WO2024128169A1 - ガラス物品およびその製造方法 - Google Patents
ガラス物品およびその製造方法 Download PDFInfo
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- WO2024128169A1 WO2024128169A1 PCT/JP2023/044131 JP2023044131W WO2024128169A1 WO 2024128169 A1 WO2024128169 A1 WO 2024128169A1 JP 2023044131 W JP2023044131 W JP 2023044131W WO 2024128169 A1 WO2024128169 A1 WO 2024128169A1
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- layer
- silicon oxide
- glass
- glass article
- containing layer
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/212—TiO2
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/213—SiO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/23—Mixtures
- C03C2217/231—In2O3/SnO2
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/24—Doped oxides
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/90—Other aspects of coatings
- C03C2217/94—Transparent conductive oxide layers [TCO] being part of a multilayer coating
- C03C2217/948—Layers comprising indium tin oxide [ITO]
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
Definitions
- This disclosure relates to glass articles and methods for manufacturing the same.
- Glass products including the window glass of vehicles and buildings, are given desired properties by coating the surface of the glass substrate with various materials depending on the application.
- Patent Literature 1 discloses a glass plate having a thermal radiation reflective coating including a functional layer containing a transparent conductive oxide (TCO) and a SiO 2 layer on a substrate. Patent Literature 1 also discloses that the glass plate having the SiO 2 layer as the uppermost layer is compatible with an opaque masking print made of black enamel provided in the peripheral area, and a good appearance can be obtained. It is known that a shielding layer containing a black pigment, glass frit, or the like, as in the above-mentioned masking printed matter, is provided on the peripheral portion of a glass article for a vehicle (e.g., an automobile window glass) for the purpose of preventing deterioration of the adhesive due to sunlight, improving the design, etc.
- a vehicle e.g., an automobile window glass
- the present disclosure has been made in consideration of the above problems, and aims to provide a glass article with excellent appearance that can suppress the occurrence of whitening after heat molding, and a method for manufacturing the same.
- a glass article according to the present disclosure has a functional layer and a silicon oxide-containing layer in this order on a glass substrate, and the total Ar amount in the silicon oxide-containing layer is 52.0 nm ⁇ atomic % or less.
- the glass article may have a total Ar amount in the silicon oxide-containing layer of 19.0 nm ⁇ atomic % or less.
- the silicon oxide-containing layer may have a total H amount of 5.7 ⁇ 10 23 nm/cm 3 or less.
- the silicon oxide-containing layer may have a total H amount of 2.9 ⁇ 10 23 nm/cm 3 or less.
- any of the above glass articles may have a shielding layer on the silicon oxide-containing layer, and the Bi/Si ratio in the shielding layer may be 3.8 or less.
- the SiO2 content in the shielding layer may be 15 mass% or more.
- the silicon oxide-containing layer may contain an element selected from Al and Zr.
- Any of the above glass articles may have a dielectric layer between the glass substrate and the functional layer, and the dielectric layer may contain an element selected from Si, C, Ti, Zr, Nb, Zn, Sn and Al, or an oxide, nitride or oxynitride of these elements.
- the functional layer may contain an element selected from In, Sn, Al, Ni, Cr, Zr, Ti, Nb, W, Fe and F, or an oxide, nitride or oxynitride of these elements.
- Any of the above glass articles may be used as automotive glazing.
- a method for producing a glass article according to the present disclosure includes forming a functional layer and a silicon oxide-containing layer in this order on a glass substrate by dry coating, and setting the total Ar amount in the silicon oxide-containing layer to 52.0 nm atomic % or less.
- the power density when sputtering the silicon oxide-containing layer may be 8.7 W/cm 2 or more.
- a process gas pressure when sputtering the silicon oxide-containing layer may be 3.0 mTorr or less.
- an average O2 blending ratio in a process gas when sputtering the silicon oxide-containing layer may be 80 volume % or more.
- an average O2 blending ratio in a process gas when sputtering the silicon oxide-containing layer may be 90 volume % or more.
- the present disclosure provides a glass article with excellent appearance that can suppress the occurrence of whitening after heat molding, and a method for manufacturing the same.
- FIG. 1 is a schematic cross-sectional view of one embodiment of a glass article according to the present disclosure.
- FIG. 1 is a schematic cross-sectional view of one embodiment of a glass article according to the present disclosure.
- FIG. 1 is a schematic plan view of one embodiment of a glass article according to the present disclosure.
- 1 is a graph showing the depth profile of each atomic concentration measured using a Rutherford scattering spectrum analyzer in Example 1.
- 1 is a graph showing the relationship between the secondary ion intensity of the sample constituent elements measured using a secondary ion mass spectrometer in Example 1 and the sputtering time.
- the use of "to" indicating a range of values means that the values before and after it are included as the lower and upper limits.
- the upper or lower limit of one numerical range may be replaced with the upper or lower limit of another numerical range.
- the upper or lower limit of the numerical range may be replaced with a value shown in the examples.
- the inventors speculated that the occurrence of whitening due to the hot forming (and subsequent cooling as necessary) operation is due to the following. That is, in the process of forming a coating film (e.g., a dry coating film), gas contained in the coating film (e.g., a process gas in dry coating: an inert gas such as Ar) is degassed when heated. Then, when the material for forming the shielding layer melts due to hot forming, the gas remains near the interface between the coating film and the shielding layer and in the shielding layer, and eventually holes (voids) of various shapes are formed in those areas. Then, they speculated that the resulting voids scatter light, and when the glass article is observed from the side on which the shielding layer is not disposed, a phenomenon (whitening) occurs in which the glass article appears white.
- a coating film e.g., a dry coating film
- an inert gas such as Ar an inert gas such as Ar
- glass article according to the present disclosure (hereinafter also referred to as the "glass article") will be described in detail with reference to the drawings, but the present disclosure is not limited to this embodiment. Furthermore, the present disclosure can be modified as desired without departing from the gist of the present disclosure.
- the glass article can be suitably used as a vehicle glass such as an automobile, particularly as an automobile window glass, and can be used in any position of the front, rear, side, or ceiling of the vehicle body.
- the glass article can also be used without restriction for applications other than vehicles, such as buildings.
- the glass article may have at least a portion of the following configuration, and may be used as, for example, a single glass including a single glass substrate, or as a laminated glass including multiple glass substrates.
- the method for producing the glass article is not particularly limited, but as described below, it can be produced, for example, by using a conventionally known float method.
- the glass article has a functional layer 3 and a silicon oxide-containing layer 4 in this order on a glass substrate 1. Furthermore, as shown in Fig. 1B, the glass article may have a dielectric layer 2 between the glass substrate 1 and the functional layer 3. Furthermore, as shown in Fig. 1C, the glass article may have a shielding layer 5 on at least a part of the silicon oxide-containing layer 4. In the present glass article, it is sufficient that these layers are sequentially laminated on at least a portion of one surface of the glass substrate, and these layers may or may not be laminated over the entire glass substrate constituting the glass article.
- the dielectric layer 2 may be in contact with the glass substrate 1, or another layer may be disposed between the glass substrate 1 and the dielectric layer 2, so that the glass substrate 1 and the dielectric layer 2 are not in direct contact with each other. Furthermore, another layer may be disposed between the dielectric layer 2 and the functional layer 3, or between the functional layer 3 and the silicon oxide-containing layer 4, so that these layers are not in direct contact with each other.
- coating films such as a dielectric layer 2, a functional layer 3, and a silicon oxide-containing layer 4 may be disposed over the entire glass substrate, and a frame-shaped shielding layer 5 may be disposed on the coating films at a position that will become the peripheral portion of the glass substrate, as shown in FIG. 1C.
- the present glass article has a silicon oxide-containing layer 4 formed as the uppermost layer of the coating film, and a shielding layer is disposed on the silicon oxide-containing layer 4.
- a seal layer such as a seal lip or an adhesive layer (not shown) for fixing other members may be provided on the silicon oxide-containing layer 4 (for example, on the shielding layer 5 when the shielding layer 5 is provided) via a primer.
- primers, seal layers, and adhesive layers can be appropriately used.
- a scratch-resistant layer may be disposed on the silicon oxide-containing layer.
- the scratch-resistant layer may be composed of at least one selected from, for example, ZrBO, ZrO 2 , Ta 2 O 5 , Al 2 O 3 , TiO 2 , Nb 2 O 5 , SiN, and BN.
- 1A and 1B respectively show schematic cross-sectional views of two embodiments of the glass article, and FIG. 1C shows a schematic plan view thereof as viewed from the shielding layer 5 side.
- the total Ar content of the entire silicon oxide-containing layers is set to fall within the above range.
- a specific method for measuring the total Ar content in the silicon oxide-containing layers will be described later.
- the total amount of Ar in the silicon oxide-containing layer is preferably 5.0 nm-atomic% or more (0.05 nm or more). If the total amount of Ar in the silicon oxide-containing layer is 5.0 nm-atomic% or more, it is easy to prevent the heat resistance of the glass article from decreasing, and it is easy to adjust the film formation speed when producing the coating film to an appropriate range. From the same viewpoint, it is more preferable that the total amount of Ar in the silicon oxide-containing layer is 7.0 nm-atomic% or more (0.07 nm or more).
- the glass article thus provided with a silicon oxide-containing layer having a specific total Ar amount has excellent whitening resistance, can suppress the occurrence of whitening caused by voids, and can have an excellent appearance. Therefore, even when the glass article is molded into a curved shape for use in a vehicle at high temperatures (e.g., 600 to 750°C), the occurrence of whitening can be easily avoided.
- the total amount of H in the silicon oxide-containing layer is preferably 5.7 ⁇ 10 23 nm/cm 3 (nm ⁇ atoms/cm 3 ) or less. If the total amount of H is 5.7 ⁇ 10 23 nm/cm 3 or less, the moisture amount (H amount) in the silicon oxide-containing layer can be easily kept low, and in conjunction with this, the amount of Ar trapped in the SiOx structure in the silicon oxide-containing layer can also be easily kept low. As a result, the generation of voids and whitening of the glass article caused by the Ar can be suppressed, and a glass article having an excellent appearance can be provided regardless of the type of shielding layer. From the same viewpoint, the total amount of H in the silicon oxide-containing layer is more preferably 4.0 ⁇ 10 23 nm/cm 3 or less, and further preferably 2.9 ⁇ 10 23 nm/cm 3 or less.
- the total amount of H in the silicon oxide-containing layer is preferably 1.0 ⁇ 10 23 nm/cm 3 or more. If the total amount of H in the silicon oxide-containing layer is 1.0 ⁇ 10 23 nm/cm 3 or more, it is easy to prevent many restrictions on the manufacturing conditions, and further, it is easy to prevent the waiting time during film formation from becoming long. From the same viewpoint, it is more preferable that the total amount of H in the silicon oxide-containing layer is 1.2 ⁇ 10 23 nm/cm 3 or more.
- the silicon oxide-containing layer may be composed of one or more layers selected from, for example, SiO 2 , SiO 2 :Al, SiO 2 :B, SiO 2 :Sn, SiO 2 :Ti, SiO 2 :Zr, SiO 2 :Hf, and SiO 2 :N. More specifically, for example, the silicon oxide-containing layer may have only one SiOx layer on a glass substrate, or may have a SiOx layer and a SiOx layer doped with another element in this order. Among these, from the viewpoint of improving whitening resistance, the silicon oxide-containing layer preferably contains an element selected from Al and Zr. Note that the dopant is not limited to those mentioned above, and any conventionally known dopant may be appropriately contained.
- the silicon oxide (SiOx) content in the silicon oxide-containing layer is not particularly limited, but from the viewpoint of suppressing the formation of voids and improving whitening resistance, the silicon oxide content is preferably 85 mass% or more, more preferably 90 mass% or more, and even more preferably 92 mass% or more.
- the thickness of the silicon oxide-containing layer is not particularly limited, but from the viewpoints of antireflection and adhesion, it is preferably 20 nm or more, more preferably 40 nm or more, and even more preferably 80 nm or more. From the viewpoint of whitening resistance, the thickness of the silicon oxide-containing layer is preferably 150 nm or less, more preferably 130 nm or less, and even more preferably 110 nm or less. In addition, when a plurality of silicon oxide-containing layers are formed, it is preferable that the total thickness of the silicon oxide-containing layers is within the above range.
- the thickness ratio of the two layers is preferably 2:1 to 5:1, more preferably 3:1 to 4:1, from the viewpoint of improving whitening resistance.
- the coating film is more preferably a low-emissivity coating film and a p-polarized light reflective coating film having two or more layers or three or more layers with a silicon oxide-containing layer as the uppermost layer, and is even more preferably a low-emissivity coating film.
- a method for forming each film a conventionally known method can be appropriately used.
