WO2024170496A1

WO2024170496A1 - System and method for ventilating a climate chamber

Info

Publication number: WO2024170496A1
Application number: PCT/EP2024/053484
Authority: WO
Inventors: Jo NELISSEN
Original assignee: Abn Cleanroom Technology NV
Current assignee: Abn Cleanroom Technology NV
Priority date: 2023-02-15
Filing date: 2024-02-12
Publication date: 2024-08-22
Anticipated expiration: 2025-08-15
Also published as: EP4666014A1; BE1031344B1; BE1031344A1

Abstract

The invention relates to a method and system for ventilating at least one climate chamber. The system is built upon a base and has a climate chamber. An air processing module treats supplied air, for example, with a temperature control module, moisture control module, and/or filter module. A floor structure is formed on the base. Above it, at least one climate chamber is formed, encompassed by upstanding sidewalls and by a ceiling structure. The climate chamber is substantially airtight. In the ceiling structure, a ceiling plenum is formed that is separated from the climate chamber by a ceiling and is connected to the climate chamber through at least one recess in the ceiling. According to the invention, the floor structure has a floor, which is provided with at least one recess for the exhaust of air from the climate chamber. The floor structure can have a floor plenum that is connected to the climate chamber through one or more recesses.

Description

SYSTEM AND METHOD FOR VENTILATING A CLIMATE CHAMBER

TECHNICAL FIELD

[0001] The invention relates to a system and a method for ventilating a climate chamber.

BACKGROUND

[0002] A climate chamber is a room or space in which at least one aspect of the climate is conditioned. In practice, such climate chambers, especially when filter modules are incorporated, are also called cleanrooms. Cleanrooms exist in various types, depending on the kinds of filters used, and are generally used to create a space in which the amount of dust is reduced.

[0003] Within climate chambers, different climates can be created that are ideal for work with various types of semiconductor technology, microorganisms, viruses, toxins, and/or other types of work that require a room with a controlled climate. Often, the term cleanroom refers to a room where work is done with semiconductor technology sensitive to small environmental particles, such as dust.

[0004] Climate chambers usually comprise an air supply that provides conditioned air, for example, clean air, to the climate chamber and an air exhaust that exhausts air from the climate chamber. The exhausted air may contain pollutants. Air can be supplied via an air supply module, connected to a (series of) filter(s) that ensure air can be purified and supplied to the climate chamber. Air can be drawn from the outdoor environment or provided by an external facility, for example, a gas cylinder.

[0005] Installations for ventilating cleanrooms are well known in the state of the art, such as in DE102004049520A1 and US4553696. EP2820356 discloses a system for supplying air to at least two cleanrooms and a plenum above these cleanrooms. The at least two cleanrooms and the plenum are separated by a ceiling in EP2820356. US6132309A discloses the construction of air delivery systems in cleanrooms for semiconductor manufacturing, wherein the cleanrooms have a plenum.

[0006] Most such installations use tubes and/or other air ducts for supplying and exhausting air to and from the cleanroom. These tubing systems are often incorporated into (suspended) ceilings and/or walls of the cleanroom. Such installations are expensive, difficult to install and maintain.

[0007] Additionally, such installations are next to non-modular, and the purpose and destination of the cleanroom must be thought out from the design phase. Another common problem with such systems is related to the fact that there are a limited number of placement possibilities for exhaust points, which are usually placed in the walls of the cleanroom. Since the position of electricity and water lines must be considered, exhaust points can only be placed in a limited number of locations in the space. As a result, the path of the airflow between the supply and exhaust points may not span the entire space. Consequently, only parts of the cleanroom are ventilated, leading to "dirty" areas in the space.

[0008] The invention aims to reduce at least one of these disadvantages.

[0009] Aspects of the invention relate to improving the homogeneity of the ventilation of a climate chamber. Aspects of the invention relate to improving the modularity and freedom of choice during the design process and when later expanding or modifying or changing the system and specifically the climate chamber. Aspects of the invention relate to preventing the formation of dirty areas in a cleanroom and particularly in cleanrooms with a size of at least 25, preferably at least 45 square meters.

SUMMARY OF THE INVENTION

[0010] According to an aspect of the invention, a system for ventilating at least one climate chamber is provided. The climate chamber is a substantially airtight chamber. The system, including the climate chamber, may also be substantially airtight. The air supply and/or air exhaust to the system, and in particular to the climate chamber, is regulated. The air processing module conditions the supplied air. Conditioning can be an air treatment such as cleaning, temperature adjustment, moisture regulation, etc. In embodiments, the system includes an air processing module with a dust filter. The air processing module is arranged to regulate air that is supplied to the system, particularly to the climate chamber. The air processing module is, for example, provided with one of a temperature control module, moisture control module, and/or filter module. [0011] The system with climate chamber is built upon a base. A foundation or a building can form the base for the system.

[0012] Part of the system built on the base is a floor structure. The floor structure includes a floor of the climate chamber on which users of the climate chamber can walk. Equipment in the climate chamber can be placed on the floor.

[0013] The climate chamber is encompassed, not only by the floor of the floor structure, but also by at least one upstanding sidewall and by a ceiling structure. The sidewalls, the floor, and the ceiling encompass the climate chamber. In the climate chamber, there is a conditioned environment. The sidewall may be provided with an access gate to the climate chamber. For modularity, the sidewalls are easily mountable and removable to adapt the size of the climate room. The sidewalls can be mounted between the ceiling structure and the floor structure.

[0014] In embodiments of the invention, the ceiling structure has a ceiling plenum. The ceiling separates the ceiling plenum from the climate chamber. The ceiling can include multiple layers. The ceiling is preferably a load-bearing ceiling that can support and carry multiple components, such as an air processing module, held in the ceiling plenum. The ceiling of the climate room can be a suspended ceiling. The ceiling plenum comprises a relatively large hollow space. Air in the plenum can be brought into the climate chamber through a recess that runs through the ceiling. The ceiling plenum is formed between a(n outer) ceiling of the system and a ceiling of the climate chamber. Multiple recesses can connect the ceiling plenum with the climate chamber.

