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WO2025022966A1 - Surveying device - Google Patents

Surveying device Download PDF

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Publication number
WO2025022966A1
WO2025022966A1 PCT/JP2024/024172 JP2024024172W WO2025022966A1 WO 2025022966 A1 WO2025022966 A1 WO 2025022966A1 JP 2024024172 W JP2024024172 W JP 2024024172W WO 2025022966 A1 WO2025022966 A1 WO 2025022966A1
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WO
WIPO (PCT)
Prior art keywords
light
distance measuring
unit
mirror
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/JP2024/024172
Other languages
French (fr)
Japanese (ja)
Inventor
太一 湯浅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Topcon Corp
Original Assignee
Topcon Corp
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Filing date
Publication date
Application filed by Topcon Corp filed Critical Topcon Corp
Publication of WO2025022966A1 publication Critical patent/WO2025022966A1/en
Anticipated expiration legal-status Critical
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C1/00Measuring angles
    • G01C1/02Theodolites
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C15/00Surveying instruments or accessories not provided for in groups G01C1/00 - G01C13/00

Definitions

  • the present invention relates to a surveying device capable of acquiring the three-dimensional coordinates of a measurement object.
  • Surveying equipment such as laser scanners and total stations have optical distance measuring devices that detect the distance to the object being measured using prism distance measurement, which uses a retroreflective prism as the object being measured, and non-prism distance measurement, which does not use a reflecting prism.
  • the distance measuring light emitting section that emits the distance measuring light and the distance measuring light receiving section that receives the reflected distance measuring light are incorporated into a single optical system, and a deflection optical member is required to make the optical axis of the distance measuring light coaxial with the optical axis of the reflected distance measuring light, which leads to an increase in the size of the optical system and the entire surveying device.
  • the present invention provides a surveying device that reduces the size of the optical system and the entire device.
  • the present invention includes a distance measuring unit having a light emitting element that emits distance measuring light and a light receiving element that receives the reflected distance measuring light from the object to be measured, a rotary deflection unit that irradiates the distance measuring light, a vertical rotation drive unit that rotates the rotary deflection unit in the vertical direction via a hollow vertical rotation shaft, a base unit on which the rotary deflection unit is provided, a horizontal rotation drive unit that rotates the base unit in the horizontal direction, and a calculation control unit that calculates the distance to the object to be measured based on the result of receiving the reflected distance measuring light at the light receiving element.
  • the rotating deflection unit has a light projecting deflection unit formed in the center of the rotating deflection unit and deflecting the distance measuring light at a right angle, and a light receiving deflection unit formed outside the center and deflecting the reflected distance measuring light at a right angle in the opposite direction to the light emitting element, and the light receiving deflection unit is connected to the hollow part of the vertical rotation shaft and has a through hole parallel to the optical axis of the distance measuring light, and the light projecting deflection unit is arranged so that a part of the light projecting deflection unit is fitted into the through hole.
  • the present invention also relates to a surveying instrument in which the light receiving deflection unit is a cylinder with a reflective surface formed at the end that reflects the optical axis of the distance measuring light at a right angle, the light projecting deflection unit is a light projecting mirror, the light projecting mirror is fitted into the through hole, and has a cylindrical portion that causes the distance measuring light that has passed through the vertical rotation axis to enter at a right angle, a rod mirror with a reflective surface that reflects the distance measuring light that has passed through the cylindrical portion, and a cylindrical lens integrated with the rod mirror.
  • the present invention also relates to a surveying device in which the cylindrical lens has a concave portion with a curvature equal to that of the cylindrical portion, and a flat portion onto which the distance measuring light reflected by the reflecting surface is incident at a right angle, and the cylindrical portion and the concave portion are configured to fit tightly together without any gaps.
  • the present invention also relates to a surveying device in which a chamfered portion having an inclination equivalent to the inclination of the reflecting surface of the light receiving deflection section is formed at the base end of the cylindrical lens, and the reflecting surface and the chamfered portion are configured to come into contact.
  • the present invention also relates to a surveying device in which the cylindrical lens has a cylindrical shape with the same diameter as the cylindrical portion, and the flat portion has a circular shape with the same diameter as the cylindrical portion.
  • the present invention also relates to a surveying instrument in which the reflecting surface of the receiving deflection unit is an off-axis paraboloid or a free-form surface.
  • the present invention also relates to a surveying device that is further provided with a window section that covers the periphery of the light-projecting mirror and is fixedly provided on the support section, the window section being cylindrical or conical in shape and coinciding with or parallel to the axis of the vertical rotation axis, and that is configured so that any one of the entrance surface of the cylindrical section on which the distance measuring light is incident, the reflecting surface, and the exit surface of the cylindrical lens on which the distance measuring light reflected by the reflecting surface is incident at a right angle is a cylindrical surface.
  • a distance measuring unit having a light emitting element that emits distance measuring light and a light receiving element that receives the reflected distance measuring light from the object to be measured is provided, a rotary deflection unit that irradiates the distance measuring light, a vertical rotation drive unit that rotates the rotary deflection unit in the vertical direction via a hollow vertical rotation shaft, a base unit on which the rotary deflection unit is provided, a horizontal rotation drive unit that rotates the base unit in the horizontal direction, and a calculation control unit that calculates the distance to the object to be measured based on the result of receiving the reflected distance measuring light to the light receiving element, and the rotary deflection unit is
  • the device has a light projecting deflection section formed in the center of the device that deflects the distance measuring light at a right angle, and a light receiving deflection section formed outside the center that deflects the reflected distance measuring light at a right angle in the opposite direction to the light emitting element, and the light receiving deflection section is configured
  • FIG. 1 is a front sectional view showing a surveying instrument according to a first embodiment.
  • FIG. 2 is an enlarged view of the main part showing the light projecting section and the light receiving section according to the first embodiment.
  • 3A and 3B are explanatory diagrams for explaining the rotary deflection unit according to the first embodiment.
  • 4A to 4C are explanatory diagrams for explaining the light projecting mirror according to the first embodiment.
  • 5A to 5C are explanatory diagrams for explaining a light projecting mirror according to the second embodiment.
  • FIG. 6A is a side view showing the relationship between a light projecting mirror and a window portion according to the third embodiment
  • FIG. 6B is a perspective view showing the relationship between a light projecting mirror and a window portion according to the third embodiment.
  • 7A to 7C are explanatory diagrams for explaining a light projecting mirror according to the third embodiment.
  • the surveying device 1 is, for example, a laser scanner, and is composed of a leveling unit 2 attached to a tripod (not shown) and a surveying device main body 3 attached to the leveling unit 2.
  • the leveling unit 2 has a leveling screw 10, which is used to level the surveying device main body 3 horizontally.
  • the surveying device main body 3 is equipped with (contains) a fixed section 4, a support section 5, a horizontal rotation shaft 6, a horizontal rotation bearing 7, a horizontal rotation motor 8 as a horizontal rotation drive section, a horizontal angle encoder 9 as a horizontal angle detection section, a vertical rotation shaft 11, a vertical rotation bearing 12, a vertical rotation motor 13 as a vertical rotation drive section, a vertical angle encoder 14 as a vertical angle detection section, a light receiving mirror 15, an operation panel 16 that serves both as an operation section and a display section, a calculation control section 17, a memory section 18, a light projecting section 19, a light receiving section 21, etc.
  • the calculation control section 17 is a CPU specialized for this device or a general-purpose CPU.
  • the horizontal rotation bearing 7 is fixed to the fixed part 4.
  • the horizontal rotation shaft 6 has a vertical axis 6a, and the horizontal rotation shaft 6 is supported rotatably by the horizontal rotation bearing 7.
  • the support part 5 is supported by the horizontal rotation shaft 6, and the support part 5 rotates horizontally together with the horizontal rotation shaft 6.
  • the horizontal rotation motor 8 is provided between the horizontal rotation bearing 7 and the support frame 5, and the horizontal rotation motor 8 is controlled by the calculation control unit 17.
  • the calculation control unit 17 causes the horizontal rotation motor 8 to rotate the support frame 5 about the axis 6a.
  • the relative rotation angle of the support part 5 with respect to the fixed part 4 is detected by the horizontal angle encoder 9.
  • the detection signal from the horizontal angle encoder 9 is input to the calculation control part 17, which calculates horizontal angle data.
  • the calculation control part 17 performs feedback control of the horizontal rotation motor 8 based on the horizontal angle data.
  • the base 5 is provided with the vertical rotation shaft 11 having a horizontal axis 11a.
  • the vertical rotation shaft 11 is rotatable via the vertical rotation bearing 12.
  • the intersection of the axis 6a and the axis 11a is the emission position of the distance measuring light, and is the origin of the coordinate system of the surveying device main body 3.
  • a recess 22 is formed in the support portion 5.
  • the vertical rotation shaft 11 is hollow, and one end of the shaft extends into the recess 22.
  • the light receiving mirror 15 is fixed to the one end of the vertical rotation shaft 11, and the light receiving mirror 15 is stored in the recess 22.
  • the light receiving mirror 15 is a cylinder formed by cutting the end of a cylindrical glass or metal material such as aluminum to form a reflective surface on the end.
  • the reflective surface is flat and is configured to deflect the incident light receiving optical axis 43 (described later) at a right angle.
  • the light receiving mirror 15 is a 45° rod mirror that deflects the light receiving optical axis 43 at a right angle.
  • a cylindrical through hole 23 that communicates with the hollow part of the vertical rotation shaft 11 and is concentric with the vertical rotation shaft 11 is formed in the center of the light receiving mirror 15.
  • One end of the through hole 23 opens into the recess 22 via the reflective surface of the light receiving mirror 15, and the lower end of the opening protrudes a predetermined distance laterally beyond the upper end of the opening end.
  • a part of the light projecting mirror 24 is glued to fit into the through hole 23.
  • the reflecting surface of the light projecting mirror 24 protrudes from the through hole 23 into the recess 22 and is configured to reflect the horizontally incident distance measuring optical axis 25 (described later) at a right angle.
  • the light projecting mirror 24 is composed of a rod mirror 26 and a cylindrical lens 27 that is attached so as to be in close contact with and integrated with the rod mirror 26.
  • the side that protrudes into the recess 22 is referred to as the tip side, and the side opposite the recess 22 is referred to as the base side.
  • the rod mirror 26 has a cylindrical portion 26a made of a transparent material such as glass, and a reflective surface 26b formed by cutting the end face of the cylindrical portion 26a at 45° and evaporating a metal film or a dielectric multilayer film onto the cut surface.
  • the rod mirror 26 is a 45° rod mirror.
  • the cylindrical portion 26a is fitted into the through hole 23, and the reflective surface 26b protrudes from the through hole 23 and is configured to deflect the ranging optical axis 25, which is horizontally incident, at a right angle while coinciding with the axis of the rod mirror 26.
  • the cylindrical lens 27 is a plano-concave cylindrical lens composed of a flat surface and a concave curved surface, and is attached to the rod mirror 26 so as to face the reflecting surface 26b. At this time, the distance measurement optical axis 25 deflected at a right angle by the reflecting surface 26b is made to enter the rectangular flat surface portion 27a of the cylindrical lens 27 at a right angle with an incident angle of 0°.
  • the recess 27b of the cylindrical lens 27 has a semicircular cross section, and the curvature of the recess 27b matches the curvature of the circumferential surface of the rod mirror 26 (the cylindrical portion 26a). The length of the cylindrical lens 27 in the width direction is longer than the diameter of the cylindrical portion 26a.
  • rod mirror 26 and the cylindrical lens 27 are integrated without any gaps, and half or approximately half of the circumferential surface of the rod mirror 26 is covered by the cylindrical lens 27.
  • the distance measurement optical axis 25 does not deflect at the boundary between the rod mirror 26 and the cylindrical lens 27. In addition, all light passing through the cylindrical portion 26a can be made to enter the flat portion 27a.
  • the base end of the cylindrical lens 27 is formed with a chamfered portion 27c that is chamfered so as to slope from the base end side to the tip end side from top to bottom, and the inclination angle of the chamfered portion 27c matches the inclination angle of the light receiving mirror 15.
  • the rod mirror 26 is installed in the through hole 23, as shown in FIG. 2, the light receiving mirror 15 and the chamfered portion 27c come into contact, and the distance measuring light axis 25 deflected by the light projecting mirror 24 and the light receiving light axis 43 incident on the light receiving mirror 15 match, and further the axis of the cylindrical portion 26a and the distance measuring light axis 25 match.
  • the chamfered portion 27c acts as a positioning mechanism for the light projecting mirror 24.
  • the vertical angle encoder 14 is provided at the other end of the vertical rotation shaft 11.
  • the light projector 19 is provided at a position away from the other end of the vertical rotation shaft 11.
  • the light projector 19 is composed of a distance measuring light emitting unit 28 and a tracking light emitting unit 29.
  • the distance measurement light emitting unit 28 has the distance measurement light axis 25.
  • the distance measurement light emitting unit 28 also has, in order from the light emitting side, a light emitting element 31 arranged on the distance measurement light axis 25, for example a laser diode (LD) that emits near-infrared light of a predetermined wavelength as distance measurement light 32, a light projecting lens 33, a dichroic mirror 34, and the light projecting mirror 24 arranged on the transmitted light axis of the dichroic mirror 34.
  • LD laser diode
  • the dichroic mirror 34 has optical properties that transmit the distance measurement light 32 and reflect the tracking light 35.
  • the dichroic mirror 34 is also provided on a common optical path of the distance measurement light 32 and the tracking light 35 (at the intersection of the distance measurement optical axis 25 and the tracking optical axis 36 (described later)).
  • the dichroic mirror 34 deflects (reflects) the tracking optical axis 36 so that the tracking optical axis 36 coincides with the distance measurement optical axis 25 transmitted through the dichroic mirror 34. Therefore, the distance measurement light 32 and the tracking light 35 are incident on the light projecting mirror 24 on the same axis and are reflected at a right angle by the light projecting mirror 24.
  • the distance measurement optical axis 25 is deflected while passing through the dichroic mirror 34, and the deflected distance measurement optical axis 25 coincides with the axis 11a. Therefore, the tracking optical axis 36 reflected by the dichroic mirror 34 also coincides with the axis 11a.
  • the tracking light emitting unit 29 has the tracking optical axis 36.
  • the tracking light emitting unit 29 also has, in order from the light emitting side, a tracking light emitting element 37 provided on the tracking optical axis 36, for example a laser diode (LD) that emits near-infrared light of a wavelength different from that of the distance measuring light 32 as the tracking light 35, a tracking projection lens 38, the dichroic mirror 34, and the projection mirror 24 provided on the reflected optical axis of the dichroic mirror 34.
  • LD laser diode
  • a window portion 39 made of a transparent material such as glass, which rotates integrally with the light receiving mirror 15.
  • the window portion 39 is inclined at a predetermined angle with respect to the axis 6a.
  • the light receiving mirror 15 constitutes a light receiving deflection portion
  • the light projecting mirror 24 constitutes a light projecting deflection portion.
  • the light receiving deflection portion and the light projecting deflection portion constitute a rotary deflection portion which is rotated integrally in the vertical direction by the vertical rotary motor 13 via the vertical rotary shaft 11.
  • the vertical rotation motor 13 is provided on the vertical rotation shaft 11, and the vertical rotation motor 13 is controlled by the calculation control unit 17.
  • the calculation control unit 17 rotates the vertical rotation shaft 11 using the vertical rotation motor 13, and the light receiving mirror 15 and the light projecting mirror 24 are rotated around the axis 11a.
  • the rotation angle of the light receiving mirror 15 is detected by the vertical angle encoder 14, and the detection signal is input to the calculation control unit 17.
  • the calculation control unit 17 calculates vertical angle data of the light receiving mirror 15 based on the detection signal, and performs feedback control of the vertical rotation motor 13 based on the vertical angle data.
  • the horizontal angle data, vertical angle data, and measurement results calculated by the calculation control unit 17 are stored in the memory unit 18.
  • various storage means such as HDD as a magnetic storage device, CD or DVD as an optical storage device, memory card as a semiconductor storage device, USB memory, etc.
  • the memory unit 18 may be detachable from the support unit 5, or may be capable of sending data to an external storage device or external data processing device via a communication means (not shown).
