 Methods for removing impurities in the impurity removal step include, for example, thread-wound filter treatment, activated carbon treatment, microfiltration treatment, ultrafiltration treatment, and gel filtration treatment. The method for removing impurities in the impurity removal step may preferably include activated carbon treatment. A method for removing impurities using activated carbon treatment may, for example, include contacting the plating composition with activated carbon. By using activated carbon, at least a portion of the impurities can be more efficiently removed from the first plating composition. In the impurity removal step, a method for electrostatically adsorbing impurities (for example, a method for contacting with an ion exchange resin) may be combined with activated carbon treatment.
活性炭は、炭素を主な成分とし、化学的または物理的な賦活化処理が施された多孔質の物質である。活性炭処理に用いられる活性炭は、薬品賦活されたものであっても、ガス賦活されたものであってもよい。また、活性炭は粉末活性炭であっても、粒状活性炭であってもよく、これらの組み合わせであってもよい。 Activated carbon is a porous material whose main component is carbon and which has been subjected to a chemical or physical activation process. The activated carbon used in activated carbon treatment may be chemically activated or gas activated. Activated carbon may also be powdered activated carbon, granular activated carbon, or a combination of these.
活性炭の比表面積は、例えば200m2/g以上1500m2/g以下であってよく、好ましくは300m2/g以上、または700m2/g以下であってよい。なお、比表面積はBET(Brunauer Emmett Teller)理論に基づき、前処理として200℃で6時間熱処理した後、窒素ガスを用いて測定される。また、活性炭の平均細孔径は、例えば1.5nm以上3.5nm以下であってよく、好ましくは2.0nm以上3.0nm以下であってよい。活性炭のメソ孔形状は、INNES法による吸着側の平均細孔幅が、例えば2nm以上30nm以下であってよく、好ましくは4nm以上10nm以下であってよい。また、INNES法による脱着側の平均細孔幅が例えば2nm以上5nm以下であってよく、好ましくは2nm以上3.5nm以下であってよい。 The specific surface area of the activated carbon may be, for example, 200 m 2 /g or more and 1500 m 2 /g or less, preferably 300 m 2 /g or more or 700 m 2 /g or less. The specific surface area is measured based on the BET (Brunauer Emmett Teller) theory using nitrogen gas after pretreatment at 200°C for 6 hours. The average pore diameter of the activated carbon may be, for example, 1.5 nm or more and 3.5 nm or less, preferably 2.0 nm or more and 3.0 nm or less. The mesopore shape of the activated carbon may be, for example, such that the average pore width on the adsorption side measured by the INNES method is, for example, 2 nm or more and 30 nm or less, preferably 4 nm or more and 10 nm or less. The average pore width on the desorption side measured by the INNES method may be, for example, 2 nm or more and 5 nm or less, preferably 2 nm or more and 3.5 nm or less.
第1めっき組成物との接触に用いられる活性炭の量は、活性炭の種類に応じて適宜選択すればよい。活性炭の使用量は、第1めっき組成物に含まれる不純物(例えば、界面活性剤)の少なくとも一部を除去できる量であればよく、好ましくは界面活性剤の50質量%以上、70質量%以上、又は90質量%以上を除去するのに十分な量とすればよい。活性炭の使用量は、第1めっき組成物との接触方法に応じて選択してもよい。例えば、1パスで接触させる場合にはだ第1めっき組成物を循環させて接触させる場合に比べて、必要となる活性炭の量が多くなってよい。 The amount of activated carbon used for contact with the first plating composition may be selected appropriately depending on the type of activated carbon. The amount of activated carbon used should be an amount that is sufficient to remove at least a portion of the impurities (e.g., surfactants) contained in the first plating composition, and is preferably an amount sufficient to remove 50% by mass or more, 70% by mass or more, or 90% by mass or more of the surfactants. The amount of activated carbon used may also be selected depending on the method of contact with the first plating composition. For example, when contacting in a single pass, a larger amount of activated carbon may be required than when contacting by circulating the first plating composition.
第1めっき組成物と活性炭との接触は、例えば第1めっき組成物と活性炭とを混合した後に固液分離することで接触させてもよく、ろ過器、カートリッジ等に保持した活性炭にめっき組成物を通液して接触させてもよい。第1めっき組成物と活性炭の接触温度は、例えば0℃以上、又は70℃以下であってよい。 The first plating composition may be brought into contact with the activated carbon by, for example, mixing the first plating composition with the activated carbon followed by solid-liquid separation, or by passing the plating composition through activated carbon held in a filter, cartridge, or the like. The contact temperature between the first plating composition and the activated carbon may be, for example, 0°C or higher or 70°C or lower.
第1濃縮工程
第1濃縮工程では、第1金属イオンと水とを含む第1めっき組成物から、分離膜を介して水の一部を除去して第1濃縮液を得る。一般に、酸化され得る金属イオンを含むめっき組成物から水の一部を除去して濃縮する場合、金属イオン濃度が低いほど、また温度が高いほど金属イオンの酸化が進行し易くなる。第1めっき組成物の濃縮に分離膜を用いることで、金属イオンの酸化を抑制しつつ、高速かつ大量に第1めっき組成物を濃縮することができる。分離膜は、第1めっき組成物から水を優先的に分離できるろ過膜であればよく、好ましくは水を選択的に分離できるろ過膜であってよい。
First Concentration Step In the first concentration step, a first concentrated solution is obtained by removing a portion of the water from a first plating composition containing first metal ions and water through a separation membrane. Generally, when concentrating a plating composition containing oxidizable metal ions by removing a portion of the water, the lower the metal ion concentration and the higher the temperature, the more likely the oxidation of the metal ions will proceed. By using a separation membrane to concentrate the first plating composition, the first plating composition can be concentrated quickly and in large quantities while suppressing the oxidation of the metal ions. The separation membrane may be a filtration membrane that can preferentially separate water from the first plating composition, and is preferably a filtration membrane that can selectively separate water.
一態様において、分離膜は逆浸透膜と呼ばれるろ過膜であってよい。逆浸透膜(以下、RO膜ともいう)は、ろ過膜の1種であり、水分子を透過し、イオンなど水分子以外の物質を透過しない性質を示す。逆浸透膜で塩濃度の高い溶液A(例えば、第1めっき組成物)と塩濃度が低い溶液B(例えば、水)とを仕切り、塩濃度の高い溶液A側に溶液Aと溶液Bの浸透圧の差よりも大きい圧力をかけると水分子だけが溶液Aから溶液Bに移動する。これにより第1めっき組成物から水の一部を除去して第1濃縮液を得ると共に逆浸透膜処理水として水を得ることができる。 In one embodiment, the separation membrane may be a filtration membrane known as a reverse osmosis membrane. A reverse osmosis membrane (hereinafter also referred to as an RO membrane) is a type of filtration membrane that allows water molecules to pass through while blocking substances other than water molecules, such as ions. A reverse osmosis membrane separates a solution A with a high salt concentration (e.g., a first plating composition) from a solution B with a low salt concentration (e.g., water). When a pressure greater than the difference in osmotic pressure between solutions A and B is applied to the side of solution A with a high salt concentration, only water molecules move from solution A to solution B. This removes a portion of the water from the first plating composition to obtain a first concentrated solution, and water can be obtained as reverse osmosis membrane-treated water.
分離膜の材質としては、例えばポリアミド、ポリスルホン、セルロースアセテートなどが挙げられ、好ましくは芳香族ポリアミドまたは架橋芳香族ポリアミドを含むポリアミドが挙げられる。分離膜による第1めっき組成物の濃縮には、例えば分離膜を備えるチューブラー型モジュール、スパイラル型モジュール等を使用することができる。 Examples of materials for the separation membrane include polyamide, polysulfone, and cellulose acetate, and preferably polyamides including aromatic polyamides or crosslinked aromatic polyamides. To concentrate the first plating composition using a separation membrane, for example, a tubular module or a spiral module equipped with a separation membrane can be used.