- the composition of the coating film can be determined using energy dispersive X-ray spectroscopy (SEM-EDX).
- the acceleration voltage can be set appropriately, but from the viewpoint of performing more accurate measurements, it is preferably 5 to 25 keV, and more preferably 15 to 20 keV.
- the thickness of each layer of the coating film can be determined by measuring a single film using a stylus step gauge, or by performing optical simulation based on spectroscopic measurements on the laminated product or by observation with a transmission electron microscope (TEM).
- the accelerating voltage in the TEM observation can be set as appropriate, but from the viewpoint of performing more accurate measurements, it is preferably 40 to 1000 kV, and more preferably 60 to 300 kV.
- NIMC CRM5201-a National Institute of Advanced Industrial Science and Technology's standard sample GaAs/AlAs superlattice certified reference material
- the silicon oxide-containing layer may be formed on the silicon oxide-containing layer, but from the viewpoint of suppressing whitening of the glass article, if a shielding layer is provided, it is preferable to form the shielding layer on the silicon oxide-containing layer, more specifically, on the surface of the silicon oxide-containing layer.
- the dielectric layer can be disposed on the glass substrate, specifically between the glass substrate and the functional layer.
- the dielectric layer can be formed by the above-mentioned dry coating method, and preferably contains, for example, an element selected from Si, C, Ti, Zr, Nb, Zn, Sn and Al, or an oxide, nitride or oxynitride of these elements. It can also contain a combination of two or more of these components.
- the dielectric layer can be, for example, Si(Al)N, SiO 2 , TiO 2 , ZnO, or a layer containing a dopant (for example, Zr) in these layers.
- the dielectric layer may be composed of one layer or two or more layers.
- the thickness of the dielectric layer is not particularly limited, but from the viewpoint of imparting various excellent performances, the total thickness is preferably 20 to 100 nm, more preferably 30 to 90 nm, and even more preferably 40 to 80 nm.
- the functional layer can be formed by the above-mentioned dry coating method, and preferably contains, for example, an element selected from In, Sn, Al, Ni, Cr, Zr, Ti, Nb, W, Fe and F, or an oxide, nitride or oxynitride of these elements. It can also contain a combination of two or more of these components.
- the functional layer can be SnO 2 , In 2 O 3 (ITO), ZrN, TiN, CrN, or a layer containing a dopant.
- the functional layer may be composed of one layer or two or more layers.
- the thickness of the functional layer is not particularly limited, but from the viewpoint of imparting various excellent performance properties, the total thickness is preferably 40 to 200 nm, more preferably 50 to 180 nm, and even more preferably 60 to 160 nm.
- the total thickness of the coating film including the functional layer and the silicon oxide-containing layer (including the dielectric layer as necessary) is not particularly limited. However, from the viewpoint of imparting various excellent performance properties, the total thickness of the coating film is preferably 25 to 500 nm, more preferably 50 to 450 nm, and even more preferably 100 to 400 nm.
- the glass article can be applied to various dry coating films that have a silicon oxide-containing layer formed on the surface.
- each dry coating film will be briefly explained, focusing mainly on the parts other than the silicon oxide-containing layer formed on the surface.
- the heat ray reflective coating film can be composed of one or more layers, and can be composed of multiple layers (10 to 18 layers, etc.).
- the heat ray reflective coating film can include a barrier layer in addition to the above-mentioned dielectric layer and functional layer.
- the heat ray reflective coating film can be composed of a first dielectric layer, a functional layer, a barrier layer, and a second dielectric layer (for example, a silicon oxide-containing layer) in this order from the glass substrate side.
- the functional layer can be composed of, for example, any of Ag, Au, Cu, Al, Nb, W, Fe, and Pt, or a combination thereof.
- the functional layer is composed of any of Au, Cu, Al, and Pt, or a combination thereof.
- the dielectric layer and the barrier layer can be composed of any of Ti, Zn, Sn, Si, Al, and Ni, or a combination thereof.
- the dielectric layer and the barrier layer may be composed of oxides, nitrides, or oxynitrides of these elements.
- the low-emission coating film can be composed of one or more layers, and can be composed of multiple layers (e.g., two to six layers).
- the low-emission coating film can be composed of a first dielectric layer, a functional layer, and a second dielectric layer (e.g., a silicon oxide-containing layer) in this order from the glass substrate side.
- the functional layer can be composed of, for example, any one of In, Sn, Al, Ni, Cr, Zr, Ti, and F, or a combination thereof.
- the functional layer can be composed of an oxide, nitride, or oxynitride of these elements.
- the dielectric layer can be composed of any one of Si, C, Ti, Zr, Nb, Zn, Sn, and Al, or a combination thereof.
- the dielectric layer can be composed of an oxide, nitride, or oxynitride of these elements.
- the degree of oxidation can be adjusted to obtain the desired characteristics.
- the degree of oxidation can be adjusted by adjusting the amount of oxygen added to the deposition gas when forming the functional layer, and the degree of oxidation can be set appropriately according to the desired characteristics.
- ITO indium tin oxide
- Ar which is the main deposition gas.
- a low-emission coating film can be formed on a 1 to 3 mm clear glass substrate by this method, and heated at a temperature in the range of 500 to 700°C for 2 to 10 minutes to obtain a glass substrate with a low-emission coating film having the characteristics of a visible light transmittance of 85% or more and a sheet resistance of 25 ⁇ / ⁇ or less.
- the dielectric layer can be, for example, an oxynitride.
- the functional layer contains a transparent conductive oxide (TCO)
- TCO transparent conductive oxide
- the amount of moisture contained in the deposition gas can be appropriately adjusted, but in particular, when an ITO (indium tin oxide) layer is formed as the functional layer using an indium tin oxide target, it is preferable to do as follows. That is, it is preferable that moisture is present in the deposition gas in a range in which the H 2 O/Ar partial pressure ratio in the deposition gas measured using a quadrupole mass spectrometer is 2.0% or less.
- a low-emission coating film is formed on a 1-3 mm clear glass substrate by this method, and the substrate is heated in a range of 500-700° C. for 2-10 minutes, thereby obtaining a glass substrate with a low-emission coating film that does not generate cracks.
- the dielectric layer can be, for example, an oxynitride. In this way, by including a predetermined amount of other components such as moisture in the deposition gas, the occurrence of cracks can be easily suppressed.
- the low-reflection coating film can be composed of one or more layers, for example, it can be composed of multiple layers (three layers, etc.).
- the low-reflection coating film can be composed of a low refractive index layer, a high refractive index layer, and a silicon oxide-containing layer in this order, a high refractive index layer, a low refractive index layer, a high refractive index layer, and a silicon oxide-containing layer in this order, or a high refractive index layer, a low refractive index layer, a high refractive index layer, a low refractive index layer, a high refractive index layer, and a silicon oxide-containing layer in this order, from the glass substrate side, focusing on the refractive index.
- the low-reflection coating film can have multiple functional layers.
- the functional layer closest to the glass substrate may be a low refractive index layer or a high refractive index layer, but it is preferable that the functional layer closest to the silicon oxide-containing layer (for example, the layer directly below the silicon oxide-containing layer) is a high refractive index layer.
- the low refractive index layer can be made of Si
- the high refractive index layer can be made of any one of Ti, Nb, Ta, and Sn, or a combination thereof. Note that any of these refractive index layers may be made of an oxide, nitride, or oxynitride of these elements.
- the p-polarized light reflective coating film can be composed of one or more layers, for example, multiple layers (two layers, etc.).
- the p-polarized light reflective coating film can be composed of a high refractive index layer and a low refractive index layer, or a high refractive index layer, a low refractive index layer, a high refractive index layer and a low refractive index layer, from the glass substrate side, focusing on the refractive index.
- the low refractive index layer located on the outermost layer side becomes a silicon oxide-containing layer, and the other layers become functional layers. That is, in the p-polarized light reflective coating film, the functional layer may be one layer, or may be two or more layers.
- the high refractive index layer can be composed of, for example, any of Au, Ag, Cu, Al, Zn, Zr, Sn, Nb, Ni, In, Ce, W, Mo, Sb, Cr, B, Y, La, Ta, Bi and Ti, or a combination thereof, or an oxide, nitride or oxynitride of these elements.
- the high refractive index layer can be TiO2 , Zr: TiO2 having other elements as dopants, etc.
- the low refractive index layer can be composed of an oxide, nitride, or oxynitride of Si and can further contain Al and Zr, but the outermost low refractive index layer will at least be the silicon oxide-containing layer described above.
- the glass substrate (glass plate) of the present glass article may be any of those known in the art.
- the glass substrate may be, for example, heat absorbing glass, clear glass, soda lime glass, quartz glass, borosilicate glass, alkali-free glass, green glass, or UV green glass.
- the glass substrate is required to have a visible light transmittance in accordance with the safety standards of the country in which the vehicle is used, and when used for other purposes, it is required to have the characteristics required for the purpose. For this reason, it is preferable to appropriately adjust the composition of the glass substrate so that the required characteristics can be realized.
- the composition of the glass substrate may be, for example, the following, expressed in mass% based on oxides.
- the composition of the glass substrate can be identified by fluorescent X-ray analysis.
- the glass substrate may be substantially transparent, or may be tinted, i.e., colored. Furthermore, the glass substrate may be one which has been subjected to a strengthening treatment as required.
- the strengthening treatment may be a chemical strengthening treatment or a physical strengthening treatment (air-cooling strengthening treatment).
- the shape of the glass substrate is not particularly limited as long as it can be molded into a shape according to the desired application, and can be, for example, rectangular.
- the molded shape of the present glass article can be a curved shape, and the form of the curve is not particularly limited, but for example, it can be a shape curved in the vertical direction of the paper surface shown in FIG. 1A.
- the present glass article includes both the glass substrate on which the coating film (and the shielding layer) is disposed before molding, and the glass substrate after molding into a desired shape. Therefore, the glass substrate of the present glass article may be, for example, a rectangular glass substrate before molding, or may be, for example, a curved glass substrate after molding.
- the present glass article may be molded, for example, by forming a curved surface on the glass substrate by a bending process by heating, called firing bending, during the firing of the shielding layer that is provided as necessary.
- the present glass article may be molded by forming a shielding layer or the like on the glass substrate and then separately performing firing bending, or by forming a shielding layer or the like and then performing temporary firing and then firing bending. In this way, the molding time of the present glass article can be appropriately selected.
- the thickness of the glass substrate is not particularly limited and may be set according to the purpose.
- the thickness of the glass substrate when used in an automobile among vehicles, is, for example, 0.2 to 5.0 mm, and preferably 0.3 to 3.0 mm.
- the thickness of the glass substrate located on the outside of the automobile when installed in the automobile is preferably 1.1 mm or more, more preferably 1.8 mm or more, from the viewpoint of strength such as stone chip resistance.
- the thickness of the glass substrate is preferably 3.0 mm or less, more preferably 2.8 mm or less.
- the thickness of the glass substrate located on the inside of the automobile when installed in the automobile is preferably 0.3 mm or more, from the viewpoint of handleability, and is preferably 2.3 mm or less, from the viewpoint of weight reduction of the laminated glass.
- the present glass article can be suitably used not only as a single glass but also as a laminated glass, and can be used for various purposes.
- the thicknesses of the two glass substrates used in the laminated glass may be the same or different.
- the glass substrate can be manufactured by any conventional method (e.g., the float method, the fusion method, and the roll-out method), and the manufacturing method is not particularly limited. Note that commercially available products may be used as the glass substrate.
- the glass article may have a shielding layer on the silicon oxide-containing layer described above.
- the shielding layer may be disposed on at least a portion of one side of the glass substrate, specifically, on at least a portion of the coating film, but when the glass article is used as a glass article for a vehicle, it is preferable that the shielding layer is disposed so as to cover the peripheral portion of the glass substrate.
- This shielding layer prevents attachment members to the vehicle body and terminals of electrical equipment from being seen from outside the vehicle. Therefore, the shielding layer may be an opaque shielding layer.
- the shape of the shielding layer can be various shapes, such as a frame shape, a stripe shape, a dot shape, etc. In Fig.
- a frame-shaped shielding layer 5 is provided on the peripheral portion of the glass substrate, more specifically, on the peripheral portion of the silicon oxide-containing layer 4.
- the shielding layer 5 can be provided so as to cover a specific region from the edge of the glass substrate 1, for example. More specifically, the shielding layer 5 can cover a portion within at least 30 mm from the edge of the glass substrate 1 (for example, within 50 mm from the edge).
- the shielding layer may contain crystalline components, pigments, and additives (e.g., resins).
- the components (elements) constituting the shielding layer are not particularly limited, but may contain, for example, the following elements: Si, Bi, O, Fe, Ni, C, B, Al, Li, Na, K, Mg, Ca, Ba, Sr, Zn, Ti, Ce, Zr, Cu, Cr, Mn, Co.