  • the memory unit 18 stores various programs such as a sequence program that controls the distance measurement operation, a calculation program that calculates distance by the distance measurement operation, a calculation program that calculates an angle based on horizontal angle data and vertical angle data, a program that calculates the three-dimensional coordinates of a desired measurement point based on distance and angle, a tracking program for tracking a target, etc.
  • various processes are performed by the calculation control unit 17 executing various programs.
  • the operation panel 16 is, for example, a touch panel, and serves both as an operation section for inputting distance measurement instructions and measurement conditions, such as changing the measurement point interval, and as a display section for displaying distance measurement results and images, etc.
  • a target having retroreflective properties such as a prism, is used as the measurement object.
  • the light receiving unit 21 has a distance measuring light receiving unit 41 and a tracking light receiving unit 42.
  • the distance measuring unit is composed of the distance measuring light emitting unit 28 and the distance measuring light receiving unit 41, and the tracking light emitting unit 29 and the tracking light receiving unit 42 form a tracking unit.
  • the distance measurement light receiving unit 41 has the light receiving optical axis 43.
  • the distance measurement light receiving unit 41 also has, in order from the light receiving side, a light receiving element 44 arranged on the light receiving optical axis 43, a light receiving prism 45, and a light receiving lens 46.
  • the light-receiving prism 45 has a dichroic film 47 as a separation surface.
  • the light-receiving prism 45 is configured to internally reflect at least once the distance measuring light 32 (reflected distance measuring light 48) reflected by the object to be measured and the tracking light 35 (reflected tracking light 49) incident coaxially with the reflected distance measuring light 48.
  • the dichroic film 47 has the optical property of reflecting the reflected distance measuring light 48 and transmitting the reflected tracking light 49.
  • the light receiving optical axis 43 and the light receiving optical axis 43 reflected by the light receiving prism 45 and the dichroic film 47 are collectively referred to as the light receiving optical axis 43.
  • the tracking light receiving unit 42 has a tracking light receiving optical axis 51.
  • the tracking light receiving unit 42 also has, in order from the light receiving side, a tracking light receiving element 52 arranged on the tracking light receiving optical axis 51, the light receiving prism 45, and the light receiving lens 46.
  • the tracking light receiving optical axis 51 and the tracking light receiving optical axis 51 reflected by the light receiving prism 45 are collectively referred to as the tracking light receiving optical axis 51.
  • the tracking light receiving element 52 is a CCD or CMOS sensor that is a collection of pixels, and the position of each pixel on the tracking light receiving element 52 can be identified. For example, each pixel has pixel coordinates with the center of the tracking light receiving element 52 as the origin, and the position on the tracking light receiving element 52 is identified by the pixel coordinates.
  • the light projecting unit 19 and the light receiving unit 21 are controlled by the calculation control unit 17.
  • the pulsed distance measuring light 32 emitted from the light emitting element 31 onto the distance measuring optical axis 25 passes through the light projecting lens 33 and the dichroic mirror 34, passes through the inside of the vertical rotation shaft 11 and the through hole 23, and is incident at a right angle to the base end surface of the cylindrical portion 26a of the rod mirror 26 at an incident angle of 0°.
  • the distance measuring light 32 passes through the cylindrical portion 26a along the axis of the cylindrical portion 26a and is reflected at a right angle by the reflecting surface 26b.
  • the distance measuring light 32 reflected by the reflecting surface 26b enters the cylindrical lens 27 through the recess 27b, enters the flat portion 27a at an angle of incidence of 0°, and is emitted.
  • the distance measuring light 32 enters the cylindrical portion 26a at an angle of incidence of 0° and exits from the flat portion 27a, so no deflection occurs in the distance measuring light 32 when it enters and exits.
  • the cylindrical lens 27 of the rod mirror 26 is integrated without any gaps, so no deflection occurs when the distance measuring light 32 passes through the boundary surface between the rod mirror 26 and the cylindrical lens 27.
  • the distance measuring light 32 reflected at a right angle by the light projecting mirror 24 passes through the window 39 and is irradiated onto the object to be measured.
  • the light projecting mirror 24 rotates integrally with the light receiving mirror 15 around the axis 11a, so that the distance measuring light 32 rotates (scans) perpendicular to the axis 11a and within a plane including the axis 6a.
  • the reflected distance measuring light 48 reflected by the object to be measured passes through the window 39 and enters the light receiving mirror 15 coaxially with the distance measuring light 32.
  • the reflected distance measuring light 48 is also reflected at a right angle by the light receiving mirror 15, is collected by the light receiving lens 46, and enters the light receiving prism 45. In the process of passing through the light receiving prism 45, it is reflected by the dichroic film 47 and is received by the light receiving element 44.
  • the receiving optical axis 43 of the reflected distance measuring light 48 reflected by the receiving mirror 15 is coaxial with the distance measuring optical axis 25 transmitted through the dichroic mirror 34. In other words, the distance measuring optical axis 25 and the receiving optical axis 43 coincide with the axis 11a.
  • the window portion 39 is inclined at a predetermined angle with respect to the distance measurement optical axis 25, so that the distance measurement light 32 reflected by the window portion 39 is prevented from being reflected by the light receiving mirror 15 and received by the light receiving element 44.
  • the calculation control unit 17 performs distance measurement for each pulse of the distance measuring light 32 based on the time difference between the light emission timing of the light emitting element 31 and the light reception timing of the light receiving element 44 (i.e., the round trip time of the pulsed light) and the speed of light, and calculates the distance to the object to be measured (Time Of Flight).
  • the light emission timing of the light emitting element 31, i.e., the pulse interval can be changed via the operation panel 16.
  • the three-dimensional coordinates of the object to be measured can be calculated based on the distance measurement result and the horizontal angle data and vertical angle data obtained by the horizontal angle encoder 9 and the vertical angle encoder 14.
  • the vertical rotation of the light receiving mirror 15 and the horizontal rotation of the base frame 5 cooperate to scan the distance measuring light 32 two-dimensionally. Furthermore, by detecting the vertical angle and horizontal angle for each pulse light using the vertical angle encoder 14 and the horizontal angle encoder 9, vertical angle data and horizontal angle data can be obtained. From the vertical angle data, horizontal angle data and distance measuring data, the three-dimensional coordinates of the measurement object and three-dimensional point cloud data corresponding to the measurement object can be obtained.
  • the tracking light 35 which is near-infrared light of a different wavelength from the distance measurement light 32 emitted from the tracking light-emitting element 37, is slightly diverged by the tracking projection lens 38, and then deflected by the dichroic mirror 34 so as to be coaxial with the distance measurement light 32.
  • the tracking light 35 passes through the inside of the vertical rotation shaft 11 and the through hole 23, and is incident at a right angle on the cylindrical portion 26a of the rod mirror 26 at an incident angle of 0°, and the tracking light 35 passes through the cylindrical portion 26a and is incident on the reflecting surface 26b.
  • the tracking light 35 reflected at a right angle by the reflecting surface 26b is incident on the cylindrical lens 27 through the recess 27b, is incident on and emitted from the flat portion 27a at an incident angle of 0°, and is irradiated onto the measurement object through the window portion 39.
  • the reflected tracking light 49 is irradiated onto the object to be measured coaxially with the distance measuring light 32 and is reflected coaxially from the object to be measured. It passes through the window 39, is reflected at a right angle by the light receiving mirror 15, and is incident on the light receiving prism 45 via the light receiving lens 46. In the process of passing through the light receiving prism 45, the reflected tracking light 49 incident on the light receiving prism 45 is separated from the reflected distance measuring light 48 by the dichroic film 47, passes through the dichroic film 47, and is received by the tracking light receiving element 52. In addition, a tracking image (not shown) can be obtained by receiving the reflected tracking light 49 at the tracking light receiving element 52.
  • the calculation control unit 17 is configured to calculate the position deviation between the center of the tracking light receiving element 52 and the receiving position of the reflected tracking light 49 relative to the tracking light receiving element 52, and drive the horizontal rotation motor 8 and the vertical rotation motor 13 based on the position deviation to track the object to be measured.
  • the light-projecting unit 19 and the light-receiving unit 21 are arranged on opposite sides of the light-receiving mirror 15. Therefore, there is no need to incorporate the light-projecting unit 19 and the light-receiving unit 21 into a single optical system, and no deflection optical member is required to deflect the distance measuring light 32 and the reflected distance measuring light 48 so that they are coaxial. This reduces the number of parts and allows the optical system and the surveying device 1 as a whole to be made more compact.
  • the rod mirror 26 and the cylindrical lens 27 form the light projecting mirror 24, and the rod mirror 26 and the cylindrical lens 27 are integrated together so that the recess 27b of the cylindrical lens 27 covers the upper half or approximately half of the periphery of the rod mirror 26 without any gaps.
  • the distance measuring light 32 and the tracking light 35 reflected by the reflecting surface 26b are not deflected by the peripheral surface of the rod mirror 26, and all of the light enters and is emitted from the cylindrical lens 27.
  • the chamfered portion 27c is formed at the base end of the cylindrical lens 27 with an inclination equivalent to that of the light receiving mirror 15.
  • the vertical rotation shaft 11 is hollow, and the light receiving mirror 15 is formed with the through hole 23 that is concentric with the vertical rotation shaft 11 and communicates with the hollow portion, and the light projecting mirror 24 is provided in the through hole 23, and has the cylindrical portion 26a that is concentric with the vertical rotation shaft 11 and the through hole 23, i.e., concentric with the rotation axis of the light receiving mirror 15 and rotates integrally therewith.
  • the distance measurement optical axis 25 incident on the reflecting surface 26b of the light projecting mirror 24 and the light receiving optical axis 43 deflected by the light receiving mirror 15 can be made coaxial, improving the measurement accuracy.
  • the cylindrical lens 53 has a cylindrical shape with a circular flat surface 53a, and the diameter of the flat surface 53a is the same as or approximately the same as the cylindrical portion 26a of the rod mirror 26.
  • the recess 53b of the cylindrical lens 53 has a semicircular cross section with a curvature equal to that of the circumferential surface of the cylindrical portion 26a. Therefore, the rod mirror 26 and the cylindrical lens 53 are tightly attached and integrated with no gaps between the inner surface of the recess 53b and the circumferential surface of the cylindrical portion 26a.
  • the rest of the configuration is the same as in the first embodiment.
  • the cylindrical lens 53 has a cylindrical shape with a diameter equal to that of the cylindrical portion 26a of the rod mirror 26, and the rod mirror 26 and the cylindrical lens 53 are tightly integrated with no gaps via the recess 53b, forming the light projecting mirror 54.
  • the distance measuring light 32 and tracking light 35 reflected by the reflecting surface 26b pass through the cylindrical lens 53, which has the same diameter as the cylindrical portion 26a, and are emitted from the flat portion 53a.
  • the entire amount of the distance measuring light 32 and the tracking light 35 reflected by the reflecting surface 26b is incident on the cylindrical lens 53 without being deflected by the peripheral surface of the rod mirror 26 and is emitted from the flat surface portion 53a.
  • the incident area of the reflected distance measuring light 48 on the flat surface 53a is smaller than that of the flat surface 27a in the first embodiment, so that the effective diameter of the distance measuring light 32 and the tracking light 35 is maintained while minimizing vignetting of the light receiving section 21 (see FIG. 2).
  • the light projecting unit 19 has the distance measuring light emitting unit 28 and the tracking light emitting unit 29, and the light receiving unit 21 has the distance measuring light receiving unit 41 and the tracking light receiving unit 42, but if tracking of the object to be measured is not required, the tracking light emitting unit 29 and the tracking light receiving unit 42 may be omitted.
  • the distance measuring light emitting unit 28 can be provided inside the vertical rotation shaft 11, making it possible to further miniaturize the optical system of the distance measuring unit.
  • the reflecting surface of the light receiving mirror 15 is a flat surface, but the reflecting surface may be an off-axis parabolic mirror, a free-form surface mirror, or an annular free-form surface mirror. This allows the focal length of the light receiving section 21 to be shortened, the optical system to be made more compact, and the light receiving lens 46 can be omitted, reducing the number of parts.
  • the exit plane (plane 27a, 53a) of the cylindrical lens 27, 53 in the light projecting mirror 24, 54 and the entrance plane (entrance end surface of the cylindrical portion 26a) of the rod mirror 26 are perpendicular to the distance measuring optical axis 25 and the tracking optical axis 36, but they may be slightly tilted (for example, about 0.5° to 2°). This reduces the surface reflected light returning to the light emitting element 31 and the tracking light emitting element 37, and suppresses output fluctuations of the light emitting element 31 and the tracking light emitting element 37.
  • the tilt angle is the same, and the tilt direction is set so that the deflection angle of the exit optical axis relative to the incident optical axis is perpendicular.
  • the window portion 39 rotates together with the light receiving mirror 15 (see FIG. 1), but in the third embodiment, the window portion 56 is fixed and only the light receiving mirror 15 rotates.
  • the window portion 56 is, for example, cylindrical with a portion of the periphery cut away, and is attached to the bottom surface of the recess 22 (see FIG. 1) via the cut away portion.
  • the axis of the window portion 56 coincides with or is parallel to the axis 11a of the vertical rotation shaft 11 (see FIG. 1).
  • the entire periphery of the light receiving mirror 15 is covered by the window portion 56 except for the portion blocked by the support portion 5 (see FIG. 1), so that the distance measuring light 32 reflected by the light projecting mirror 57, which serves as a light projecting optical axis deflection portion, passes through the window portion 56 regardless of the emission direction.
  • the axis of the window portion 56 coincides with or is parallel to the axis 11a, the angle of incidence of the distance measuring light 32 with respect to the window portion 56 is always constant.
  • the window portion 56 may be cone-shaped.
  • the entrance surface of the window portion 56 is a curved surface having a predetermined curvature
  • astigmatism occurs when the distance measurement light 32 passes through the window portion 56.
  • the distance measurement light 32 having a circular beam cross section that enters the window portion 56 is emitted from the window portion 56 as the distance measurement light 32 having an elliptical beam cross section.
  • the light projecting mirror 57 in the third embodiment is composed of a rod mirror 58 having a cylindrical portion 58a and a reflecting surface 58b, and a cylindrical lens 59 having a flat portion 59a and a recessed portion 59b, similar to the light projecting mirror 54 in the second embodiment (see FIG. 5).
  • the flat surface 59a i.e., the incident surface of the distance measuring light 32 reflected by the reflecting surface 58b, and the exit surface through which the distance measuring light 32 passes and exits, is a convex cylindrical surface. Therefore, in the following description, the flat surface 59a is also referred to as the exit surface 59a.
  • the axis of the exit surface 59a is oriented in a direction that can offset the astigmatism that occurs in the window portion 56, and is the same as the curvature direction of the window portion 56.
  • the exit surface 59a is configured to reduce the distance measurement light 32 in the direction of the major axis of an ellipse that occurs due to the astigmatism in the window portion 56.
  • the distance measuring light 32 incident on the light projecting mirror 57 has its beam diameter reduced in a predetermined axial direction as it passes through the exit surface 59a, and enters the window portion 56 as the distance measuring light 32 having an elliptical beam cross section.
  • the distance measuring light 32 incident on the window 56 generates astigmatism as it passes through the window 56, expanding the beam diameter of the distance measuring light 32 in the direction of the reduction at the exit surface 59a. Therefore, the distance measuring light 32 is emitted from the window 56 as distance measuring light 32 having a circular beam diameter, and is irradiated onto the object to be measured.
  • the exit surface 59a of the cylindrical lens 59 is a convex cylindrical surface, and the exit surface 59a corrects the astigmatism that occurs in the window portion 56.
  • the window portion 56 is fixedly provided and has a cylindrical or conical shape that covers the periphery of the light-projecting mirror 57, and astigmatism is generated by the window portion 56, the astigmatism can be eliminated and the distance measuring light 32 having a circular beam diameter can be obtained, thereby improving the measurement accuracy.
  • the exit surface 59a of the cylindrical lens 59 is a convex cylindrical surface, and the exit surface 59a corrects the astigmatism caused by the window portion 56, but the method of correcting astigmatism is not limited to this.
  • the entrance surface 58c of the rod mirror 58 (cylinder portion 58a) may be a convex cylindrical surface, and the entrance surface 58c may correct the astigmatism, or the reflecting surface 58b of the rod mirror 58 may be a concave cylindrical surface, and the reflecting surface 58b may correct the astigmatism.
  • the other surface will be a flat surface.
  • the rod mirror 58 and the cylindrical lens 59 may be made of glass materials with different refractive indices, thereby correcting the astigmatism caused by the window portion 56.
  • any one of the exit surface 59a, the reflecting surface 58b, and the entrance surface 58c is a cylindrical surface may also be applied to the light-projecting mirror 24 in the first embodiment (see FIG. 4).