分離膜を用いて第1めっき組成物を濃縮する際の液送圧は、使用する分離膜の種類に応じて適宜選択すればよい。濃縮の際の液送圧は、例えば0.1MPa以上であってよく、好ましくは0.5MPa以上、1MPa以上、または2MPa以上であってよい。また液送圧は、例えば10MPa以下であってよい。また、濃縮の際の温度は、例えば0℃以上50℃以下であってよく、好ましくは10℃以上40℃以下であってよい。 The liquid feed pressure when concentrating the first plating composition using a separation membrane may be selected appropriately depending on the type of separation membrane used. The liquid feed pressure during concentration may be, for example, 0.1 MPa or more, and preferably 0.5 MPa or more, 1 MPa or more, or 2 MPa or more. The liquid feed pressure may be, for example, 10 MPa or less. The temperature during concentration may be, for example, 0°C or more and 50°C or less, and preferably 10°C or more and 40°C or less.
分離膜による濃縮に供される第1めっき組成物は、不純物除去工程で不純物の少なくとも一部が除去された後の第1めっき組成物であってもよく、不純物が除去されていない第1めっき組成物であってもよい。好ましくは不純物除去工程で不純物の少なくとも一部が除去された後の第1めっき組成物であってよい。 The first plating composition subjected to concentration using a separation membrane may be the first plating composition from which at least some of the impurities have been removed in the impurity removal step, or it may be the first plating composition from which the impurities have not been removed. Preferably, it may be the first plating composition from which at least some of the impurities have been removed in the impurity removal step.
分離膜を介して水の一部が除去された第1濃縮液の体積に対する第1めっき組成物の体積の比(濃縮倍率)は、例えば2以上であってよく、好ましくは3以上であってよい。 The ratio of the volume of the first plating composition to the volume of the first concentrated solution from which some of the water has been removed via the separation membrane (concentration factor) may be, for example, 2 or more, and preferably 3 or more.
第2濃縮工程
第2濃縮工程では、第1濃縮液から、低酸素分圧環境下で水の一部を除去して第2濃縮液を得る。低酸素分圧環境下で第1濃縮液から水の一部を除去することで、第1濃縮液に含まれる金属イオンの酸化を効果的に抑制しながら、水の一部が更に除去された第2濃縮液を得ることができる。
In the second concentration step, a portion of the water is removed from the first concentrate in a low-oxygen partial pressure environment to obtain a second concentrate. By removing a portion of the water from the first concentrate in a low-oxygen partial pressure environment, a second concentrate from which a portion of the water has been further removed can be obtained while effectively suppressing oxidation of metal ions contained in the first concentrate.
第2濃縮工程における低酸素分圧環境下とは酸素分圧が大気より低い環境であればよく、不活性ガスによる置換、減圧等によって実現できる。具体的に低酸素分圧環境下における酸素分圧は、例えば10kPa以下であってよく、好ましくは2kPa以下、または1kPa以下であってよい。 The low oxygen partial pressure environment in the second concentration step is an environment in which the oxygen partial pressure is lower than that of the atmosphere, and can be achieved by replacing the atmosphere with an inert gas, reducing the pressure, etc. Specifically, the oxygen partial pressure in the low oxygen partial pressure environment may be, for example, 10 kPa or less, and preferably 2 kPa or less, or 1 kPa or less.
第2濃縮工程における低酸素分圧環境は不活性ガスの置換により、不活性ガス雰囲気として実現することが可能である。不活性ガス雰囲気における不活性ガスとしては、アルゴン等の希ガス、窒素ガスなどを挙げることができる。不活性ガス雰囲気における不活性ガスの濃度は、例えば80体積%以上であってよく、好ましくは90体積%以上、95体積%以上、98体積%以上、または99体積%以上であってよい。不活性ガス雰囲気における気圧は、常圧であっても、大気圧よりも減圧されていてもよい。減圧下での不活性ガス雰囲気は、不活性ガスで置換してから減圧してもよく、真空度の調整時に不活性ガスを供給して不活性ガス雰囲気にしてもよい。 The low oxygen partial pressure environment in the second concentration step can be achieved as an inert gas atmosphere by replacing the atmosphere with an inert gas. Examples of inert gases in the inert gas atmosphere include rare gases such as argon, and nitrogen gas. The concentration of the inert gas in the inert gas atmosphere may be, for example, 80% by volume or more, and preferably 90% by volume or more, 95% by volume or more, 98% by volume or more, or 99% by volume or more. The pressure in the inert gas atmosphere may be normal pressure or may be reduced below atmospheric pressure. An inert gas atmosphere under reduced pressure may be reduced after replacement with an inert gas, or an inert gas atmosphere may be created by supplying an inert gas when adjusting the degree of vacuum.
第2濃縮工程における低酸素分圧環境は、低圧環境であってもよい。低圧環境とは大気圧より低い減圧下の環境であればよく、具体的に低圧環境における気圧は、例えば50hPa以下であってよく、好ましくは10hPa以下、または1hPa以下であってよい。 The low oxygen partial pressure environment in the second concentration step may be a low-pressure environment. A low-pressure environment may be an environment under reduced pressure lower than atmospheric pressure. Specifically, the air pressure in a low-pressure environment may be, for example, 50 hPa or less, and preferably 10 hPa or less, or 1 hPa or less.
一態様において第2濃縮工程は、低酸素分圧環境下で、第1濃縮液から水の一部を除去して第2濃縮液を得る工程であってもよい。低酸素分圧環境は、例えば酸素分圧が10kPaまたは酸素濃度が10体積%以下であってよく、好ましくは酸素分圧が2kPa以下または酸素濃度が2体積%以下、または酸素分圧が1kPa以下または酸素濃度が1体積%以下であってよい。 In one embodiment, the second concentration step may be a step of removing a portion of the water from the first concentrated liquid in a low oxygen partial pressure environment to obtain a second concentrated liquid. The low oxygen partial pressure environment may be, for example, an oxygen partial pressure of 10 kPa or an oxygen concentration of 10% by volume or less, and preferably an oxygen partial pressure of 2 kPa or less or an oxygen concentration of 2% by volume or less, or an oxygen partial pressure of 1 kPa or less or an oxygen concentration of 1% by volume or less.
第2濃縮工程における水の除去方法としては、減圧下で第1濃縮液から水の一部を除去する第1の濃縮方法、第1濃縮液を凍結した後に減圧下で第1濃縮液の凍結物から水の一部を除去する第2の濃縮方法、不活性ガス雰囲気下または減圧下で第1濃縮液から水を含むミストを発生させ、発生したミストの少なくとも一部を除去する第3の濃縮方法等を挙げることができる。 Methods for removing water in the second concentration step include a first concentration method in which a portion of the water is removed from the first concentrated liquid under reduced pressure, a second concentration method in which the first concentrated liquid is frozen and then a portion of the water is removed from the frozen first concentrated liquid under reduced pressure, and a third concentration method in which a mist containing water is generated from the first concentrated liquid under an inert gas atmosphere or reduced pressure and at least a portion of the generated mist is removed.
第1の濃縮方法では減圧下で第1濃縮液から水の一部を除去する。第1の濃縮方法における真空度は、例えば500hPa以下、好ましくは200hPa以下、または100hPa以下の減圧下で実施することができる。また真空度は、例えば1hPa以上、または100hPa以上の減圧下であってよい。第1の濃縮方法においては、第1濃縮液を減圧下で加熱しながら水の一部を除去してもよい。第1濃縮液を加熱する場合、その温度は、例えば30℃以上80℃以下であってよく、好ましくは35℃以上、または38℃以上であってよく、また好ましくは70℃以下、または60℃以下であってよい。また第1の濃縮方法においては、第1濃縮液を撹拌してもよい。撹拌方法は通常用いられる撹拌方法から適宜選択することができる。撹拌方法としては、例えば第1濃縮液を入れた容器を回転させて撹拌する方法、回転翼等を用いて容器中の第1濃縮液を撹拌する方法、第1濃縮液を噴流させながら容器に入れる方法等を挙げることができる。なお、第1の濃縮方法においては、減圧する前に容器内を不活性ガスで置換することで、不活性ガス雰囲気下で水の一部を除去することができる。 In the first concentration method, a portion of the water is removed from the first concentrated liquid under reduced pressure. The degree of vacuum in the first concentration method can be, for example, 500 hPa or less, preferably 200 hPa or less, or 100 hPa or less. The degree of vacuum can also be, for example, 1 hPa or more, or 100 hPa or more. In the first concentration method, a portion of the water can be removed while the first concentrated liquid is heated under reduced pressure. When the first concentrated liquid is heated, the temperature can be, for example, 30°C or more and 80°C or less, preferably 35°C or more or 38°C or more, and preferably 70°C or less or 60°C or less. In the first concentration method, the first concentrated liquid can also be stirred. The stirring method can be appropriately selected from commonly used stirring methods. Examples of stirring methods include a method of rotating a container containing the first concentrated liquid to stir, a method of stirring the first concentrated liquid in a container using a rotor or the like, and a method of pouring the first concentrated liquid into a container while spraying it. In the first concentration method, some of the water can be removed under an inert gas atmosphere by replacing the atmosphere inside the container with an inert gas before reducing the pressure.