[0015] In an embodiment, the floor of the climate chamber has at least one recess for the exhaust of air from the climate chamber. By exhausting air through the floor, a largely vertical air flow is obtained from the recesses in the ceiling to the recess in the floor. In embodiments, at least one recess in the ceiling is placed vertically above a recess in the floor.

[0016] Furthermore, by exhausting air through recesses in the floor, the formation of “dirty” areas can be prevented. Such dirty areas can, for example, form in and around the center of a climate chamber when the air exhaust only occurs through recesses in the sidewall. The result of this is that the air exhaust in the center of the climate chamber is not strong enough, causing the air there to (partially) stagnate. Air exhaust through one or more recesses in the floor of the climate chamber ensures a more homogeneous air throughput that, on average, exhausts air equally in every part of the room. The exhaust points in the floor are, if possible and preferably, placed in the center or at the "center of gravity" of the room.

[0017] The air exhaust through the recesses in the floor can also take place at multiple points, for example, within a certain distance from each other, for example, less than 2 meters from each other.

[0018] Exhaust points in the floor can also be placed at selected locations, such as around a machine or near a place known to have a lot of dust accumulation.

[0019] In an embodiment, the floor structure has a floor plenum. The floor structure comprises a ground floor that is, for example, built on the base. The floor of the cleanroom is supported by, and held at a distance from, the ground floor. A floor plenum is formed between floor and ground floor. The floor has the recess for the air exhaust. The climate chamber floor separates the climate chamber from the floor plenum. The recess in the floor connects the climate chamber with the floor plenum. The exhaust air can reach the floor plenum through multiple recesses in the floor of the climate chamber. Due to the size of the hollow space of the floor plenum, pressure equalization can take place in a calm and uniform manner.

[0020] In embodiments, the system includes not one, but two or more climate chambers. The second climate chamber is separated from the first climate chamber by at least one sidewall. The second climate chamber is, similar to the first climate chamber, formed between ceiling construction and floor construction and encompassed by upstanding sidewalls that extend between the floor and ceiling of the second climate space.

[0021] The second climate chamber has a second recess in the floor for air exhaust from the second climate chamber. The second climate chamber has a second recess in the ceiling for air supply to the second climate chamber. In embodiments, the same ceiling plenum is connected via the first and the second recess to the first and second climate chamber respectively. The second recess in the floor of the second climate chamber is, in embodiments, connected to the floor plenum that is also connected to the first recess. This allows the exhaust air from the second climate chamber to make use of the same exhaust and pressure equalization. In embodiments, the same floor plenum is connected via the first and the second recess to the first and second climate chamber respectively. [0022] The air supplied to the second climate chamber can be conditioned in a different way. This allows work to be done under different conditioned circumstances at one location. A second air processing module for processing air is connected to the second recess in the ceiling, wherein the second air processing module is arranged for processing air that differs from the (first) air processing module. Preferably, the overpressure of the second chamber is different, for example, higher, than the overpressure in the first chamber. By setting the exhaust device connected to the recess in the floor of the second chamber differently than the exhaust device connected to the recess in the floor of the first chamber, a different overpressure can be obtained within the same system.

[0023] In a particular embodiment, the second climate chamber is completely encompassed by the first climate chamber and separated from it by intermediate sidewalls. In the second climate chamber, there can be extra high conditioning, for example, extra cleanliness. Thereby, the overpressure of the second climate chamber can also be set higher than the first chamber. An access gate or airlock connects the first and the second climate chambers.

[0024] The second chamber can be connected to the first climate room via a door for access by personnel. There may be intermediate chambers or a corridor between the climate chambers.

[0025] In embodiments and/or according to further aspects of this disclosure, a modular climate room system is provided. On a base, a floor structure with plenum is formed. Upstanding walls are erected on the floor that carry the ceiling structure that has a plenum. Openings in the ceiling and floor can be opened and closed, dependent on where a climate room is formed on the floor plan. Areas within the floor surface can be without clean room and the respective openings in ceiling and floor are/remain closed off. Where a first, and preferably a second clean room is formed, by encompassing that clean room by upstanding walls, the ceiling and floor openings are opened.

[0026] In any embodiment, the upstanding sidewalls of the second climate chamber are mountable and, at least partially, easily removed from between the ceiling structure and the floor structure. This increases the modularity. Recesses, in ceiling and floor, can be closed or opened, dependent on the size (and thus of the position of the sidewalls) of the first and second chamber. In embodiments, the second chamber can be expanded by adding one or more upstanding sidewalls, taking a part of the surface area of the first chamber. [0027] The system for ventilating at least one climate chamber can further comprise a transport column or central column. The transport column connects the recess in the floor with the ceiling plenum. In particular, the transport column connects the floor plenum with the ceiling plenum. The transport column is a vertically-extending space. The conditioned air in the system flows roughly from the ceiling structure, via the climate space, to the floor structure, and back to the ceiling structure via the transport column.

[0028] In embodiments, a longitudinal side of the system forms the transport column. A sidewall of the climate chamber can form the separation between the transport column and the climate chamber. In embodiments, air conditioning elements, such as cooling elements, are included in the transport column. Also, any cabling, such as the power supply for elements in the ceiling structure, can run through the transport column.

[0029] In embodiments, first and second climate chambers are formed in the system having a floor surface area with a width and a length. In embodiments the transport column spans a column at one end in the length direction. The transport column spans the, close to, entire width of the floor surface area. A floor plenum, and preferably also the ceiling plenum, preferably spans at least 40% of the width of the floor surface area, preferably at least 50% and more preferably at least 60 of the width of the floor surface area. In embodiments, the floor plenum is connected to the transport column, preferably over more than 40% of the width of the floor surface. At the boundary of floor plenum and transport column, the direction of air flow from the recess in the floor through the floor plenum to the transport column is mainly in the longitudinal direction of the floor plenum. This results in a uniform air flow with a large cross-sectional surface area, where the air flow is hindered by few obstacles, and therefore the pressure distribution is very uniform. The vertically extending transport column thus forms an extension of the floor plenum, with little or no air flow obstructions.