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Abstract

The present invention comprises: a ranging unit having a light-emitting element (31) that emits a ranging beam and a light-receiving element that receives a reflected ranging beam from an object being measured; rotary deflecting units (15, 24) that radiate the ranging beam; a perpendicular-rotation drive unit (13) that rotates the rotary deflecting units perpendicularly via a hollow perpendicular-rotation shaft (11); a bracket unit (5) on which the rotary deflecting units are provided; a horizontal-rotation drive unit (8) that rotates the bracket unit horizontally; and an arithmetic-operation control unit (17) that performs arithmetic operations on the distance to the object being measured, on the basis of results of reception of the reflected ranging beam at the light-receiving element. The rotary deflecting units are configured: so as to include a cast-beam deflecting unit that is formed in the center part of the rotary deflecting units and deflects the ranging beam at right angles, and a received-beam deflecting unit that is formed outside the center part and deflects the reflected ranging beam at right angles in the opposite direction from that of the light-emitting element; so that a through-hole (23) which interconnects with the hollow section of the perpendicular rotation shaft and which is parallel to the optical axis of the ranging beam is formed in the received-beam deflecting unit; and so that the cast-beam deflecting unit is arranged so that a portion thereof is fitted into the through-hole.

Description

測量装置Surveying Equipment

 本発明は、測定対象物の3次元座標を取得可能な測量装置に関するものである。 The present invention relates to a surveying device capable of acquiring the three-dimensional coordinates of a measurement object.

 レーザスキャナやトータルステーション等の測量装置は、測定対象物として再帰反射性を有するプリズムを用いたプリズム測距、反射プリズムを用いないノンプリズム測距により測定対象物迄の距離を検出する光波距離測定装置を有している。 Surveying equipment such as laser scanners and total stations have optical distance measuring devices that detect the distance to the object being measured using prism distance measurement, which uses a retroreflective prism as the object being measured, and non-prism distance measurement, which does not use a reflecting prism.

 従来の光波距離測定装置では、測距光を照射する測距光射出部と、反射測距光を受光する測距光受光部とが1つの光学系に組込まれており、又測距光の光軸と反射測距光の光軸とを同軸とする為の偏向光学部材を必要とする為、光学系の大型化、測量装置全体の大型化を招いていた。 In conventional optical distance measuring devices, the distance measuring light emitting section that emits the distance measuring light and the distance measuring light receiving section that receives the reflected distance measuring light are incorporated into a single optical system, and a deflection optical member is required to make the optical axis of the distance measuring light coaxial with the optical axis of the reflected distance measuring light, which leads to an increase in the size of the optical system and the entire surveying device.

米国特許出願公開第2022/0373685号明細書US Patent Application Publication No. 2022/0373685

 本発明は、光学系及び装置全体の小型化を図る測量装置を提供するものである。 The present invention provides a surveying device that reduces the size of the optical system and the entire device.

 本発明は、測距光を発する発光素子と、測定対象物からの反射測距光を受光する受光素子とを有する測距部と、前記測距光を照射する回転偏向部と、該回転偏向部を中空の鉛直回転軸を介して鉛直方向に回転させる鉛直回転駆動部と、前記回転偏向部が設けられる托架部と、該托架部を水平方向に回転させる水平回転駆動部と、前記受光素子への前記反射測距光の受光結果に基づき測定対象物迄の距離を演算する演算制御部とを具備し、前記回転偏向部は、該回転偏向部の中心部に形成され、前記測距光を直角に偏向する投光偏向部と、中心部以外に形成され、前記反射測距光を前記発光素子と逆向きに直角に偏向する受光偏向部とを有し、該受光偏向部に前記鉛直回転軸の中空部と連通し、前記測距光の光軸と平行な貫通孔が形成され、該貫通孔に一部が嵌合される様に前記投光偏向部が配置される様構成された測量装置に係るものである。 The present invention includes a distance measuring unit having a light emitting element that emits distance measuring light and a light receiving element that receives the reflected distance measuring light from the object to be measured, a rotary deflection unit that irradiates the distance measuring light, a vertical rotation drive unit that rotates the rotary deflection unit in the vertical direction via a hollow vertical rotation shaft, a base unit on which the rotary deflection unit is provided, a horizontal rotation drive unit that rotates the base unit in the horizontal direction, and a calculation control unit that calculates the distance to the object to be measured based on the result of receiving the reflected distance measuring light at the light receiving element. The rotating deflection unit has a light projecting deflection unit formed in the center of the rotating deflection unit and deflecting the distance measuring light at a right angle, and a light receiving deflection unit formed outside the center and deflecting the reflected distance measuring light at a right angle in the opposite direction to the light emitting element, and the light receiving deflection unit is connected to the hollow part of the vertical rotation shaft and has a through hole parallel to the optical axis of the distance measuring light, and the light projecting deflection unit is arranged so that a part of the light projecting deflection unit is fitted into the through hole.

 又本発明は、前記受光偏向部は端部に前記測距光の光軸を直角に反射させる反射面が形成された筒体であり、前記投光偏向部は投光ミラーであり、該投光ミラーは前記貫通孔に嵌合され、前記鉛直回転軸内を通過した前記測距光を直角に入射させる円筒部と、該円筒部を透過した前記測距光を反射させる反射面を有するロッドミラーと、該ロッドミラーと一体化されたシリンドリカルレンズとを有する測量装置に係るものである。 The present invention also relates to a surveying instrument in which the light receiving deflection unit is a cylinder with a reflective surface formed at the end that reflects the optical axis of the distance measuring light at a right angle, the light projecting deflection unit is a light projecting mirror, the light projecting mirror is fitted into the through hole, and has a cylindrical portion that causes the distance measuring light that has passed through the vertical rotation axis to enter at a right angle, a rod mirror with a reflective surface that reflects the distance measuring light that has passed through the cylindrical portion, and a cylindrical lens integrated with the rod mirror.

 又本発明は、前記シリンドリカルレンズは前記円筒部の曲率と同等の曲率を有する凹部と、前記反射面で反射された前記測距光が直角に入射する平面部とを有し、前記円筒部と前記凹部とが隙間なく密着する様構成された測量装置に係るものである。 The present invention also relates to a surveying device in which the cylindrical lens has a concave portion with a curvature equal to that of the cylindrical portion, and a flat portion onto which the distance measuring light reflected by the reflecting surface is incident at a right angle, and the cylindrical portion and the concave portion are configured to fit tightly together without any gaps.

 又本発明は、前記シリンドリカルレンズの基端部には前記受光偏向部の反射面の傾斜と同等の傾斜を有する面取り部が形成され、前記反射面と前記面取り部とが接触する様に構成された測量装置に係るものである。 The present invention also relates to a surveying device in which a chamfered portion having an inclination equivalent to the inclination of the reflecting surface of the light receiving deflection section is formed at the base end of the cylindrical lens, and the reflecting surface and the chamfered portion are configured to come into contact.

 又本発明は、前記シリンドリカルレンズは前記円筒部と同径の円筒形状であり、前記平面部は前記円筒部と同径の円形である測量装置に係るものである。 The present invention also relates to a surveying device in which the cylindrical lens has a cylindrical shape with the same diameter as the cylindrical portion, and the flat portion has a circular shape with the same diameter as the cylindrical portion.

 又本発明は、前記受光偏向部の前記反射面は、軸外し放物面又は自由曲面である測量装置に係るものである。 The present invention also relates to a surveying instrument in which the reflecting surface of the receiving deflection unit is an off-axis paraboloid or a free-form surface.

 更に又本発明は、前記投光ミラーの周囲を覆い、前記托架部に固定的に設けられた窓部を更に具備し、該窓部は前記鉛直回転軸の軸心と合致又は平行な円筒又は円錐形状であり、前記測距光が入射する前記円筒部の入射面と、前記反射面と、該反射面で反射された前記測距光が直角に入射する前記シリンドリカルレンズの射出面のいずれか1つをシリンドリカル面とする様に構成された測量装置に係るものである。 The present invention also relates to a surveying device that is further provided with a window section that covers the periphery of the light-projecting mirror and is fixedly provided on the support section, the window section being cylindrical or conical in shape and coinciding with or parallel to the axis of the vertical rotation axis, and that is configured so that any one of the entrance surface of the cylindrical section on which the distance measuring light is incident, the reflecting surface, and the exit surface of the cylindrical lens on which the distance measuring light reflected by the reflecting surface is incident at a right angle is a cylindrical surface.