第2の濃縮方法は、第1濃縮液を凍結することと、第1濃縮液の凍結物から減圧下で水の一部を除去することとを含む。第1濃縮液の凍結は、第1濃縮液の液温を、例えば-15℃以下、好ましくは-25℃以下にすることで実施することができる。凍結の際には容器内を不活性ガスで置換しておくことが好ましい。第2の濃縮方法では、凍結した第1濃縮液を含む容器を減圧することで、第1濃縮液に含まれる水の一部を固体状態から昇華させる凍結乾燥法によって除去する。第2の濃縮方法における真空度は、例えば10hPa以下であってよく、好ましくは1hPa以下であってよい。第2の濃縮方法は、例えば凍結乾燥機を用いて実施することができる。第2の濃縮方法によれば、高度の減圧下に低温で水を除去できることから金属イオンの酸化をより効果的に抑制することができる。なお、第2の濃縮方法においては、減圧する前に容器内を不活性ガスで置換することで、不活性ガス雰囲気下で水の一部を除去することができる。 The second concentration method includes freezing the first concentrated liquid and removing a portion of the water from the frozen first concentrated liquid under reduced pressure. The first concentrated liquid can be frozen by lowering the liquid temperature to, for example, -15°C or below, preferably -25°C or below. It is preferable to replace the atmosphere inside the container with an inert gas before freezing. In the second concentration method, the container containing the frozen first concentrated liquid is depressurized, and a portion of the water contained in the first concentrated liquid is removed by freeze-drying, which sublimes the solid state. The degree of vacuum in the second concentration method may be, for example, 10 hPa or below, preferably 1 hPa or below. The second concentration method can be performed using, for example, a freeze dryer. The second concentration method allows water to be removed at low temperatures under highly reduced pressure, thereby more effectively suppressing the oxidation of metal ions. In the second concentration method, the container can be purged with an inert gas before depressurizing, thereby removing a portion of the water under an inert gas atmosphere.
第3の濃縮方法は、第1濃縮液から水を含むミストを生成させる(以下、「霧化させる」ともいう)ことと、生成したミストの少なくとも一部を除去することとを含む。第1濃縮液から水を含むミストを生成する方法としては、第1濃縮液に超音波振動を加える超音波霧化が挙げられる。超音波霧化とは、超音波振動を液に加えると、振動により液面に噴水状の液柱が発生し、液柱の側面からおもに数ミクロン程度の微細な液滴(ミスト)が発生する現象である。超音波霧化により液体を加熱せずにミスト化することで分子のクラスターレベルで物質を分離することができる。超音波霧化による物質の分離は、例えば、液体中では同じ物質の分子はクラスター化しやすいこと、および物質によりクラスターの大小に隔たりがあることを利用することで可能になる。第3の濃縮方法は、例えば霧化分離装置(例えば、ナノミストテクノロジーズ株式会社製)を用いて実施することができる。 The third concentration method involves generating a mist containing water from the first concentrated liquid (hereinafter also referred to as "atomization") and removing at least a portion of the generated mist. One method for generating a mist containing water from the first concentrated liquid is ultrasonic atomization, in which ultrasonic vibrations are applied to the first concentrated liquid. Ultrasonic atomization is a phenomenon in which, when ultrasonic vibrations are applied to a liquid, the vibrations create a fountain-like liquid column on the liquid surface, and fine droplets (mist), mainly measuring a few microns, are generated from the sides of the liquid column. By using ultrasonic atomization to turn a liquid into mist without heating it, substances can be separated at the molecular cluster level. Separation of substances by ultrasonic atomization is possible, for example, by taking advantage of the fact that molecules of the same substance tend to cluster in liquid, and the fact that clusters vary in size depending on the substance. The third concentration method can be performed, for example, using an atomization separation device (e.g., manufactured by NanoMist Technologies, Inc.).
具体的には以下のようにして第1濃縮液から水の一部を除去することができる。第1濃縮液に超音波振動を加えることで、水のクラスターからなるミストと、水に加えて第1濃縮液に含まれる水以外の成分を含むミストを発生させる。発生したミストについてサイクロン等の分級装置を用いて、水のクラスターからなる「軽いミスト」は上方に、水以外の成分も含む「重いミスト」は下方へと分離する。軽いミストである水は冷却等により凝縮することで液体化して第1濃縮液から除去される。一方、重いミストは自重により落下させて液体化することで回収することができる。第3の濃縮方法においては、超音波霧化を不活性ガス雰囲気下で行い、サイクロンに用いる気流に不活性ガスを用いることで、不活性ガス雰囲気下で水の一部を除去することができる。第3の濃縮方法によれば、第1濃縮液を加熱することなく、不活性ガス雰囲気下で水の一部を除去できることから金属イオンの酸化をより効果的に抑制することができる。 Specifically, a portion of the water can be removed from the first concentrated liquid as follows. Ultrasonic vibrations are applied to the first concentrated liquid to generate a mist consisting of water clusters and a mist containing water and other components contained in the first concentrated liquid. A classification device such as a cyclone is used to separate the generated mist, with the "light mist" consisting of water clusters rising and the "heavy mist" containing components other than water falling. The light mist, consisting of water, is liquefied by condensation through cooling or other means and removed from the first concentrated liquid. Meanwhile, the heavy mist is allowed to fall under its own weight and be liquefied, allowing it to be recovered. In the third concentration method, ultrasonic atomization is performed in an inert gas atmosphere, and an inert gas is used in the airflow used in the cyclone, thereby removing a portion of the water in an inert gas atmosphere. According to the third concentration method, a portion of the water can be removed in an inert gas atmosphere without heating the first concentrated liquid, thereby more effectively suppressing the oxidation of metal ions.
第3の濃縮方法においては、第1濃縮液を加温しながら超音波霧化を実施してもよい。加温しながら超音波霧化を行う場合、第1濃縮液の液温は、例えば20℃以上80℃以下であってよく、好ましくは20℃以上、または30℃以上であってよく、また好ましくは70℃以下であってよい。 In the third concentration method, ultrasonic atomization may be performed while heating the first concentrated liquid. When ultrasonic atomization is performed while heating, the liquid temperature of the first concentrated liquid may be, for example, 20°C or higher and 80°C or lower, preferably 20°C or higher or 30°C or higher, and preferably 70°C or lower.
第1濃縮液から水の一部を除去して得られる第2濃縮液における溶質の総濃度は、例えば30g/L以上であってよく、好ましくは50g/L以上、または80g/L以上であってよい。第2濃縮液における溶質の総濃度は、例えば500g/L以下であってよい。第1濃縮工程において第2濃縮液の体積に対する第1濃縮液の体積の比(濃縮倍率)は、例えば2以上20以下であってよく、好ましくは3以上、または10以下であってよい。第1濃縮工程における第1濃縮液の濃縮倍率を上記範囲内に制御することで、第1金属イオン還元工程において、より効率的に第1金属イオンを還元することができる。 The total concentration of solutes in the second concentrated liquid obtained by removing a portion of the water from the first concentrated liquid may be, for example, 30 g/L or more, and preferably 50 g/L or more, or 80 g/L or more. The total concentration of solutes in the second concentrated liquid may be, for example, 500 g/L or less. In the first concentration step, the ratio of the volume of the first concentrated liquid to the volume of the second concentrated liquid (concentration factor) may be, for example, 2 or more and 20 or less, and preferably 3 or more, or 10 or less. By controlling the concentration factor of the first concentrated liquid in the first concentration step within the above range, the first metal ions can be reduced more efficiently in the first metal ion reduction step.