- the composition in the shielding layer In order to prevent the formation of voids and the occurrence of whitening, it is preferable to adjust the composition in the shielding layer. Specifically, it is preferable to set the composition ratio of Si (silicon), which has the function of increasing the melting start temperature during hot molding, and Bi (bismuth), which has the function of decreasing the melting start temperature, i.e., the Bi/Si ratio (mass % ratio) in the shielding layer to 3.8 or less. If the Bi/Si ratio is 3.8 or less, the sintering temperature of the components in the shielding layer can be relatively high, and more gas (Ar) can be degassed from the silicon oxide-containing layer before the shielding layer is sintered.
- Si silicon
- Bi bismuth
- the Bi/Si ratio is more preferably 3.7 or less, even more preferably 3.5 or less, and particularly preferably 3.3 or less.
- the composition of the shielding layer can also be determined using energy dispersive X-ray spectroscopy (SEM-EDX).
- the acceleration voltage can be set appropriately, but from the perspective of performing more accurate measurements, it is preferably 5 to 25 keV, and more preferably 15 to 20 keV.
- the shielding layer (e.g., black ceramic layer) is a fired layer that can be formed by coating a shielding layer forming material (ceramic paste) on a glass substrate, more specifically, on a desired position (e.g., on the periphery) of a coating film, and heating and sintering at a high temperature.
- the firing temperature can be appropriately set, and can be, for example, 500 to 700°C (e.g., 600°C or higher).
- the shielding layer forming material before firing can contain frit (corresponding to the crystalline component when made into the shielding layer), pigment (for example, heat-resistant black pigment), and, if necessary, additives such as an (organic) vehicle for dispersing the pigment, conductive metal, reducing agent, dispersing surfactant, flow modifier, flow aid, adhesion promoter, stabilizer, and colorant.
- frit corresponding to the crystalline component when made into the shielding layer
- pigment for example, heat-resistant black pigment
- additives such as an (organic) vehicle for dispersing the pigment, conductive metal, reducing agent, dispersing surfactant, flow modifier, flow aid, adhesion promoter, stabilizer, and colorant.
- the frit may include one or more of the following components: SiO2 , Bi2O3 , Cr2O3 , Cs2O , Na2O , B2O3 , ZnO , TiO2 , La2O3 , Nb2O5 , MnO2, CeO2 , MoO3 , WO3 , F, Al2O3 , BaO, MgO, CaO, K2O , etc. Frits having a high melting point range are known to have excellent chemical resistance and a relatively low thermal expansion coefficient.
- SiO 2 in the frit forms a glass network and is also a crystallization component. It also controls chemical, thermal, and mechanical properties and has the property of increasing the melting point of the frit.
- SiO 2 may be contained not only as SiO 2 alone but also as a composite such as Bi 4 Si 3 O 12.
- the SiO 2 content in the shielding layer is preferably 15% by mass or more, more preferably 18% by mass or more, and even more preferably 20% by mass or more.
- the SiO 2 content in the shielding layer is preferably 30% by mass or less, and more preferably 28% by mass or less.
- Bi2O3 in the frit is a component that forms a glass network and has the property of lowering the melting point.
- the Bi2O3 content in the shielding layer is preferably 60 mass% or less, more preferably 55 mass% or less. Also, from the viewpoint of fluidity, the Bi2O3 content in the shielding layer is preferably 30 mass% or more, more preferably 35 mass% or more.
- the frit When the frit is made into a shielding layer, it may or may not have a crystal morphology different from that of the raw material stage (shielding layer forming material) before firing.
- the crystal component in the shielding layer may be composed of one type of frit, or may be composed of multiple types of frits fused together by, for example, firing.
- Frits can be manufactured by conventional methods. For example, starting materials according to the desired composition can be mixed, melted at a desired temperature for a desired time, and cooled with water or the like as necessary to produce frits having the desired composition. If necessary, the frits can be crushed to the desired particle size (e.g., 1 to 8 ⁇ m) using a known crushing technique. Commercially available frits can also be used.
- the content of the frit in the material for forming the shielding layer can be appropriately set, but from the viewpoint of obtaining good sinterability, it is preferably 60% by mass or more, more preferably 65% by mass or more, and even more preferably 70% by mass or more, while from the viewpoint of maintaining the glass strength, the content of the frit in the material for forming the shielding layer is preferably 99% by mass or less, more preferably 98% by mass or less, and even more preferably 96% by mass or less.
- the content in the shielding layer-forming material means the content in the total amount of inorganic components among the components constituting the shielding layer-forming material, and does not take into account the content of organic components. Therefore, the frit content in the shielding layer-forming material is the amount excluding the content of fillers and the like contained in the shielding layer-forming material.
- the above-mentioned pigments may be any of the conventionally known pigments, and may be derived from one or more of composite inorganic pigments such as corundum-hematite, olivine, priderite, pyrite, rutile, and spinel.
- metal oxide pigments spinel pigments containing copper (Cu), chromium (Cr), iron (Fe), cobalt (Co), nickel (Ni), manganese (Mn), aluminum (Al), magnesium (Mg), zinc (Zn), zirconium (Zr), niobium (Nb), yttrium (Y), tungsten (W), antimony (Sb), and calcium (Ca) may be used.
- These black spinel pigments are suitable for use in the automotive industry, and in other industries such as the construction, household appliance, and beverage industries, other metal oxide pigments that produce other colors may be used as pigments.
- the spinel structure is a common pigment structure with the general formula AB2X4 , where X is usually O2- or F- with approximately the same ionic radius, where A and B represent the tetrahedral and octahedral sites in a standard spinel lattice.
- the spinel structure can be formed from many different elements, including the first row transition elements, and is therefore the structure of many inorganic pigments. Most spinel compounds have a cubic space group, but distorted spinel structures can adopt tetragonal and sometimes orthorhombic phases.
- metal oxide pigments include CuO.CrO 3 , CuCr 2 O 4 , (Co,Fe)(Fe,Cr) 2 O 4 , MnCr 2 O 4 , NiMnCrFe, CuCrMnO, and pigments modified with a modifying agent.
- the performance of the pigment can be determined by the raw materials, synthesis techniques and conditions, and post-calcination treatment.
- the pigment may be synthesized by a conventional method, for example, the method described in JP-A-2019-509959, or a commercially available product may be purchased.
- the desired pigment can be formed by combining fine metal oxides or salts containing the desired metal and calcining them.
- the size of the fine metal oxide particles can be appropriately set, but is preferably 1 nm to 10 ⁇ m, more preferably 10 nm to 1 ⁇ m, and even more preferably 50 to 500 nm.
- the pigment those derived from rare earth manganese oxide pigments can also be used.
- (YxMn)Oy, (LaxMn)Oy, (CexMn)Oy, (PrxMn)Oy, and (NdxMn)Oy can be used.
- x is preferably 0.01 to 99, more preferably 0.08 to 12, and even more preferably 0.25 to 4.
- y is the number of oxygen atoms required to maintain electrical neutrality, and is preferably x+1 to 2x+2.
- Specific examples of the pigment include CeMnO 3 , PrMnO 3 , NdMnO 3 , and those modified by using a modifying agent.
- the rare earth manganese oxide pigment preferably has a perovskite crystal structure or an orthorhombic crystal structure.
- a rare earth manganese oxide pigment By using a rare earth manganese oxide pigment, a high infrared reflectance can be obtained and heat generation characteristics can be reduced. Furthermore, the pigment does not contain any cobalt material, and hexavalent chromium is not produced and eluted even in acidic solutions such as acid rain.
- the pigment content in the material for forming the shielding layer can be set as appropriate, but from the viewpoint of obtaining the desired color tone, it is preferably 0.1 mass% or more, more preferably 1 mass% or more, even more preferably 2 mass% or more, and particularly preferably 5 mass% or more. Furthermore, from the viewpoint of maintaining the sinterability of the shielding layer, the pigment content is preferably 50 mass% or less, more preferably 30 mass% or less, even more preferably 25 mass% or less, and particularly preferably 15 mass% or less.
- organic vehicles for dispersing and suspending the frit and pigment include vegetable oils, mineral oils, low molecular weight petroleum fractions, tridecyl alcohol, synthetic resins, and natural resins.
- conductive metal for example, silver (silver particles) can be used.
- reducing agent for example, silicon metal can be used.
- the dispersing surfactant plays a role of helping the pigment to be wetted when an inactive fine inorganic pigment is used.
- the dispersing surfactant usually contains a block copolymer having a group having affinity for the pigment, and further contains a solvent (e.g., xylene, butyl acetate, methoxypropyl acetate) as necessary.
- the dispersing surfactant can be appropriately selected from conventionally known ones, for example, Disperbyk162 (trade name, manufactured by BykChemie).
- the flow modifier is used to adjust the viscosity, and any conventionally known flow modifier can be used as appropriate.
- the Viscobyk series manufactured by BykChemie
- the flow aid is an additive used to adjust viscosity and flowability, and a conventionally known one can be used, for example, Additol VXW6388 (trade name, manufactured by UCB Surface Speciality).
- the adhesion promoter is used to improve compatibility with the layer (coating film) on which the shielding layer is to be formed, and can be appropriately selected depending on the composition of the coating film to be used.
- a light stabilizer or a UV blocking agent can be used as the stabilizer.
- the amounts of these additives to be added can be appropriately determined and are not particularly limited.
- composition of the shielding layer (the entire shielding layer including frit, pigment, additives, etc.) expressed in mass % based on oxides can be, for example, as follows:
- the composition of the shielding layer can be considered to be the same as the composition of the shielding layer-forming material before firing.
- Bi2O3 35 to 60 mass%, SiO2 : 15 to 30% by mass, Cr2O3 : 5 to 25% by mass, CuO: 3 to 9% by mass, MnO2 : 3 to 6 mass%; Al 2 O 3 : 0.2 to 4 mass%, MgO: 0 to 2% by mass, CaO: 0 to 3% by mass, BaO: 0 to 8% by mass Na 2 O: 0 to 5% by mass, K2O : 0 to 3 mass% TiO 2 : 0 to 5% by mass, ZnO: 0 to 8% by mass.
- the thickness of the shielding layer affects UV transmittance, acid resistance, weather resistance, concealment, glass strength, and cost. From the viewpoints of UV transmittance, acid resistance, weather resistance, concealment, etc., the thickness of the shielding layer is preferably 5 ⁇ m or more, more preferably 8 ⁇ m or more, and even more preferably 10 ⁇ m or more. From the viewpoints of glass strength and cost, the thickness of the shielding layer is preferably 30 ⁇ m or less, and more preferably 20 ⁇ m or less. The thickness of the shielding layer can be determined using a scanning electron microscope (SEM).
- SEM scanning electron microscope
- the firing conditions for the shielding layer can be set appropriately within the range in which the effects of the present disclosure can be obtained.
- the firing speed (transport speed) (mm/s) and firing temperature (°C) when transporting the workpiece (to which the shielding layer forming material has been applied) in the automotive glass molding process, and the temperature profile when the firing temperature is changed during firing can be adjusted.
- the firing time can be 3 to 30 minutes (preferably 4 to 20 minutes)
- the firing temperature can be 550 to 730°C (preferably 580 to 710°C, more preferably 600 to 710°C).
- a functional layer and a silicon oxide-containing layer are formed in this order on a glass substrate by dry coating.
- the total amount of Ar in the silicon oxide-containing layer is set to 52.0 nm atomic % or less.
- the total amount of Ar is as described above, and therefore will not be described here.
- Dry coating includes physical vapor deposition (PVD), a physical film formation method including vacuum deposition and sputtering, and chemical vapor deposition (CVD), a chemical film formation method.
- PVD physical vapor deposition
- CVD chemical vapor deposition
- the PVD method is a method in which a thin film-forming substance is evaporated and scattered into particles (atoms and molecules) by heating, sputtering, ion beam irradiation, laser irradiation, or the like mainly under high vacuum (10 ⁇ 1 to 10 ⁇ 5 Pa), and the particles are then attached and deposited on the surface of a substrate.
- Vacuum deposition is a technique in which a film-forming material such as a metal or metal oxide is heated in a vacuum to melt and evaporate or sublimate, and the evaporated and sublimated particles (atoms and molecules) are attached and deposited on the surface of a substrate to form a thin film.
- Sputtering is a technique in which an inert gas and a reactive gas (mainly Ar, O2, N2) are introduced in a vacuum, a negative voltage is applied to a target (e.g., a plate-shaped film-forming material) to generate a glow discharge, ionizing the inert gas atoms, and the gas ions collide with the surface of the target at high speed to strike it violently, violently ejecting particles (atoms and molecules) of the film-forming material that constitutes the target, which then vigorously adhere to and deposit on the substrate surface to form a thin film.
