WO2025027164A1 - Coupling system for valve disc, and vacuum valve - Google Patents

Abstract

A vacuum valve with a valve seat which has a first sealing surface surrounding the valve opening, a valve closure with a second sealing surface corresponding to the first sealing surface, and a coupling arrangement. The vacuum valve has a drive unit and a connecting element (20) defining a connecting axis (V) and having a first end and a second end, the second end lying opposite the first end along the connecting axis (V), and wherein the connecting element (20) is connected at the first end to the drive unit, and has a connecting portion (21) defining a connecting width (22) for insertion into the coupling arrangement (10) in the region of the second end. The drive unit is designed in such a manner that the valve closure (4) in a coupled state is adjustable from an open position into a closed position and back. The connecting portion (21) has a fastening recess (23) extending along the connecting axis (V), has a depression (24) which is set back with respect to the connecting width (22), extends orthogonally to the connecting axis (V) and has a depression opening (25), which is open towards the fastening recess (23), and has a clamping element (26) which is located in the depression (24) and is movably mounted at least orthogonally to the connecting axis (V), the clamping element (26) projecting through the depression opening (25) into the fastening recess (23).

Description

coupling system for valve plate and vacuum valve

The invention relates to a vacuum valve for moving and positioning a valve closure that can be coupled to a drive unit using a coupling element in a process atmosphere, and to such a valve closure.

Vacuum valves are used in particular in vacuum chamber systems in the field of IC, semiconductor, flat panel or substrate production, which must take place in a protected atmosphere with, if possible, no contaminating particles.

Such vacuum chamber systems comprise in particular at least one evacuatable vacuum chamber intended to accommodate semiconductor elements or substrates to be processed or manufactured, which has at least one vacuum chamber opening through which the semiconductor elements or other substrates can be guided into and out of the vacuum chamber. For example, in a production plant for semiconductor wafers or liquid crystal substrates, the highly sensitive semiconductor or liquid crystal elements sequentially pass through several process vacuum chambers in which the parts located within the process vacuum chambers are processed using a processing device each.

Such process chambers often have additional valves such as a transfer valve, the cross-section of which is adapted to the substrate and robot and through which the substrate can be introduced into the vacuum chamber and, if necessary, removed after the intended processing. In addition, For example, a further transfer valve can be provided through which the processed substrate is brought out of the chamber.

The substrate, e.g. a wafer, is guided using a suitably designed and controlled robot arm, which can be moved through the opening in the process chamber provided by the transfer valve. The process chamber is then loaded by gripping the substrate with the robot arm, bringing the substrate into the process chamber and placing the substrate in the chamber in a defined manner. The process chamber is emptied in a similar manner.

In general, vacuum valves for regulating a volume or mass flow and/or for essentially closing a flow path in a gas-tight manner that leads through an opening formed in a valve housing are known in various designs from the prior art and - as mentioned above - are used in particular in vacuum chamber systems in the field of IC, semiconductor or substrate production, which must take place in a protected atmosphere with as little contaminating particles as possible. Both during the processing within the process vacuum chambers and during transport from chamber to chamber, the highly sensitive semiconductor elements or substrates must always be in a protected atmosphere - in particular in an airless environment.

For this purpose, peripheral valves are used to open and

Closing a gas supply or outlet and on the other hand

Transfer valves for opening and closing the Transfer openings in the vacuum chambers are used for loading and unloading parts.

The vacuum valves passed through by semiconductor components are called vacuum transfer valves due to the described application area and the associated dimensioning, due to their predominantly rectangular

Due to their opening cross-section they are also called rectangular valves and, due to their usual mode of operation, they are also called slide valves, rectangular slide valves or transfer slide valves.

Peripheral valves are used in particular to control or regulate the gas flow between a vacuum chamber and a vacuum pump or another vacuum chamber. Peripheral valves are located, for example, within a pipe system between a process vacuum chamber or a transfer chamber and a vacuum pump, the atmosphere or another process vacuum chamber. The opening cross-section of such valves, also called pump valves, is usually smaller than that of a vacuum transfer valve. Since peripheral valves are used, depending on the area of application, not only to fully open and close an opening, but also to control or regulate a flow by continuously adjusting the opening cross-section between a fully open position and a gas-tight closed position, they are also referred to as control valves. One possible peripheral valve for controlling or regulating the gas flow is the pendulum valve.

In a typical pendulum valve, as known for example from US 6,089,537 (Olmsted), in a first step a generally round valve disc is moved over a The opening, which is usually also round, is rotated from a position which releases the opening to an intermediate position which covers the opening. In the case of a slide valve, as described for example in US 6,416,037 (Geiser) or US 6,056,266 (Blecha), the valve plate, like the opening, is usually rectangular and in this first step is pushed linearly from a position which releases the opening to an intermediate position which covers the opening. In this intermediate position, the valve plate of the pendulum or slide valve is at a distance from the valve seat surrounding the opening. In a second step, the distance between the valve plate and the valve seat is reduced so that the valve plate and the valve seat are pressed evenly against one another and the opening is essentially sealed gas-tight. This second movement preferably takes place essentially in a direction perpendicular to the valve seat. Sealing can be achieved, for example, either by means of a sealing ring arranged on the closing side of the valve plate, which is pressed onto the valve seat surrounding the opening, or by means of a sealing ring on the valve seat, against which the closing side of the valve plate is pressed. As a result of the closing process taking place in two steps, the sealing ring between the valve plate and the valve seat is hardly subjected to shear forces which would destroy the sealing ring, since the movement of the valve plate in the second step takes place essentially in a straight line perpendicular to the valve seat.

Different sealing devices are available from the state of

Technology is known, for example from US 6,629,682 B2 (Duelli). A suitable material for sealing rings and Seals for vacuum valves, for example, are fluororubber, also called FKM, in particular the fluoroelastomer known under the trade name "Viton", as well as perfluororubber, or FFKM for short.