第1金属イオン還元工程
第1金属イオン還元工程では、第2濃縮液に含まれる第1金属イオンを、電気化学装置の作用電極をカソードとして還元して、第1金属イオンが還元されてなる金属単体を得る。第1金属イオン還元工程は、作用電極を備える作用電極室と対向電極を備える対向電極室とを備え、作用電極室と対向電極室とがイオン交換膜、逆浸透膜及びナノろ過膜からなる群から選択される少なくとも1種の隔膜で隔離された電気化学装置を用いて行われてよい。第2濃縮液は電気化学装置の作用電極室に導入される。電気化学装置の対向電極室には、導電性イオン含有水溶液が配置されてもよい。対向電極室に導電性イオン含有水溶液が配置されていることで、より効率的に第1金属イオンを還元することができる。
First Metal Ion Reduction Step In the first metal ion reduction step, the first metal ions contained in the second concentrated solution are reduced using the working electrode of the electrochemical device as the cathode to obtain a metal element formed by the reduction of the first metal ions. The first metal ion reduction step may be performed using an electrochemical device including a working electrode chamber having a working electrode and a counter electrode chamber having a counter electrode, the working electrode chamber and the counter electrode chamber being separated by at least one diaphragm selected from the group consisting of an ion exchange membrane, a reverse osmosis membrane, and a nanofiltration membrane. The second concentrated solution is introduced into the working electrode chamber of the electrochemical device. An aqueous solution containing conductive ions may be placed in the counter electrode chamber of the electrochemical device. Placing the aqueous solution containing conductive ions in the counter electrode chamber enables more efficient reduction of the first metal ions.
作用電極室に備えられる作用電極の材質としては、例えば金、白金、白金被覆チタン、銀、ニッケル、グラファイト、スズ、チタン、酸化イリジウム、酸化ルテニウム等が挙げられる。対向電極の材質としては、白金、白金被覆チタン、金、ニッケル、酸化イリジウム、酸化ルテニウム、チタン、グラファイト、パラジウム等が挙げられる。作用電極室と対向電極室とは、例えばイオン交換膜で隔離される。これにより、より効率的に第1金属イオンを還元することができる。イオン交換膜は、陽イオン交換膜であっても、陰イオン交換膜であっても、両者を組み合わせて用いてもよい。イオン交換膜は、購入可能なイオン交換膜から適宜選択して用いることができる。イオン交換膜は、第1金属イオンの還元効率の観点から、少なくとも陽イオン交換膜を含んでいてよい。例えば、陽イオン交換膜は、スルホン化されたテトラフルオロエチレンを基にしたフッ素樹脂の共重合体を含んでいてよい。また、イオン交換膜に代えて、例えば、逆浸透膜(RO膜)、ナノろ過膜(NF膜、ルーズRO膜)等の第1金属イオンを通しにくい膜を用いてよい。 Examples of materials for the working electrode provided in the working electrode chamber include gold, platinum, platinum-coated titanium, silver, nickel, graphite, tin, titanium, iridium oxide, and ruthenium oxide. Examples of materials for the counter electrode include platinum, platinum-coated titanium, gold, nickel, iridium oxide, ruthenium oxide, titanium, graphite, and palladium. The working electrode chamber and the counter electrode chamber are separated, for example, by an ion exchange membrane. This allows for more efficient reduction of the first metal ion. The ion exchange membrane may be a cation exchange membrane, an anion exchange membrane, or a combination of both. The ion exchange membrane can be appropriately selected from commercially available ion exchange membranes. The ion exchange membrane may include at least a cation exchange membrane from the perspective of the reduction efficiency of the first metal ion. For example, the cation exchange membrane may include a fluororesin copolymer based on sulfonated tetrafluoroethylene. In addition, instead of an ion exchange membrane, a membrane that is difficult for the first metal ions to pass through, such as a reverse osmosis membrane (RO membrane) or a nanofiltration membrane (NF membrane, loose RO membrane), may be used.
対向電極室に導電性イオン含有水溶液が配置される場合、導電性イオン含有水溶液は、少なくとも水と水溶性金属塩とを含んでいてよい。水溶性金属塩は、金属イオンとして、例えばアルカリ金属イオン、アルカリ土類金属イオン等を含んでいてよい。また水溶性金属塩は、陰イオンとして、例えば硫酸イオン、硝酸イオン、リン酸イオン等を含んでいてよい。 When a conductive ion-containing aqueous solution is placed in the counter electrode chamber, the conductive ion-containing aqueous solution may contain at least water and a water-soluble metal salt. The water-soluble metal salt may contain metal ions such as alkali metal ions and alkaline earth metal ions. The water-soluble metal salt may also contain anions such as sulfate ions, nitrate ions, and phosphate ions.
第1金属イオン還元工程では、作用電極室に導入された第2濃縮液中の第1金属イオンの少なくとも一部を、作用電極をカソードとして第1の電気分解処理することで、金属単体に還元する。還元されて生成した金属単体は、例えば作用電極上に堆積してよい。第1金属イオンの電気分解における電流密度は、第1金属イオンの種類に応じて適宜選択すればよい。電流密度は、例えば0.05A/dm2以上10A/dm2以下であってよく、好ましくは0.1A/dm2以上、または5A/dm2以下であってよい。電気分解における温度は、例えば20℃以上80℃以下であってよく、好ましくは30℃以上、または75℃以下であってよい。電気分解に要する時間は、例えば10分間以上200時間以下であってよい。 In the first metal ion reduction step, at least a portion of the first metal ions in the second concentrate introduced into the working electrode chamber are reduced to elemental metals by a first electrolysis process using the working electrode as a cathode. The elemental metals produced by the reduction may be deposited on the working electrode, for example. The current density in the electrolysis of the first metal ions may be appropriately selected depending on the type of first metal ions. The current density may be, for example, 0.05 A/dm2 or more and 10 A/dm2 or less, and preferably 0.1 A/ dm2 or more or 5 A/dm2 or less . The temperature in the electrolysis may be, for example, 20°C or more and 80°C or less, and preferably 30°C or more or 75°C or less. The time required for the electrolysis may be, for example, 10 minutes to 200 hours.
第2金属イオン酸化工程
第2金属イオン酸化工程では、第1金属イオン還元工程で還元されて生成した金属と同種の金属を、作用電極をアノードとして第2の電気分解処理することで、第2金属イオンに酸化する。第2金属イオン酸化工程では、第1金属イオン還元工程で作用電極上に堆積した金属と同種の金属を、作用電極をアノードとして電気分解して第2金属イオンに酸化してよい。第2金属イオン酸化工程は、第1金属イオン還元工程の第1金属イオンの還元に引き続いて、同一の電気化学装置を用いて実施されてよい。すなわち、第1金属イオン還元工程で作用電極上に堆積した金属を、作用電極をアノードとして電気分解して第2金属イオンに酸化してよい。
Second Metal Ion Oxidation Step In the second metal ion oxidation step, a metal of the same type as the metal produced by reduction in the first metal ion reduction step is oxidized to second metal ions by a second electrolysis process using the working electrode as the anode. In the second metal ion oxidation step, a metal of the same type as the metal deposited on the working electrode in the first metal ion reduction step may be oxidized to second metal ions by electrolysis using the working electrode as the anode. The second metal ion oxidation step may be performed using the same electrochemical device subsequent to the reduction of the first metal ions in the first metal ion reduction step. That is, the metal deposited on the working electrode in the first metal ion reduction step may be oxidized to second metal ions by electrolysis using the working electrode as the anode.
金属の電気分解における電流密度は、金属の種類に応じて適宜選択すればよい。電流密度は、例えば0.5A/dm2以上100A/dm2以下であってよい。また金属の電気分解における温度は、例えば10℃以上80℃以下であってよく、好ましくは15℃以上、または75℃以下であってよい。電気分解に要する時間は、例えば0.2時間以上10時間以下であってよい。 The current density in the electrolysis of a metal may be appropriately selected depending on the type of metal. The current density may be, for example, 0.5 A/dm2 or more and 100 A/dm2 or less . The temperature in the electrolysis of a metal may be, for example, 10°C or more and 80°C or less, preferably 15°C or more or 75°C or less. The time required for the electrolysis may be, for example, 0.2 hours or more and 10 hours or less.