 本発明によれば、測距光を発する発光素子と、測定対象物からの反射測距光を受光する受光素子とを有する測距部と、前記測距光を照射する回転偏向部と、該回転偏向部を中空の鉛直回転軸を介して鉛直方向に回転させる鉛直回転駆動部と、前記回転偏向部が設けられる托架部と、該托架部を水平方向に回転させる水平回転駆動部と、前記受光素子への前記反射測距光の受光結果に基づき測定対象物迄の距離を演算する演算制御部とを具備し、前記回転偏向部は、該回転偏向部の中心部に形成され、前記測距光を直角に偏向する投光偏向部と、中心部以外に形成され、前記反射測距光を前記発光素子と逆向きに直角に偏向する受光偏向部とを有し、該受光偏向部に前記鉛直回転軸の中空部と連通し、前記測距光の光軸と平行な貫通孔が形成され、該貫通孔に一部が嵌合される様に前記投光偏向部が配置される様構成されたので、前記発光素子と前記受光素子とを1つの光学系に組込む必要がなく、光学系の小型化及び装置全体の小型化を図ることができる。 According to the present invention, a distance measuring unit having a light emitting element that emits distance measuring light and a light receiving element that receives the reflected distance measuring light from the object to be measured is provided, a rotary deflection unit that irradiates the distance measuring light, a vertical rotation drive unit that rotates the rotary deflection unit in the vertical direction via a hollow vertical rotation shaft, a base unit on which the rotary deflection unit is provided, a horizontal rotation drive unit that rotates the base unit in the horizontal direction, and a calculation control unit that calculates the distance to the object to be measured based on the result of receiving the reflected distance measuring light to the light receiving element, and the rotary deflection unit is The device has a light projecting deflection section formed in the center of the device that deflects the distance measuring light at a right angle, and a light receiving deflection section formed outside the center that deflects the reflected distance measuring light at a right angle in the opposite direction to the light emitting element, and the light receiving deflection section is configured so that a part of the light projecting deflection section is fitted into the through hole, which eliminates the need to incorporate the light emitting element and the light receiving element into a single optical system, thereby enabling the optical system and the entire device to be made smaller.

図1は第1の実施例に係る測量装置を示す正断面図である。FIG. 1 is a front sectional view showing a surveying instrument according to a first embodiment. 図2は第1の実施例に係る投光部と受光部を示す要部拡大図である。FIG. 2 is an enlarged view of the main part showing the light projecting section and the light receiving section according to the first embodiment. 図3(A)、図3(B)は第1の実施例に係る回転偏向部を説明する説明図である。3A and 3B are explanatory diagrams for explaining the rotary deflection unit according to the first embodiment. 図4(A)~図4(C)は第1の実施例に係る投光ミラーを説明する説明図である。4A to 4C are explanatory diagrams for explaining the light projecting mirror according to the first embodiment. 図5(A)~図5(C)は第2の実施例に係る投光ミラーを説明する説明図である。5A to 5C are explanatory diagrams for explaining a light projecting mirror according to the second embodiment. 図6(A)は、第3の実施例に係る投光ミラーと窓部との関係を示す側面図であり、図6(B)は第3の実施例に係る投光ミラーと窓部との関係を示す斜視図である。FIG. 6A is a side view showing the relationship between a light projecting mirror and a window portion according to the third embodiment, and FIG. 6B is a perspective view showing the relationship between a light projecting mirror and a window portion according to the third embodiment. 図7(A)~図7(C)は第3の実施例に係る投光ミラーを説明する説明図である。7A to 7C are explanatory diagrams for explaining a light projecting mirror according to the third embodiment.

 以下、図面を参照しつつ本発明の実施例を説明する。 Below, an embodiment of the present invention will be explained with reference to the drawings.

 先ず、図1、図2に於いて、本発明の第1の実施例に係る測量装置について説明する。 First, a surveying device according to a first embodiment of the present invention will be described with reference to Figures 1 and 2.

 測量装置1は、例えばレーザスキャナであり、三脚(図示せず)に取付けられる整準部2と、該整準部2に取付けられた測量装置本体3とから構成される。 The surveying device 1 is, for example, a laser scanner, and is composed of a leveling unit 2 attached to a tripod (not shown) and a surveying device main body 3 attached to the leveling unit 2.

 前記整準部2は整準ネジ10を有し、該整準ネジ10により前記測量装置本体3を水平に整準する。 The leveling unit 2 has a leveling screw 10, which is used to level the surveying device main body 3 horizontally.

 該測量装置本体3は、固定部4と、托架部5と、水平回転軸6と、水平回転軸受7と、水平回転駆動部としての水平回転モータ8と、水平角検出部としての水平角エンコーダ9と、鉛直回転軸11と、鉛直回転軸受12と、鉛直回転駆動部としての鉛直回転モータ13と、鉛直角検出部としての鉛直角エンコーダ14と、受光ミラー15と、操作部と表示部とを兼用する操作パネル16と、演算制御部17と、記憶部18と、投光部19と、受光部21等を具備(収納)している。尚、前記演算制御部17としては、本装置に特化したCPU、或は汎用CPUが用いられる。 The surveying device main body 3 is equipped with (contains) a fixed section 4, a support section 5, a horizontal rotation shaft 6, a horizontal rotation bearing 7, a horizontal rotation motor 8 as a horizontal rotation drive section, a horizontal angle encoder 9 as a horizontal angle detection section, a vertical rotation shaft 11, a vertical rotation bearing 12, a vertical rotation motor 13 as a vertical rotation drive section, a vertical angle encoder 14 as a vertical angle detection section, a light receiving mirror 15, an operation panel 16 that serves both as an operation section and a display section, a calculation control section 17, a memory section 18, a light projecting section 19, a light receiving section 21, etc. The calculation control section 17 is a CPU specialized for this device or a general-purpose CPU.

 前記水平回転軸受7は前記固定部4に固定される。前記水平回転軸6は鉛直な軸心6aを有し、前記水平回転軸6は前記水平回転軸受7に回転自在に支持される。又、前記托架部5は前記水平回転軸6に支持され、前記托架部5は水平方向に前記水平回転軸6と一体に回転する様になっている。 The horizontal rotation bearing 7 is fixed to the fixed part 4. The horizontal rotation shaft 6 has a vertical axis 6a, and the horizontal rotation shaft 6 is supported rotatably by the horizontal rotation bearing 7. The support part 5 is supported by the horizontal rotation shaft 6, and the support part 5 rotates horizontally together with the horizontal rotation shaft 6.

 前記水平回転軸受7と前記托架部5との間には前記水平回転モータ8が設けられ、該水平回転モータ8は前記演算制御部17により制御される。該演算制御部17は、前記水平回転モータ8により、前記托架部5を前記軸心6aを中心に回転させる。 The horizontal rotation motor 8 is provided between the horizontal rotation bearing 7 and the support frame 5, and the horizontal rotation motor 8 is controlled by the calculation control unit 17. The calculation control unit 17 causes the horizontal rotation motor 8 to rotate the support frame 5 about the axis 6a.

 前記托架部5の前記固定部4に対する相対回転角は、前記水平角エンコーダ9によって検出される。該水平角エンコーダ9からの検出信号は前記演算制御部17に入力され、該演算制御部17により水平角データが演算される。該演算制御部17は、前記水平角データに基づき、前記水平回転モータ8に対するフィードバック制御を行う。 The relative rotation angle of the support part 5 with respect to the fixed part 4 is detected by the horizontal angle encoder 9. The detection signal from the horizontal angle encoder 9 is input to the calculation control part 17, which calculates horizontal angle data. The calculation control part 17 performs feedback control of the horizontal rotation motor 8 based on the horizontal angle data.

 又、前記托架部5には、水平な軸心11aを有する前記鉛直回転軸11が設けられている。該鉛直回転軸11は、前記鉛直回転軸受12を介して回転自在となっている。尚、前記軸心6aと前記軸心11aの交点が、測距光の射出位置であり、前記測量装置本体3の座標系の原点となっている。 The base 5 is provided with the vertical rotation shaft 11 having a horizontal axis 11a. The vertical rotation shaft 11 is rotatable via the vertical rotation bearing 12. The intersection of the axis 6a and the axis 11a is the emission position of the distance measuring light, and is the origin of the coordinate system of the surveying device main body 3.

 前記托架部5には、凹部22が形成されている。前記鉛直回転軸11は中空であり、一端部は前記凹部22内に延出している。又、前記鉛直回転軸11の前記一端部に前記受光ミラー15が固着されており、該受光ミラー15は前記凹部22に収納されている。 A recess 22 is formed in the support portion 5. The vertical rotation shaft 11 is hollow, and one end of the shaft extends into the recess 22. The light receiving mirror 15 is fixed to the one end of the vertical rotation shaft 11, and the light receiving mirror 15 is stored in the recess 22.

 前記受光ミラー15は、円筒状のガラス又はアルミニウム等の金属材の端部を切断し、端部に反射面を形成した筒体である。又、前記反射面は平面であり、入射した受光光軸43(後述)を直角に偏向する様に構成されている。例えば、前記受光ミラー15は、受光光軸43を直角に偏向する45°ロッドミラーとなっている。又、前記受光ミラー15の中心部には、前記鉛直回転軸11の中空部と連通し、該鉛直回転軸11と同心である円筒状の貫通孔23が形成されている。該貫通孔23の一端部は、前記受光ミラー15の反射面を介して前記凹部22内に開口しており、開口端の下端は開口端の上端よりも横方向に所定距離だけ突出している。 The light receiving mirror 15 is a cylinder formed by cutting the end of a cylindrical glass or metal material such as aluminum to form a reflective surface on the end. The reflective surface is flat and is configured to deflect the incident light receiving optical axis 43 (described later) at a right angle. For example, the light receiving mirror 15 is a 45° rod mirror that deflects the light receiving optical axis 43 at a right angle. In addition, a cylindrical through hole 23 that communicates with the hollow part of the vertical rotation shaft 11 and is concentric with the vertical rotation shaft 11 is formed in the center of the light receiving mirror 15. One end of the through hole 23 opens into the recess 22 via the reflective surface of the light receiving mirror 15, and the lower end of the opening protrudes a predetermined distance laterally beyond the upper end of the opening end.

 又、前記貫通孔23には、投光ミラー24の一部が嵌合する様に接着されている。該投光ミラー24の反射面は、前記貫通孔23から前記凹部22内に突出し、水平に入射した測距光軸25(後述)を直角に反射する様に構成されている。 Also, a part of the light projecting mirror 24 is glued to fit into the through hole 23. The reflecting surface of the light projecting mirror 24 protrudes from the through hole 23 into the recess 22 and is configured to reflect the horizontally incident distance measuring optical axis 25 (described later) at a right angle.

 前記投光ミラー24は、図3(A)、図3(B)及び図4(A)~図4(C)に示される様に、ロッドミラー26と、該ロッドミラー26に密着する様貼付けられ、一体化されたシリンドリカルレンズ27とから構成されている。尚、以下の説明に於いては、前記凹部22に突出する側を先端側、前記凹部22とは反対側を基端側としている。 As shown in Figures 3(A), 3(B) and 4(A) to 4(C), the light projecting mirror 24 is composed of a rod mirror 26 and a cylindrical lens 27 that is attached so as to be in close contact with and integrated with the rod mirror 26. In the following explanation, the side that protrudes into the recess 22 is referred to as the tip side, and the side opposite the recess 22 is referred to as the base side.

 前記ロッドミラー26は、ガラス等の透明材料からなる円筒部26aと、該円筒部26aの端面を45°で切断し、切断面に金属膜、又は誘電体多層膜を蒸着して形成した反射面26bとを有している。即ち、前記ロッドミラー26は、45°ロッドミラーとなっている。前記円筒部26aは前記貫通孔23に嵌合され、前記反射面26bは前記貫通孔23から突出し、前記ロッドミラー26の軸心に合致した状態で水平に入射した前記測距光軸25を直角に偏向する様に構成されている。 The rod mirror 26 has a cylindrical portion 26a made of a transparent material such as glass, and a reflective surface 26b formed by cutting the end face of the cylindrical portion 26a at 45° and evaporating a metal film or a dielectric multilayer film onto the cut surface. In other words, the rod mirror 26 is a 45° rod mirror. The cylindrical portion 26a is fitted into the through hole 23, and the reflective surface 26b protrudes from the through hole 23 and is configured to deflect the ranging optical axis 25, which is horizontally incident, at a right angle while coinciding with the axis of the rod mirror 26.

 前記シリンドリカルレンズ27は、平面と凹曲面によって構成される平凹シリンドリカルレンズとなっており、前記反射面26bと対向する様に前記ロッドミラー26に取付けられる。この時、前記反射面26bで直角に偏向された前記測距光軸25は、前記シリンドリカルレンズ27の矩形の平面部27aに入射角0°で直角に入射する様になっている。尚、前記シリンドリカルレンズ27の凹部27bは半円状の断面を有し、該凹部27bの曲率は前記ロッドミラー26(前記円筒部26a)の周面の曲率と合致している。又、前記シリンドリカルレンズ27の幅方向の長さは前記円筒部26aの径よりも長くなっている。 The cylindrical lens 27 is a plano-concave cylindrical lens composed of a flat surface and a concave curved surface, and is attached to the rod mirror 26 so as to face the reflecting surface 26b. At this time, the distance measurement optical axis 25 deflected at a right angle by the reflecting surface 26b is made to enter the rectangular flat surface portion 27a of the cylindrical lens 27 at a right angle with an incident angle of 0°. The recess 27b of the cylindrical lens 27 has a semicircular cross section, and the curvature of the recess 27b matches the curvature of the circumferential surface of the rod mirror 26 (the cylindrical portion 26a). The length of the cylindrical lens 27 in the width direction is longer than the diameter of the cylindrical portion 26a.