The valve plate must be pressed onto the valve seat in such a way that the required gas-tightness is ensured within the entire pressure range and that damage to the sealing medium, in particular the sealing ring in the form of an O-ring, is avoided due to excessive pressure. To ensure this, known valves provide a contact pressure control of the valve plate that is regulated depending on the pressure difference between the two sides of the valve plate. However, particularly in the case of large pressure fluctuations or when changing from negative pressure to positive pressure, or vice versa, an even distribution of force along the entire circumference of the sealing ring cannot always be guaranteed. In general, the aim is to decouple the sealing ring from support forces that result from the pressure applied to the valve. In the

US 6,629,682 (Duelli) proposes, for example, a vacuum valve with a sealing medium which is composed of a sealing ring and an adjacent support ring, so that the sealing ring is essentially freed from support forces.

In order to achieve the required gas tightness, possibly for both overpressure and underpressure, some known pendulum valves or slide valves provide, in addition to or as an alternative to the second movement step, a valve ring which can be moved perpendicularly to the valve plate and surrounds the opening, which is pressed onto the valve plate to close the valve gas-tight. Such valves with Valve rings that can be actively moved relative to the valve disk are known, for example, from DE 1 264 191 Bl, the

DE 34 47 008 C2 , US 3 , 145 , 969 (von Zweck) and DE 77 31 993 U .

What the vacuum valves mentioned have in common is that a movable valve closure (valve plate) is usually guided by a drive with a polymer-based sealing material and is intended to provide the valve effect. The closure is typically at least partially exposed to the machining process in the process volume and is therefore subject to increased wear. Regular or as-needed replacement of the valve closure is therefore necessary.

The maintenance or replacement of such valve disks generally requires a standstill or interruption of production processes and a more or less massive intervention in the overall system. Replacing a valve closure often requires the laborious removal of fastening devices for the corresponding element. This often leads to relatively long downtimes and requires special tools for the maintenance process. Fasteners that ensure a fixed arrangement of the active element in the process are also often difficult to access due to their design.

This situation is also disadvantageous when unexpected problems occur in the system (e.g. a leak in the valve) which require immediate and rapid intervention.

It is therefore an object of the present invention to provide an improved vacuum valve or an improved To provide a valve closure for such a valve in which the above disadvantages are reduced or avoided.

In particular, it is an object of the invention to provide an improved vacuum valve which enables optimized, i.e. in particular faster, simpler and more reliable, maintenance of the device.

The invention is further based on the object of providing a correspondingly improved vacuum valve for the optimized replacement of wearing parts.

The invention is further based on the object of providing a correspondingly improved valve closure for optimized replacement on a vacuum valve.

These objects are achieved by implementing the characterizing features of the independent claims. Features that further develop the invention in an alternative or advantageous manner can be found in the dependent patent claims.

The invention is based on the approach of providing a simpler way of maintaining a vacuum valve that avoids or reduces the risk of particle formation in a vacuum area. According to the invention, a specific coupling with in particular a fastening element, preferably designed as a bolt, and a counterpart on the valve designed to clamp or lock with the bolt is to be used for this purpose. The counterpart (connecting element) is to be provided in particular as part of the valve, e.g. by the valve rod. The valve closure can then be made by the Locking of the bolt to the counterpart with the bolt attached.

The fastening element and the corresponding connecting element are designed in such a way that locking can be achieved by bringing the fastening element together with the connecting element and then simply rotating the fastening element in a defined manner, e.g. by 90°. For this purpose, the valve plate is already arranged on the connecting element beforehand (initially loosely) and the fastening element then projects through part of the valve plate into the connecting element.

The fastening element thereby replaces in particular a screw or an alternative fastening means and advantageously provides a simple fastening (locking) and release of a valve disk.

The invention relates to a vacuum valve for regulating a volume or mass flow and/or for closing and opening a valve opening. The vacuum valve has a valve seat which has a first sealing surface surrounding the valve opening and also has a valve closure with a second sealing surface corresponding to the first sealing surface and a coupling arrangement.

The vacuum valve further comprises a drive unit and a connecting element defining a connecting axis with a first end and a second end, wherein the second end is opposite the first end along the connecting axis, in particular coaxially, and wherein the connecting element is connected to the drive unit at the first end. The connecting element can be, for example, a valve rod or a drive arm and can be moved by means of the drive.

In particular, the vacuum valve can have a separating device for separating a process atmosphere region from an external atmosphere region, wherein the drive unit is at least partially assigned to the external atmosphere region and the connecting element is at least partially assigned to the process atmosphere region. The vacuum valve is designed in particular for use in a vacuum region, wherein a part of the valve is present and moved in the vacuum region and another part, preferably parts of the drive unit, is present outside this region. The separating device can be formed by a housing or a bellows of the drive unit (e.g. connected on the one hand to the connecting element and on the other hand to the drive unit).

The separating device can be designed, for example, as a bellows or as a sliding feedthrough, which is sealed, for example, with an O-ring.

The drive unit can be designed as a pneumatic drive cylinder or have an electric motor.

The connecting element has a connecting section defining a connection width for insertion into the coupling arrangement in the region of the second end. The valve closure can thus be connected to the connecting element by means of the coupling arrangement by means of a fastening element, whereby a coupling state can be provided. Accordingly, a valve rod, for example, can have a device (connecting section) at its free end which is designed for connection to the valve closure by interacting with the fastening element.

The drive unit is designed in such a way that the valve closure in the coupling state can be adjusted from an open position, in which the valve closure at least partially exposes the valve opening, to a closed position, in which there is a sealing contact between the first sealing surface and the second sealing surface and the valve opening is thereby closed in a gas-tight manner, and back. The sealing contact can be provided, for example, by a seal (sealing material, O-ring) which is arranged on the side of the valve seat or the valve closure.

The connecting section has a fastening recess extending along the connecting axis. This recess is in particular recessed relative to the second end of the connecting element and can have a round cross-section.

The connecting section further comprises a depression (recess) which is set back with respect to the connection width and extends orthogonally to the connection axis, with a countersunk opening which is open towards the fastening depression, and a clamping element which is arranged in the depression and is mounted so as to be movable at least orthogonally to the connection axis. The clamping element projects (partially) through the countersunk opening into the fastening depression. In particular, the fastening recess can be cylindrical or polygonal in shape.

The connecting section is limited axially in particular with respect to the connecting axis, in particular the axial limitation corresponds to the axial dimension of the fastening recess.