めっき組成物の製造方法が不純物除去工程を含み、除去される不純物に界面活性剤が含まれる場合、めっき組成物の製造方法は、第2金属イオン酸化工程で得られる第2めっき組成物に界面活性剤を添加する工程をさらに含んでいてもよい。界面活性剤が添加されためっき組成物を用いてめっき処理を行うことで、より良好な表面を有するめっきが形成される。添加される界面活性剤は、不純物除去工程で除去される界面活性剤と同種であってよい。また、界面活性剤の添加量は、不純物除去工程における界面活性剤の除去量と同程度であってよい。 If the method for producing a plating composition includes an impurity removal step and the removed impurities include a surfactant, the method for producing a plating composition may further include a step of adding a surfactant to the second plating composition obtained in the second metal ion oxidation step. By performing a plating process using a plating composition to which a surfactant has been added, a plating having a better surface is formed. The surfactant added may be the same type as the surfactant removed in the impurity removal step. Furthermore, the amount of surfactant added may be approximately the same as the amount of surfactant removed in the impurity removal step.
本実施形態に係るめっき組成物の製造方法は、めっき方法またはめっき工程を含む電子部品の製造方法と併用されてよい。めっき組成物の製造方法を併用することで、めっき方法または電子部品の製造方法におけるめっき排液の排出を抑制することができる。 The method for producing a plating composition according to this embodiment may be used in combination with a plating method or a method for producing electronic components that includes a plating step. By using the method for producing a plating composition in combination, it is possible to reduce the discharge of plating wastewater in the plating method or the method for producing electronic components.
めっき方法
めっき方法は、めっき組成物の製造工程と、製造工程で得られるめっき組成物の少なくとも一部を含むめっき液と、被めっき物とを接触させ、被めっき物の表面にめっき層を形成するめっき工程を含む。めっき組成物の製造工程は、既述のめっき組成物の製造方法と同様である。既述のめっき組成物の製造方法で得られるめっき組成物を含むめっき液を用いることで、用時調製されためっき液を用いる場合と同等の優れた品質のめっき層を被めっき物上に形成することができる。
Plating Method The plating method includes a plating composition production step and a plating step of contacting an object to be plated with a plating solution containing at least a portion of the plating composition obtained in the production step to form a plating layer on the surface of the object to be plated. The plating composition production step is the same as the plating composition production method described above. By using a plating solution containing the plating composition obtained by the plating composition production method described above, a plating layer of excellent quality equivalent to that formed when a plating solution prepared immediately before use is used can be formed on the object to be plated.
めっき工程では、めっき液と被めっき物とを接触させて、被めっき物の表面にめっき層を形成する。めっき層は、例えばスズめっき層であってよい。めっき工程は、電解めっきであっても無電解めっきであってもよく、好ましくは電解めっきであってよい。めっき液は、製造工程で得られる製造されためっき組成物の少なくとも一部を含むことを除けば、通常用いられるスズめっき液であってよい。めっき液は、例えば、スズ(II)イオン、界面活性剤、錯化剤等を含んで構成されていてよい。めっき液は、製造されためっき組成物に加えて、製造工程で除去されることがある界面活性剤等を必要に応じてさらに含んでいてよい。 In the plating process, a plating solution is brought into contact with the object to be plated to form a plating layer on the surface of the object to be plated. The plating layer may be, for example, a tin plating layer. The plating process may be electrolytic plating or electroless plating, preferably electrolytic plating. The plating solution may be a commonly used tin plating solution, except that it contains at least a portion of the plating composition produced in the manufacturing process. The plating solution may be composed of, for example, tin (II) ions, a surfactant, a complexing agent, etc. In addition to the plating composition produced, the plating solution may further contain surfactants, etc. that may be removed in the manufacturing process, as needed.
めっき方法を適用する被めっき物は、表面にめっき層を形成可能な物品であれば、特に制限はない。被めっき物としては、例えば、表面に導電性層を有するセラミック素体、樹脂と金属磁性粉を含むコンポジット素体、基板、基材に設けられる電極等を挙げることができる。 There are no particular restrictions on the object to be plated to which the plating method can be applied, as long as it is an item on whose surface a plating layer can be formed. Examples of objects to be plated include ceramic bodies with a conductive layer on their surface, composite bodies containing resin and metal magnetic powder, substrates, and electrodes attached to base materials.
めっき工程で形成されるめっき層の厚みは、特に限定されず、目的等に応じて適宜選択すればよい。めっき層の厚みは、例えば、0.01μm以上100μm以下であってよく、好ましくは0.1μm以上50μm以下、より好ましくは0.3μm以上10μm以下、例えば0.3μm以上3μm以下または1μm以上5μm以下であってよい。 The thickness of the plating layer formed in the plating process is not particularly limited and may be selected appropriately depending on the purpose, etc. The thickness of the plating layer may be, for example, 0.01 μm or more and 100 μm or less, preferably 0.1 μm or more and 50 μm or less, more preferably 0.3 μm or more and 10 μm or less, for example, 0.3 μm or more and 3 μm or less, or 1 μm or more and 5 μm or less.
めっき工程には、公知のめっき方法を適用することができ、バレルめっき法、遠心めっき法、ラックめっき法等を適用することができる。 The plating process can be carried out using known plating methods, such as barrel plating, centrifugal plating, and rack plating.
電子部品の製造方法
電子部品の製造方法は、めっき組成物の製造工程と、製造工程で得られるめっき組成物の少なくとも一部を含むめっき液と、表面に導電性層を有する素体とを接触させ、前記導電性層の表面にめっき層を含む電極層を形成する電極形成工程と、を含む。めっき組成物の製造工程は、既述のめっき組成物の製造方法と同様である。既述のめっき組成物の製造方法で得られるめっき組成物を含むめっき液を用いることで、用時調製されためっき液を用いる場合と同等の優れた品質の電極層を含む外部電極を形成することができ、信頼性の高い電子部品を製造することができる。
2. Method for Manufacturing Electronic Components The method for manufacturing electronic components includes a step of manufacturing a plating composition, and a step of contacting a substrate having a conductive layer on its surface with a plating solution containing at least a portion of the plating composition obtained in the manufacturing step, to form an electrode layer including a plating layer on the surface of the conductive layer. The manufacturing step of the plating composition is the same as in the manufacturing method of the plating composition described above. By using a plating solution containing the plating composition obtained by the manufacturing method of the plating composition described above, it is possible to form external electrodes including an electrode layer of excellent quality equivalent to that obtained by using a plating solution prepared just before use, and it is possible to manufacture highly reliable electronic components.
電子部品の製造方法で製造される電子部品の詳細については、例えば、特開2021-027195号公報、国際公開第2023/171394号、国際公開第2020/218218号(これらの文献の開示は、その全体が参照により本明細書に取り込まれる)等の記載を参照することができる。 For details of electronic components manufactured using the electronic component manufacturing method, please refer to, for example, JP 2021-027195 A, WO 2023/171394, WO 2020/218218 (the disclosures of these documents are incorporated herein by reference in their entirety).
電極形成工程では、めっき液と表面に導電性層を有する素体とを接触させてめっき層を含む電極層を形成する。電極形成工程におけるめっき方法は、電解めっきであっても無電解めっきであってもよく、好ましくは電解めっきであってよい。めっき液は、めっき組成物の製造工程で得られるめっき組成物の少なくとも一部を含むことを除けば、通常用いられるめっき液であってよい。めっき液は、例えば、スズ(II)イオン、界面活性剤、錯化剤等を含んで構成されていてよい。めっき液は、製造されためっき組成物に加えて、製造工程で除去されることがある界面活性剤等を必要に応じてさらに含んでいてよい。 In the electrode formation process, a plating solution is brought into contact with an element having a conductive layer on its surface to form an electrode layer including a plating layer. The plating method in the electrode formation process may be electrolytic plating or electroless plating, and preferably electrolytic plating. The plating solution may be a commonly used plating solution, except that it contains at least a portion of the plating composition obtained in the plating composition production process. The plating solution may be composed of, for example, tin (II) ions, a surfactant, a complexing agent, etc. In addition to the produced plating composition, the plating solution may further contain, as necessary, surfactants and the like that may be removed in the production process.
電極形成工程に供される素体は、電子部品の部品本体であってよい。部品本体は特に限定されず、例えば積層セラミックコンデンサ、インデクタ、抵抗、LC複合部品、サーミスタ等であってよい。一態様として、部品本体は積層セラミックコンデンサであってよい。部品本体は、その種類に応じて通常行われる手法を用いて構成され得る。部品本体の材質は、特に限定されず、部品本体の種類に応じて通常用いられる材質であってよい。材質としては、例えばセラミック、樹脂、金属、これらの複合材等を挙げることができる。一態様として、部品本体の材質はセラミックであってよい。 The element body subjected to the electrode formation process may be the component body of an electronic component. The component body is not particularly limited, and may be, for example, a multilayer ceramic capacitor, an inductor, a resistor, an LC composite component, a thermistor, etc. In one embodiment, the component body may be a multilayer ceramic capacitor. The component body may be constructed using a method commonly used depending on the type of component body. The material of the component body is not particularly limited, and may be a material commonly used depending on the type of component body. Examples of materials include ceramic, resin, metal, and composites of these. In one embodiment, the material of the component body may be ceramic.