[0030] In embodiments, the system has a mainly rectangular floor surface. The climate chamber extends in the width of the system. The width of the floor plenum is generally similarly wide and extends in the longitudinal direction. On one long side in the longitudinal direction, the transport column is formed, which also extends over a significant, preferably substantially the entire width of the system. The ceiling plenum is also substantially as wide as the system, while the ceiling plenum extends in the longitudinal direction over the climate chamber. [0031] The recess in the floor of the climate chamber can be connected to an exhaust device. The exhaust device can have a fan to suck air from the recess and from the climate chamber. The exhaust inlet of an exhaust device is connected to the recess. The exhaust outlet is connected to the floor plenum. The exhaust device can be adjustable, in particular, its flow rate can be adjusted. The exhaust device can thus be adjusted to exhaust a certain amount of air from the climate chamber. Additionally, the exhaust device also regulates the overpressure in the climate chamber and/or in the floor plenum. In particular, the setting of the flow rate of the exhaust device is used to obtain the desired overpressure.

[0032] In the ceiling plenum, an inlet opening can be provided that is connected to the outside air or an air supply. Fresh air can be supplied to the ceiling plenum through the inlet opening.

[0033] A supply device can also be included in the system. The inlet opening of the system is connected to the suction side of the supply device. The exhaust side of the supply device is connected to the ceiling plenum and in some embodiments, via the recess in the ceiling, with the climate chamber.

[0034] The supply device can have a fan and can be controlled to regulate the rate of the air flow from outside to the system. For controlling the air inlet via the inlet opening, but also for controlling the air processing module and the air exhaust device, the system can have a control module. The control module is arranged to vary the flow rate of the fan of the exhaust device over time. Preferably, the flow rate of the fan of the supply device and the flow rate of the fan of the air processing module are kept constant over time. This can, for example, regulate the overpressure relative to the outside air. The system can have an overpressure relative to the outside air. One of the spaces, for example, the ceiling plenum, the floor plenum, the transport column, or the climate chamber of the system can be regulated to an overpressure. By pinching off the air exhaust from a space, pressure can be built up in the substantially airtight sealed system or in the climate chamber. This overpressure in the climate chamber ensures that contaminants will only occasionally enter the climate chamber.

[0035] In embodiments, the ceiling and the floor each have multiple preformed recesses for supply and exhaust of air respectively. Recesses can be closed off, in function of the formed climate rooms. To enable future adjustments and redesigns of the climate chamber, a system according to the invention is preferably provided, wherein the floor of the floor structure has multiple, temporarily sealable, recesses. Each of those sealed recesses can be used for air exhaust from a climate chamber. By the preformed recesses, if necessary, an additional recess for air exhaust can be added. In other embodiments, a recess can be sealed off if air exhaust is no longer necessary.

[0036] Similarly, recesses in the ceiling can be closed and/or opened. This can be done, for example, by providing a hatch or lock. These recesses may also be closed and/or opened in realtime using a control system. This allows modular control of the system.

[0037] For easy maintenance, the air processing module, the air supply device, and/or the air exhaust device are included in one of the ceiling plenum and/or floor plenum, and wherein the ceiling plenum and/or the floor plenum further comprises at least one access point for physically accessing the floor plenum and/or ceiling plenum. The floor plenum is thus accessible for maintenance by an operator.

[0038] Dust accumulation, humidity, temperature, and/or other variables that determine the climate condition can also be measured locally by means of one or more sensors. Information obtained from these sensors can be supplied to a computer system for controlling the climate condition of one or more climate chambers via cables, internet, or Bluetooth. Air supply systems and air exhaust systems in the climate chamber can be controlled individually or jointly to achieve a global (entire space) or local (an area in the space) climate condition. The control system can be improved by maintaining a model of the space of the climate chamber and the present machines, equipment, objects, and/or furniture.

[0039] Embodiments of the invention provide for measuring devices in one or more spaces of the system, in particular in the climate chamber. The measuring devices can measure air properties such as air pressure, temperature, and pollution (dust particles per volume), but also the air composition, in particular the CO2. Each of the measured properties can be supplied to the control system, and the control system can adjust the settings of supply or exhaust devices. To increase the overpressure, the supply of air can be (temporarily) increased and/or the exhaust (temporarily) reduced. When the CO2 percentage in the air in the climate chamber exceeds a certain threshold, then more fresh air from outside the system can be drawn in. In particular, the proportion of fresh air in the total amount of air in the system can be increased. Also, the total throughput speed can be increased, where both the supply and exhaust flow rates to the climate chamber are increased. By measuring properties of the air and responding to the control system, a system can be obtained that operates at lower costs. During hours when fewer people are present in the climate space, the CO2 can be lower and the throughput speed can be reduced.

[0040] The system can be accessible from the outside via a first intermediate chamber or airlock that is connected via an access gate with the climate chamber.

[0041] The invention will be further described by means of figures. In this description, features are described in conjunction with the system and especially preferred embodiments thereof.

However, it should be noted that, unless explicitly stated, each of the features are combinable with any other feature described in this application. The applicant preserves the opportunity to file a divisional application based on said combinations.

BRIEF DESCRIPTION OF THE FIGURES

[0042] FIG. 1 shows an example embodiment of a system for ventilating more than one climate chambers,

[0043] FIG. 2 shows an example embodiment of a system for ventilating more than one climate chambers with one or more transport columns,

[0044] FIG. 3 shows an example embodiment of a system for ventilating more than one climate chambers with one or more transport columns and plenums,

[0045] FIG. 4 shows an example embodiment of a cross-section of a recess in the ceiling, ceiling plenum, floor, floor plenum, and/or transport column, en

[0046] FIG. 5 shows schematic top and side plan views of an example embodiment of a system with a climate chamber.

DESCRIPTION OF THE EMBODIMENTS

[0047] Multiple embodiments will be further described. The invention is not limited to these embodiments.

[0048] FIG. 1 shows an example embodiment of a system 500 for ventilating at least one climate chambers 501,502. The climate chamber(s) 501,502 can be a cleanroom. In the cleanroom, entry of dust into that room is generally prevented by only supplying filtered air. Entry of dust is prevented by providing overpressure in the room that pushes out dust particles. Other climate conditions, such as pressure, airflow, humidity, temperature, and/or light can also be regulated in the climate chamber.