In one embodiment, the countersunk opening and the clamping element can be designed to correspond in such a way that the clamping element is partially in the countersunk opening and partially protrudes into the fastening recess with a maximum of a certain projection. An inner clamping width can be defined in the fastening recess. The clamping element is designed to correspond in such a way with the countersunk opening that the clamping element cannot be pushed completely through the opening, but is partially held back in the countersunk opening due to its spatial dimensions and/or shape. The maximum projection into the fastening recess occurs in particular when the clamping element contacts the edge of the countersunk opening and is held back from further penetration into the fastening recess by means of the edge.

The inner clamping width can here correspond in particular to a distance between a surface of the clamping element and a surface opposite the clamping element in the fastening recess. The opposite surface can in particular be provided by a second clamping element which is present in the depression designed as a circumferential depression or is arranged in a further depression. Clamping or locking by means of the clamping element can be provided by the interaction with the fastening element in the fastening recess. For this purpose, the fastening element is designed in particular such that the interaction with the clamping element can be provided or optionally avoided by rotating the fastening element in the fastening recess.

According to one embodiment, a restoring element that interacts with the clamping element can be arranged on the connecting section, in particular in the depression, and can cause a restoring force on the clamping element in the direction of the fastening recess. The restoring element can in particular be designed as an annular spring.

The return element can be arranged circumferentially around the connecting portion, for example as a clamp, and thereby provide a retaining force on several clamping elements.

The return element can in particular be shaped and arranged in such a way that the clamping element or several clamping elements are pressed radially in the direction of a central axis (connecting axis) and thereby - in the case of non-coupling or without a radially opposing force - provide the maximum projection into the fastening recess.

In one embodiment, the clamping element can be spherical, cylindrical or pyramid-shaped, in particular as a ball. In a ball design, a ball diameter is particularly chosen so that it is larger than the diameter of the countersunk opening.

According to one embodiment, the depression and the clamping element can be designed such that the depression, in particular the countersink opening, limits or prevents the mobility of the clamping element in a direction parallel to the connection axis, in particular in the direction of the second end. In particular, the depression provides a (vertically directed) stop for the clamping element. Due to such limited mobility of the clamping element, an axial locking of the fastening element can take place when there is interaction between the clamping element and the fastening element, whereby an axially directed tensile force can be caused by the fastening element on the valve plate.

In one embodiment, the vacuum valve can have the fastening element for fastening the valve closure to the connecting element. The fastening element can define a fastening axis corresponding to its extension and have a fastening section for interacting with the connecting section and a holding section for interacting with the coupling arrangement. The fastening section can be assigned to a first end and the holding section to a second end of the fastening element.

The fastening section in particular provides a first fastening width which is smaller than the inner clamping width and provides a second fastening width which is larger than the inner clamping width. The The first fastening width and the second fastening width are provided at an angle in a common plane which is aligned orthogonal to the fastening axis.

By means of the second fastening width, a locking with the clamping element can be provided. The first fastening width can provide a simple, contact-free insertion of the fastening section into the fastening recess of the connecting element.

In one embodiment, the fastening element can be arranged such that the fastening section at least partially overlaps the connecting section axially, in particular lies axially (completely) in the connecting section. The holding section can contact the coupling arrangement. In this arrangement, the fastening element can optionally provide the coupling state or not interact with the connecting element depending on its rotational position about the fastening axis.

In particular, the fastening element can have two opposite contact sides in the fastening section and a distance between the contact sides can provide the second fastening width. The fastening element can also be arranged and radially aligned such that at least one of the contact sides interacts with the clamping element and the coupling state is thereby provided. The opposite contact sides point in diametrically opposite directions. According to one embodiment, the at least one contact side can be shaped in such a way, in particular concavely shaped, that when interacting with the clamping element, a force acting in the axial direction is generated, in particular parallel to the fastening axis and/or connection axis, whereby the valve closure is held on the connection element.

In particular, the at least one contact side can have a cantilevered and curved contact surface, wherein the contact surface points away from the first end of the fastening element, the contact surface contacts the clamping element and thereby a force acting in the axial direction is generated.

In the coupled state, the contact surface can then interact with the clamping element, whereby the contact surface can provide a support or receptacle for the clamping element. This support can be correspondingly concave. Such a support can be located on the clamping element in particular opposite the vertical movement limit provided by the depression. This can provide a (detachable) positive connection between the fastening element and the connecting element.

In one embodiment, the fastening element can have a shoulder in the region of the holding section and the shoulder can interact with the coupling arrangement in such a way that a force acting in the axial direction is generated, in particular parallel to the fastening axis and/or connection axis, whereby the valve closure is held on the connection element. This allows the fastening element to provide a positive-locking interaction with the connecting element at its lower end and thereby cause the coupling arrangement to be pressed against the connecting element at the upper end by means of the shoulder. The tensile force provided by the interaction can be transmitted to the coupling arrangement by means of the shoulder.

In one embodiment, the fastening element can have a rotation limiting element (38) in the region of the holding section, wherein the rotation limiting element can interact with the coupling arrangement in such a way that a radial angle for the radial alignment of the fastening element providing the coupling state can be set and a rotational movement of the fastening element is correspondingly limited.

Such a rotation limiter can, for example, be designed as an element projecting from the fastening element, in particular as a pin, and interact with a corresponding section or formation of the coupling arrangement.

The invention accordingly also relates to a valve closure for a vacuum valve as described herein. The valve closure can in particular be designed as a valve plate. The valve closure has a second sealing surface which is designed as a first sealing surface of a valve seat of the vacuum valve which surrounds the valve opening. The valve closure also has a coupling arrangement for providing a coupling state by connecting the coupling arrangement to the connecting element of the vacuum valve by means of the fastening element. In particular, the second sealing surface and the coupling arrangement can be arranged on opposite sides of the valve closure.

The coupling arrangement has a recess defining a central coupling axis for receiving the connecting element. The recess has a receiving area with a coupling opening for inserting and receiving the connecting element and a holding area with a fastening opening diametrically opposite the coupling opening for inserting and receiving the fastening element. The fastening opening has, on its side facing away from the recess, a recess accessible from the outside for interacting with a rotation limiting element of the fastening element. The recess also provides a rotation limit for the fastening element.