 又、前記ロッドミラー26と前記シリンドリカルレンズ27は隙間なく一体化されると共に、前記ロッドミラー26の周面のうちの半分又は略半分が前記シリンドリカルレンズ27で覆われる様に構成されている。 In addition, the rod mirror 26 and the cylindrical lens 27 are integrated without any gaps, and half or approximately half of the circumferential surface of the rod mirror 26 is covered by the cylindrical lens 27.

 従って、前記測距光軸25は前記ロッドミラー26と前記シリンドリカルレンズ27との境界で偏向を生じることがない。又、前記円筒部26a内を透過する光を全て前記平面部27aに入射させることができる。 Therefore, the distance measurement optical axis 25 does not deflect at the boundary between the rod mirror 26 and the cylindrical lens 27. In addition, all light passing through the cylindrical portion 26a can be made to enter the flat portion 27a.

 又、前記シリンドリカルレンズ27の基端部には、上方から下方に向って基端側から先端側に傾斜する様に面取りした面取り部27cが形成され、該面取り部27cの傾斜角は、前記受光ミラー15の傾斜角と合致している。前記ロッドミラー26を前記貫通孔23に設けた際には、図2に示される様に、前記受光ミラー15と前記面取り部27cとが接触し、前記投光ミラー24で偏向された前記測距光軸25と前記受光ミラー15に入射する前記受光光軸43とが合致し、更に前記円筒部26aの軸心と前記測距光軸25が合致する。即ち、前記面取り部27cは、前記投光ミラー24の位置決め機構として作用する。 The base end of the cylindrical lens 27 is formed with a chamfered portion 27c that is chamfered so as to slope from the base end side to the tip end side from top to bottom, and the inclination angle of the chamfered portion 27c matches the inclination angle of the light receiving mirror 15. When the rod mirror 26 is installed in the through hole 23, as shown in FIG. 2, the light receiving mirror 15 and the chamfered portion 27c come into contact, and the distance measuring light axis 25 deflected by the light projecting mirror 24 and the light receiving light axis 43 incident on the light receiving mirror 15 match, and further the axis of the cylindrical portion 26a and the distance measuring light axis 25 match. In other words, the chamfered portion 27c acts as a positioning mechanism for the light projecting mirror 24.

 前記鉛直回転軸11の他端部には、前記鉛直角エンコーダ14が設けられている。又、前記鉛直回転軸11の他端部から離反した位置には、前記投光部19が設けられている。該投光部19は、測距光射出部28と追尾光射出部29とから構成されている。 The vertical angle encoder 14 is provided at the other end of the vertical rotation shaft 11. The light projector 19 is provided at a position away from the other end of the vertical rotation shaft 11. The light projector 19 is composed of a distance measuring light emitting unit 28 and a tracking light emitting unit 29.

 前記測距光射出部28は、前記測距光軸25を有している。又、前記測距光射出部28は、発光側から順に、前記測距光軸25上に設けられた発光素子31、例えば所定の波長の近赤外光を測距光32として射出するレーザダイオード(LD)と、投光レンズ33と、ダイクロイックミラー34と、該ダイクロイックミラー34の透過光軸上に設けられた前記投光ミラー24とを有している。 The distance measurement light emitting unit 28 has the distance measurement light axis 25. The distance measurement light emitting unit 28 also has, in order from the light emitting side, a light emitting element 31 arranged on the distance measurement light axis 25, for example a laser diode (LD) that emits near-infrared light of a predetermined wavelength as distance measurement light 32, a light projecting lens 33, a dichroic mirror 34, and the light projecting mirror 24 arranged on the transmitted light axis of the dichroic mirror 34.

 前記ダイクロイックミラー34は、前記測距光32を透過し、追尾光35を反射する光学特性を有している。又、前記ダイクロイックミラー34は、前記測距光32と前記追尾光35の共通光路上(前記測距光軸25と追尾光軸36(後述)の交差位置)に設けられている。前記ダイクロイックミラー34は、該追尾光軸36が前記ダイクロイックミラー34を透過した前記測距光軸25と合致する様に前記追尾光軸36を偏向(反射)する。従って、前記測距光32と前記追尾光35とは、同軸で前記投光ミラー24に入射し、該投光ミラー24で直角に反射される。 The dichroic mirror 34 has optical properties that transmit the distance measurement light 32 and reflect the tracking light 35. The dichroic mirror 34 is also provided on a common optical path of the distance measurement light 32 and the tracking light 35 (at the intersection of the distance measurement optical axis 25 and the tracking optical axis 36 (described later)). The dichroic mirror 34 deflects (reflects) the tracking optical axis 36 so that the tracking optical axis 36 coincides with the distance measurement optical axis 25 transmitted through the dichroic mirror 34. Therefore, the distance measurement light 32 and the tracking light 35 are incident on the light projecting mirror 24 on the same axis and are reflected at a right angle by the light projecting mirror 24.

 尚、前記測距光軸25は、前記ダイクロイックミラー34を透過する過程で偏向され、偏向された前記測距光軸25が前記軸心11aと合致する。従って、前記ダイクロイックミラー34で反射された前記追尾光軸36も前記軸心11aと合致する。 The distance measurement optical axis 25 is deflected while passing through the dichroic mirror 34, and the deflected distance measurement optical axis 25 coincides with the axis 11a. Therefore, the tracking optical axis 36 reflected by the dichroic mirror 34 also coincides with the axis 11a.

 前記追尾光射出部29は、前記追尾光軸36を有している。又、前記追尾光射出部29は、発光側から順に、前記追尾光軸36上に設けられた追尾発光素子37、例えば前記測距光32とは異なる波長の近赤外光を前記追尾光35として射出するレーザダイオード(LD)と、追尾投光レンズ38と、前記ダイクロイックミラー34と、該ダイクロイックミラー34の反射光軸上に設けられた前記投光ミラー24とを有している。 The tracking light emitting unit 29 has the tracking optical axis 36. The tracking light emitting unit 29 also has, in order from the light emitting side, a tracking light emitting element 37 provided on the tracking optical axis 36, for example a laser diode (LD) that emits near-infrared light of a wavelength different from that of the distance measuring light 32 as the tracking light 35, a tracking projection lens 38, the dichroic mirror 34, and the projection mirror 24 provided on the reflected optical axis of the dichroic mirror 34.

 又、前記軸心6a上であり、前記受光ミラー15と対向する位置には、ガラス等の透明材料で形成され、該受光ミラー15と一体に回転する窓部39が設けられている。該窓部39は、前記軸心6aに対して所定角度傾斜している。尚、前記受光ミラー15は受光偏向部を構成し、前記投光ミラー24は投光偏向部を構成する。更に、前記受光偏向部と前記投光偏向部とで、前記鉛直回転モータ13により前記鉛直回転軸11を介して一体に鉛直方向に回転される回転偏向部が構成される。 Also, on the axis 6a, at a position facing the light receiving mirror 15, there is provided a window portion 39 made of a transparent material such as glass, which rotates integrally with the light receiving mirror 15. The window portion 39 is inclined at a predetermined angle with respect to the axis 6a. The light receiving mirror 15 constitutes a light receiving deflection portion, and the light projecting mirror 24 constitutes a light projecting deflection portion. Furthermore, the light receiving deflection portion and the light projecting deflection portion constitute a rotary deflection portion which is rotated integrally in the vertical direction by the vertical rotary motor 13 via the vertical rotary shaft 11.

 前記鉛直回転軸11に前記鉛直回転モータ13が設けられ、該鉛直回転モータ13は前記演算制御部17に制御される。該演算制御部17は、前記鉛直回転モータ13により前記鉛直回転軸11を回転させ、前記受光ミラー15及び前記投光ミラー24は前記軸心11aを中心に回転される。 The vertical rotation motor 13 is provided on the vertical rotation shaft 11, and the vertical rotation motor 13 is controlled by the calculation control unit 17. The calculation control unit 17 rotates the vertical rotation shaft 11 using the vertical rotation motor 13, and the light receiving mirror 15 and the light projecting mirror 24 are rotated around the axis 11a.

 前記受光ミラー15の回転角は、前記鉛直角エンコーダ14によって検出され、検出信号は前記演算制御部17に入力される。該演算制御部17は、前記検出信号に基づき前記受光ミラー15の鉛直角データを演算し、該鉛直角データに基づき前記鉛直回転モータ13に対するフィードバック制御を行う。 The rotation angle of the light receiving mirror 15 is detected by the vertical angle encoder 14, and the detection signal is input to the calculation control unit 17. The calculation control unit 17 calculates vertical angle data of the light receiving mirror 15 based on the detection signal, and performs feedback control of the vertical rotation motor 13 based on the vertical angle data.

 又、前記演算制御部17で演算された水平角データ、鉛直角データや測定結果は、前記記憶部18に保存される。該記憶部18としては、磁気記憶装置としてのHDD、光記憶装置としてのCD、DVD、半導体記憶装置としてのメモリカード、USBメモリ等種々の記憶手段が用いられる。該記憶部18は、前記托架部5に対して着脱可能であってもよく、或は図示しない通信手段を介して外部記憶装置や外部データ処理装置にデータを送出可能としてもよい。 The horizontal angle data, vertical angle data, and measurement results calculated by the calculation control unit 17 are stored in the memory unit 18. As the memory unit 18, various storage means such as HDD as a magnetic storage device, CD or DVD as an optical storage device, memory card as a semiconductor storage device, USB memory, etc. The memory unit 18 may be detachable from the support unit 5, or may be capable of sending data to an external storage device or external data processing device via a communication means (not shown).

 前記記憶部18には、測距作動を制御するシーケンスプログラム、測距作動により距離を演算する演算プログラム、水平角データ及び鉛直角データに基づき角度を演算する演算プログラム、距離と角度に基づき所望の測定点の3次元座標を演算するプログラム、ターゲットを追尾する為の追尾プログラム等の各種プログラムが格納される。又、前記演算制御部17により各種プログラムが実行されることで、各種処理が実行される。 The memory unit 18 stores various programs such as a sequence program that controls the distance measurement operation, a calculation program that calculates distance by the distance measurement operation, a calculation program that calculates an angle based on horizontal angle data and vertical angle data, a program that calculates the three-dimensional coordinates of a desired measurement point based on distance and angle, a tracking program for tracking a target, etc. In addition, various processes are performed by the calculation control unit 17 executing various programs.

 前記操作パネル16は、例えばタッチパネルであり、測距の指示や測定条件、例えば測定点間隔の変更等を行う操作部と、測距結果や画像等を表示する表示部とを兼用している。 The operation panel 16 is, for example, a touch panel, and serves both as an operation section for inputting distance measurement instructions and measurement conditions, such as changing the measurement point interval, and as a display section for displaying distance measurement results and images, etc.

 次に、図2を参照して、前記受光部21について説明する。尚、本実施例では、測定対象物として、再帰反射性を有するターゲット、例えばプリズムが用いられる。 Next, the light receiving unit 21 will be described with reference to FIG. 2. In this embodiment, a target having retroreflective properties, such as a prism, is used as the measurement object.

 前記受光部21は、測距光受光部41と追尾光受光部42とを有している。尚、前記測距光射出部28と前記測距光受光部41とで測距部が構成され、前記追尾光射出部29と前記追尾光受光部42とで追尾部が形成される。 The light receiving unit 21 has a distance measuring light receiving unit 41 and a tracking light receiving unit 42. The distance measuring unit is composed of the distance measuring light emitting unit 28 and the distance measuring light receiving unit 41, and the tracking light emitting unit 29 and the tracking light receiving unit 42 form a tracking unit.

 前記測距光受光部41は、前記受光光軸43を有している。又、前記測距光受光部41は、受光側から順に、前記受光光軸43上に設けられた受光素子44と、受光プリズム45と、受光レンズ46とを有している。 The distance measurement light receiving unit 41 has the light receiving optical axis 43. The distance measurement light receiving unit 41 also has, in order from the light receiving side, a light receiving element 44 arranged on the light receiving optical axis 43, a light receiving prism 45, and a light receiving lens 46.

 前記受光プリズム45は、分離面としてのダイクロイック膜47を有している。前記受光プリズム45は、測定対象物で反射された前記測距光32(反射測距光48)と該反射測距光48と同軸で入射した前記追尾光35(反射追尾光49)とを少なくとも1回内部反射させる様に構成されている。又、前記ダイクロイック膜47は、前記反射測距光48を反射し、前記反射追尾光49を透過する光学特性を有している。 The light-receiving prism 45 has a dichroic film 47 as a separation surface. The light-receiving prism 45 is configured to internally reflect at least once the distance measuring light 32 (reflected distance measuring light 48) reflected by the object to be measured and the tracking light 35 (reflected tracking light 49) incident coaxially with the reflected distance measuring light 48. In addition, the dichroic film 47 has the optical property of reflecting the reflected distance measuring light 48 and transmitting the reflected tracking light 49.

 尚、本実施例では、前記受光光軸43と、前記受光プリズム45及び前記ダイクロイック膜47で反射された前記受光光軸43とを総称して、該受光光軸43としている。 In this embodiment, the light receiving optical axis 43 and the light receiving optical axis 43 reflected by the light receiving prism 45 and the dichroic film 47 are collectively referred to as the light receiving optical axis 43.