電極形成工程で形成される電極層に含まれるめっき層の厚みは、特に限定されず、目的等に応じて適宜選択すればよい。電極層の厚みは、例えば、0.01μm以上100μm以下であってよく、好ましくは0.1μm以上50μm以下、より好ましくは0.3μm以上10μm以下、例えば0.3μm以上3μm以下または1μm以上5μm以下であってよい。 The thickness of the plating layer included in the electrode layer formed in the electrode formation process is not particularly limited and may be selected appropriately depending on the purpose, etc. The thickness of the electrode layer may be, for example, 0.01 μm or more and 100 μm or less, preferably 0.1 μm or more and 50 μm or less, more preferably 0.3 μm or more and 10 μm or less, for example, 0.3 μm or more and 3 μm or less, or 1 μm or more and 5 μm or less.
電極形成工程には、公知のめっき方法を適用することができ、バレルめっき法、遠心めっき法、ラックめっき法等を適用することができる。 The electrode formation process can be performed using known plating methods, such as barrel plating, centrifugal plating, and rack plating.
電子部品の製造方法が含む工程の一例を、図面を参照して説明する。図2は、本実施形態の一態様である電子部品の製造方法の工程の一部を示す模式図である。電子部品の製造方法では、表面に導電性層を有する素体をスズめっき槽10に投入手段12により投入し、スズめっき槽10中で投入された素体の導電性層上にスズめっき層を含む電極層を形成する。スズめっき槽10からは水が蒸発16する。次いでポンプを用いて電極層が形成された素体をスズめっき槽から水洗槽20にくみ出し手段14によりくみ出す。水洗槽20には、例えば向流多段水洗槽が用いられる。素体は向流多段水洗槽の下流側にくみ出され、上流側へと移動していく。電極層が形成された素体は、最上流槽において向流多段水洗槽から分離手段24により分離される。分離された電極層が形成された素体には乾燥処理が実施される。水洗槽20である向流多段水洗槽では上流側から給水手段22により給水され、水洗水は下流側へと移動する。最下流槽から取り出される水洗水(第1めっき組成物)26は、めっき組成物の製造装置30へと導入される。 An example of the steps included in a method for manufacturing electronic components will be described with reference to the drawings. Figure 2 is a schematic diagram showing part of the steps of a method for manufacturing electronic components, which is one aspect of this embodiment. In this method for manufacturing electronic components, element bodies having a conductive layer on their surface are introduced into a tin plating tank 10 using an introduction means 12, and an electrode layer including a tin plating layer is formed on the conductive layer of the element body introduced into the tin plating tank 10. Water evaporates 16 from the tin plating tank 10. Next, the element bodies with the electrode layer formed thereon are pumped out of the tin plating tank by an extraction means 14 into a water rinsing tank 20 using a pump. The water rinsing tank 20 may be, for example, a countercurrent multi-stage water rinsing tank. The element bodies are pumped downstream of the countercurrent multi-stage water rinsing tank and move upstream. The element bodies with the electrode layer formed thereon are separated from the countercurrent multi-stage water rinsing tank in the most upstream tank by a separation means 24. The element bodies with the separated electrode layer formed thereon are subjected to a drying process. In the countercurrent multi-stage rinsing tank (20), water is supplied from the upstream side by a water supply means 22, and the rinsing water moves downstream. The rinsing water (first plating composition) 26 extracted from the most downstream tank is introduced into the plating composition manufacturing apparatus 30.
めっき組成物の製造装置30では、スズを含む水洗水から活性炭を用いる不純物除去手段32により不純物(例えば、界面活性剤)の少なくとも一部を除去する。不純物の少なくとも一部が除去された水洗水からは、分離膜を用いる第1濃縮装置36によって水の一部が除去されて第1濃縮液が得られる。水洗水から除去された水36aは、再生水26として水洗槽20に供給される。分離膜を介して水の一部が除去された第1濃縮液からは、低酸素分圧環境下で第2濃縮装置37により水の一部が除去され、第2濃縮液が得られる。第2濃縮液から除去された水37aは、再生水26として水洗水から除去された水36aとともに水洗槽20に供給される。第2濃縮液は、膜で隔離された作用電極室と対向電極室を備える電気化学装置34に導入される。第2濃縮液には、第1金属イオンとしてスズ(IV)イオンが含まれていてよく、さらに第2金属イオンとしてスズ(II)イオンが含まれていてもよい。電気化学装置34では、作用電極をカソードとして水洗水中のスズ(IV)イオンの少なくとも一部が金属スズに還元される。また、第2濃縮液にスズ(II)イオンが含まれる場合、作用電極をカソードとして第2濃縮液中のスズ(II)イオンの少なくとも一部が金属スズに還元されてもよい。次いで、還元された金属スズの少なくとも一部またはスズ基板が、作用電極をアノードとしてスズ(II)イオンに酸化されて、めっき処理に再利用可能な第2めっき組成物38が製造される。製造された第2めっき組成物36には、必要に応じて界面活性剤等の添加剤が添加されて、スズめっき槽10に導入されて再利用される。本実施形態の一態様により、従来は廃棄されていたスズを含む水洗水が、再生されためっき組成物として再利用され、廃棄物の低減に寄与することができる。 In the plating composition manufacturing apparatus 30, at least some impurities (e.g., surfactants) are removed from the tin-containing wash water using an impurity removal means 32 that uses activated carbon. A first concentrator 36 using a separation membrane removes some of the water from the wash water, yielding a first concentrated solution. The water 36a removed from the wash water is supplied to the wash tank 20 as reclaimed water 26. The first concentrated solution, from which some of the water has been removed via the separation membrane, is further removed by a second concentrator 37 in a low-oxygen partial pressure environment, yielding a second concentrated solution. The water 37a removed from the second concentrated solution is supplied to the wash tank 20 as reclaimed water 26, along with the water 36a removed from the wash water. The second concentrated solution is introduced into an electrochemical device 34 that includes a working electrode chamber and a counter electrode chamber separated by a membrane. The second concentrated solution may contain tin(IV) ions as the first metal ions and may further contain tin(II) ions as the second metal ions. In the electrochemical device 34, at least a portion of the tin(IV) ions in the rinse water are reduced to metallic tin using the working electrode as the cathode. If the second concentrate contains tin(II) ions, at least a portion of the tin(II) ions in the second concentrate may be reduced to metallic tin using the working electrode as the cathode. Next, at least a portion of the reduced metallic tin or the tin substrate is oxidized to tin(II) ions using the working electrode as the anode to produce a second plating composition 38 that can be reused in plating processes. The produced second plating composition 36 is optionally supplemented with additives such as surfactants and introduced into the tin plating tank 10 for reuse. According to one aspect of this embodiment, tin-containing rinse water that would previously have been discarded can be reused as a regenerated plating composition, contributing to waste reduction.
本開示に係る発明は、例えば以下の態様を包含してよい。
[1] 第1金属イオンと水とを含む第1めっき組成物から不純物の少なくとも一部を除去することと、前記第1めっき組成物から、分離膜を介して前記水の一部を除去して第1濃縮液を得ることと、前記第1濃縮液から、低酸素分圧環境下で前記水の一部を除去して第2濃縮液を得ることと、対向電極を備える対向電極室とイオン交換膜、逆浸透膜及びナノろ過膜からなる群から選択される少なくとも1種の膜で隔離され、作用電極を備える作用電極室に、前記第2濃縮液を導入し、前記第2濃縮液中の前記第1金属イオンの少なくとも一部を、前記作用電極をカソードとして金属に還元することと、前記還元された金属と同種の金属を、前記作用電極をアノードとして、前記第1金属イオンよりも酸化数の低い第2金属イオンに酸化して、前記第2金属イオンと水とを含む第2めっき組成物を得ることと、を含むめっき組成物の製造方法。
The invention according to the present disclosure may include, for example, the following aspects.