The recess can in particular be designed as a depression with respect to the surface of an upper side of the coupling arrangement, in particular wherein the upper side is designed orthogonal to the second sealing surface and diametrically opposite to the coupling opening.

The recess is located particularly in the area of the fastening opening on the outside of the coupling arrangement.

In one embodiment, the recess can extend with respect to the coupling axis over a radial angular range between 75 ° and 105 °, in particular over a range of 90 °.

In a combined system, i . h . the

Fastening element is intended for use by the

Mounting hole inserted into the recess, the Rotation limiting element of the fastening element is present in the recess. This limits the rotation of the fastening element about the coupling axis according to the shape of the recess. The rotation limiting element can only be moved within the limits provided by the recess.

The recess is designed in particular in such a way that the rotatability enables the system to be locked precisely by rotating the fastening element up to a first rotation limit and the system to be opened or unlocked by rotating the fastening element up to a second rotation limit. Each of the rotation limits can be provided by a surface or wall of the recess and represent the rotation limit.

If the recess is designed as a depression, the rotation limiting element can be designed in particular as a pin or pointer which is present in the recess in the assembled state and is movable in this. The coupling arrangement has a marking or display in particular in the area of the recess which identifies a state provided by the fastening element depending on its rotational position, in particular the reaching or provision of the coupling state.

In one embodiment, the recess can have a first shoulder associated with the receiving area, wherein the first shoulder is designed to limit an insertion depth for the connecting element, in particular as a stop. Alternatively or additionally, the recess can have a second shoulder associated with the holding area, wherein the second shoulder is designed to limit a Insertion depth for the fastening element and for interaction with the fastening element, in particular as a stop. In particular, the first shoulder and/or the second shoulder can separate the receiving area from the holding area.

The invention accordingly also relates to a fastening element for a vacuum valve described herein for fastening a valve closure to a connecting element of the vacuum valve. The fastening element defines a fastening axis corresponding to its (axial) extension and has an (axially limited) fastening section for interacting with the connecting section of the connecting element and an (axially limited) holding section for interacting with the coupling arrangement of the valve closure. The fastening section is assigned to a first end and the holding section to a second (axially opposite) end of the fastening element.

The fastening section provides a first fastening width and a second fastening width, wherein the first fastening width is smaller than the second fastening width. The first fastening width and the second fastening width are provided angularly offset in a common plane that is oriented orthogonal to the fastening axis.

The fastening element can in particular be designed as a bolt.

In one embodiment, the fastening element can be

Area of the fastening section two opposite

Have insertion sides that are orthogonal to the Mounting axis point in opposite directions, with a distance between the insertion sides providing the first mounting width.

In one embodiment, the fastening element can have two opposite contact sides in the region of the fastening section, which point in opposite directions orthogonal to the fastening axis, wherein a distance between the contact sides provides the second fastening width.

In particular, the alignment of at least one of the contact sides and the relative alignment of at least one of the insertion sides can include an angle from an angular range between 75° and 105°, in particular an angle of 90°. The at least one contact side can be aligned orthogonally to the at least one insertion side.

Due to the offset alignment of the contact and insertion sides, the fastening element can provide at least two different active states when used as intended, depending on its rotational orientation, in particular the locking or coupling state and a release state.

According to one embodiment, the contact sides can each have concavely curved surfaces for interaction with a clamping element of the connecting element. The shape of the contact sides enables the generation of a force coupling state relative to the connecting element with an axially directed force component. In one embodiment, the fastening element can have a shoulder in the region of the holding section, wherein the shoulder is designed to interact with a second shoulder associated with a holding region of the valve closure. By means of this shoulder on the fastening element, the transmission of a tensile force generated by the fastening section (in the direction of the connecting element) to the valve closure or the coupling arrangement can be provided.

In one embodiment, the fastening element can have a rotation limiting element in the region of the holding section, wherein the rotation limiting element is designed to correspond to and cooperate with a recess in the valve closure.

The rotation limiting element can in particular be formed in a radially aligned manner.

In particular, the rotation limiting element can be designed as a projection projecting radially from the fastening element, in particular as a pin or bolt.

The devices according to the invention are described in more detail below using specific embodiments shown schematically in the drawings, purely by way of example, whereby further advantages of the invention are also discussed. In detail:

Fig. 1a-c shows an embodiment of a vacuum valve according to the invention with a coupling arrangement;

Fig. 2 an embodiment of a connecting element

20 of a vacuum valve according to the invention and a fastening element 30 according to the invention that can be connected to the connecting element 20;

Fig. 3a-c show a detail of an embodiment of a vacuum valve according to the invention with a coupling arrangement 10 of a valve closure, a connecting element 20 and a fastening element 30 in a coupling state; and

Fig. 4a-c shows a detail of the embodiment according to figures 3a-c in an uncoupled state.

Figures 1a to 1c schematically show a possible embodiment of a valve 1 according to the invention in the form of a transfer valve 1, shown in different closing positions.

The transfer valve 1 shown is a special form of a slide valve. The vacuum valve has a rectangular, plate-shaped valve closure 4 (e.g. valve disk) which has a sealing surface 6 for the gas-tight closure of an opening 2. The opening 2 has a cross-section corresponding to the valve closure 4 and is formed in a wall 2a. The opening 2 is surrounded by a valve seat which in turn also provides a sealing surface 3 corresponding to the sealing surface 6 of the closure element 4. The sealing surface 6 of the valve closure 4 runs around the valve closure 4 and carries a sealing material 7 (seal). In a closed position (G), the sealing surfaces 3 and 6 are pressed against one another and the sealing material 7 is compressed between the two sealing surfaces 3 and 6. The opening 2 connects a first pressure area L, which is located to the left of the wall 2a in the figure, with a second pressure area R to the right of the wall 2a. The wall 2a is formed, for example, by a chamber wall of a vacuum chamber. The vacuum valve is then formed by an interaction of the chamber wall 2a with the valve closure 4.

It is understood that the valve seat together with the sealing surface 3 can alternatively be designed as a valve component that is structurally firmly connected to the valve 1 and can be arranged, e.g. screwed, at a chamber opening.