 前記追尾光受光部42は、追尾受光光軸51を有している。又、前記追尾光受光部42は、受光側から順に、前記追尾受光光軸51上に設けられた追尾受光素子52、前記受光プリズム45、前記受光レンズ46を有している。尚、本実施例では、前記追尾受光光軸51と、前記受光プリズム45で反射された前記追尾受光光軸51とを総称して、該追尾受光光軸51としている。 The tracking light receiving unit 42 has a tracking light receiving optical axis 51. The tracking light receiving unit 42 also has, in order from the light receiving side, a tracking light receiving element 52 arranged on the tracking light receiving optical axis 51, the light receiving prism 45, and the light receiving lens 46. In this embodiment, the tracking light receiving optical axis 51 and the tracking light receiving optical axis 51 reflected by the light receiving prism 45 are collectively referred to as the tracking light receiving optical axis 51.

 前記追尾受光素子52は、画素の集合体であるCCD、或はCMOSセンサであり、各画素は前記追尾受光素子52上での位置が特定できる様になっている。例えば、各画素は、前記追尾受光素子52の中心を原点とした画素座標を有し、該画素座標によって前記追尾受光素子52上での位置が特定される。 The tracking light receiving element 52 is a CCD or CMOS sensor that is a collection of pixels, and the position of each pixel on the tracking light receiving element 52 can be identified. For example, each pixel has pixel coordinates with the center of the tracking light receiving element 52 as the origin, and the position on the tracking light receiving element 52 is identified by the pixel coordinates.

 前記投光部19及び前記受光部21は、前記演算制御部17によって制御される。前記発光素子31から前記測距光軸25上に射出されたパルス状の前記測距光32は、前記投光レンズ33、前記ダイクロイックミラー34を透過し、前記鉛直回転軸11の内部及び前記貫通孔23を通り、前記ロッドミラー26の前記円筒部26aの基端面に入射角0°で直角に入射する。 The light projecting unit 19 and the light receiving unit 21 are controlled by the calculation control unit 17. The pulsed distance measuring light 32 emitted from the light emitting element 31 onto the distance measuring optical axis 25 passes through the light projecting lens 33 and the dichroic mirror 34, passes through the inside of the vertical rotation shaft 11 and the through hole 23, and is incident at a right angle to the base end surface of the cylindrical portion 26a of the rod mirror 26 at an incident angle of 0°.

 前記測距光32は、前記円筒部26aの軸心に沿って該円筒部26a内を透過し、前記反射面26bで直角に反射される。該反射面26bで反射された前記測距光32は、前記凹部27bを介して前記シリンドリカルレンズ27に入射し、前記平面部27aに入射角0°で入射し、射出される。 The distance measuring light 32 passes through the cylindrical portion 26a along the axis of the cylindrical portion 26a and is reflected at a right angle by the reflecting surface 26b. The distance measuring light 32 reflected by the reflecting surface 26b enters the cylindrical lens 27 through the recess 27b, enters the flat portion 27a at an angle of incidence of 0°, and is emitted.

 尚、前記測距光32は入射角0°で前記円筒部26aに入射し、前記平面部27aから射出されるので、入射及び射出の際に前記測距光32に偏向は生じない。又、前記ロッドミラー26の前記シリンドリカルレンズ27は隙間なく一体化されているので、前記測距光32が前記ロッドミラー26と前記シリンドリカルレンズ27との境界面を通過する際にも偏向は生じない。 The distance measuring light 32 enters the cylindrical portion 26a at an angle of incidence of 0° and exits from the flat portion 27a, so no deflection occurs in the distance measuring light 32 when it enters and exits. In addition, the cylindrical lens 27 of the rod mirror 26 is integrated without any gaps, so no deflection occurs when the distance measuring light 32 passes through the boundary surface between the rod mirror 26 and the cylindrical lens 27.

 前記投光ミラー24で直角に反射された前記測距光32は、前記窓部39を透過して測定対象物に照射される。前記投光ミラー24が前記受光ミラー15と一体に前記軸心11aを中心に回転することで、前記測距光32は前記軸心11aと直交し、且つ前記軸心6aを含む平面内で回転(走査)される。 The distance measuring light 32 reflected at a right angle by the light projecting mirror 24 passes through the window 39 and is irradiated onto the object to be measured. The light projecting mirror 24 rotates integrally with the light receiving mirror 15 around the axis 11a, so that the distance measuring light 32 rotates (scans) perpendicular to the axis 11a and within a plane including the axis 6a.

 測定対象物で反射された前記反射測距光48は、前記窓部39を透過し、前記測距光32と同軸で前記受光ミラー15に入射する。又、前記反射測距光48は、前記受光ミラー15で直角に反射され、前記受光レンズ46で集光されつつ前記受光プリズム45に入射し、該受光プリズム45を通過する過程で前記ダイクロイック膜47に反射され、前記受光素子44で受光される。 The reflected distance measuring light 48 reflected by the object to be measured passes through the window 39 and enters the light receiving mirror 15 coaxially with the distance measuring light 32. The reflected distance measuring light 48 is also reflected at a right angle by the light receiving mirror 15, is collected by the light receiving lens 46, and enters the light receiving prism 45. In the process of passing through the light receiving prism 45, it is reflected by the dichroic film 47 and is received by the light receiving element 44.

 尚、前記受光ミラー15で反射された前記反射測距光48の前記受光光軸43は、前記ダイクロイックミラー34を透過した前記測距光軸25と同軸となっている。即ち、前記測距光軸25と前記受光光軸43は、前記軸心11aと合致する。 The receiving optical axis 43 of the reflected distance measuring light 48 reflected by the receiving mirror 15 is coaxial with the distance measuring optical axis 25 transmitted through the dichroic mirror 34. In other words, the distance measuring optical axis 25 and the receiving optical axis 43 coincide with the axis 11a.

 又、前記窓部39は、前記測距光軸25に対して所定角度傾斜しているので、前記窓部39で反射された前記測距光32が前記受光ミラー15で反射され、前記受光素子44に受光されるのが防止される。 In addition, the window portion 39 is inclined at a predetermined angle with respect to the distance measurement optical axis 25, so that the distance measurement light 32 reflected by the window portion 39 is prevented from being reflected by the light receiving mirror 15 and received by the light receiving element 44.

 前記演算制御部17は、前記発光素子31の発光タイミングと、前記受光素子44の受光タイミングの時間差(即ち、パルス光の往復時間)と光速に基づき、前記測距光32の1パルス毎に測距を実行し(Time Of Flight)、測定対象物迄の距離を演算する。尚、前記発光素子31の発光のタイミング、即ちパルス間隔は、前記操作パネル16を介して変更可能となっている。又、測距結果と前記水平角エンコーダ9及び前記鉛直角エンコーダ14で得られた水平角データ及び鉛直角データに基づき、測定対象物の3次元座標を演算できる。 The calculation control unit 17 performs distance measurement for each pulse of the distance measuring light 32 based on the time difference between the light emission timing of the light emitting element 31 and the light reception timing of the light receiving element 44 (i.e., the round trip time of the pulsed light) and the speed of light, and calculates the distance to the object to be measured (Time Of Flight). The light emission timing of the light emitting element 31, i.e., the pulse interval, can be changed via the operation panel 16. In addition, the three-dimensional coordinates of the object to be measured can be calculated based on the distance measurement result and the horizontal angle data and vertical angle data obtained by the horizontal angle encoder 9 and the vertical angle encoder 14.

 又、前記測距光32を所定のパルス間隔で射出しつつ、前記托架部5と前記受光ミラー15(前記投光ミラー24)とをそれぞれ定速で回転させることで、該受光ミラー15の鉛直方向の回転と、前記托架部5の水平方向の回転との協動により、前記測距光32が2次元に走査される。又、各パルス光毎に前記鉛直角エンコーダ14、前記水平角エンコーダ9により鉛直角、水平角を検出することで、鉛直角データ、水平角データが取得できる。鉛直角データ、水平角データ、測距データとにより、測定対象物の3次元座標及び測定対象物に対応する3次元の点群データが取得できる。 Furthermore, by rotating the base frame 5 and the light receiving mirror 15 (the light projecting mirror 24) at a constant speed while emitting the distance measuring light 32 at a predetermined pulse interval, the vertical rotation of the light receiving mirror 15 and the horizontal rotation of the base frame 5 cooperate to scan the distance measuring light 32 two-dimensionally. Furthermore, by detecting the vertical angle and horizontal angle for each pulse light using the vertical angle encoder 14 and the horizontal angle encoder 9, vertical angle data and horizontal angle data can be obtained. From the vertical angle data, horizontal angle data and distance measuring data, the three-dimensional coordinates of the measurement object and three-dimensional point cloud data corresponding to the measurement object can be obtained.

 又、測距作動と並行して、前記追尾発光素子37から発せられた前記測距光32とは異なる波長の近赤外光である前記追尾光35は、前記追尾投光レンズ38で僅かに発散された後、前記ダイクロイックミラー34により前記測距光32と同軸となる様に偏向される。又、前記追尾光35は、前記鉛直回転軸11内部と前記貫通孔23を通過し、前記ロッドミラー26の前記円筒部26aに入射角0°で直角に入射し、前記追尾光35は、前記円筒部26a内を透過して前記反射面26bに入射する。該反射面26bで直角に反射された前記追尾光35は、前記凹部27bを介して前記シリンドリカルレンズ27に入射し、前記平面部27aに入射角0°で入射及び射出され、前記窓部39を透過して測定対象物に照射される。 In parallel with the distance measurement operation, the tracking light 35, which is near-infrared light of a different wavelength from the distance measurement light 32 emitted from the tracking light-emitting element 37, is slightly diverged by the tracking projection lens 38, and then deflected by the dichroic mirror 34 so as to be coaxial with the distance measurement light 32. The tracking light 35 passes through the inside of the vertical rotation shaft 11 and the through hole 23, and is incident at a right angle on the cylindrical portion 26a of the rod mirror 26 at an incident angle of 0°, and the tracking light 35 passes through the cylindrical portion 26a and is incident on the reflecting surface 26b. The tracking light 35 reflected at a right angle by the reflecting surface 26b is incident on the cylindrical lens 27 through the recess 27b, is incident on and emitted from the flat portion 27a at an incident angle of 0°, and is irradiated onto the measurement object through the window portion 39.

 前記測距光32と同軸で測定対象物に照射され、測定対象物に同軸で反射された前記反射追尾光49は、前記窓部39を透過し、前記受光ミラー15で直角に反射され、前記受光レンズ46を介して前記受光プリズム45に入射する。該受光プリズム45に入射した前記反射追尾光49は、前記受光プリズム45を通過する過程で、前記ダイクロイック膜47で前記反射測距光48と分離され、前記ダイクロイック膜47を透過して前記追尾受光素子52で受光される。又、該追尾受光素子52への前記反射追尾光49の受光により、追尾像(図示せず)を得ることができる。 The reflected tracking light 49 is irradiated onto the object to be measured coaxially with the distance measuring light 32 and is reflected coaxially from the object to be measured. It passes through the window 39, is reflected at a right angle by the light receiving mirror 15, and is incident on the light receiving prism 45 via the light receiving lens 46. In the process of passing through the light receiving prism 45, the reflected tracking light 49 incident on the light receiving prism 45 is separated from the reflected distance measuring light 48 by the dichroic film 47, passes through the dichroic film 47, and is received by the tracking light receiving element 52. In addition, a tracking image (not shown) can be obtained by receiving the reflected tracking light 49 at the tracking light receiving element 52.

 前記演算制御部17は、前記追尾受光素子52の中心と、該追尾受光素子52に対する前記反射追尾光49の受光位置との位置偏差を演算し、該位置偏差に基づき、前記水平回転モータ8と前記鉛直回転モータ13を駆動させ、測定対象物を追尾する様に構成される。 The calculation control unit 17 is configured to calculate the position deviation between the center of the tracking light receiving element 52 and the receiving position of the reflected tracking light 49 relative to the tracking light receiving element 52, and drive the horizontal rotation motor 8 and the vertical rotation motor 13 based on the position deviation to track the object to be measured.

 上述の様に、第1の実施例では、前記投光部19と前記受光部21とが、前記受光ミラー15を挟んで反対側に配置されている。従って、前記投光部19と前記受光部21を1つの光学系に組込む必要がないと共に、前記測距光32と前記反射測距光48とが同軸となる様に偏向する為の偏向光学部材が不要となるので、部品点数の低減が図れると共に、光学系及び前記測量装置1全体の小型化を図ることができる。 As described above, in the first embodiment, the light-projecting unit 19 and the light-receiving unit 21 are arranged on opposite sides of the light-receiving mirror 15. Therefore, there is no need to incorporate the light-projecting unit 19 and the light-receiving unit 21 into a single optical system, and no deflection optical member is required to deflect the distance measuring light 32 and the reflected distance measuring light 48 so that they are coaxial. This reduces the number of parts and allows the optical system and the surveying device 1 as a whole to be made more compact.

 又、前記ロッドミラー26と前記シリンドリカルレンズ27とで前記投光ミラー24が構成され、前記シリンドリカルレンズ27の前記凹部27bが前記ロッドミラー26周囲の上側の半分又は略半分を隙間なく覆う様に、前記ロッドミラー26と前記シリンドリカルレンズ27とが一体化されている。 The rod mirror 26 and the cylindrical lens 27 form the light projecting mirror 24, and the rod mirror 26 and the cylindrical lens 27 are integrated together so that the recess 27b of the cylindrical lens 27 covers the upper half or approximately half of the periphery of the rod mirror 26 without any gaps.