- the sputtering method can form films even with materials that are difficult to form using vacuum deposition, such as high-melting point metals and alloys, and can be used with a wide range of film-forming materials.
- the CVD method is a method in which a gaseous raw material is fed under atmospheric pressure to medium vacuum (100 to 10 ⁇ 1 Pa) and energy such as heat, plasma, or light is applied to excite and promote a chemical reaction, synthesizing a thin film or fine particles, which are then adsorbed and deposited on the surface of a substrate.
- a film selected from a heat ray reflective coating film, a low-emissivity coating film (Low-E film), a low-reflection coating film, and a p-polarized light reflective coating film can be used.
- a low-emissivity coating film and a p-polarized light reflective coating film it is preferable to use a low-emissivity coating film.
- a method for forming each film a conventionally known method can be used as appropriate.
- the substrate preparation step can include a step of melting glass raw materials and pouring them into a tin bath (melting step) and a step of slowly cooling the molten glass raw materials (slow cooling step).
- a dielectric layer is provided between the glass substrate and the functional layer
- a step of forming a dielectric layer on the glass substrate can be provided between the substrate preparation step and the functional layer formation step.
- the dielectric layer, the functional layer and the silicon oxide-containing layer each are composed of a plurality of layers, a step of forming each layer can be provided.
- a shielding layer may be formed on the silicon oxide-containing layer (shielding layer forming step) to manufacture a glass article having a shielding layer (manufacturing method for a glass article having a shielding layer).
- the shielding layer forming step may include, for example, the following steps.
- a step of preparing a material for forming a shielding layer (a step of preparing a material for forming a shielding layer).
- a step of applying the material for forming the shielding layer onto the silicon oxide-containing layer (application step).
- a step of sintering the material for forming the shielding layer applied onto the silicon oxide-containing layer (sintering step).
- the manufacturing method may also include the following steps.
- a process of hot-molding the glass substrate having the dielectric layer, the functional layer, the silicon oxide-containing layer, and the shielding layer arranged in this order as required, into a desired shape (hot-molding process).
- a step of cooling the hot-formed glass substrate (cooling step).
- a rectangular glass substrate (glass plate) is prepared (substrate preparation step).
- the glass substrate may be a commercially available product, but may be prepared, for example, by the following method. That is, glass raw materials mixed to obtain a desired glass composition are heated at a predetermined temperature to obtain molten glass.
- the obtained molten glass is poured into a tin bath filled with molten tin (melting step), a plate-shaped glass ribbon is formed, and the plate-shaped glass ribbon is slowly cooled (slow cooling step) to obtain a glass substrate.
- the obtained glass ribbon may be subjected to processing treatment (for example, SO 2 treatment or cleaning treatment).
- the glass substrate may be formed in either the melting step or the slow cooling step.
- the glass substrate when preparing the glass substrate, it may be cut into a desired size as appropriate.
- a glass substrate of (500 to 1300 mm) x (1200 to 1700 mm) x (1.6 to 2.5 mm) is prepared.
- the glass substrate may be one sheet, or may be a laminated glass in which two or more sheets of glass are bonded together.
- a coating film is formed on at least a portion of one side of the glass substrate, for example, on the entire one side of the glass substrate, in the order of a dielectric layer, a functional layer, and a silicon oxide-containing layer.
- the conditions for forming these coating films can be appropriately selected.
- a low-emissivity coating film Li-E film
- it is formed by sputtering using Ar gas, O2 gas, N2 gas, or a mixed gas thereof as a process gas.
- the conditions for forming the silicon oxide-containing layer are preferably as follows.
- the power density when sputtering the silicon oxide-containing layer e.g., SiOx layer
- the power density when sputtering the silicon oxide-containing layer is preferably 7.5 W/ cm2 or more, more preferably 8.7 W/ cm2 or more, and even more preferably 8.8 W/ cm2 or more.
- the power density is preferably 9.6 W/cm2 or less, more preferably 9.4 W/ cm2 or less, and even more preferably 9.0 W/ cm2 or less.
- the power density is calculated by dividing the power by the area in the case of a rectangular target, and by the length x diameter x pi/3 in the case of a cylindrical target.
- the power density is preferably 7.7 W/ cm2 or more, and more preferably 8.0 W/ cm2 or more.
- the power density is preferably 10.2 W/cm2 or less, more preferably 9.4 W/ cm2 or less, and even more preferably 9.2 W/ cm2 or less.
- the process gas pressure when sputtering the silicon oxide-containing layer is preferably 1.0 mTorr or more.
- the process gas pressure when sputtering the silicon oxide-containing layer is preferably 3.0 mTorr or less, more preferably 2.5 mTorr or less, and even more preferably 2.0 mTorr or less.
- the process gas pressure is preferably 3.0 mTorr or less, more preferably 2.8 mTorr or less, and even more preferably 2.5 mTorr or less. This makes it possible to obtain a low-emission coating film having good sheet resistance ( ⁇ / ⁇ ) after firing.
- the average O 2 blending ratio in the process gas when sputtering the silicon oxide-containing layer is preferably 80 vol% or more, more preferably 90 vol% or more.
- the average O 2 blending ratio may be 100 vol%, and in this case, the formation of voids can be suppressed and a glass article with excellent whitening resistance can be provided.
- the average O 2 blending ratio in the process gas is preferably 38 vol% or more, more preferably 50 vol% or more, from the above viewpoint. From the same viewpoint, the average O 2 blending ratio is preferably 90 vol% or less, more preferably 85 vol% or less.
- a frame-shaped shielding layer can be formed on at least a portion of the silicon oxide-containing layer (the uppermost layer) of the obtained glass article, for example, on the peripheral portion of the silicon oxide-containing layer (shielding layer forming step).
- a material for forming a shielding layer for example, a ceramic color paste
- application step is applied to at least a portion of the area of the glass substrate on which the dielectric layer, the functional layer, and the silicon oxide-containing layer are formed in this order (application step), and dried as necessary.
- the method for applying the material for forming the shielding layer is not particularly limited, but for example, a screen printing method, an inkjet method, electronic printing, etc. can be used. Specifically, it is preferable to print on the glass substrate using a #150 to #250 mesh screen.
- the shielding layer forming material may be a commercially available product or may be prepared separately (shielding layer forming material preparation process).
- the shielding layer forming material can be prepared, for example, by dispersing the desired frit and pigment described above in an organic vehicle.
- the obtained glass substrate is heated to a predetermined temperature using a baking furnace such as a conveyor-type IR furnace, to sinter the shielding layer-forming material onto the glass substrate (sintering process).
- the heating (baking) temperature is not particularly limited, but is, for example, 500 to 730°C (preferably 550 to 700°C).
- the baking speed (conveying speed) is also not particularly limited, but is preferably 5 to 30 mm/s.
- the heating time is, for example, 3 to 30 minutes (preferably 4 to 20 minutes). As a result, a shielding layer is formed on the glass substrate.
- the glass frit in the shielding layer forming material may be one type of frit or two or more types of frits mixed together to provide various characteristics. Furthermore, two or more types of frits having the same composition but different particle sizes may be mixed together as appropriate. From the viewpoint of reducing the porosity, the melting point of the frit is preferably 600°C or higher, more preferably 630°C or higher. Moreover, from the viewpoint of adhesion to glass, the melting point of the frit is preferably 700°C or lower, more preferably 680°C or lower. When two or more types of frits are used in combination, it is preferred that at least one of the frits has a softening point within the above range, and it is more preferred that all of the frits have softening points within the above range.
- the glass substrate on which the coating film and the shielding layer are arranged in this order is heated and molded into a desired shape (heat molding step), and cooled as necessary (cooling step).
- the glass substrate may be bent under its own weight or pressed while being held at the heating temperature in the sintering step, to be molded into a desired shape. That is, the heat molding step and the sintering step may be performed in parallel.
- the press bending process for example, a glass sheet is bent by a press (heat press) according to the desired shape of the window glass for an automobile.
- the gravity bending process the glass substrate is bent by a gravity bending device.
- air-cooling tempering or the like may be performed according to the safety standards required for the window glass for an automobile.
- the glass article obtained in this manner has excellent durability, is less susceptible to whitening, and has an excellent appearance.
- Examples 1 to 6 are working examples related to the present glass article, and Examples 7 and 8 are comparative examples.
- Example 1 (Preparation of glass substrate and preparation of coating film) A low-emission coating film was formed on one surface of a glass substrate using a sputtering device. Specifically, a glass substrate (product name: FGY1, manufactured by AGC Inc.) having a thickness of 2.1 mm was first prepared. Next, a titanium oxide layer containing zirconia was formed as a first dielectric layer on the surface of the glass substrate by sputtering using a zirconia-doped titania target containing 35% by mass of zirconia, and the thickness of the film was 10 nm according to optical simulation based on spectroscopic measurement.
- a glass substrate product name: FGY1, manufactured by AGC Inc.
- a silicon oxide layer was formed as a second dielectric layer by sputtering, and the thickness was 35 nm according to optical simulation based on spectroscopic measurements.
- an ITO (indium tin oxide) layer was formed as a functional layer by sputtering.
- a tin oxide doped indium oxide target with a tin oxide content of 10 mass% was used for the film formation, and a mixed gas with an average oxygen blending ratio O2 /( O2 +Ar) of 0.2 volume% was used for the film formation.
- the film thickness was 120 nm according to optical simulation based on spectroscopic measurement.
- a first silicon oxide-containing layer (SiOx) was formed.
- the film was formed by applying a power of 48.9 kW (power density: 9.6 W/ cm2 ) under a pressure of 2.0 mTorr using a silicon target and a mixed gas with an average oxygen blending ratio O2 /( O2 +Ar) of 80 volume percent.
- the film thickness was 80 nm according to an optical simulation based on spectroscopic measurements.
- a silicon oxide-containing layer (SiOx:Zr) containing zirconia was formed as a second silicon oxide-containing layer on the surface of the obtained glass substrate by sputtering.
- a zirconia-doped silica target containing 10% by mass of zirconia was used for the film formation, and a mixed gas having an average oxygen blending ratio O2 /( O2 +Ar) of 52% by volume was used, and a power of 48.0 kW (power density: 9.4 W/ cm2 ) was applied under a pressure of 3.0 mTorr to form the film.
- An optical simulation based on spectroscopic measurement revealed that the film had a thickness of 25 nm.
- a glass substrate with a coating film was obtained.
- Ar, O 2 , or a mixed gas thereof was used unless otherwise specified.
- the obtained glass article was measured for each physical property value described later, and was further evaluated based on the evaluation method described later.
- Examples 2, 3, 5, 7 and 8 the power, power density, process gas pressure and average oxygen blending ratio when sputtering the first silicon oxide-containing layer and the second silicon oxide-containing layer were as shown in Table 1. Otherwise, glass articles provided with coating films were produced in the same manner as in Example 1, and the respective physical properties described below were measured and further evaluated based on the evaluation methods described below.
- Example 4 A glass article provided with a coating film was produced in the same manner as in Example 1, except that the first silicon oxide-containing layer and the second silicon oxide-containing layer were formed according to the following methods, respectively, and each of the physical properties described below was measured and evaluated based on the evaluation methods described below. That is, when the first silicon oxide-containing layer was formed, a silicon target was used, and a gas having an average oxygen blending ratio of O2 of 100 volume % was used, and a power of 45.0 kW (power density: 8.8 W/ cm2 ) was applied under a pressure of 2.0 mTorr to form the film. An optical simulation based on spectroscopic measurement showed that the film had a thickness of 46 nm.
- the second silicon oxide-containing layer when forming the second silicon oxide-containing layer, a silicon target was used, and a mixed gas having an average oxygen blending ratio O2 /( O2 +Ar) of 80% by volume was used to apply a power of 45.0 kW (power density: 8.8 W/ cm2 ) under a pressure of 2.0 mTorr to form the layer.
- the optical simulation based on the spectroscopic measurement showed that the layer had a thickness of 46 nm.
- Example 6 A glass article provided with a coating film was produced in the same manner as in Example 1, except that the second silicon oxide-containing layer was not formed and the first silicon oxide-containing layer was formed according to the following method. The glass article was then measured for each of the physical properties described below and evaluated based on the evaluation method described below. That is, when the first silicon oxide-containing layer was formed, a silicon target was used, and a gas having an average oxygen blending ratio of O2 of 100 volume % was used, and a power of 45.0 kW (power density: 8.8 W/ cm2 ) was applied under a pressure of 2.0 mTorr to form the film. An optical simulation based on spectroscopic measurement revealed that the film had a thickness of 92 nm.