The valve closure 4 is arranged on an adjustment arm 20 (connecting element), which here is, for example, rod-shaped, and extends along a geometric adjustment axis V. The adjustment arm 20 is mechanically coupled at its first end to a drive unit 9, by means of which the closure member 4 can be adjusted in the first pressure region L to the left of the wall 2a by adjusting the connecting element 20 by means of the drive unit 9 between an open position 0 (Fig.2a) via an intermediate position Z (Fig.2b) into a closed position G (Fig.2c).

In the open position 0, the valve closure 4 is outside the projection area of the opening 2 and completely opens it, as shown in Figure 2a.

By adjusting the adjusting arm 20 in the axial direction parallel to the adjustment axis V and parallel to the wall 2a, the valve closure 4 can be moved by means of the drive unit 9 from the open position 0 to the intermediate position Z.

In this intermediate position Z, the valve closure 4 covers the opening 2 and is located at a distance from the valve seat. The sealing surfaces 3 and 6 are also located in the corresponding opposite position.

By adjusting the adjusting arm 20 in a direction transverse to the adjustment axis V, i.e. e.g. perpendicular to the wall 2a and to the valve seat and thus in the direction of the axis 5, the closure element 4 can be adjusted from the intermediate position Z into the closed position G (Figure 2c).

In the closed position G, the valve closure 4 closes the opening 2 gas-tight and separates the first pressure area L from the second pressure area R gas-tight.

The opening and closing of the vacuum valve is therefore carried out by means of the drive unit 9 through an L-shaped movement of the valve closure 4 and the adjustment arm 20. Therefore, the transfer valve shown is also called an L-type valve.

A transfer valve as shown is typically used to seal a process volume (vacuum chamber) and to load and unload the volume. Frequent changes between the open position 0 and the closed position G are the norm in such applications. This can lead to increased wear on the sealing surfaces 3 and 6, the seal 7 and the drive 9.

According to the invention, the valve closure 4 has a coupling arrangement 10 for providing a Coupling state by connecting the coupling arrangement 10 to a connecting section provided by the connecting element 20. For this purpose, the coupling arrangement 10 has a recess for receiving the connecting element, into which the connecting section engages in the embodiment shown. In addition, a fastening element, e.g. in the form of a bolt, is provided, by means of which the connection between the coupling arrangement and the connecting element can be provided.

As an alternative to the embodiment shown, the coupling arrangement 10 can be integrated in the valve closure 4 with an attached coupling arrangement in an integrated design. With such an embodiment, the space required for the valve closure 4 can be reduced.

A coupling arrangement 10 of a valve closure according to the invention as well as a corresponding connecting element 20 of a vacuum valve according to the invention as well as a fastening element 30 are shown in detail in the following figures.

Figure 2 shows an embodiment of a connecting element 20 of a vacuum valve according to the invention as well as a fastening element 30 according to the invention that can be connected to the connecting element 20 in an exploded view.

The connecting element 20 is designed here as a valve rod (also referred to as an adjusting arm). Figure 2 shows a second end of the connecting element 20. An opposite first end is connected to the drive unit of the vacuum valve for the controlled movement of the valve disk.

The connecting element 20 has, in the region of the second end, a connecting section 21 with a fastening recess 23 formed centrally around the connecting axis V. The connecting section 21 defines a connecting width 22. The fastening recess 23 is open and accessible from above along the connecting axis V.

In addition, the design provides two depressions 24, each with a countersunk opening 25, wherein the depressions 24 are set back with respect to the connection width 22 and extend orthogonally to the connection axis V, i.e. the depths of the depressions 24 are measured orthogonally to the connection axis V.

The depressions 24 are arranged opposite one another, in particular aligned at an angle of 180 ° relative to one another, thus pointing in two opposite directions.

The connecting section 22 also has two spherical clamping elements 26. The clamping elements 26 are arranged in the depressions 24 and are mounted in such a way that they can move orthogonally to the connecting axis V. The clamping elements 26 are shaped and correspond to the countersunk openings 25 in such a way that each clamping element 26 partially projects through the respective countersunk opening 25 into the fastening recess 23 but cannot be pushed completely through the countersunk opening 25.

In particular, the diameter of a clamping element is larger than the diameter of the corresponding countersink opening. The connecting section 22 also has a restoring element 27, here designed as an annular spring. The annular spring 27 is arranged in the depression 24 and interacts with the clamping elements 26 in such a way that a restoring force is exerted on them in the direction of the fastening depression 23. The clamping elements 26 are thereby pressed into the countersunk openings 25.

This arrangement of countersunk openings 25 , clamping elements 26 and annular spring 27 defines an inner clamping width in the fastening recess 23 , wherein the inner clamping width corresponds to a distance between the surfaces of the clamping elements 26 in the fastening recess 23 .

The fastening element 30 defines a fastening axis B according to its extension. In addition, the fastening element 30 has a fastening section 31 at a first end and a holding section 32 at a second, opposite end. The fastening section 31 is designed and shaped in such a way that it can be brought into a cooperating state with the connecting section 21.

The holding section 32 is shaped such that it can interact with the valve closure of the valve and, in a coupled state, can exert a holding force on the valve closure.

The fastening section 31 has two opposite contact sides 33. The contact sides 33 are concavely shaped in such a way that when interacting with the clamping element 26, a force acting in the axial direction parallel to the fastening axis B can be generated. whereby the fastening element 30 is held to the connecting element 20.

For this purpose, the contact sides 33 have projecting contact surfaces 34, i.e. in the area of the fastening section 31 they protrude from an extending body of the fastening section 31. The contact surfaces 34 or holding surfaces point away from the first, lower end of the fastening element 30 and thus provide a type of clamping stop for the clamping elements 26. The interaction of these components can be seen in detail in the following figures.

The fastening element 30 also has two opposite insertion sides 35 in the region of the fastening section 21 , which point in opposite directions orthogonal to the fastening axis B.

The fastening element 30 is mounted so as to be rotatable about the fastening axis B, particularly when used in accordance with the generic type with the vacuum valve. This means that either the insertion sides 35 or the contact sides 33 can be brought into an opposing position relative to the clamping elements 26. An interaction between the fastening element 30 and the connecting element 20 is only possible when the contact sides 33 are in an opposing position.