 従って、前記反射面26bで反射された前記測距光32及び前記追尾光35が前記ロッドミラー26の周面で偏向されることなく全光量が前記シリンドリカルレンズ27に入射し、射出されるので、前記測距光32と前記追尾光35の有効径を前記円筒部26aの径の略同程度迄拡大させることができ、射出させたい前記測距光32と前記追尾光35のビーム径に対して、前記ロッドミラー26の円筒面サイズを最小化することができる。 Therefore, the distance measuring light 32 and the tracking light 35 reflected by the reflecting surface 26b are not deflected by the peripheral surface of the rod mirror 26, and all of the light enters and is emitted from the cylindrical lens 27. This allows the effective diameter of the distance measuring light 32 and the tracking light 35 to be expanded to approximately the same diameter as the cylindrical portion 26a, and the cylindrical surface size of the rod mirror 26 can be minimized relative to the beam diameter of the distance measuring light 32 and the tracking light 35 to be emitted.

 又、前記シリンドリカルレンズ27の基端部に、前記受光ミラー15の傾斜と同等の傾斜を有する前記面取り部27cを形成しているので、該面取り部27cと前記受光ミラー15とを接触させることで、前記投光ミラー24を自動的に位置決めすることができ、作業性の向上及び作業時間の短縮を図ることができる。 In addition, the chamfered portion 27c is formed at the base end of the cylindrical lens 27 with an inclination equivalent to that of the light receiving mirror 15. By bringing the chamfered portion 27c into contact with the light receiving mirror 15, the light projecting mirror 24 can be automatically positioned, improving workability and reducing work time.

 又、前記鉛直回転軸11を中空とし、前記受光ミラー15に前記鉛直回転軸11と同心で中空部と連通する前記貫通孔23を形成し、該貫通孔23に前記鉛直回転軸11及び前記貫通孔23と同心、即ち前記受光ミラー15の回転軸と同心で一体に回転する前記円筒部26aを有する投光ミラー24を設けている。 The vertical rotation shaft 11 is hollow, and the light receiving mirror 15 is formed with the through hole 23 that is concentric with the vertical rotation shaft 11 and communicates with the hollow portion, and the light projecting mirror 24 is provided in the through hole 23, and has the cylindrical portion 26a that is concentric with the vertical rotation shaft 11 and the through hole 23, i.e., concentric with the rotation axis of the light receiving mirror 15 and rotates integrally therewith.

 従って、該投光ミラー24の前記反射面26bに入射する前記測距光軸25と、前記受光ミラー15で偏向された前記受光光軸43とを同軸とすることができ、測定精度を向上させることができる。 Therefore, the distance measurement optical axis 25 incident on the reflecting surface 26b of the light projecting mirror 24 and the light receiving optical axis 43 deflected by the light receiving mirror 15 can be made coaxial, improving the measurement accuracy.

 又、前記受光ミラー15に前記貫通孔23を形成し、該貫通孔23に前記投光ミラー24を設けるだけでよいので、製作が容易であり、製作コストも低減することができる。 Furthermore, since it is only necessary to form the through hole 23 in the light receiving mirror 15 and provide the light projecting mirror 24 in the through hole 23, manufacturing is easy and manufacturing costs can be reduced.

 次に、図5(A)~図5(C)に於いて、本発明の第2の実施例について説明する。尚、図5(A)~図5(C)中、図4(A)~図4(C)中と同等のものには同符号を付し、その説明を省略する。 Next, a second embodiment of the present invention will be described with reference to Figures 5(A) to 5(C). Note that in Figures 5(A) to 5(C), the same reference numerals are used for the same parts as in Figures 4(A) to 4(C), and their description will be omitted.

 第2の実施例に於いては、シリンドリカルレンズ53は平面部53aが円形となった円筒形状となっており、前記平面部53aの径はロッドミラー26の円筒部26aと同径又は略同径となっている。 In the second embodiment, the cylindrical lens 53 has a cylindrical shape with a circular flat surface 53a, and the diameter of the flat surface 53a is the same as or approximately the same as the cylindrical portion 26a of the rod mirror 26.

 又、前記シリンドリカルレンズ53の凹部53bは、図5(C)に示される様に、前記円筒部26aの周面の曲率と同等の曲率を有する半円状の断面を有している。従って、前記ロッドミラー26と前記シリンドリカルレンズ53とは、前記凹部53bの内面と前記円筒部26aの周面とを介して隙間なく密着され、一体化されている。その他の構成については、第1の実施例と同様である。 Also, as shown in FIG. 5(C), the recess 53b of the cylindrical lens 53 has a semicircular cross section with a curvature equal to that of the circumferential surface of the cylindrical portion 26a. Therefore, the rod mirror 26 and the cylindrical lens 53 are tightly attached and integrated with no gaps between the inner surface of the recess 53b and the circumferential surface of the cylindrical portion 26a. The rest of the configuration is the same as in the first embodiment.

 第2の実施例に於いては、前記シリンドリカルレンズ53が前記ロッドミラー26の前記円筒部26aと同等の径を有する円筒形状であり、前記凹部53bを介して前記ロッドミラー26と前記シリンドリカルレンズ53が隙間なく密着して一体化され、投光ミラー54を構成している。 In the second embodiment, the cylindrical lens 53 has a cylindrical shape with a diameter equal to that of the cylindrical portion 26a of the rod mirror 26, and the rod mirror 26 and the cylindrical lens 53 are tightly integrated with no gaps via the recess 53b, forming the light projecting mirror 54.

 従って、前記反射面26bで反射された測距光32及び追尾光35は、前記円筒部26aと同径の前記シリンドリカルレンズ53内を透過して前記平面部53aより射出される。 Therefore, the distance measuring light 32 and tracking light 35 reflected by the reflecting surface 26b pass through the cylindrical lens 53, which has the same diameter as the cylindrical portion 26a, and are emitted from the flat portion 53a.

 第2の実施例に於いても、前記反射面26bで反射された前記測距光32と前記追尾光35の全光量が、前記ロッドミラー26の周面で偏向されることなく前記シリンドリカルレンズ53に入射し、前記平面部53aより射出されるので、前記測距光32と前記追尾光35の有効径を前記円筒部26aの径の略同程度迄拡大させることができ、射出させたい前記測距光32と前記追尾光35のビーム径に対して、前記ロッドミラー26の円筒面サイズを最小化することができる。 In the second embodiment, the entire amount of the distance measuring light 32 and the tracking light 35 reflected by the reflecting surface 26b is incident on the cylindrical lens 53 without being deflected by the peripheral surface of the rod mirror 26 and is emitted from the flat surface portion 53a. This allows the effective diameter of the distance measuring light 32 and the tracking light 35 to be expanded to approximately the same diameter as the cylindrical portion 26a, and the cylindrical surface size of the rod mirror 26 can be minimized relative to the beam diameter of the distance measuring light 32 and the tracking light 35 to be emitted.

 又、前記平面部53aに対する反射測距光48の入射面積が第1の実施例に於ける平面部27aよりも小さくなるので、前記測距光32と前記追尾光35の有効径を維持しつつ、受光部21(図2参照)のケラレを最小化することができる。 In addition, the incident area of the reflected distance measuring light 48 on the flat surface 53a is smaller than that of the flat surface 27a in the first embodiment, so that the effective diameter of the distance measuring light 32 and the tracking light 35 is maintained while minimizing vignetting of the light receiving section 21 (see FIG. 2).

 尚、第1の実施例と第2の実施例では、前記投光部19が前記測距光射出部28と前記追尾光射出部29を有し、前記受光部21が前記測距光受光部41と前記追尾光受光部42を有しているが、測定対象物の追尾が不要である場合には、前記追尾光射出部29と前記追尾光受光部42は省略してもよい。前記追尾光射出部29を省略することで、前記測距光射出部28を前記鉛直回転軸11の内部に設けることができるので、測距部の光学系を更に小型化することができる。 In the first and second embodiments, the light projecting unit 19 has the distance measuring light emitting unit 28 and the tracking light emitting unit 29, and the light receiving unit 21 has the distance measuring light receiving unit 41 and the tracking light receiving unit 42, but if tracking of the object to be measured is not required, the tracking light emitting unit 29 and the tracking light receiving unit 42 may be omitted. By omitting the tracking light emitting unit 29, the distance measuring light emitting unit 28 can be provided inside the vertical rotation shaft 11, making it possible to further miniaturize the optical system of the distance measuring unit.

 又、第1の実施例と第2の実施例では、前記受光ミラー15の反射面を平面としているが、該反射面は軸外し放物面鏡や自由曲面鏡、輪帯自由曲面鏡であってもよい。これにより、前記受光部21の焦点距離を短くでき、光学系の小型化が図れると共に、前記受光レンズ46を省略でき、部品点数の低減を図ることができる。 In the first and second embodiments, the reflecting surface of the light receiving mirror 15 is a flat surface, but the reflecting surface may be an off-axis parabolic mirror, a free-form surface mirror, or an annular free-form surface mirror. This allows the focal length of the light receiving section 21 to be shortened, the optical system to be made more compact, and the light receiving lens 46 can be omitted, reducing the number of parts.

 更に、第1の実施例と第2の実施例では、前記投光ミラー24,54に於けるシリンドリカルレンズ27,53の射出平面部(平面部27a,53a)と前記ロッドミラー26の入射平面部(前記円筒部26aの入射端面)を前記測距光軸25と前記追尾光軸36に対して直角としているが、僅かに(例えば、0.5°~2°程度)傾けてもよい。これにより、前記発光素子31と前記追尾発光素子37に戻る表面反射光を低減することができ、前記発光素子31と前記追尾発光素子37の出力変動を抑制することができる。尚、前記シリンドリカルレンズ27,53の射出平面部と前記ロッドミラー26の入射平面部を傾ける場合、傾ける角度は同じとし、傾ける向きは入射光軸に対する射出光軸の偏向角が直角となる様に設定される。 Furthermore, in the first and second embodiments, the exit plane (plane 27a, 53a) of the cylindrical lens 27, 53 in the light projecting mirror 24, 54 and the entrance plane (entrance end surface of the cylindrical portion 26a) of the rod mirror 26 are perpendicular to the distance measuring optical axis 25 and the tracking optical axis 36, but they may be slightly tilted (for example, about 0.5° to 2°). This reduces the surface reflected light returning to the light emitting element 31 and the tracking light emitting element 37, and suppresses output fluctuations of the light emitting element 31 and the tracking light emitting element 37. When the exit plane of the cylindrical lens 27, 53 and the entrance plane of the rod mirror 26 are tilted, the tilt angle is the same, and the tilt direction is set so that the deflection angle of the exit optical axis relative to the incident optical axis is perpendicular.

 次に、図6(A)、図6(B)、図7(A)~図7(C)に於いて、本発明の第3の実施例について説明する。尚、図6(A)、図6(B)、図7(A)~図7(C)中、図5(A)~図5(C)中と同等のものには同符号を付し、その説明を省略する。 Next, a third embodiment of the present invention will be described with reference to Figures 6(A), 6(B), and 7(A) to 7(C). Note that in Figures 6(A), 6(B), and 7(A) to 7(C), the same reference numerals are used for elements equivalent to those in Figures 5(A) to 5(C), and their description will be omitted.

 第1の実施例及び第2の実施例では、窓部39(図1参照)が受光ミラー15(図1参照)と一体に回転する構成であったが、第3の実施例では、窓部56が固定的に設けられ、前記受光ミラー15のみが回転するように構成されている。 In the first and second embodiments, the window portion 39 (see FIG. 1) rotates together with the light receiving mirror 15 (see FIG. 1), but in the third embodiment, the window portion 56 is fixed and only the light receiving mirror 15 rotates.

 前記窓部56は、例えば周面の一部が切除された円筒形状であり、切除部分を介して凹部22(図1参照)の底面に取り付けられている。又この時、窓部56の軸心は、鉛直回転軸11(図1参照)の軸心11aと合致するか、又は平行となっている。 The window portion 56 is, for example, cylindrical with a portion of the periphery cut away, and is attached to the bottom surface of the recess 22 (see FIG. 1) via the cut away portion. In addition, at this time, the axis of the window portion 56 coincides with or is parallel to the axis 11a of the vertical rotation shaft 11 (see FIG. 1).

 従って、前記受光ミラー15の周囲は、托架部5(図1参照)で遮られる部分を除き、全周に亘って前記窓部56に覆われるので、投光光軸偏向部としての投光ミラー57で反射される測距光32は、射出方向に拘わらず、前記窓部56を透過する。又、前記窓部56の軸心が前記軸心11aと合致又は平行であるので、前記窓部56に対する前記測距光32の入射角は常に一定である。尚、前記窓部56は円錐形状としてもよい。 Therefore, the entire periphery of the light receiving mirror 15 is covered by the window portion 56 except for the portion blocked by the support portion 5 (see FIG. 1), so that the distance measuring light 32 reflected by the light projecting mirror 57, which serves as a light projecting optical axis deflection portion, passes through the window portion 56 regardless of the emission direction. In addition, since the axis of the window portion 56 coincides with or is parallel to the axis 11a, the angle of incidence of the distance measuring light 32 with respect to the window portion 56 is always constant. The window portion 56 may be cone-shaped.

 一方で、該窓部56の入射面は所定の曲率を有する曲面であるので、前記測距光32が前記窓部56を透過する過程で非点収差が生じる。非点収差が生じると、前記窓部56に入射した円形のビーム断面を有する前記測距光32が、楕円形のビーム断面を有する前記測距光32として前記窓部56から射出されることとなる。 On the other hand, since the entrance surface of the window portion 56 is a curved surface having a predetermined curvature, astigmatism occurs when the distance measurement light 32 passes through the window portion 56. When astigmatism occurs, the distance measurement light 32 having a circular beam cross section that enters the window portion 56 is emitted from the window portion 56 as the distance measurement light 32 having an elliptical beam cross section.