[1] A method for producing a plating composition, comprising: removing at least a portion of impurities from a first plating composition containing first metal ions and water; removing a portion of the water from the first plating composition through a separation membrane to obtain a first concentrated solution; removing a portion of the water from the first concentrated solution in a low oxygen partial pressure environment to obtain a second concentrated solution; introducing the second concentrated solution into a working electrode chamber separated by a counter electrode chamber having a counter electrode and at least one membrane selected from the group consisting of an ion exchange membrane, a reverse osmosis membrane, and a nanofiltration membrane and having a working electrode, and reducing at least a portion of the first metal ions in the second concentrated solution to metal using the working electrode as a cathode; and oxidizing a metal similar to the reduced metal to a second metal ion having a lower oxidation number than the first metal ion using the working electrode as an anode to obtain a second plating composition containing the second metal ions and water.
[2] 前記第1めっき組成物は、界面活性剤を更に含む[1]に記載の製造方法。 [2] The manufacturing method described in [1], wherein the first plating composition further contains a surfactant.
[3] 前記第1めっき組成物から前記界面活性剤の少なくとも一部を除去することを更に含む[2]に記載の製造方法。 [3] The manufacturing method described in [2], further comprising removing at least a portion of the surfactant from the first plating composition.
[4] 前記分離膜が逆浸透膜を含む[1]から[3]のいずれかに記載の製造方法。 [4] The manufacturing method described in any one of [1] to [3], wherein the separation membrane includes a reverse osmosis membrane.
[5] 前記第2濃縮液を得ることは、減圧下で前記第1濃縮液から前記水の一部を除去することを含む[1]から[4]のいずれかに記載の製造方法。 [5] The manufacturing method described in any one of [1] to [4], wherein obtaining the second concentrated liquid includes removing a portion of the water from the first concentrated liquid under reduced pressure.
[6] 前記第2濃縮液を得ることは、前記第1濃縮液を凍結することと、前記凍結した第1濃縮液から減圧下で前記水の一部を除去することとを含む[1]から[5]のいずれかに記載の製造方法。 [6] The manufacturing method described in any one of [1] to [5], wherein obtaining the second concentrated liquid includes freezing the first concentrated liquid and removing a portion of the water from the frozen first concentrated liquid under reduced pressure.
[7] 前記第2濃縮液を得ることは、前記第1濃縮液から水を含むミストを生成させることと、生成したミストの少なくとも一部を除去することとを含む[1]から[4]のいずれかに記載の製造方法。 [7] A manufacturing method according to any one of [1] to [4], wherein obtaining the second concentrated liquid includes generating a mist containing water from the first concentrated liquid and removing at least a portion of the generated mist.
[8] 前記第1めっき組成物は、溶質の総濃度が150g/L以下である[1]から[7]のいずれかに記載の製造方法。 [8] The manufacturing method described in any one of [1] to [7], wherein the first plating composition has a total solute concentration of 150 g/L or less.
[9] 前記第2濃縮液は、溶質の総濃度が30g/L以上である[1]から[8]のいずれかに記載の製造方法。 [9] The manufacturing method described in any one of [1] to [8], wherein the second concentrated solution has a total solute concentration of 30 g/L or more.
[10] 前記第1金属イオンはスズ(IV)イオンを含み、前記第2金属イオンはスズ(II)イオンを含む[1]から[9]のいずれかに記載の製造方法。 [10] The manufacturing method described in any one of [1] to [9], wherein the first metal ions include tin(IV) ions and the second metal ions include tin(II) ions.
[11] [1]から[10]のいずれかに記載の製造方法で得られるめっき組成物。 [11] A plating composition obtained by the manufacturing method described in any one of [1] to [10].
以下、本発明を実施例により具体的に説明するが、本発明はこれらの実施例に限定されるものではない。 The present invention will be explained in more detail below using examples, but the present invention is not limited to these examples.
めっき組成物の調製
精製水、スズ(IV)イオン源としてスズ(IV)酸カリウム、スズ(II)イオン源としてメタンスルホン酸スズ(II)、グルコン酸、デシルトリメチルアンモニウムクロリドを含むカチオン系界面活性剤、ヒドロキノン、メタンスルホン酸ナトリウムを用いて、以下に示す組成を有するめっき組成物を調製した。
Preparation of Plating Composition A plating composition having the composition shown below was prepared using purified water, potassium stannate (IV) as a tin (IV) ion source, tin (II) methanesulfonate as a tin (II) ion source, gluconic acid, a cationic surfactant containing decyltrimethylammonium chloride, hydroquinone, and sodium methanesulfonate.
組成
スズ(IV)イオン:0.16mol/L
スズ(II)イオン:0.04mol/L
グルコン酸:0.8mol/L
メタンスルホン酸:1.2mol/L
界面活性剤:1g/L
ヒドロキノン:1g/L
ナトリウムイオン:1.4mol/L
Composition Tin (IV) ion: 0.16 mol/L
Tin (II) ion: 0.04 mol/L
Gluconic acid: 0.8 mol/L
Methanesulfonic acid: 1.2 mol/L
Surfactant: 1 g/L
Hydroquinone: 1g/L
Sodium ion: 1.4 mol/L
実施例1
上記で調製しためっき組成物を精製水で30倍希釈した第1めっき組成物を、活性炭フィルター(日本フィルター社製のFCC-S)を液送圧0.1MPaで通過させて、界面活性剤の除去を行ってフィルター処理液を得た。得られたフィルター処理液を、逆浸透膜(RO膜;ダイセン・メンブレンシステムズ社製のDRA991C)を用いて、液送圧2MPaで流して水の一部を除去して濃縮することで、目標濃縮率の1/5程度の濃度まで濃縮した第1濃縮液を得た。得られた第1濃縮液を窒素ガスで置換した後、ロータリーエバポレーター(東京理化器械株式会社製のN-2110)を用いて、窒素雰囲気下、100hPa、60℃、60rpmの条件で濃縮して、調製しためっき組成物と等倍の成分濃度の第2濃縮液を得た。
Example 1
The plating composition prepared above was diluted 30 times with purified water to prepare a first plating composition, which was then passed through an activated carbon filter (FCC-S, manufactured by Nippon Filter Co., Ltd.) at a feed pressure of 0.1 MPa to remove the surfactant and obtain a filtered solution. The filtered solution was then passed through a reverse osmosis membrane (RO membrane; DRA991C, manufactured by Daisen Membrane Systems Co., Ltd.) at a feed pressure of 2 MPa to remove a portion of the water and concentrate the solution, thereby obtaining a first concentrated solution concentrated to a concentration of approximately 1/5 of the target concentration. The resulting first concentrated solution was then purged with nitrogen gas and then concentrated using a rotary evaporator (N-2110, manufactured by Tokyo Rikakikai Co., Ltd.) under a nitrogen atmosphere at 100 hPa, 60°C, and 60 rpm to obtain a second concentrated solution with component concentrations equal to those of the prepared plating composition.
第2濃縮液から金属スズを以下のようにして還元析出させた。作用電極としてPt板、対向電極としてPt/Tiメッシュ板を備え、作用電極室と対向電極室とが陽イオン交換膜(Nafion(TM)424)で隔離された電気化学装置を準備した。電気化学装置の作用電極室に第2濃縮液を導入し、対向電極室にはメタンスルホン酸液を導入した。作用電極をカソードとし、対向電極をアノードとして、1A/dm2の電流密度で、スズイオンの還元反応を行った。このとき液温は65℃以下となるようにした。次いで、作用電極をアノードとし、対向電極をカソードとして、1A/dm2の電流密度で、析出した金属スズの酸化反応を行って第2めっき組成物を得た。 Metallic tin was reductively deposited from the second concentrated solution as follows. An electrochemical device was prepared, equipped with a Pt plate as the working electrode and a Pt/Ti mesh plate as the counter electrode, with the working electrode chamber and the counter electrode chamber separated by a cation exchange membrane (Nafion ™ 424). The second concentrated solution was introduced into the working electrode chamber of the electrochemical device, and a methanesulfonic acid solution was introduced into the counter electrode chamber. A reduction reaction of tin ions was carried out at a current density of 1 A/ dm² , with the working electrode as the cathode and the counter electrode as the anode. The solution temperature was kept at 65°C or lower. Next, an oxidation reaction of the deposited metallic tin was carried out at a current density of 1 A/ dm² , with the working electrode as the anode and the counter electrode as the cathode, to obtain a second plating composition.