Figures 3a to 3c show sections of a

Embodiment of a vacuum valve according to the invention with a coupling arrangement 10 of a valve closure, a connecting element 20 and a fastening element 30 in a coupling state.

The fastening element 30 acts here with the

coupling arrangement 10 and the connecting element 20 such that the coupling arrangement 10 is held on the connecting element 20 by means of the fastening element 30 and the coupling state is provided. The coupling state is produced by the simultaneous interaction of the fastening element 30 with the coupling arrangement 10 and the fastening element 30 with the connecting element 20.

For the cooperation of the fastening element 30 with the coupling arrangement 10, the latter has a holding region 11 with a fastening opening 12 diametrically opposite a coupling opening 15 for inserting and receiving the fastening element 30. The fastening opening 12 and the coupling opening 15 are provided by a recess in the coupling arrangement 10. The extension, shape and/or spatial dimensioning of the recess defines a coupling axis K. The fastening element 30, here designed as a bolt, is inserted into the coupling arrangement 10 from above through the fastening opening 12.

The recess further has a shoulder 13 associated with the holding area 11, wherein the shoulder 13 is formed to limit an insertion depth for the fastening element 30 and to interact with the fastening element 30. In the embodiment shown, the shoulder 13 serves as a stop for the holding section 32 of the fastening element 30 and thereby enables a (downwardly directed) holding force to be exerted on the coupling arrangement 10. The holding force is generated in particular by pressing the fastening element 30.

The fastening element 30 has in the area of the

holding section also has a shoulder 36, whereby this Shoulder 36 is designed to interact with the shoulder 13 assigned to the holding area 11 of the valve closure. In addition, an axial bearing 32a is provided, which can be designed, for example, as a ball bearing or plain bearing. The axial bearing enables simple, in particular low-friction, rotation of the fastening element 30 relative to the coupling arrangement 10.

In addition, the fastening element 30 has a sealing element 37, by means of which contact is established between the shoulders 13 and 36. The sealing element 37 provides a sealing effect between the components on the one hand and can also cause the holding force and/or compensate for a manufacturing tolerance through its axial compression.

For the fastening element 30 to interact with the connecting element 20, the connecting element 20 is introduced into the coupling arrangement 10 from below through the coupling opening 15. The coupling opening 15 is assigned to a receiving area 14 of the coupling arrangement 10. The recess also has a shoulder 16 assigned to the receiving area 14, this shoulder 16 being shaped to limit an insertion depth for the connecting element 20. The shoulder 16 forms a stop for the connecting element 20.

The recess of the coupling arrangement 10 is designed such that, when the fastening element 30 and the connecting element 20 are inserted into the coupling arrangement 10 as intended, the fastening section 31 is axially connected to the connecting section

21 at least overlaps, here in particular axially within of the connecting section 21. In addition, the

holding section 32 the coupling arrangement 10 .

The two opposite contact sides 33 of the fastening element 30 have respective contact surfaces 34 which contact the clamping elements 26 of the connecting element 20. The clamping elements 26 are designed as balls.

The clamping elements 26 are in turn held radially by the return element 27, which is designed as a ring spring, in such a way that in the illustrated rotational position of the fastening element 30, the contact between the contact surfaces 34 and the clamping elements 26 is maintained. The contact sides and thus the fastening element are thereby prevented from sliding away or past. The fastening element 30 is thus locked by the permanent contact, whereby a force acting in the axial direction is generated.

By locking and the tensile force generated thereby and acting on the fastening element 30 in the axial direction downwards, the holding force acting on the shoulder 13 (by means of the holding section 32) is generated accordingly.

In this coupling state, the coupling axis K, the fastening axis B and the connection axis V are arranged coaxially.

Figure 3b shows a section through the interacting and locked arrangement of contact arrangement 10, connecting element 20 and fastening element 30 orthogonal to the coupling axis K and in the region of the connecting section 21. The rotational orientation of the fastening element 30 is evident here such that the contact sides 33 of the fastening element 30 interact with the balls 26 of the connecting element 20 and these are thereby pressed radially away from the connecting axis. The annular spring 27 prevents further radial movement of the balls 26. Because the balls 26 are in the recesses of the connecting element, their freedom of movement in the axial direction is also limited.

The retaining element 27 is shaped in such a way that it does not touch an inner wall of the recess of the contact arrangement 10 even in the expanded coupling state. This specific design can in particular prevent the formation of particles, e.g. due to friction between the elements. The retaining element 27 thus has a width in the coupling state that is smaller than the width (inner diameter) of the recess in the receiving area 14.

Figure 3c shows the locked arrangement of contact arrangement 10, connecting element 20 and fastening element 30 in a plan view of the holding section 32 or the coupling arrangement 10 in perspective from above.

The coupling arrangement 10 has a recess 17 accessible from the outside at its fastening opening for interaction with a rotation limiting element 38 of the fastening element 30. The recess is designed in particular as a depression with respect to the surface of an upper side of the coupling arrangement 10 and extends with respect to the coupling axis K over a radial angle range 18 between 75 ° and 105 ° , here in particular 90 ° .

The rotation limiting element 38 is designed here as a pin which is located in the recess in the coupled state. The fastening element 30 can be rotated accordingly by 90° about the axis K.

A corresponding rotation of the fastening element 30 relative to the orientation shown leads to a release of the locking, i.e. the interaction between the clamping elements and the contact surfaces is cancelled and the two elements are in contactless contact. This state is described in the following figures.

The arrangement according to the invention offers the advantage that, for fastening a valve plate to a vacuum valve, the fastening element according to the invention can be used instead of a fastening means, such as typically a screw, and thus the valve plate can be locked and released by a simple rotary movement.

In contrast to the current state of the art, a specific tightening torque for screwing does not have to be set and provided. This avoids possible sources of error and the corresponding potential for damage. Replacing the valve plate is thus made even easier and does not require a specially trained user.

Figures 4a to 4c show sections of the vacuum valve according to the invention of Figures 3a-3c with the coupling arrangement 10 of the valve closure, the connecting element 20 and the fastening element 30 in a non-coupling state. The coupling arrangement 10, the connecting element 20 and the fastening element 30 are joined together here, but not locked accordingly.