[0049] The system 500 can be built upon a base, such as an existing floor, a foundation, but also indoor or outdoor spaces consisting of stone, soil, grass, and/or other surfaces suitable for supporting the system. The system 500 is built on a base by means of a floor structure 113. The climate chamber(s) are encompassed by the floor of the floor structure 113, upstanding sidewalls 101, and ceiling 114. Upstanding sidewalls 101, floor structure 113, and ceiling structure 103 substantially airtightly encompass the climate chamber(s), allowing, for example, the pressure in the climate chamber(s) to be regulated by supplying and/or exhausting air.

[0050] System 500 may also comprise intermediate walls 503, provided within the climate chamber, to make multiple individual climate chambers. In contrast to sidewalls 101, intermediate wall 503, or other walls separating individual climate chambers, such as 501 and 502, are preferably not load-bearing. As a result, intermediate wall(s) 503 can be easily disassembled and moved to enlarge or reduce the size of individual climate chambers or create entire different layouts of climate chambers, as will be illustrated with reference to FIG. 5. Sidewall 503 can be moved to the left to enlarge the size of clean room 502 and reduce the size of clean room 501. Although FIG.1 shows the chambers stretched out over the entire width of the floor structure 113, it is possible to have a non-cleanroom space, additional to a dressing room or intermediate access room, formed between the carrying walls 101, floor structure 113 and ceiling structure 103. The area of clean rooms 501,502 is adapted to the needs and is if less surface area is needed, part of the space of the floor surface area remains unused as clean room.

[0051] The system 500 has a ceiling structure 103 with a ceiling plenum 102. The ceiling plenum provides space for the placement of, among other things, supply device 107A and/or 107B, air processing modules 104. The ceiling plenum is primarily a space where air can be collected, transported, processed, and/or stored. Ceiling plenum 102 is created by the placement of a second ceiling 114 that is preferably a load-bearing system ceiling. The second ceiling 114 can be mounted on upstanding sidewalls 101.

[0052] The ceiling plenum is connected to climate chamber(s) by means of a recess 108 A and/or 108B in the second ceiling 114. Recess 108 A and/or 108B can contain a hole, grille, tube, and/or another medium for enabling an air connection between climate chamber(s) and ceiling plenum 102.

[0053] System 500 can also include one or more supply devices 105 for supplying air 106 to system 500, climate chamber(s), and/or ceiling plenum 102. Supply device 105 can include a fan and/or another device for moving air 106. Supply device 105 can be provided in upstanding sidewalls 101, floor 113, and/or ceiling structure 103. Supply device 105 can be connected to system 500, climate chamber(s), and/or ceiling plenum 102, possibly through one or more recesses or channels or tubes. Air 106 supplied by supply device 105 can be air from an outdoor space, air reservoir, and/or another space with air that can be used for delivery to system 500, climate chamber(s), and/or ceiling plenum 102.

[0054] Supply/exhaust/throughput devices described in the embodiments of this invention can be integrated into or positioned on and/or under an upstanding sidewall, (second) ceiling, and/or (second) floor.

[0055] Air 106 is conditioned or treated by air processing module 104. Air processing module 104 can include a single treatment element or a series of treatment elements, including air, temperature, and humidity sensors, HEPA filters, UV light (filters), electrostatic filters, temperature control modules, moisture control modules, filter modules, and/or other elements for applying a climate condition to and/or processing and filtering air 106 for system 500.

[0056] Air processing module 104 can be placed within the ceiling plenum 102, but also outside the ceiling plenum 102 or even outside the system 500. Also, supply device 105 can be integrated with air processing module 104.

[0057] Floor structure 113 of system 500 also includes at least one recess 204A and/or 204B for the exhaust of air 203 A and/or 203B from the climate chamber and/or system. Just like recess 108 A and/or 108B, recess 204A and/or 204B can consist of a grille, tube, hole, and/or another medium for enabling an air connection between climate chamber(s) and the floor structure 113.

[0058] Just like supply device 105, recess 108A and/or 108B and recess 204A and/or 204B can have one or more recesses, for example, a grille. Also, recess 108 A and/or 108B and recess 204A and/or 204B can have a supply/exhaust/throughput device for supplying/exhausting/through- putting air 109A and/or 109B and air 203 A and/or 203B, respectively, from ceiling plenum 102 to climate chamber(s) and/or from climate chamber(s) to a floor structure or an outdoor space, respectively.

[0059] Also, supply device 107A and/or 107B can include an (additional) air processing module 104. The air processing at supply device 105 can be coarse air treatment, while the air processing at supply device 107A and/or 107B is high-end air treatment, e.g. including HEPA filtering.

[0060] “Clean” air 106 that is supplied from, for example, an outdoor space, by means of supply device 105 is treated by air processing module 104 and thus delivered to ceiling plenum 102. Supply device 107A and/or 107B can then supply clean air from ceiling plenum 102 to climate chamber(s) and, by regulating the degree of supply, control the pressure in climate chamber(s). By increasing the pressure in climate chamber(s), an overpressure is created in climate chamber(s) relative to the outdoor space.

[0061] Even if system 500 is not completely airtight, this overpressure enables system 500 to repel incoming particles, such as dust. Overpressure ensures that air in climate chamber(s) moves to a space with lower pressure; despite the system being substantially airtight, in this case, the outdoor space. Since air moves from climate chamber(s) to the outside, and not vice versa, this results in a cleanroom with a low chance of incoming dust.

[0062] Dust can also originate in spaces, such as climate chamber(s), due to the presence of equipment, people, tools, and/or other objects that can emit small particles. System 500 therefore allows “dirty” air 203 A and/or 203B in climate chamber(s) to be exhausted and replaced by clean air 109A and/or 109B. The exhaust of dirty air 203A and/or 203B can take place with the help of exhaust device 202A and/or 202B, which can be provided in recess 204A and/or 204B in floor 113.