- Total Ar Amount in Silicon Oxide-Containing Layer The total amount of Ar (nm ⁇ atomic %) in the silicon oxide-containing layers (the first and second silicon oxide-containing layers in all cases except for Example 6, and the first silicon oxide-containing layer in Example 6) in the obtained glass article was determined according to the following method. The average Ar atom concentration in each silicon oxide-containing layer was calculated by the following steps (I) to (II).
- a Rutherford scattering spectrometer (Pelletron 3SDH (trade name) manufactured by National Electrostatics Corporation) was used to detect values detected by irradiating 2300 keV He ++ ions at two angles of incidence, 0° and -35°, and a compositional depth profile including the Ar atomic concentration [atomic %] in the silicon oxide-containing film was obtained by simulation fitting. Here, one step of the depth profile was in the range of 1 to 3 nm.
- the part where three consecutive measurement points are within the range of the average value ⁇ 0.05 atomic % is defined as a flat part, and the Ar atomic concentration is read.
- the average value of all the corresponding measurement points is defined as the average Ar atomic concentration of the layer. Note that, if there are multiple discontinuous flat parts in one layer, the average Ar atomic concentration is calculated for each flat part by multiplying the average Ar atomic concentration by the film thickness when the average value was calculated, and the total value is divided by the total film thickness value of all the flat parts to define the average Ar atomic concentration of the layer. If the average Ar atomic concentration is equal to or less than the detection limit of 0.1 atomic %, 0.05 atomic % is defined as the average Ar atomic concentration of the layer.
- the boundary of the silicon oxide-containing layer for reading the flat portion to calculate the average Ar atomic concentration was determined as the portion where the atomic concentration of the element in the flat portion closest to the silicon oxide-containing film is half the value in the profile of the most abundant element among the elements not present in the silicon oxide-containing film in the layer adjacent to the silicon oxide-containing film in the atomic concentration depth profile.
- the location where the maximum atomic concentration value of the element is half the value was determined as the boundary between the two layers, and the average Ar atomic concentration inside the boundary was calculated.
- the Ar amount [nm atomic %] was calculated by multiplying the obtained average Ar atomic concentration by the thickness of the silicon oxide-containing layer.
- Total H content in silicon oxide-containing layer The total amount of H (nm/cm 3 ) in the silicon oxide-containing layers (the first and second silicon oxide-containing layers except for Example 6, and the first silicon oxide-containing layer in Example 6) in the obtained glass article was determined according to the following procedures (I) to (III).
- an ultraviolet (UV) ozone treatment was carried out.
- an ultraviolet irradiation device with a trade name of PL30-200 manufactured by Sen Engineering Co., Ltd.
- a power supply for the ultraviolet irradiation device with a trade name of UB2001D-20 was used.
- the treatment conditions were ultraviolet wavelength: 254 nm, and treatment time: 10 minutes.
- (II) Using silicon oxide doped with 1% or less H + as a quantitative standard sample, the H concentration and average H/Si intensity ratio in the standard sample were measured using a secondary ion mass spectrometer.
- the analytical conditions are as follows: Apparatus: ULVAC-PHI, Inc., product name: PHI ADEPT1010; Primary ion species: Cs + , Primary ion acceleration voltage: 2 kV, Primary ion current: 20 nA, Primary ion incident angle (angle from the perpendicular direction to the sample surface): 60°, Raster size: 400 x 400 ⁇ m 2 , Secondary ion polarity: negative.
- FIG. 3 are graphs showing the relationship between the secondary ion intensity (cps) of the sample constituent elements measured using a secondary ion mass spectrometer and the sputtering time (sec) in Examples 1, 7 and 6, respectively.
- the range for calculating the H/Si intensity ratio was defined by the profile of the metal element that had the largest change in intensity among the metal elements not present in the adjacent layers. Specifically, as shown in FIG.
- the H/Si intensity ratio in the region where the (90Zr+16O)-secondary ion intensity stops increasing rapidly and where the intensity starts to decrease rapidly was taken as the H/Si intensity ratio of the layer.
- the H/Si intensity ratio in the range indicated by the symbol A in FIG. 3 was taken as the H/Si intensity ratio of the silicon oxide-containing layer.
- the H/Si intensity ratio in the region from the region where the rapid decrease in the (90Zr+16O)-secondary ion intensity ends to just before the (120Sn+16O)-secondary ion intensity starts to increase was defined as the H/Si intensity ratio of the silicon oxide-containing layer.
- Example 4 was calculated in the same manner as in Example 1.
- FIG. 5 which is a profile of Example 6, when the outermost layer was a silicon oxide layer mainly not containing metal elements other than Si, the H/Si intensity ratio in the region from the region where the rapid increase in the 30Si-secondary ion intensity ended to just before the (120Sn+16O)-secondary ion intensity started to increase (the range indicated by the symbol B in FIG. 5) was determined to be the H/Si intensity ratio of the layer.
- the H/Si intensity ratio was calculated three times for each measurement sample, and the average value of these was taken as the average H/Si intensity ratio.
- the total H amount [nm/cm 3 ] "5.63E+23" in Example 1 means "5.63 ⁇ 10 23 ".
- the above glass substrate was baked in a baking furnace (IR furnace) by increasing the temperature at 3°C/sec up to a baking temperature of 650°C, and after reaching the baking temperature, the baking temperature was maintained, and the total baking (heating) time was set to 240 seconds.
- the sheet resistance of the baked glass substrate was measured using a non-contact surface resistance measuring device (PULS, manufactured by NAGY Corporation). The measurement results are shown in Table 1.
- a shielding layer A or B having the elemental composition (mass%) shown in Table 2 was prepared on the glass substrate. Specifically, the shielding layer forming material having the elemental composition was printed on the periphery of the coating film by a screen printing method with a mesh of #150 to #250, and then dried. Subsequently, firing was performed under the following firing conditions using a firing furnace (IR furnace), and the shielding layer forming material was sintered on the glass substrate to form a frame-shaped shielding layer A or B as shown in FIG. 1C. The thickness of each shielding layer was 15 ⁇ m.