In contrast to the state according to Figures 3a-3c, there is no interaction between the clamping elements 26 and the contact side or contact surfaces. In this unlocked, i.e. open, position, the insertion sides 35 are opposite the clamping elements 26. The fastening section 31 of the fastening element 30 and the connecting section 21 of the connecting element 20 are shaped in such a way that there is no contact between the connecting element 20 and the fastening element 30. With this orientation, the fastening element 30 can be pushed into the coupling arrangement 10 and into the fastening recess 23 easily and without noticeable resistance.

The clamping elements 26 experience a corresponding radial restoring force directed on one side in the direction of the axis K and are thereby pressed maximally into the countersunk openings. The clamping elements 26 protrude accordingly (maximally) into the fastening recess 23. A distance between the surfaces of the two clamping elements 26 corresponds to an inner clamping width 28.

A width of the fastening element 30 in the area of the fastening section 31 between the two interfaces of the insertion sides 35 is smaller than the inner clamping width 28 and corresponds to a first fastening width 39a. Accordingly, the width of the fastening element 30 in the area of the fastening section 31 between the two Contact surfaces 34 larger than the inner clamping width 28 and corresponds to a second fastening width 39b.

Figure 4c shows the unlocked arrangement of contact arrangement 10, connecting element 20 and fastening element 30 in a plan view of the holding section 32 or the coupling arrangement 10 in perspective from above.

The rotation limiting element 38 is here rotated by 90° about the axis K relative to the locked coupling state. In this orientation of the fastening element 30, easy insertion of this element into the connecting element 20 is provided, since contact-free insertion into the fastening recess 23 can be provided due to the smaller first fastening width 39a relative to the inner clamping width 28.

The rotation limiting element 38, in cooperation with the recess 17, provides for simple and precise alignment of the fastening element 30 for insertion or withdrawal of the fastening element 30.

It is understood that the coupling design shown or one included in the present invention can be used in other vacuum valve types of the prior art. Preferably, an arrangement for replacing and/or maintaining a valve closure susceptible to wear can be useful.

It is understood that the figures shown only schematically represent possible embodiments. According to the invention, the various approaches can also be combined with each other and with vacuum devices, in particular for Substrate processing or vacuum valves of the state of the

technology can be combined.