得られた第2めっき組成物の成分を分析により確認した後、めっき組成物として不足している成分を添加することでスズめっき液として再利用可能であることを確認した。 After confirming the components of the resulting second plating composition through analysis, it was confirmed that it could be reused as a tin plating solution by adding any missing components in the plating composition.
比較例1
第1濃縮液の濃縮を大気雰囲気下で実施したこと以外は、実施例1と同様にして第2濃縮液を得た。
Comparative Example 1
A second concentrated liquid was obtained in the same manner as in Example 1, except that the first concentrated liquid was concentrated in the air.
スズ(II)イオン濃度の評価
実施例1および比較例1で得られた第2濃縮液について、スズ(II)イオンの濃度を以下のようにして評価した。結果を表1に示す。なお、濃縮を行う前の第1めっき組成物を参考例0とし、ロータリーエバポレーターによる濃縮をおこなわずに窒素雰囲気下、室温(27℃)で8時間放置した試料を参考例1とし、ロータリーエバポレーターによる濃縮をおこなわずに大気雰囲気下、室温(27℃)で8時間放置した試料を参考例2として評価した。表1には参考例0におけるスズ(II)イオン濃度を100%とする相対濃度を示す。
Evaluation of Tin(II) Ion Concentration The tin(II) ion concentrations of the second concentrated solutions obtained in Example 1 and Comparative Example 1 were evaluated as follows. The results are shown in Table 1. The first plating composition before concentration was designated Reference Example 0, a sample that was left for 8 hours at room temperature (27°C) in a nitrogen atmosphere without being concentrated using a rotary evaporator was designated Reference Example 1, and a sample that was left for 8 hours at room temperature (27°C) in an air atmosphere without being concentrated using a rotary evaporator was designated Reference Example 2. Table 1 shows the relative concentrations, with the tin(II) ion concentration in Reference Example 0 set to 100%.
酸化還元滴定と高周波誘導結合プラズマ発光分光分析法(ICP-AES)を組み合わせて、スズ(IV)イオンとスズ(II)イオンの濃度を評価した。酸化還元滴定として具体的には、でんぷんを指示薬として2M塩酸中、ヨウ素標準液を用いて滴定することで、スズ(II)イオンの濃度を算出した。またICP-AESを用いてスズイオンの総濃度を算出し、スズ(II)イオンの濃度を差し引くことでスズ(IV)イオンの濃度を算出した。 The concentrations of tin(IV) ions and tin(II) ions were evaluated using a combination of redox titration and inductively coupled plasma atomic emission spectroscopy (ICP-AES). Specifically, the redox titration was performed using starch as an indicator in 2M hydrochloric acid with an iodine standard solution to calculate the concentration of tin(II) ions. Additionally, the total concentration of tin ions was calculated using ICP-AES, and the concentration of tin(IV) ions was calculated by subtracting the concentration of tin(II) ions.
表1から、窒素雰囲気下で濃縮することでスズ(II)イオンの酸化が抑制されることが分かる。 Table 1 shows that concentrating under a nitrogen atmosphere suppresses the oxidation of tin(II) ions.
実施例2
ロータリーエバポレーターによる濃縮の代わりに、凍結乾燥機(東京理化器械株式会社製の凍結乾燥機FDU-1110)を用い、以下のようにして濃縮を行った。第1濃縮液1500mLを容器に入れて-30℃に設定した冷凍庫で凍らせ、凍結乾燥機にセットした。凍結乾燥機は-40℃、真空度は10Paに設定した。減圧する前に装置内を窒素置換した。凍結乾燥機で約1日処理することで300mLに濃縮された。
Example 2
Instead of concentration using a rotary evaporator, a freeze dryer (freeze dryer FDU-1110 manufactured by Tokyo Rikakikai Co., Ltd.) was used to carry out concentration as follows: 1500 mL of the first concentrate was placed in a container, frozen in a freezer set to -30°C, and set in the freeze dryer. The freeze dryer was set to -40°C and the degree of vacuum was 10 Pa. The atmosphere inside the device was replaced with nitrogen before reducing the pressure. After processing in the freeze dryer for about one day, the concentrate was concentrated to 300 mL.
凍結乾燥による濃縮後の第2濃縮液のスズ(II)イオン濃度は、濃縮前の第1濃縮液に対して5倍であった。濃縮倍率を考慮すると凍結乾燥でのスズ(II)イオンの酸化はなかったと考えられる。 The tin(II) ion concentration in the second concentrate after concentration by freeze-drying was five times that of the first concentrate before concentration. Considering the concentration ratio, it is believed that there was no oxidation of tin(II) ions during freeze-drying.
実施例3
ロータリーエバポレーターによる濃縮の代わりに、超音波振動を用いたミスト化で水の除去を行う霧化分離装置(ナノミストテクノロジーズ株式会社の霧化分離装置USA-L5)を用い、以下のようにして濃縮を行った。第1濃縮液1500mLを装置に接続した容器に入れた。装置内を窒素ガスでパージして窒素雰囲気に置換した。液温60℃になるように浴を温め、約8時間処理することで300mLに濃縮された。
Example 3
Instead of concentration using a rotary evaporator, concentration was carried out using an atomization separation device (NanoMist Technologies Inc., USA-L5 atomization separation device) that removes water by misting using ultrasonic vibrations, as follows. 1500 mL of the first concentrated liquid was placed in a container connected to the device. The inside of the device was purged with nitrogen gas to replace the nitrogen atmosphere. The bath was heated to a liquid temperature of 60°C, and the liquid was concentrated to 300 mL by treating for approximately 8 hours.
霧化分離装置による濃縮後の第2濃縮液のスズ(II)イオン濃度は、濃縮前の第1濃縮液に対して5倍であった。濃縮倍率を考慮すると霧化分離装置でのスズ(II)イオンの酸化はなかったと考えられる。 The tin (II) ion concentration in the second concentrate after concentration using the atomization separation device was five times that of the first concentrate before concentration. Considering the concentration ratio, it is believed that there was no oxidation of tin (II) ions in the atomization separation device.
日本国特許出願2024-012029号(出願日:2024年1月30日)の開示はその全体が参照により本明細書に取り込まれる。本明細書に記載された全ての文献、特許出願、及び技術規格は、個々の文献、特許出願、及び技術規格が参照により取り込まれることが具体的かつ個々に記された場合と同程度に、本明細書に参照により取り込まれる。 The disclosure of Japanese Patent Application No. 2024-012029 (filing date: January 30, 2024) is incorporated herein by reference in its entirety. All documents, patent applications, and technical standards described herein are incorporated herein by reference to the same extent as if each individual document, patent application, and technical standard was specifically and individually indicated to be incorporated by reference.
Claims (11)
前記第1濃縮液から、低酸素分圧環境下で前記水の一部を除去して第2濃縮液を得ることと、
対向電極を備える対向電極室とイオン交換膜、逆浸透膜及びナノろ過膜からなる群から選択される少なくとも1種の膜で隔離され、作用電極を備える作用電極室に、前記第2濃縮液を導入し、前記第2濃縮液中の前記第1金属イオンの少なくとも一部を、前記作用電極をカソードとして金属に還元することと、
前記還元された金属と同種の金属を、前記作用電極をアノードとして、前記第1金属イオンよりも酸化数の低い第2金属イオンに酸化して、前記第2金属イオンと水とを含む第2めっき組成物を得ることと、を含むめっき組成物の製造方法。 removing a portion of the water from a first plating composition containing first metal ions and water through a separation membrane to obtain a first concentrated solution;
removing a portion of the water from the first concentrated solution in a low oxygen partial pressure environment to obtain a second concentrated solution;
introducing the second concentrated solution into a counter electrode chamber having a counter electrode and a working electrode chamber having a working electrode, the counter electrode chamber being separated by at least one membrane selected from the group consisting of an ion exchange membrane, a reverse osmosis membrane, and a nanofiltration membrane, and reducing at least a portion of the first metal ions in the second concentrated solution to a metal using the working electrode as a cathode;
oxidizing a metal of the same type as the reduced metal to a second metal ion having a lower oxidation number than the first metal ion, using the working electrode as an anode, to obtain a second plating composition containing the second metal ion and water.
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