- Evaluation criterion AA Firing temperature: Under all temperature conditions from 650° C. to 670° C., the produced shielding layer was black in color and had the desired appearance.
- shielding layer composition In the above-mentioned evaluation of whitening resistance, the elemental compositions of the shielding layers A and B used in the glass article were identified by the following method. That is, the surface of the sample (shielding layer) was measured by energy dispersive X-ray spectroscopy (SEM-EDX) to quantify the composition (mass%) of each component (element). In this case, a scanning electron microscope (SEM) manufactured by Hitachi, Ltd. under the trade name: TM4000Plus was used, and an EDX manufactured by Oxford Instruments under the trade name: AZtecOne was used. The measurement results are shown in Table 2.
- SEM-EDX energy dispersive X-ray spectroscopy
- SiO2 content When evaluating the whitening resistance, the SiO2 content (mass%) contained in each of the shielding layers A and B used in the glass article was measured by SEM-EDX. The measurement results are shown in Table 2.
- the glass article having a silicon oxide-containing layer with a specific total Ar content has excellent whitening resistance, can suppress the occurrence of whitening caused by voids, and has an excellent appearance, regardless of the type of shielding layer used.
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Abstract
Description
なお、車両用ガラス物品(例えば、自動車用窓ガラス)の周縁部には、太陽光による接着剤の劣化防止、意匠性の向上等の目的で、上記マスキング印刷物のように、黒色顔料やガラスフリット等が付与された遮蔽層が設けられることが知られている。
前記ガラス物品は、前記酸化ケイ素含有層中の総Ar量が、19.0nm・原子%以下であってもよい。
上記いずれかのガラス物品は、前記酸化ケイ素含有層中の総H量が、5.7×1023nm/cm3以下であってもよい。
上記いずれかのガラス物品において、前記酸化ケイ素含有層中の総H量が、2.9×1023nm/cm3以下であってもよい。
上記いずれかのガラス物品において、前記酸化ケイ素含有層上に、遮蔽層を有し、前記遮蔽層中のBi/Si比が、3.8以下であってもよい。
上記いずれかのガラス物品において、前記遮蔽層中のSiO2含有量が、15質量%以上であってもよい。
上記いずれかのガラス物品において、前記酸化ケイ素含有層が、AlおよびZrから選ばれる元素を含有していてもよい。
上記いずれかのガラス物品において、前記ガラス基板と、前記機能層との間に、誘電体層を有し、前記誘電体層が、Si、C、Ti、Zr、Nb、Zn、SnおよびAlから選ばれる元素、または、これらの元素の酸化物、窒化物もしくは酸窒化物を含有していてもよい。
上記いずれかのガラス物品において、前記機能層が、In、Sn、Al、Ni、Cr、Zr,Ti、Nb、W、FeおよびFから選ばれる元素、または、これらの元素の酸化物、窒化物もしくは酸窒化物を含有していてもよい。
上記いずれかのガラス物品は、自動車用窓ガラスとして使用されてもよい。
本開示に係るガラス物品の製造方法は、ガラス基板上に、機能層と、酸化ケイ素含有層とをこの順にドライコーティングにより形成し、前記酸化ケイ素含有層中の総Ar量を、52.0nm・原子%以下とする。
前記ガラス物品の製造方法は、前記酸化ケイ素含有層をスパッタリングする際のパワー密度が、8.7W/cm2以上であってもよい。
上記いずれかのガラス物品の製造方法は、前記酸化ケイ素含有層をスパッタリングする際のプロセスガス圧が、3.0mTorr以下であってもよい。
上記いずれかのガラス物品の製造方法において、前記酸化ケイ素含有層をスパッタリングする際のプロセスガス中の平均O2配合比は、80体積%以上であってもよい。
上記いずれかのガラス物品の製造方法において、前記酸化ケイ素含有層をスパッタリングする際のプロセスガス中の平均O2配合比は、90体積%以上であってもよい。
本明細書中に段階的に記載されている数値範囲において、一つの数値範囲で記載された上限値又は下限値は、他の段階的な記載の数値範囲の上限値又は下限値に置き換えてもよい。また、本明細書中に記載されている数値範囲において、その数値範囲の上限値又は下限値は、実施例に示されている値に置き換えてもよい。
本ガラス物品は、自動車等の車両用ガラス、特に自動車用窓ガラスとして好適に用いることができ、車体前部、後部、側部、天井部のいずれの位置にも使用できる。また、本ガラス物品は、車両以外の用途、例えば、建築物等に関しても制限なく用いることができる。また、本ガラス物品は、以下に示す構成をその少なくとも一部に有していればよく、例えば、1枚のガラス基板を含む1枚ガラスとして使用してもよく、複数枚のガラス基板を含む合わせガラスとして使用してもよい。本ガラス物品の製造方法は特に限定されないが、後述するように、例えば、従来公知のフロート法を用いて製造できる。
本ガラス物品では、ガラス基板の一方の面の少なくとも一部分上にこれらの層が順次積層されていればよく、ガラス物品を構成するガラス基板全体にこれらの層が積層されていてもよいし、積層されていなくてもよい。また、誘電体層2は、ガラス基板1に接していてもよいし、ガラス基板1と誘電体層2との間に他の層を配して、ガラス基板1と誘電体層2とが直接接していなくてもよい。さらに、誘電体層2と機能層3との間や、機能層3と酸化ケイ素含有層4との間に、他の層を配して、これらの層が直接接していなくてもよい。
例えば、ガラス基板全体に、誘電体層2、機能層3および酸化ケイ素含有層4等のコーティング膜が配され、図1Cに示すように、そのコーティング膜上のガラス基板の周縁部となる位置に額縁状の遮蔽層5が配されていてもよい。
なお、図1Aおよび図1Bはそれぞれ、本ガラス物品の2つの実施形態における概略図断面図を示し、図1Cは、遮蔽層5側から見た際のそれらの概略平面図を示す。
本ガラス物品では、酸化ケイ素含有層中の総Ar量が、52.0nm・原子%以下(0.52nm以下)である。当該総Ar量が52.0nm・原子%以下であれば、酸化ケイ素含有層中のAr量を低く抑えることができ、それにより、当該Arに起因する空孔の発生およびガラス物品の白化を抑制でき、遮蔽層の種類によらず優れた外観を有するガラス物品を提供できる。
同様の観点から、酸化ケイ素含有層中の総Ar量は、38.0nm・原子%以下(0.38nm以下)であることがより好ましく、19.0nm・原子%以下(0.19nm以下)であることがさらに好ましい。
なお、本ガラス物品が上記酸化ケイ素含有層を複数(例えば、2層)有する場合は、これら複数の酸化ケイ素含有層全体の合計のAr量が上記範囲を満たすようにする。また、酸化ケイ素含有層中の総Ar量の具体的な測定方法に関しては、後述する。
また、同様の観点から、酸化ケイ素含有層中の総H量は、4.0×1023nm/cm3以下であることがより好ましく、2.9×1023nm/cm3以下であることがさらに好ましい。
酸化ケイ素含有層は、これらの中でも、耐白化性向上の観点から、AlおよびZrから選ばれる元素を含有することが好ましい。なお、ドーパントは上述したものに限定されず、従来公知のものを適宜含有できる。
なお、酸化ケイ素含有層を複数層形成する場合は、酸化ケイ素含有層全体の合計厚みが上記範囲内となることが好ましい。例えば、酸化ケイ素含有層が、SiOx層と、他の元素をドープしたSiOx層とを含む場合、耐白化性向上の観点から、両者の厚みの比(SiOx層の厚み:ドープSiOx層の厚み)は、2:1~5:1とすることが好ましく、3:1~4:1とすることがより好ましい。
しかしながら、本開示の優れた効果をより活かす観点から、気相成長法を使用して真空中で薄膜を形成するドライコーティングを用いて形成されたドライコーティング膜であることが好ましい。ドライコーティング膜としては、熱線反射コーティング膜、低放射コーティング膜(Low-E膜)、低反射コーティング膜およびp偏光反射コーティング膜などが挙げられる。これらの中でも、本開示の優れた効果をより活かす観点から、当該コーティング膜は、酸化ケイ素含有層を最上層とする2層以上または3層以上の、低放射コーティング膜およびp偏光反射コーティング膜がより好ましく、低放射コーティング膜がさらに好ましい。各膜の構成方法としては、従来公知の方法を適宜使用できる。
誘電体層は、ガラス基板上、具体的には、ガラス基板と機能層との間に配置できる。なお、誘電体層は、上述したドライコーティング法で形成することができ、例えば、Si、C、Ti、Zr、Nb、Zn、SnおよびAlから選ばれる元素、または、これらの元素の酸化物、窒化物もしくは酸窒化物を含むことが好ましい。また、これらの成分を複数種以上組み合わせて含むこともできる。誘電体層は、例えば、Si(Al)N、SiO2、TiO2、ZnOやこれらの層にドーパント(例えば、Zr)を含むものを使用できる。さらに、誘電体層は1層または2層以上で構成されてもよい。
誘電体層の厚みは特に限定されないが、優れた各種性能を付与する観点から、合計の厚みが20~100nmであることが好ましく、30~90nmであることがより好ましく、40~80nmであることがさらに好ましい。
機能層は、上述したドライコーティング法で形成することができ、例えば、In、Sn、Al、Ni、Cr、Zr、Ti、Nb、W、FeおよびFから選ばれる元素、または、これらの元素の酸化物、窒化物もしくは酸窒化物を含むことが好ましい。また、これらの成分を複数種以上組み合わせて含むこともできる。機能層は、例えば、SnO2、In2O3(ITO)、ZrN、TiN、CrNやこれらの層にドーパントを含むものを使用できる。さらに、機能層は1層または2層以上で構成されてもよい。
機能層の厚みは特に限定されないが、優れた各種性能を付与する観点から、合計の厚みが40~200nmであることが好ましく、50~180nmであることがより好ましく、60~160nmであることがさらに好ましい。
本ガラス物品が有するガラス基板(ガラス板)は、従来公知のものを適宜使用できる。ガラス基板は、例えば、熱線吸収ガラス、クリアガラス、ソーダ石灰(ソーダライム)ガラス、石英ガラス、ホウケイ酸ガラス、無アルカリグラス、グリーンガラス、UVグリーンガラスなどを用いることができる。しかしながら、本ガラス物品を車両用ガラスとして使用する際には、ガラス基板は、当該車両を使用する国の安全規格に沿った可視光線透過率を有することが求められ、その他の用途に用いる場合には、その用途において必要となる特性を有することが求められる。このため、ガラス基板は、求められる特性を実現できるよう、組成を適宜調整することが好ましい。ガラス基板の組成としては、酸化物基準の質量%表示で、例えば、以下のものを挙げることができる。なお、ガラス基板の組成は、蛍光X線分析により特定できる。
シリカ(SiO2):70~73質量%、
アルミナ(Al2O3):0.6~2.4質量%、
ライム(CaO):7~12質量%、
マグネシア(MgO):1.0~4.5質量%、
R2O:13~15質量%(Rはアルカリ金属、例えば、NaやK)、
Fe2O3に換算した全酸化鉄(T-Fe2O3):0~1.5質量%。
自動車でも特にフロントガラスやルーフガラスに用いる場合の合わせガラスであって、自動車に取り付けたときに車外側に位置するガラス基板の厚みは、耐飛び石性能等の強度の観点から、1.1mm以上が好ましく、1.8mm以上がより好ましい。また、合わせガラスの軽量化の観点から、ガラス基板の厚みは、3.0mm以下が好ましく、2.8mm以下がより好ましい。当該合わせガラスであって、自動車に取り付けたときに車内側に位置するガラス基板の厚みは、ハンドリング性の点から、0.3mm以上が好ましく、合わせガラスの軽量化の観点から、2.3mm以下が好ましい。また、本ガラス物品は、1枚ガラスとしてだけではなく、合わせガラスとしても好適に使用でき、様々な用途に使用できる。なお、合わせガラスに用いられる2枚のガラス基板の厚みは同じであってもよいし、異なっていてもよい。
本ガラス物品は、上述した酸化ケイ素含有層上に、遮蔽層を有することができる。
遮蔽層は、ガラス基板の一方の面の少なくとも一部分上、具体的には、コーティング膜の少なくとも一部分上に配されていればよいが、本ガラス物品を車両用ガラス物品として用いる際には、ガラス基板の周縁部を被覆するように設けられることが好ましい。この遮蔽層によって、車体への取付け部材や電装品の端子などが車外から視認できないようにしている。したがって、当該遮蔽層は不透明な遮蔽層であることができる。
なお、遮蔽層の形状は、例えば、額縁状、帯状、ドット状等、様々な形状とすることができる。図1Cでは、ガラス基板の周縁部上、より具体的には、酸化ケイ素含有層4の周縁部上に、額縁状の遮蔽層5が設けられている。前記遮蔽層5は、例えば、ガラス基板1の端縁から特定の領域を被覆するように設けることができる。より具体的には、遮蔽層5は、ガラス基板1の端縁から少なくとも30mm以内(例えば、端縁から50mm以内)の部分を被覆できる。
焼成前の遮蔽層形成用材料は、フリット(遮蔽層としたときの結晶成分に相当)と、顔料(例えば、耐熱性黒色顔料)と、必要に応じて、顔料を分散させるための(有機)ビヒクル、導電性金属、還元剤、分散性界面活性剤、流動性修飾剤、流動性補助剤、接着促進剤、安定化剤、着色剤等の添加剤を含むことができる。なお、遮蔽層形成用材料として、市販品を使用することもできる。遮蔽層を焼成層とすることにより、ガラス基板上に遮蔽層が接合される。
フリット中のSiO2はガラスのネットワークを形成し、結晶化成分でもある。また、化学的、熱的、機械的特性も制御し、フリットの融点を高くする性質を有する。SiO2は、SiO2単独でなく、例えばBi4Si3O12のような複合物として含んでいても構わない。耐白化性向上の観点から、遮蔽層中のSiO2含有量は、15質量%以上が好ましく、18質量%以上がより好ましく、20質量%以上がさらに好ましい。また、焼結性の維持の観点から、遮蔽層中のSiO2含有量は、30質量%以下が好ましく、28質量%以下がより好ましい。