Claims

1. Vacuum valve (1) for regulating a volume or mass flow or for closing and opening a valve opening (2), with • a valve seat having a first sealing surface (3) surrounding the valve opening (2), • a valve closure (4) with a second sealing surface (6) corresponding to the first sealing surface (3) and a coupling arrangement (10), • a drive unit (9) and • a connecting element (20) defining a connecting axis (V) with a first end and a second end, wherein the second end is opposite the first end along the connecting axis (V), and wherein the connecting element (20) ° is connected at the first end to the drive unit (9), and ° a connecting section (21) defining a connection width (22) for insertion into the coupling arrangement (10) in the region of the second end, wherein the valve closure (4) can be connected to the connecting element (20) by means of the coupling arrangement (10) by means of a fastening element (30) and a coupling state can thereby be provided and wherein the drive unit (9) is designed such that the valve closure (4) in the coupling state of • an open position (0) in which the valve closure (4) at least partially releases the valve opening (2), in • a closed position (G) in which there is a sealing contact between the first sealing surface (3) and the second sealing surface (6) and the valve opening (2) is thereby closed gas-tight and can be adjusted back, characterized in that the connecting section (21) • has a fastening recess (23) extending along the connecting axis (V), • a recess (24) set back with respect to the connection width (22) and extending orthogonally to the connection axis (V) with a countersunk opening (25) open towards the fastening recess (23), and • a clamping element (26) arranged in the depression (24) and movably mounted at least orthogonally to the connection axis (V), wherein the clamping element (26) projects through the countersunk opening (25) into the fastening recess (23). 2. Vacuum valve (1) according to claim 1, characterized in that the countersunk opening (25) and the clamping element (26) are designed such that the clamping element (26) is partially present in the depression (24) and partially projects into the fastening recess (23) with a maximum of a certain projection and thereby defines an inner clamping width (28) in the fastening recess (23). 3. Vacuum valve (1) according to claim 1 or 2, characterized in that a restoring element (27) cooperating with the clamping element (26) is arranged on the connecting portion (21), in particular in the depression, and effects a restoring force on the clamping element (26) in the direction of the fastening recess (23). 4. Vacuum valve (1) according to claim 3, characterized in that the return element (27) is designed as an annular spring. 5. Vacuum valve (1) according to one of the preceding claims, characterized in that the clamping element (26) is spherical, cylindrical, pyramidal or sphere-shaped. 6. Vacuum valve (1) according to one of the preceding claims, characterized in that the depression (24) and the clamping element (26) are designed such that the depression (24) or the countersunk opening limits the mobility of the clamping element (26) in a direction parallel to the connection axis (V), in particular in the direction of the second end, in particular forms a stop for the clamping element. 7. Vacuum valve (1) according to one of the preceding claims, characterized in that the vacuum valve (1) has the fastening element (30) for fastening the valve closure (4) to the connecting element (20), wherein the fastening element (30) • defines a fastening axis (B) according to its extension, and • a fastening section (31) for interacting with the connecting section (21) and a holding section (32) for interacting with the coupling arrangement (10), wherein the fastening section (31) is associated with a first end and the holding section (32) is associated with a second end of the fastening element (30), wherein • the fastening section (31) provides a first fastening width (39a) which is smaller than the inner clamping width (28) and a second fastening width (39b) which is larger than the inner clamping width (28), and • the first fastening width (39a) and the second fastening width (39b) are provided at an angle in a common plane which is aligned orthogonal to the fastening axis (B). 8. Vacuum valve (1) according to claim 7, characterized in that the fastening element (30) is arranged such that • the fastening section (31) axially overlaps the connecting section (21) at least partially or lies axially in the connecting section, and the holding portion (32) contacts the coupling arrangement (10). 9. Vacuum valve (1) according to claim 7 or 8, characterized in that • the fastening element (30) in the fastening section (31) has two opposite contact sides (33) and a distance between the contact sides (33) provides the second fastening width (39b), and • the fastening element (30) is arranged and radially aligned such that at least one of the contact sides (33) cooperates with the clamping element (26) and the coupling state is provided. 10. Vacuum valve (1) according to claim 9, characterized in that the at least one contact side (33) is shaped in such a way, in particular concave, that when interacting with the clamping element (26) a force acting in the axial direction is generated, in particular parallel to the fastening axis (B) or connection axis (V), whereby the valve closure (4) is held on the connection element (20). 11. Vacuum valve (1) according to claim 9 or 10, characterized in that the at least one contact side (33) has a projecting and curved contact surface (34), wherein • the contact surface (34) faces away from the first end of the fastening element (30), • the contact surface (34) contacts the clamping element (26) and • This creates a force acting in the axial direction. 12. Vacuum valve (1) according to one of claims 7 to 11, characterized in that • the fastening element (30) has a shoulder (36) in the region of the holding section (32) and • the shoulder (36) cooperates with the coupling arrangement (10) in such a way that a force acting in the axial direction is generated, in particular parallel to the fastening axis (B) or connection axis (V), whereby the valve closure (4) is held on the connecting element (20). 13. Vacuum valve (1) according to one of claims 7 to 12, characterized in that • the fastening element (30) has a rotation limiting element (38) in the region of the holding section (32), and • the rotation limiting element (38) interacts with the coupling arrangement (10) in such a way that a radial angle for the radial alignment of the fastening element (30) providing the coupling state can be set and a rotational movement of the fastening element (30) is limited accordingly. 14. Valve closure (4) for a vacuum valve (1) according to one of claims 1 to 13, with • a second sealing surface (6) corresponding to a first sealing surface (3) of a valve seat of the vacuum valve surrounding the valve opening (2) and • a coupling arrangement for providing a coupling state by connecting the coupling arrangement (10) to a connecting element (20) of the vacuum valve (1) by means of a fastening element, characterized in that the coupling arrangement (10) for receiving the connecting element (20) has a recess (11) defining a central coupling axis (K), with • a receiving area (14) with a Coupling opening (15) for inserting and receiving the connecting element (20) and • a holding region (11) with a fastening opening (12) diametrically opposite the coupling opening (15) for inserting and receiving the fastening element (30), wherein the fastening opening (12) has, on its side facing away from the recess, an externally accessible recess (17) for interacting with a rotation limiting element (38) of the fastening element (30), and the recess (17) provides a rotation limit for the fastening element (30). 15. Valve closure (4) according to claim 14, characterized in that the recess (17) is designed as a depression with respect to the surface of an upper side of the coupling arrangement (10), in particular wherein the upper side is designed orthogonal to the second sealing surface and diametrically opposite to the coupling opening. 16. Valve closure (4) according to claim 14 or 15, characterized in that the recess (17) extends with respect to the coupling axis (K) over a radial angular range (18) between 75° and 105°, in particular of 90°. 17. Valve closure (4) according to one of claims 14 to 16, characterized in that • the recess has a first shoulder (16) associated with the receiving area (14), wherein the first shoulder (16) is formed to limit an insertion depth for the connecting element (20), in particular as a stop, and/or • the recess has a second shoulder (13) associated with the holding area (11), wherein the second shoulder (13) is formed to limit an insertion depth for the fastening element (30) and to cooperate with the fastening element (30), in particular as a stop, in particular wherein the first shoulder and/or the second shoulder separate the receiving area from the holding area separates. 18. Fastening element (30) for a vacuum valve (1) according to one of claims 1 to 13 for fastening a valve closure (4) to a connecting element (20) of the vacuum valve (1), wherein the fastening element (30) • defines a fastening axis (B) according to its extension and • a fastening section (31) for interacting with a connecting section (21) of the connecting element (20) and a holding section (32) for interacting with a coupling arrangement (10) of the valve closure (4), wherein the fastening section (31) is associated with a first end and the holding section (32) is associated with a second end of the fastening element (30), and wherein • the fastening section (31) provides a first fastening width (39a) and a second fastening width (39b), wherein the first fastening width (39a) is smaller than the second fastening width (39b), and • the first fastening width (39a) and the second fastening width (39b) are provided at an angle in a common plane which is aligned orthogonal to the fastening axis (B). 19. Fastening element (30) according to claim 18, characterized in that the fastening element (30) is designed as a bolt. 20. Fastening element (30) according to claim 18 or 19, characterized in that the fastening element (30) in the region of the fastening section (31) has two opposite insertion sides (35) which point in opposite directions orthogonal to the fastening axis (B), and a distance between the insertion sides (35) provides the first fastening width (39a). 21. Fastening element (30) according to one of claims 18 to 20, characterized in that the fastening element (30) in the region of the fastening section (31) has two opposite contact sides (33) which point orthogonally to the fastening axis (B) in opposite directions, and a distance between the contact sides (33) provides the second fastening width (39b). 22. Fastening element (30) according to claim 20 or 21, characterized in that the orientation of at least one of the contact sides (33) and the orientation of at least one of the insertion sides (35) enclose an angle from an angular range between 75° and 105° or an angle of 90°. 23. Fastening element (30) according to one of claims 18 to 22, characterized in that the contact sides (33) each have concavely curved surfaces for cooperation with a clamping element (26) of the connecting element (20). 24. Fastening element (30) according to one of claims 18 to 23, characterized in that the fastening element (30) has a shoulder (36) in the region of the holding portion (32), wherein the shoulder (36) is designed to cooperate with a second shoulder (16) associated with a holding region (11) of the valve closure (4). 25. Fastening element (30) according to one of claims 18 to 24, characterized in that the fastening element (30) has a rotation limiting element (38) in the region of the holding section (32), wherein the rotation limiting element (38) is designed to correspond to and cooperate with a recess (17) of the valve closure. 26. Fastening element (30) according to claim 25, characterized in that the rotation limiting element (38) is formed radially aligned. 27. Fastening element (30) according to claim 25 or 26, characterized in that the rotation limiting element (38) is designed as a projection projecting radially from the fastening element (30), as a pin or as a bolt.