[0063] An advantage of exhausting air from climate chamber(s) from floor 113, instead of through recesses in the upstanding sidewalls 101, is that there is more freedom in the placement of exhaust points. Unlike exhaust points in upstanding sidewalls 101, which usually allow exhaust only from one side of climate chamber 101, the exhaust point in floor 113 can be placed in the center of climate chamber 101 and this provides a more central, homogeneous exhaust of air. The air flow through the climate chamber is roughly vertical. [0064] Also, all embodiments of this invention allow for each climate chamber to include more than one exhaust point, each with its own exhaust device, which are placed in the floor structure. This results in an even more uniform and complete exhaust of air. It also allows for hard-to-reach areas of the climate chamber to be reached, possibly by placing a specially dedicated exhaust point at these locations.

[0065] In addition to each climate chamber potentially comprising more than one exhaust point, it can also include more than one supply point, each with one or more recesses and/or supply devices.

[0066] FIG. 1 shows an embodiment of the system 500 for ventilating at least one climate chamber. In FIG. 1, the same components are denoted by the same reference numbers and are not described again here.

[0067] System 500 includes a floor structure 113 with a floor plenum 206. Among other things, exhaust device 202A and/or 202B is placed in the floor plenum. Additionally, the floor plenum can collect, transport, process, and/or store air. Floor plenum 206 can be created by placing a second floor 205. Various techniques are available for positioning the second floor 205 at a distance from the underlying floor. Second floor 205 is placed at a distance from the base, leaving a floor plenum 206 with a height of between 20-100 cm, preferably between 30-70 cm. Floor plenum 206 is connected to the climate chamber(s) through recess 204A and/or 204B.

[0068] Pressure in the climate chamber(s) of all embodiments of this invention can be regulated by varying the degree of supply, exhaust, and/or throughput of each supply/exhaust/throughput device in the system.

[0069] In the embodiment shown in FIG. 1, floor plenum 206 has an outlet opening for exhausting air 403 from floor plenum 206. This exhaust of air 403 can be carried out by using exhaust device 402. Exhaust device 402 can, like supply device 105, supply device 107A, 107B, exhaust device 202A and/or 202B, supply/exhaust/throughput device 305, and supply/exhaust/throughput device 306, be provided in a recess in one of the upstanding sidewalls 101, floor 113, and/or second floor 205 and can include a fan and/or another device for moving air 403. [0070] Supply device 105 and exhaust device 402 allow, in every embodiment of this invention, clean and dirty air, respectively, to be supplied and exhausted to and from the system. In this way, a correct balance can be found in the air quality, which can be characterized by air flow, temperature, humidity, amount of dust, number of bacteria, and/or a quantity of another measurable unit.

[0071] The degree of air flow in exhaust device 402, supply device 105, supply device 107A, 107B, exhaust device 202A and/or 202B, supply/exhaust/throughput device 305, and supply/exhaust/throughput device 306 can be individually or collectively (decentralized or centralized) regulated to achieve a specific airflow, pressure, moisture content, and/or dust level in climate chamber(s), but also in transport column 307, ceiling plenum 102, and floor plenum 206.

[0072] In an embodiment, exhaust device 402 is directly connected to recess 204A and/or 204B and, in particular, to an air processing module placed in the recess, that is, in a channel of the recess. When the air processing module has an exhaust for dirty air, that dirty air can be exhausted through exhaust device 402.

[0073] System 500 comprises at least two climate chambers 501 and 502, wherein each climate chamber air supply 109A and/or supply 109B enter the respective climate rooms via at least one supply device 107A and/or 107B, placed in at least one recess 108 A and/or 108B. Air 203 A and/or 203B is exhausted from the at least two climate chambers 501 and 502 through at least one exhaust device 202A, 202B, placed in at least one recess 108A and/or 108B. By throttling the exhaust devices 202A, 202B an overpressure can be achieved in the respective climate rooms 501,502.

[0074] Climate chambers 501 and 502 are separated by at least one upstanding intermediate wall 503. Intermediate wall 503 provides a substantially airtight connection between the ceiling component (ceiling 103 or second ceiling 114) and the floor component (floor 113 or second floor 205).

[0075] Intermediate wall 503 may also be an intermediate column, which may be coupled to the ceiling plenum 102 and/or floor plenum 206. This may be advantageous and serve as a buffer when dealing with two neighbouring climate chambers that require different conditions. In contrast to sidewalls 101, intermediate wall 503, or other walls separating individual climate chambers, such as 501 and 502, are preferably not load-bearing. As a result, intermediate wall(s) 503 can be easily disassembled and moved to create different layouts of climate chambers. Recesses, such as ceiling recesses 108A,B and floor recesses 204A,B can be (temporarily) closes and/or opened to accommodate new layouts.

[0076] Due to the substantially airtight intermediate wall 503 and the at least two supply devices 107 A and 107B, the climate chambers can be individually conditioned. Particularly when the supply devices 107A and 107B both have an air processing module that is set differently, then the supplied air 109 A and 109B can differ, and the climate chambers are differently conditioned. The exhaust devices 202A and 202B can also be differently designed. This allows the pressure in climate chambers 501 and 502 to be individually regulated.

[0077] To achieve individual conditioning between different climate chambers, system 500 may further comprise one or more control units, coupled to at least one air processing module, and arranged to control the flow rate of at least one air processing module. Said control unit may also be arranged to centrally control at least one air processing modules to separately adjust the temperature, a moisture, and/or level of filtering between different climate chambers. Said control unit may be arranged to control air processing modules on the supply side, such as supply device 107A and/or 107B or 105, or the exhaust side, such as exhaust device 202A and/or 202B. Said control unit may employ simple or advanced (MIMO) control algorithms, such as PID, LQR, and MPC.

[0078] The control unit described in the previous paragraph may additionally be coupled to one or more sensors for measuring a condition, such as pressure, temperature, moisture, cleanliness, of at least one climate chamber. Given that there may we cross-interactions between neighbouring climate chambers, said control unit may be arranged to control the at least one air processing modules depending on said sensors.