一方、フリット中のBi2O3は、ガラスのネットワークを形成する成分であり、融点を下げる性質を有する。耐白化性向上の観点から、遮蔽層中のBi2O3含有量は、60質量%以下が好ましく、55質量%以下がより好ましい。また、流動性の観点から、遮蔽層中のBi2O3含有量は、30質量%以上が好ましく、35質量%以上がより好ましい。
なお、本明細書における遮蔽層形成用材料中の含有量とは、遮蔽層形成用材料を構成する成分のうち、無機成分全量中の含有量を意味し、有機成分の含有量は加味しない。そのため、遮蔽層形成用材料中のフリット含有量は、遮蔽層形成用材料中に含まれるフィラーなどの含有量を除いた量である。
顔料は、例えば、目的の金属を含有する微小金属酸化物または塩を化合し、か焼することによって、所望の顔料を形成できる。その際、当該微小金属酸化物のサイズは、適宜設定できるが、好ましくは1nm~10μm、より好ましくは10nm~1μm、さらに好ましくは50~500nmである。
導電性金属としては、例えば、銀(銀粒子)を用いることができる。
還元剤としては、例えば、ケイ素金属を用いることができる。
分散性界面活性剤は、不活性微粒子無機顔料が使用される際に、顔料が濡れるのを補助する役割を担う。分散性界面活性剤は、通常、顔料に親和性を有する基を備えたブロックコポリマーを含有し、さらに必要に応じて溶剤(例えば、キシレン、酢酸ブチル、酢酸メトキシプロピル)を含有する。分散性界面活性剤は、従来公知のものを適宜使用でき、例えば、Disperbyk162(商品名、BykChemie製)を使用できる。
流動性修飾剤は、粘度を調整するために使用され、従来公知のものを適宜使用でき、例えば、Viscobykシリーズ(BykChemie製)を使用できる。
流動性補助剤は、粘度と流動性を調整するために使用される添加剤であり、従来公知のものを使用でき、例えば、AdditolVXW6388(商品名、UCB Surface Speciality製)を使用できる。
接着促進剤は、遮蔽層を設ける層(コーティング膜)との適合性を改善するために使用するものであり、使用するコーティング膜の組成に応じて適宜選択できる。
安定化剤としては、例えば、光安定化剤や、UV遮蔽剤を使用できる。
なお、これらの添加剤の配合量は適宜設定でき、特に限定されない。
Bi2O3:35~60質量%、
SiO2:15~30質量%、
Cr2O3:5~25質量%、
CuO:3~9質量%、
MnO2:3~6質量%、
Al2O3:0.2~4質量%、
MgO:0~2質量%、
CaO:0~3質量%、
BaO:0~8質量%
Na2O:0~5質量%、
K2O:0~3質量%、
TiO2:0~5質量%、
ZnO:0~8質量%。
本開示に係るガラス物品の製造方法(以下、「本製造方法」とも記す)では、ガラス基板上に、機能層と、酸化ケイ素含有層とをこの順にドライコーティングにより形成する。そして、前記酸化ケイ素含有層中の総Ar量を、52.0nm・原子%以下にする。当該総Ar量に関しては上述した通りであるため、説明は省略する。
真空蒸着とは、真空中で金属や金属酸化物などの成膜材料を加熱して、溶融および蒸発または昇華させて、基材表面に蒸発、昇華した粒子(原子および分子)を付着および堆積させて薄膜を形成する技術である。
また、スパッタリングとは、真空中で不活性ガスおよび反応性ガス(主に、Ar、O2、N2)を導入、ターゲット(例えば、プレート状の成膜材料)にマイナスの電圧を印加してグロー放電を発生させ、不活性ガス原子をイオン化し、高速でターゲットの表面にガスイオンを衝突させて激しく叩き、ターゲットを構成する成膜材料の粒子(原子および分子)を激しく弾き出し、勢いよく基材表面に付着および堆積させ薄膜を形成する技術である。スパッタリング法では、高融点金属や合金など、真空蒸着法では困難な材料でも、成膜が可能で、広範囲な成膜材料に対応できる。
・ガラス基板を用意する工程(基板用意工程)。
・前記ガラス基板上に、機能層を形成する工程(機能層形成工程)。
・前記機能層上に、酸化ケイ素含有層を形成する工程(酸化ケイ素含有層形成工程)。
なお、誘電体層、機能層および酸化ケイ素含有層がそれぞれ複数層で構成される場合は、各層を形成する工程を設けることができる。
・遮蔽層形成用材料を用意する工程(遮蔽層形成用材料用意工程)。
・前記酸化ケイ素含有層上に、前記遮蔽層形成用材料を塗布する工程(塗布工程)。
・前記酸化ケイ素含有層上に塗布された前記遮蔽層形成用材料を焼結する工程(焼結工程)。
・必要に応じて誘電体層と、機能層と、酸化ケイ素含有層と、必要に応じて遮蔽層とがこの順に配されたガラス基板を、所望の形状に加熱成形する工程(加熱成形工程)。
・加熱成形した前記ガラス基板を冷却する工程(冷却工程)。
これらの工程は順次行われてもよいし、複数の工程(例えば、遮蔽層形成工程(具体的には焼結工程)と加熱成形工程)が並行して行われてもよい。
以下に本製造方法について詳しく説明する。
前記酸化ケイ素含有層(例えば、SiOx層)をスパッタリングする際のパワー密度は上記観点から、7.5W/cm2以上であることが好ましく、8.7W/cm2以上であることがより好ましく、8.8W/cm2以上であることがさらに好ましい。また、同様の観点から、当該パワー密度は、9.6W/cm2以下であることが好ましく、9.4W/cm2以下であることがより好ましく、9.0W/cm2以下であることがさらに好ましい。なお、前記パワー密度は、パワーを長方形ターゲットの場合はその面積で、円筒形ターゲットの場合は長さ×直径×円周率/3で除することで求められる。
ここで、酸化ケイ素含有層が他の元素(例えば、Zrなど)をドープしたSiOx層である場合は、上記観点から、当該パワー密度は、7.7W/cm2以上であることが好ましく、8.0W/cm2以上であることがより好ましい。また、同様の観点から、当該パワー密度は、10.2W/cm2以下であることが好ましく、9.4W/cm2以下であることがより好ましく、9.2W/cm2以下であることがさらに好ましい。
前記酸化ケイ素含有層(ドープもしくは非ドープSiOx層)をスパッタリングする際のプロセスガス圧は、上記観点から、1.0mTorr以上とすることが好ましい。また、酸化ケイ素含有層(例えば、SiOx層)をスパッタリングする際のプロセスガス圧は、耐熱性の観点から、3.0mTorr以下であることが好ましく、2.5mTorr以下であることがより好ましく、2.0mTorr以下であることがさらに好ましい。ここで、酸化ケイ素含有層が他の元素(例えば、Zrなど)をドープしたSiOx層である場合は、同様の観点から、当該プロセスガス圧は、3.0mTorr以下であることが好ましく、2.8mT以下であることがより好ましく、2.5mTorr以下であることがさらに好ましい。これにより焼成後に良好なシート抵抗(Ω/□)をもつ低放射コーティング膜を得ることができる。
前記酸化ケイ素含有層(例えば、SiOx層)をスパッタリングする際のプロセスガス中の平均O2配合比は、上記観点から、80体積%以上であることが好ましく、90体積%以上であることがより好ましい。また、当該平均O2配合比は、100体積%であってもよく、この場合も空孔の形成が抑制でき、耐白化性に優れたガラス物品を提供できる。ここで、酸化ケイ素含有層が他の元素(例えば、Zrなど)をドープしたSiOx層である場合には、上記プロセスガス中の平均O2配合比は、上記観点から、38体積%以上であることが好ましく、50体積%以上であることがより好ましい。また、同様の観点から、当該平均O2配合比は、90体積%以下であることが好ましく、85体積%以下であることがより好ましい。
以上より、ガラス基板上に、誘電体層と、機能層と、酸化ケイ素含有層とが順に配されたガラス物品を得ることができる。なお、誘電体層は形成してもよいし、形成しなくてもよい。
2種以上のフリットを混合して使用する場合には、それぞれのフリットのうち1種以上が上記範囲内の軟化点であることが好ましく、全てのフリットの軟化点が上記範囲であることがより好ましい。
プレス曲げ成形では、例えば、所望の自動車用窓ガラスの形状に応じて、プレス装置(加熱プレス装置)によってガラス板を曲げ加工する。自重曲げ成形では、自重曲げ装置によって、当該ガラス基板を曲げ加工する。さらに、自動車用窓ガラスに必要とされる安全基準に応じて、風冷強化などを行ってもよい。
(ガラス基板の用意およびコーティング膜の作製)
ガラス基板の一方の面に、スパッタリング装置を用いて、低放射コーティング膜を形成した。具体的には、まず、厚さ2.1mmのガラス基板(商品名:FGY1、AGC株式会社製)を準備した。
次に、スパッタリング法により、このガラス基板の表面に、第1の誘電体層として、ジルコニアを含む酸化チタン層を成膜した。成膜にはジルコニア量35質量%のジルコニアドープチタニアターゲットを使用し、分光測定を基にした光学シミュレーションにて膜厚は10nmであった。
次に、スパッタリング法により、第2の誘電体層として、酸化ケイ素層を成膜した。分光測定を基にした光学シミュレーションにて膜厚は35nmであった。
次に、スパッタリング法により、機能層として、ITO(酸化インジウムスズ)層を成膜した。成膜には酸化スズ量10質量%の酸化スズドープ酸化インジウムターゲットを使用し、平均酸素配合比O2/(O2+Ar)が0.2体積%である混合ガスを用い、成膜を行った。分光測定を基にした光学シミュレーションにて膜厚は120nmであった。
次に、第1の酸化ケイ素含有層(SiOx)を成膜した。シリコンターゲットを使用し、平均酸素配合比O2/(O2+Ar)が80体積%である混合ガスを用いて、2.0mTorrの圧力下にて、48.9kWのパワー(パワー密度:9.6W/cm2)を印可して成膜を行った。分光測定を基にした光学シミュレーションにて膜厚は80nmであった。
次に、スパッタリング法により、得られたガラス基板の表面に、第2の酸化ケイ素含有層として、ジルコニアを含む酸化ケイ素含有層(SiOx:Zr)を成膜した。成膜にはジルコニア量10質量%のジルコニアドープシリカターゲットを使用し、平均酸素配合比O2/(O2+Ar)が52体積%である混合ガスを用いて、3.0mTorrの圧力下にて48.0kWのパワー(パワー密度:9.4W/cm2)を印可して成膜を行った。分光測定を基にした光学シミュレーションにて膜厚は25nmであった。
以上の工程により、コーティング膜付きガラス基板が得られた。なお、各層の成膜時には、明記していない場合、ArやO2、もしくはその混合ガスを使用した。得られたガラス物品に対し、後述する各物性値を測定し、さらに後述する評価方法に基づき評価を行った。
例2~例3、例5、例7~例8では、第1の酸化ケイ素含有層および第2の酸化ケイ素含有層をスパッタリングする際のパワー、パワー密度、プロセスガス圧および平均酸素配合比を表1に示す通りにした。それ以外は、例1と同様にして、コーティング膜を備えたガラス物品を作製し、後述する各物性値を測定し、さらに後述する評価方法に基づき評価を行った。
第1の酸化ケイ素含有層および第2の酸化ケイ素含有層をそれぞれ以下の方法に従い、成膜した以外は、例1と同様にして、コーティング膜を備えたガラス物品を作製し、後述する各物性値を測定し、さらに後述する評価方法に基づき評価を行った。
すなわち、第1の酸化ケイ素含有層の形成の際に、シリコンターゲットを使用し、平均酸素配合比がO2100体積%のガスを用いて、2.0mTorrの圧力下にて45.0kWのパワー(パワー密度:8.8W/cm2)を印可して成膜を行った。分光測定を基にした光学シミュレーションにて膜厚は46nmであった。
次に、第2の酸化ケイ素含有層の形成の際に。シリコンターゲットを使用し、平均酸素配合比O2/(O2+Ar)が80体積%である混合ガスを用いて、2.0mTorrの圧力下にて45.0kW(パワー密度:8.8W/cm2)のパワーを印可して成膜を行った。分光測定を基にした光学シミュレーションにて膜厚は46nmであった。
第2の酸化ケイ素含有層を形成せずに、第1の酸化ケイ素含有層を以下の方法に従い、成膜した以外は、例1と同様にして、コーティング膜を備えたガラス物品を作製し、後述する各物性値を測定し、さらに後述する評価方法に基づき評価を行った。
すなわち、第1の酸化ケイ素含有層の形成の際に、シリコンターゲットを使用し、平均酸素配合比がO2100体積%のガスを用いて、2.0mTorrの圧力下にて45.0kWのパワー(パワー密度:8.8W/cm2)を印可して成膜を行った。分光測定を基にした光学シミュレーションにて膜厚は92nmであった。
得られたガラス物品の各物性値の測定方法は以下の通りである。
得られたガラス物品における酸化ケイ素含有層(例6以外は第1および第2の酸化ケイ素含有層、例6は第1の酸化ケイ素含有層)中の合計の総Ar量(nm・原子%)を以下の方法に従い求めた。
各酸化ケイ素含有層中の平均Ar原子濃度を以下の手順(I)~(II)によって算出した。
I)ラザフォード散乱スペクトル分析装置(National Electrostatics Corporation製 Pelletron 3SDH(商品名))にて2300keV He++イオンを入射角0°、-35°の2条件で入射させ検出した値を用い、シミュレーションフィッティングにより酸化ケイ素含有膜におけるAr原子濃度[原子%]を含む組成デプスプロファイルを得た。ここでデプスプロファイルの1ステップは1~3nmの範囲とした。
II)酸化ケイ素含有膜中のAr原子濃度デプスプロファイルにおいて、連続する3つの測定点が、その平均値±0.05原子%の範囲に入る部分を平坦部として、Ar原子濃度を読む部分とした。平均値±0.05原子%の範囲に入る測定点が連続で複数ある場合は、該当するすべての測定点の平均値をもって、その層の平均Ar原子濃度とした。なお、1つの層に不連続で複数の平坦部が存在する場合、各々の平坦部に対して、前記平均Ar原子濃度に、平均値を算出した際の膜厚を乗じた値を算出し、それらの合計値を全ての平坦部の膜厚合計値で除した値を、その層の平均Ar原子濃度とした。平均Ar原子濃度が検出限界0.1原子%以下の場合は、0.05原子%をその層の平均Ar原子濃度と規定した。平均Ar原子濃度算出のために平坦部を読む酸化ケイ素含有層の境界は、原子濃度デプスプロファイルにおいて当該酸化ケイ素含有膜に隣接する層の中で酸化ケイ素含有膜に存在しない元素の中で最も多い元素のプロファイルにおいて、酸化ケイ素含有膜に最も近い平坦部における元素原子濃度が半値になる部分とした。平坦部が存在しない場合は、当該元素の最大原子濃度値の半値になる場所を2層の境界とし、境界内部における平均Ar原子濃度を算出した。
得られた平均Ar原子濃度に当該酸化ケイ素含有層膜厚を乗じた値をAr量[nm・原子%]として算出した。酸化ケイ素含有層が単層の場合は、この計算によって得た値を総Ar量とし、酸化ケイ素含有層が複数層の場合は、各層Ar量の和を総Ar量とした。
ここで、図2に、上述した例1においてラザフォード散乱スペクトル分析装置(RBS)を用いて測定した各原子濃度の深さ方向のプロファイルを示す。このように、RBSを使用して、各酸化ケイ素含有層の深さ方向の組成比、平均Ar原子濃度を出すことができる。
得られたガラス物品における酸化ケイ素含有層(例6以外は第1および第2の酸化ケイ素含有層、例6は第1の酸化ケイ素含有層)中の合計の総H量(nm/cm3)を以下の(I)~(III)の手順に従い求めた。
(I)測定試料(酸化ケイ素含有層)表面の有機汚染を除去するため、紫外線(UV)オゾン処理を実施した。UVオゾン処理は、紫外線照射装置、商品名:PL30-200(センエンジニアリング株式会社製)を使用し、紫外線照射装置電源として商品名:UB2001D-20を使用した。処理条件は、紫外線波長:254nm、処理時間:10分とした。
(II)定量用標準試料として1%以下のH+注入酸化ケイ素を用い、二次イオン質量分析装置を用いて、標準試料中のH濃度および平均H/Si強度比を測定した。分析条件を以下に示す。
装置:アルバック・ファイ株式会社製、商品名:PHI ADEPT1010、
一次イオン種:Cs+、
一次イオン加速電圧:2kV、
一次イオンカレント:20nA、
一次イオン入射角(試料面垂直方向からの角度):60°、