 第3の実施例における前記投光ミラー57は、第2の実施例における投光ミラー54(図5参照)と同様に、円筒部58aと反射面58bを有するロッドミラー58と、平面部59aと凹部59bとを有するシリンドリカルレンズ59とから構成される。 The light projecting mirror 57 in the third embodiment is composed of a rod mirror 58 having a cylindrical portion 58a and a reflecting surface 58b, and a cylindrical lens 59 having a flat portion 59a and a recessed portion 59b, similar to the light projecting mirror 54 in the second embodiment (see FIG. 5).

 一方で、前記平面部59a、即ち前記反射面58bで反射された前記測距光32の入射面であり、前記測距光32が透過し射出される射出面は、凸シリンドリカル面となっている。従って、以下の説明では、前記平面部59aは射出面59aとも称す。 On the other hand, the flat surface 59a, i.e., the incident surface of the distance measuring light 32 reflected by the reflecting surface 58b, and the exit surface through which the distance measuring light 32 passes and exits, is a convex cylindrical surface. Therefore, in the following description, the flat surface 59a is also referred to as the exit surface 59a.

 該射出面59aは、例えばR=1000mm程度の凸シリンドリカル面であり、該射出面59aの曲率は、前記窓部56の曲率に併せて設定される。又、前記射出面59aの軸心の向きは、前記窓部56で生じる非点収差を相殺可能な方向であり、該窓部56の曲率方向と同等となっている。即ち、前記射出面59aは、前記窓部56での非点収差により生じる楕円の長径方向に前記測距光32を縮小する構成となっている。 The exit surface 59a is a convex cylindrical surface with R=1000 mm, for example, and the curvature of the exit surface 59a is set to match the curvature of the window portion 56. The axis of the exit surface 59a is oriented in a direction that can offset the astigmatism that occurs in the window portion 56, and is the same as the curvature direction of the window portion 56. In other words, the exit surface 59a is configured to reduce the distance measurement light 32 in the direction of the major axis of an ellipse that occurs due to the astigmatism in the window portion 56.

 前記投光ミラー57に入射した前記測距光32は、前記射出面59aを透過する過程で所定の1軸方向にビーム径が縮小され、楕円形のビーム断面を有する前記測距光32として前記窓部56に入射する。 The distance measuring light 32 incident on the light projecting mirror 57 has its beam diameter reduced in a predetermined axial direction as it passes through the exit surface 59a, and enters the window portion 56 as the distance measuring light 32 having an elliptical beam cross section.

 該窓部56に入射した前記測距光32は、前記窓部56を透過する過程で非点収差を生じ、前記射出面59aで縮小された方向に前記測距光32のビーム径を拡大させる。従って、前記測距光32は、真円のビーム径を有する該測距光32として前記窓部56から射出され、測定対象物に照射される。 The distance measuring light 32 incident on the window 56 generates astigmatism as it passes through the window 56, expanding the beam diameter of the distance measuring light 32 in the direction of the reduction at the exit surface 59a. Therefore, the distance measuring light 32 is emitted from the window 56 as distance measuring light 32 having a circular beam diameter, and is irradiated onto the object to be measured.

 上記した様に、第3の実施例では、前記シリンドリカルレンズ59の前記射出面59aを凸シリンドリカル面とし、該射出面59aにより前記窓部56で生じる非点収差を補正している。 As described above, in the third embodiment, the exit surface 59a of the cylindrical lens 59 is a convex cylindrical surface, and the exit surface 59a corrects the astigmatism that occurs in the window portion 56.

 従って、前記窓部56を固定的に設けられ、前記投光ミラー57の周囲を覆う円筒又は円錐形状とし、前記窓部56により非点収差を生じる場合であっても、非点収差を除去し、円形のビーム径を有する前記測距光32を得ることができるので、測定精度を向上させることができる。 Therefore, even if the window portion 56 is fixedly provided and has a cylindrical or conical shape that covers the periphery of the light-projecting mirror 57, and astigmatism is generated by the window portion 56, the astigmatism can be eliminated and the distance measuring light 32 having a circular beam diameter can be obtained, thereby improving the measurement accuracy.

 尚、第3の実施例では、前記シリンドリカルレンズ59の前記射出面59aを凸シリンドリカル面とし、該射出面59aで前記窓部56による非点収差を補正しているが、非点収差の補正方法はこれに限られるものではない。例えば、前記ロッドミラー58(円筒部58a)の入射面58cを凸シリンドリカル面とし、該入射面58cで非点収差を補正してもよいし、前記ロッドミラー58の反射面58bを凹シリンドリカル面とし、該反射面58bで非点収差を補正してもよい。尚、前記射出面59aと前記入射面58cと前記反射面58bのいずれかをシリンドリカル面とした場合、その他の面は平面となる。 In the third embodiment, the exit surface 59a of the cylindrical lens 59 is a convex cylindrical surface, and the exit surface 59a corrects the astigmatism caused by the window portion 56, but the method of correcting astigmatism is not limited to this. For example, the entrance surface 58c of the rod mirror 58 (cylinder portion 58a) may be a convex cylindrical surface, and the entrance surface 58c may correct the astigmatism, or the reflecting surface 58b of the rod mirror 58 may be a concave cylindrical surface, and the reflecting surface 58b may correct the astigmatism. In addition, if any of the exit surface 59a, the entrance surface 58c, and the reflecting surface 58b is a cylindrical surface, the other surface will be a flat surface.

 或いは、前記ロッドミラー58と前記シリンドリカルレンズ59として、それぞれ屈折率の異なる硝材を用いることで、前記窓部56による非点収差を補正する様にしてもよい。 Alternatively, the rod mirror 58 and the cylindrical lens 59 may be made of glass materials with different refractive indices, thereby correcting the astigmatism caused by the window portion 56.

 又、前記射出面59aと前記反射面58bと前記入射面58cのいずれかをシリンドリカル面とする構成は、第1の実施例における投光ミラー24(図4参照)に適用してもよいのは言う迄もない。 It goes without saying that the configuration in which any one of the exit surface 59a, the reflecting surface 58b, and the entrance surface 58c is a cylindrical surface may also be applied to the light-projecting mirror 24 in the first embodiment (see FIG. 4).

    1       測量装置
    3       測量装置本体
    5       托架部
    11      鉛直回転軸
    15      受光ミラー
    17      演算制御部
    19      投光部
    21      受光部
    23      貫通孔
    24      投光ミラー
    28      測距光射出部
    32      測距光
    41      測距光受光部
    48      反射測距光
REFERENCE SIGNS LIST 1 Surveying instrument 3 Surveying instrument body 5 Base section 11 Vertical rotation axis 15 Light receiving mirror 17 Calculation control section 19 Light projecting section 21 Light receiving section 23 Through hole 24 Light projecting mirror 28 Distance measuring light emitting section 32 Distance measuring light 41 Distance measuring light receiving section 48 Reflected distance measuring light

Claims (7)

 測距光を発する発光素子と、測定対象物からの反射測距光を受光する受光素子とを有する測距部と、前記測距光を照射する回転偏向部と、該回転偏向部を中空の鉛直回転軸を介して鉛直方向に回転させる鉛直回転駆動部と、前記回転偏向部が設けられる托架部と、該托架部を水平方向に回転させる水平回転駆動部と、前記受光素子への前記反射測距光の受光結果に基づき測定対象物迄の距離を演算する演算制御部とを具備し、前記回転偏向部は、該回転偏向部の中心部に形成され、前記測距光を直角に偏向する投光偏向部と、中心部以外に形成され、前記反射測距光を前記発光素子と逆向きに直角に偏向する受光偏向部とを有し、該受光偏向部に前記鉛直回転軸の中空部と連通し、前記測距光の光軸と平行な貫通孔が形成され、該貫通孔に一部が嵌合される様に前記投光偏向部が配置される様構成された測量装置。 A distance measuring unit having a light emitting element that emits distance measuring light and a light receiving element that receives the reflected distance measuring light from the object to be measured, a rotary deflection unit that irradiates the distance measuring light, a vertical rotation drive unit that rotates the rotary deflection unit in the vertical direction via a hollow vertical rotation shaft, a base unit on which the rotary deflection unit is provided, a horizontal rotation drive unit that rotates the base unit in the horizontal direction, and a calculation unit that calculates the distance to the object to be measured based on the result of receiving the reflected distance measuring light at the light receiving element. A surveying device comprising a control unit, the rotary deflection unit having a light projecting deflection unit formed in the center of the rotary deflection unit and deflecting the distance measuring light at a right angle, and a light receiving deflection unit formed outside the center and deflecting the reflected distance measuring light at a right angle in the opposite direction to the light emitting element, the light receiving deflection unit communicating with the hollow part of the vertical rotation shaft and having a through hole parallel to the optical axis of the distance measuring light, the light projecting deflection unit being positioned so that a part of the light projecting deflection unit is fitted into the through hole.  前記受光偏向部は端部に前記測距光の光軸を直角に反射させる反射面が形成された筒体であり、前記投光偏向部は投光ミラーであり、該投光ミラーは前記貫通孔に嵌合され、前記鉛直回転軸内を通過した前記測距光を直角に入射させる円筒部と、該円筒部を透過した前記測距光を反射させる反射面を有するロッドミラーと、該ロッドミラーと一体化されたシリンドリカルレンズとを有する請求項1の測量装置。 The surveying device of claim 1, wherein the light receiving deflection unit is a cylinder having a reflecting surface formed at the end for reflecting the optical axis of the distance measuring light at a right angle, and the light projecting deflection unit is a light projecting mirror, the light projecting mirror being fitted into the through hole and having a cylindrical portion for allowing the distance measuring light that has passed through the vertical rotation axis to enter at a right angle, a rod mirror having a reflecting surface for reflecting the distance measuring light that has passed through the cylindrical portion, and a cylindrical lens integrated with the rod mirror.  前記シリンドリカルレンズは前記円筒部の曲率と同等の曲率を有する凹部と、前記反射面で反射された前記測距光が直角に入射する平面部とを有し、前記円筒部と前記凹部とが隙間なく密着する様構成された請求項2の測量装置。 The surveying device of claim 2, wherein the cylindrical lens has a concave portion having a curvature equal to that of the cylindrical portion, and a flat portion onto which the distance measuring light reflected by the reflecting surface is incident at a right angle, and the cylindrical portion and the concave portion are configured to fit closely together without any gaps.  前記シリンドリカルレンズの基端部には前記受光偏向部の反射面の傾斜と同等の傾斜を有する面取り部が形成され、前記反射面と前記面取り部とが接触する様に構成された請求項3の測量装置。 The surveying device of claim 3, in which a chamfered portion having an inclination equal to the inclination of the reflecting surface of the light receiving deflection portion is formed at the base end of the cylindrical lens, and the reflecting surface and the chamfered portion are configured to come into contact.  前記シリンドリカルレンズは前記円筒部と同径の円筒形状であり、前記平面部は前記円筒部と同径の円形である請求項3の測量装置。 The surveying device of claim 3, wherein the cylindrical lens has a cylindrical shape with the same diameter as the cylindrical portion, and the flat portion has a circular shape with the same diameter as the cylindrical portion.  前記受光偏向部の前記反射面は、軸外し放物面又は自由曲面である請求項2~請求項5のうちいずれか1項の測量装置。 The surveying device according to any one of claims 2 to 5, wherein the reflecting surface of the receiving deflection unit is an off-axis paraboloid or a free-form surface.  前記投光ミラーの周囲を覆い、前記托架部に固定的に設けられた窓部を更に具備し、該窓部は前記鉛直回転軸の軸心と合致又は平行な円筒又は円錐形状であり、前記測距光が入射する前記円筒部の入射面と、前記反射面と、該反射面で反射された前記測距光が直角に入射する前記シリンドリカルレンズの射出面のいずれか1つをシリンドリカル面とする様に構成された請求項2の測量装置。 The surveying device of claim 2 further comprises a window section that covers the periphery of the light projecting mirror and is fixedly provided on the support section, the window section being cylindrical or conical in shape and coinciding with or parallel to the axis of the vertical rotation shaft, and configured so that any one of the entrance surface of the cylindrical section on which the distance measuring light is incident, the reflecting surface, and the exit surface of the cylindrical lens on which the distance measuring light reflected by the reflecting surface is incident at a right angle is a cylindrical surface.
PCT/JP2024/024172 2023-07-21 2024-07-04 Surveying device Pending WO2025022966A1 (en)

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JP2023118766 2023-07-21

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06241799A (en) * 1993-02-12 1994-09-02 Topcon Corp Surveying equipment
JPH07159157A (en) * 1993-12-07 1995-06-23 Sokkia Co Ltd Lightwave rangefinder
JPH08313249A (en) * 1995-05-22 1996-11-29 Toshiba Corp Laser range finder
JP2006503275A (en) * 2002-10-12 2006-01-26 ライカ ジオシステムズ アクチェンゲゼルシャフト Electronic display and control device for measuring instrument
WO2020026477A1 (en) * 2018-08-02 2020-02-06 クモノスコーポレーション株式会社 Three-dimensional laser-light-scanning device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06241799A (en) * 1993-02-12 1994-09-02 Topcon Corp Surveying equipment
JPH07159157A (en) * 1993-12-07 1995-06-23 Sokkia Co Ltd Lightwave rangefinder
JPH08313249A (en) * 1995-05-22 1996-11-29 Toshiba Corp Laser range finder
JP2006503275A (en) * 2002-10-12 2006-01-26 ライカ ジオシステムズ アクチェンゲゼルシャフト Electronic display and control device for measuring instrument
WO2020026477A1 (en) * 2018-08-02 2020-02-06 クモノスコーポレーション株式会社 Three-dimensional laser-light-scanning device

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