[0079] System 500 may also comprise sensors inside the one or more climate chamber(s) to measure a condition of the climate chamber locally, such as in corners, underneath machinery, death spots, and/or hard-to-reach spots inside the climate chamber. Said sensors may then also be coupled to the control unit to provide real-time information about a local condition of the climate chamber. Said sensor(s) and/or control unit may also be coupled to a digital twin of system 500. Said digital twin may then serve as a basis for performing CFD modelling and simulations to calculate specific control actions to achieve a certain condition inside the real climate chamber, creating a feedback loop.

[0080] In the embodiments of this invention, pressure levels within the system and, in particular, in the climate chamber(s), the ceiling plenum, and/or the floor plenum, can be realized that are at least 1 Pa, preferably at least 5 Pa, and more preferably at least 10 Pa higher or lower than the pressure level outside the system. Also, pressure levels between climate chambers can differ up to 100 Pa. Besides pressure, airflow, temperature, humidity, amount of dust, number of bacteria, and/or a quantity of another measurable unit can also be measured and influenced or regulated per individual climate chamber in the system. Due to the regulation possibilities within individual climate chambers, different climates can be created that are ideal for work with various types of semiconductor technology, microorganisms, viruses, toxins, and/or other types of work that require a room with a controlled climate.

[0081] FIG. 2 shows system 600 for ventilating at least two climate chambers 501 and 502. Corresponding components from the earlier figures have the same reference number.

[0082] System 600 shows an embodiment of the invention where, instead of over the length of the climate chamber, transport column 307 is placed over the full length of system 600. Both configurations are compatible with all embodiments of the invention and can be considered based on the design requirements of at least one climate chamber. Each climate chamber in each embodiment of the invention can also include more than one transport column, depending on the layout of the system. Also, transport columns can run along multiple different walls of a climate chamber and even enclose the entire climate chamber.

[0083] System 600 includes a transport column 307. The transport column 307 forms an air connection between the floor structure 113 and the ceiling structure 103. Air can now be circulated internally in system 600.

[0084] Transport column 307 can be formed by placing at least one second upstanding sidewall 302 between the floor structure 113 and the ceiling structure 103. Sidewall 302 stands on the second floor 205 and is connected to the second ceiling 114. The transport column is formed between sidewall 302 and upstanding sidewall 101 of the system. [0085] The transport column is preferably formed on one side of the system 600, here the on left side.

[0086] Transport column 307 is connected to ceiling plenum 102 and floor plenum 206 through recess 309 in the second ceiling 114 and recess 308 in the second floor 205, respectively. Recess 309 and recess 308 can also include supply/exhaust/throughput device 306 and supply/exhaust/throughput device 305 for the supply/exhaust/throughput of air 304 and air 303, respectively.

[0087] The use of transport column 307, or transport columns used in other embodiments of this invention, allows air 203 A and/or 203B from climate chamber(s) to be moved via the floor plenum 206 to transport column 307 through supply/exhaust/throughput device 305 and then moved to ceiling plenum 102 through supply/exhaust/throughput device 306. This enables air supplied to climate chamber(s) to be exhausted and re-supplied to ceiling plenum 102. In this way, air can be circulated through system 600 and re-supplied to the climate chamber(s).

[0088] Also, circulated air can be re-treated by an air processing module. The transport column can include an air processing module 318. This can also be a cooling or heating element.

[0089] If the quality of the conditioned air after exhaust via recess 204A and/or 204B is still sufficiently clean, then this air can be reused in the climate chamber without needing to activate a treatment module again.

[0090] Instead of supply/exhaust/throughput device 305 and supply/exhaust/throughput device 306, just a single supply/exhaust/throughput device can be used to fulfil the same functionality as described above. Also, in an embodiment of the invention, no supply/exhaust/throughput device may be used in the transport column to fulfil the same functionality as described above.

[0091] FIG. 3 shows system 700 for ventilating at least two climate chambers 501 and 502. Corresponding components from the earlier figures have the same reference number.

[0092] System 700 shows an embodiment of the invention where intermediate wall 503 can be placed over the full length of the system. In this configuration, intermediate wall 503 can include recess 701 and/or recess 702 to facilitate airflow between the ceiling plenums above climate chambers 501 and 502 and floor plenums above climate chambers 501 and 502. If intermediate wall 503 does not include recesses, one or more additional supply devices 105 and exhaust devices 402 can be provided to facilitate the supply and exhaust of air 106 and air 403 in each plenum. In that case, additional transport columns 307 can also be provided for air circulation.

[0093] FIG. 4 shows an example embodiment of a cross-section of a recess 806, such as a recess in the ceiling, ceiling plenum, floor, floor plenum, and/or transport column (805), in which a supply/exhaust/throughput device 803 is provided for the supply/exhaust/throughput of air 802. Supply/exhaust/throughput device 803 further includes a supply/exhaust/throughput inlet 801 that is in direct contact with a first space and a supply/exhaust/throughput outlet 804 that is in direct contact with a second space. Supply/exhaust/throughput device 803 can include, for example, a fan and/or another device for moving air 802. Supply/exhaust/throughput inlet 801 and supply/exhaust/throughput outlet 804 can include, among other things, grilles, tubes, channels, connectors, valves, fans, and/or shafts.

[0094] While FIGs 1-4 show side views of a system with a climate space, FIG. 5 shows a top view and a side view of an exemplary system 900. Exemplary system 900 consists of, among other things, three separate climate chambers 926, 907 and 916. The pressure level in each of the climate chambers 926, 907 and 916 differs. This is made possible because supply devices 902 and 912 and exhaust devices 903 and 913 can be controlled independently to vary the degree of airflow in climate chambers 907 and 916, thus achieving a different pressure between the chambers. Exhaust devices 903 and 913 are provided in open recesses 901 and are connected to the floor plenum 910. Open recesses 901 can be the same or different in size for climate chambers, for example, depending on the type of exhaust device or the size of the space. The same applies to supply devices 902 and 912 and their corresponding recesses connected to the ceiling plenum 909.