ラスターサイズ:400×400μm2、
二次イオン極性:マイナス。
(III)二次イオン質量分析装置を用いて、上述した分析条件と同一の条件で、測定試料中の平均H/Si強度比を測定した。そして、JISK0163:2010に則り上記定量用標準試料の相対感度係数を算出し、測定試料中の平均H/Si強度比をH濃度に換算した。
得られたH濃度に酸化ケイ素含有層膜厚を乗じた値をH量[nm/cm3]と定義した。酸化ケイ素含有層が複数存在する場合は求めた各層H量の和を総H量とした。
ここで、図3、図4および図5に、それぞれ、例1、例7および例6における、二次イオン質量分析装置を用いて測定した試料構成元素の二次イオン強度(cps)とスパッタ時間(sec)との関係を示すグラフを表す。
なお、H/Si強度比を算出する範囲は隣接する層に存在しない金属元素の内で最も強度変化が大きいもののプロファイルによって定義した。具体的には例1のプロファイルである図3のように、最表層であるジルコニアを含む酸化ケイ素含有層中の(90Zr+16O)-二次イオンプロファイルが平坦な箇所を持つ場合、(90Zr+16O)-二次イオン強度の急激な上昇が終わった横ばいの停滞領域であり、かつ強度が急激に低下開始する手前までの領域におけるH/Si強度比を当該層のH/Si強度比とした。具体的には、ジルコニアを含む酸化ケイ素含有層に関しては、図3中の符号Aで示す範囲におけるH/Si強度比を酸化ケイ素含有層のH/Si強度比とした。さらに続くSi以外の金属元素を主として含まない酸化ケイ素含有層に関しては、(90Zr+16O)-二次イオン強度の急激な低下が終わった領域から、(120Sn+16O)-二次イオン強度が上昇開始する手前までの領域(図3中の符号Bで示す範囲)におけるH/Si強度比を酸化ケイ素含有層のH/Si強度比とした。
例7のプロファイルである図4のように、ジルコニアを含む酸化ケイ素含有層において最表面ジルコンドープ酸化ケイ素含有層中の(90Zr+16O)-二次イオン強度プロファイルに横ばいの停滞領域が無い場合、(90Zr+16O)-二次イオン強度の急激な上昇が終わった領域から強度が急激に低下開始する手前までの領域(図4中の符号Aで示す範囲)におけるH/Si強度比をZrドープ酸化ケイ素含有層のH/Si強度比とした。続くSi以外の金属元素を主として含まない酸化ケイ素含有層においては、例1と同様にして、図4中の符号Bで示す範囲におけるH/Si強度比を算出した。
例6のプロファイルである図5に示すように、Si以外の金属元素を主として含まない酸化ケイ素層が最表層の場合、30Si-二次イオン強度の急激な上昇が終わった領域から(120Sn+16O)-二次イオン強度が上昇開始する手前までの領域(図5中の符号Bで示す範囲)におけるH/Si強度比を当該層のH/Si強度比とした。
なお、各測定試料についてH/Si強度比を3回算出し、これらの平均値を、平均H/Si強度比とした。
なお、表1において、例えば、例1中の総H量[nm/cm3]「5.63E+23」とは、「5.63×1023」を意味する。
上記ガラス基板を焼成炉(IR炉)を用いて、焼成温度650℃までは3℃/秒で温度を上昇させ、焼成温度に到達後は焼成温度で維持し、焼成(加熱)合計時間を240秒として焼成を行った。非接触表面抵抗測定器(NAGY社製:PULS)を用いて、焼成後のガラス基板のシート抵抗を測定した。測定結果を表1に示す。
得られたガラス物品を以下の評価方法を用いて評価した。
上記ガラス基板上、具体的には、コーティング膜(最上層の酸化ケイ素含有層)の周縁部上に、表2に示す元素組成(質量%)の遮蔽層AまたはBを作製した。具体的には、当該元素組成を有する遮蔽層形成用材料をそれぞれ、コーティング膜の周縁部上に、#150~#250メッシュのスクリーン印刷法で印刷して乾燥させた。続いて、焼成炉(IR炉)を用いて、以下の焼成条件で焼成を行い、遮蔽層形成用材料をこのガラス基板上に焼結させ、図1Cに示すような額縁状の遮蔽層AまたはBを形成した。遮蔽層の厚みはいずれも、15μmであった。なお、遮蔽層AまたはBをガラス基板上に焼結させる際に、併せて曲げ成形を行い、湾曲形状の自動車用窓ガラス(ガラス物品)を作製した。このようにして、ガラス基板上に、コーティング膜と、遮蔽層AまたはBとが、この順に積層されたガラス物品を作製した。
・焼成条件
焼成温度:650、660℃または670℃。
昇温条件:焼成温度(650~670℃)までは3℃/秒で温度を上昇させ、焼成温度に到達後は焼成温度で維持し、焼成(加熱)合計時間を240秒とした。
なお、表2に記載の遮蔽層Aの具体的な元素組成(質量%)は、以下の通りであった。なお、遮蔽層組成の特定方法に関しては後述する。Bi:36.1、Si:8.2、O:29.1、Cr:12.4、Cu:5.5、Mn:4.0、Na:1.2、Al:0.6、Ti:0.4、K:0.2、C:2.3(合計100)。
また、表2に記載の遮蔽層Bの具体的な元素組成(質量%)は、以下の通りであった。Bi:29.7、Si:9.1、O:33.1、Cr:12.1、Cu:6.0、Mn:3.9、Na:1.4、Al:0.6、Ti:0.9、K:0.4、C:2.9(合計100)。
得られたガラス物品(各例に対して遮蔽層AまたはBを適用した2種類のガラス物品)の白化程度を目視で確認し、以下の評価基準に基づき、評価した。評価結果を表1に示す。
・評価基準
AA:焼成温度:650℃~670℃の全ての温度条件において、作製した遮蔽層の色が黒色であり、所望の外観が得られた。
A:焼成温度:650℃および660℃の条件においてはいずれも、遮蔽層の色は黒色であり所望の外観となったが、焼成温度:670℃の条件において遮蔽層の色はグレーであり所望の外観は得られなかった。
B:焼成温度:650℃の条件において遮蔽層の色は黒色であり所望の外観となったが、焼成温度:660℃および670℃の条件においてはいずれも遮蔽層の色はグレーであり、所望の外観が得られなかった。
C:焼成温度:650℃~670℃全ての温度条件において遮蔽層の色はグレーであり、所望の外観が得られなかった。
上記耐白化性評価の際に、ガラス物品に使用した遮蔽層AおよびBの元素組成をそれぞれ以下の方法により特定した。すなわち、試料(遮蔽層)表面を、エネルギー分散型X線分光法(SEM-EDX)により測定し、各成分(元素)組成(質量%)を定量化した。その際、走査型電子顕微鏡(SEM)として、商品名:TM4000Plus、株式会社日立製作所製を使用し、EDXとしては、商品名:AZtecOne、オックスフォードインストゥルメンツ社製を使用した。測定結果を表2に示す。
上記耐白化性評価の際に、ガラス物品に使用した遮蔽層AおよびBにそれぞれ含まれるSiO2含有量(質量%)をSEM-EDXにより測定した。測定結果を表2に示す。
上記SEM-EDXで特定した遮蔽層組成に基づき、遮蔽層AおよびBそれぞれにおけるBi/Si質量%比を算出した。算出結果を表2に示す。
2 誘電体層
3 機能層
4 酸化ケイ素含有層
5 遮蔽層
Claims (16)
- ガラス基板上に、機能層と、酸化ケイ素含有層とを、この順に有し、
前記酸化ケイ素含有層中の総Ar量は、52.0nm・原子%以下である、
ことを特徴とするガラス物品。 - 前記酸化ケイ素含有層中の総Ar量が、19.0nm・原子%以下である、請求項1に記載のガラス物品。
- 前記酸化ケイ素含有層中の総H量が、5.7×1023nm/cm3以下である、請求項1に記載のガラス物品。
- 前記酸化ケイ素含有層中の総H量が、2.9×1023nm/cm3以下である、請求項3に記載のガラス物品。
- 前記酸化ケイ素含有層上に、遮蔽層を有し、
前記遮蔽層中のBi/Si比が、3.8以下である、請求項1に記載のガラス物品。 - 前記酸化ケイ素含有層上に、遮蔽層を有し、
前記遮蔽層中のBi/Si比が、3.8以下である、請求項3に記載のガラス物品。 - 前記遮蔽層中のSiO2含有量が、15質量%以上である、請求項5に記載のガラス物品。
- 前記酸化ケイ素含有層が、AlおよびZrから選ばれる元素を含有する、請求項1に記載のガラス物品。
- 前記ガラス基板と、前記機能層との間に、誘電体層を有し、
前記誘電体層が、Si、C、Ti、Zr、Nb、Zn、SnおよびAlから選ばれる元素、または、これらの元素の酸化物、窒化物もしくは酸窒化物を含有する、請求項1に記載のガラス物品。 - 前記機能層が、In、Sn、Al、Ni、Cr、Zr,Ti、Nb、W、FeおよびFから選ばれる元素、または、これらの元素の酸化物、窒化物もしくは酸窒化物を含有する、請求項1に記載のガラス物品。
- 自動車用窓ガラスとして使用される、請求項1~10のいずれか一項に記載のガラス物品。
- ガラス基板上に、機能層と、酸化ケイ素含有層とをこの順にドライコーティングにより形成し、
前記酸化ケイ素含有層中の総Ar量を、52.0nm・原子%以下とする、
ことを特徴とするガラス物品の製造方法。 - 前記酸化ケイ素含有層をスパッタリングする際のパワー密度が、8.7W/cm2以上である、請求項12に記載のガラス物品の製造方法。
- 前記酸化ケイ素含有層をスパッタリングする際のプロセスガス圧が、3.0mTorr以下である、請求項12に記載のガラス物品の製造方法。
- 前記酸化ケイ素含有層をスパッタリングする際のプロセスガス中の平均O2配合比が、80体積%以上である、請求項12に記載のガラス物品の製造方法。
- 前記酸化ケイ素含有層をスパッタリングする際のプロセスガス中の平均O2配合比が、90体積%以上である、請求項15に記載のガラス物品の製造方法。
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| EP23903455.6A EP4635922A1 (en) | 2022-12-14 | 2023-12-11 | Glass article and method for producing same |
| CN202380085693.6A CN120359193A (zh) | 2022-12-14 | 2023-12-11 | 玻璃物品及其制造方法 |
| JP2024564358A JPWO2024128169A1 (ja) | 2022-12-14 | 2023-12-11 | |
| US19/235,039 US20250304490A1 (en) | 2022-12-14 | 2025-06-11 | Glass article and method for manufacturing same |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57124301A (en) * | 1981-01-27 | 1982-08-03 | Asahi Glass Co Ltd | Highly durable multilayered film containing silicon oxide film |
| JP2003048753A (ja) * | 2001-08-03 | 2003-02-21 | Nippon Sheet Glass Co Ltd | 薄膜を備えたガラス基板およびその製造方法 |
| WO2006098285A1 (ja) * | 2005-03-14 | 2006-09-21 | Nippon Sheet Glass Company, Limited | 温室、温室を使用した植物の栽培方法、及び透過性基板 |
| JP2008266056A (ja) * | 2007-04-18 | 2008-11-06 | Okuno Chem Ind Co Ltd | セラミックカラー用ガラス粉末及びセラミックカラー組成物 |
| WO2016184732A1 (de) | 2015-05-15 | 2016-11-24 | Saint-Gobain Glass France | Scheibe mit wärmestrahlung reflektierender beschichtung und darauf angebrachtem befestigungs- oder dichtelement |
| WO2019123877A1 (ja) * | 2017-12-20 | 2019-06-27 | Agc株式会社 | 遮熱ガラス |
| JP2023019959A (ja) | 2021-07-30 | 2023-02-09 | Jfeスチール株式会社 | ハンドリング治具 |
-
2023
- 2023-12-11 CN CN202380085693.6A patent/CN120359193A/zh active Pending
- 2023-12-11 EP EP23903455.6A patent/EP4635922A1/en active Pending
- 2023-12-11 JP JP2024564358A patent/JPWO2024128169A1/ja active Pending
- 2023-12-11 WO PCT/JP2023/044131 patent/WO2024128169A1/ja not_active Ceased
-
2025
- 2025-06-11 US US19/235,039 patent/US20250304490A1/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57124301A (en) * | 1981-01-27 | 1982-08-03 | Asahi Glass Co Ltd | Highly durable multilayered film containing silicon oxide film |
| JP2003048753A (ja) * | 2001-08-03 | 2003-02-21 | Nippon Sheet Glass Co Ltd | 薄膜を備えたガラス基板およびその製造方法 |
| WO2006098285A1 (ja) * | 2005-03-14 | 2006-09-21 | Nippon Sheet Glass Company, Limited | 温室、温室を使用した植物の栽培方法、及び透過性基板 |
| JP2008266056A (ja) * | 2007-04-18 | 2008-11-06 | Okuno Chem Ind Co Ltd | セラミックカラー用ガラス粉末及びセラミックカラー組成物 |
| WO2016184732A1 (de) | 2015-05-15 | 2016-11-24 | Saint-Gobain Glass France | Scheibe mit wärmestrahlung reflektierender beschichtung und darauf angebrachtem befestigungs- oder dichtelement |
| WO2019123877A1 (ja) * | 2017-12-20 | 2019-06-27 | Agc株式会社 | 遮熱ガラス |
| JP2023019959A (ja) | 2021-07-30 | 2023-02-09 | Jfeスチール株式会社 | ハンドリング治具 |
Non-Patent Citations (1)
| Title |
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| See also references of EP4635922A1 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP4635922A1 (en) | 2025-10-22 |
| CN120359193A (zh) | 2025-07-22 |
| JPWO2024128169A1 (ja) | 2024-06-20 |
| US20250304490A1 (en) | 2025-10-02 |
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