[0095] Climate chambers 907, 916 and 926 are currently active. The climate in those chambers is being regulated using respective supplies/exhausts 901,926. Chamber 904 is inactive. Chamber 904 also has recess 915, supply device 902, and exhaust device 913. As room 904 is not active as climate room, recess 915 (or corresponding floor plenum recesses inside climate chamber 904) may be closed, resulting in a recess which does not allow (conditioned) air to be supplied to climate chamber 904. Reasons for deactivating a climate chamber by closing a recess may differ. For example, chamber 904, which neighbours the entrance of the system may be used as a dressing room in which humans can change into cleanroom-specific clothing. It may further be used as a storage room, control room, or other room that does not require a specific conditioning.

[0096] A fully encompassed clean room 926 is shown encompassed by clean room 907. Clean room 926 is formed by intermediate side walls 929 at a central area of climate room 904. A door 927 allows entering the extra clean room 926 from climate room 907. By surrounding the extra climate room 926 that has a higher cleanness or higher climate condition (e.g. higher HEPA filter, less dust or e.g. lower moisture condition) by an already clean room 904, leakage is lower and an energy efficient set-up is obtained. If door 927 is opened, the extra clean conditions leak into a clean room, whereas the leakage into clean room 926 is only by air that at least is clean enough to be in clean room 907. To obtain the higher cleanness or higher climate condition, recess 925 is provided with a high cleanness/high climate condition supply unit.

[0097] The construction of a cleanroom system, such as example system 900, may be as follows: i) defining the footprint of the entire cleanroom system, ii) building the floor, floor plenum, ceiling, ceiling, plenum, outer-walls of the entire cleanroom system, and optionally one or more transport columns, iii) providing the ceiling and floor with recesses, either evenly disposed across the entire footprint of the cleanroom system or with a higher density of recesses at specific points, iv) providing supply/exhaust units inside the recesses, v) providing sidewalls within the outer-walls of the entire cleanroom system to make separate climate chambers within the cleanroom system, vi) closing recesses at locations where supply or exhaustion of air is not required or desired. The ability to open and close recesses enhances modularity of the system and allows for redesign or repurposing of previously constructed cleanroom arrangements. Such a redesign or repurposing now only requires moving sidewalls to change the layout of the system and opening/closing of recesses to match the newly changed partitioning of the system.

[0098] Example system 900 also includes transport column 906, which can be entered via entrance 905 for, e.g., maintenance and installation. After using stairs 908, provided to compensate for the height difference caused by the presence of floor plenum 910, climate chamber 904 can be entered via entrance 911. Climate chamber 916 can be entered from climate chamber 904 via entrance 914 and climate chamber 907 can be entered through climate chamber 916 via entrance 917. However, each climate chambers can also have their own entrances.

[0099] In the following paragraphs, clauses are provided: [00100] Clause 1. System 100 for ventilating at least one climate chamber 115, wherein the system may be built upon a base and comprises: an air processing module 104 for processing air 106, wherein the air processing module 104 is provided with at least one of a temperature control module, a moisture control module, and/or a filter module; a floor structure 113 built upon a base; at least one climate chamber 115 encompassed by at least one upstanding sidewalls 101, a floor structure 113, and a ceiling structure 103, wherein the climate chamber 115 is substantially air tight; a ceiling plenum 102, formed in the ceiling structure, that is separated from the climate chamber 115 by a ceiling 114 en that is connected to the climate chamber 115 through at least one recess 108 in the ceiling 114; wherein the floor structure 113 has a floor 205 that is provided with at least one recess 112 for the exhaustion of air 111 from the climate chamber 115.

[00101] Clause 2. System for ventilating at least one climate chamber according to clause 1, wherein the floor structure 113 comprises a floor plenum that is separated from the climate chamber 115 by the floor, wherein the floor plenum is connected to the climate chamber through the recess,

[00102] Clause 3. System for ventilating at least one climate chamber according to clause 1 or 2, further comprising a transport column, which connects the recess in the floor 205 with the ceiling plenum, preferably via a floor plenum.

[00103] Clause 4. System for ventilating at least one climate chamber according to clause 3, wherein the sidewall of the climate chamber separates the transport column from the climate chamber, wherein the transport column preferably has air conditioning elements, such as cooling elements.

[00104] Clause 5. System for ventilating at least one climate chamber according to clause 2 and clause 3 or 4, wherein a (minimal) width of the floor plenum extends over a significant, at least 50%, part of a (maximum) width of the climate chamber, wherein a direction of air flow from the exhaust to the transport column is primarily in the longitudinal direction of the floor plenum, and wherein a (minimal) width of the transport column extends over a significant, at least 50%, part of the (maximum) width of the climate chamber.

[00105] Clause 6. System for ventilating at least one climate chamber according to one of the preceding clauses, wherein the recess in the floor is connected to an exhaust inlet of an exhaust device for exhausting air from the climate chamber and wherein the exhaust device has an exhaust outlet that is connected to the floor plenum.

[00106] Clause 7. System for ventilating at least one climate chamber according to one of the preceding clauses, wherein the ceiling plenum has an inlet opening to supply fresh air to the ceiling plenum.

[00107] Clause 8. System for ventilating at least one climate chamber according to one of the preceding clauses, wherein the system comprises a supply device 105 for supplying air 106 to the system via an inlet opening, preferably to the ceiling plenum 102 and/or to the climate chamber 115.

[00108] Clause 9. System for ventilating at least one climate chamber according to clause 6 and 8, wherein the supply device and the exhaust device each have a fan, wherein the system has a control module and wherein the control module is arranged to vary a flow rate of the fan of the exhaust device over time, and preferably keeps a flow rate of the fan of the supply device constant over time.

[00109] Clause 10. System for ventilating at least one climate chamber according to one of the preceding clauses, wherein the floor of the floor structure has multiple, temporarily sealable, recesses that can form an air exhaust of the climate chamber.

[00110] Clause 11. System for ventilating at least one climate chamber according to one of the preceding clauses, wherein the system further comprises a second climate chamber, separated from the first climate chamber with sidewalls, wherein the second climate chamber has a second recess in the floor for exhaustion of air from the second climate chamber and wherein the second climate chamber has a second recess in the ceiling for the supply of air to the second climate chamber, and

[00111] Clause 12. System for ventilating at least one climate chamber according to clause 11, wherein a second air processing module for processing air is connected to the second recess in the ceiling, wherein the second air processing module is arranged to process air that differs from the (first) air processing module.

[00112] Clause 13. System for ventilating at least one climate chamber according to any of the preceding clauses, wherein the second climate chamber is included between the ceiling construction and floor construction and wherein the second climate chamber is completely encompassed by the first climate chamber.

[00113] Clause 14. System for ventilating at least one climate chamber according to any of the preceding clauses, wherein the second air processing module is arranged for processing air that is greater, for example cleaner or higher pressure, than the (first) air processing module.

[00114] Clause 15. System for ventilating at least one climate chamber according to one of the clauses 11-14, wherein the floor structure comprises a floor plenum and wherein the second recess in the floor is connected to the floor plenum.

[00115] Clause 16. System for ventilating at least one climate chamber according to one of the preceding clauses, wherein the system, particularly an air supply device, an air processing module, and an air exhaust device, is arranged to regulate pressure in the climate chamber, particularly in that the system is arranged to regulate air supply and/or air exhaust of a supply device and/or exhaust device.

[00116] Clause 17. System for ventilating at least one climate chamber according to one of the preceding clauses, wherein the air processing module, an air supply device and/or air exhaust device are included in one of the ceiling plenum and/or floor plenum and wherein the ceiling plenum and/or the floor plenum further comprises at least one access point for physically accessing the floor plenum and/or ceiling plenum for maintenance.

[00117] Clause 18. System for ventilating at least one climate chamber according to one of the preceding clauses, wherein an air pressure in the ceiling plenum, and preferably in a floor plenum, is substantially equal to the outside pressure.

[00118] Clause 19. System for ventilating at least one climate chamber according to one of the preceding clauses, wherein the system is accessible from the outside via a first intermediate chamber that is connected via an access gate with the climate chamber.

Claims

1. System (500) for ventilating at least one climate chamber, wherein the system may be built upon a base and comprises: a first air processing module (104) for processing air, wherein the air processing module (104) is provided with at least one of a temperature control module, a moisture control module, and/or a filter module; a floor structure 113 built upon the base; at least a first climate chamber (501) surrounded by at least one upstanding sidewall (101), by the floor structure (113), and by a ceiling structure (103), wherein the first climate chamber is substantially air tight; a ceiling plenum (102), formed in the ceiling structure (103), that is separated from the climate chamber by a ceiling (114), and that is connected to the climate chamber through at least one recess (108A) in the ceiling (114); wherein the floor structure (113) has a floor (205) that is provided with at least one recess (204) for air exhaust from the climate chamber (501), wherein the floor structure (113) comprises a floor plenum (206) that is separated from the climate chamber by the floor (205), wherein the floor plenum is connected to the climate chamber through the recess (204A), wherein the system further comprises a second climate chamber (502), separated from the first climate chamber (501) by at least one sidewall (503), wherein the second climate chamber is substantially air tight and has a second recess (204B) in the floor (205) for air exhaust from the second climate chamber and wherein the second climate chamber has a second recess (108B) in the ceiling for the supply of air to the second climate chamber, wherein a second air processing module (107B) for processing air is connected to the second recess in the ceiling, and wherein the second air processing module is arranged to process/condition air that differs from the first air processing module.

2. System for ventilating at least one climate chamber according to claim 1, further comprising a transport column, which connects the recess in the floor 205 with the ceiling plenum, preferably via a floor plenum.

3. System for ventilating at least one climate chamber according to claim 2, wherein the sidewall of the climate chamber separates the transport column from the climate chamber, wherein the transport column preferably has air conditioning elements, such as cooling elements.

4. System for ventilating at least one climate chamber according to claim 3 or 4, wherein a (minimal) width of the floor plenum extends over a significant, at least 50%, part of a (maximum) width of the climate chamber, wherein a direction of air flow from the exhaust to the transport column is primarily in the longitudinal direction of the floor plenum, and wherein a (minimal) width of the transport column extends over a significant, at least 50%, part of the (maximum) width of the climate chamber.

5. System for ventilating at least one climate chamber according to one of the preceding claims, wherein the recess in the floor is connected to an exhaust inlet of an exhaust device for exhausting air from the climate chamber and wherein the exhaust device has an exhaust outlet that is connected to the floor plenum.

6. System for ventilating at least one climate chamber according to one of the preceding claims, wherein the ceiling plenum has an inlet opening to supply fresh air to the ceiling plenum.

7. System for ventilating at least one climate chamber according to one of the preceding claims, wherein the system comprises a supply device 105 for supplying air 106 to the system via an inlet opening, preferably to the ceiling plenum 102 and/or to the climate chamber(s).

8. System for ventilating at least one climate chamber according to claim 7, wherein the supply device and the exhaust device each have a fan, wherein the system has a control module and wherein the control module is arranged to vary a flow rate of the fan of the exhaust device over time, and preferably keeps a flow rate of the fan of the supply device constant over time.

9. System for ventilating at least one climate chamber according to one of the preceding claims, wherein the floor of the floor structure has multiple, temporarily sealable, recesses that can form an air exhaust of the climate chamber.

10. System for ventilating at least one climate chamber according to any of the preceding claims, wherein the second climate chamber is included between the ceiling construction and floor construction and wherein the second climate chamber (926) is completely surrounded by the first climate chamber (907).

11. System for ventilating at least one climate chamber according to any of the preceding claims, wherein the second air processing module is arranged for processing air that is greater, for example cleaner or higher pressure, than the (first) air processing module.

12. System for ventilating at least one climate chamber according to any one of the preceding claims, wherein the floor structure comprises a floor plenum and wherein the second recess in the floor is connected to the floor plenum.

13. System for ventilating at least one climate chamber according to one of the preceding claims, wherein the system, particularly an air supply device, an air processing module, and an air exhaust device, is arranged to regulate pressure in the climate chamber, particularly in that the system is arranged to regulate air supply and/or air exhaust of a supply device and/or exhaust device.

14. System for ventilating at least one climate chamber according to one of the preceding claims, wherein the air processing module, an air supply device and/or air exhaust device are included in one of the ceiling plenum and/or floor plenum and wherein the ceiling plenum and/or the floor plenum further comprises at least one access point for physically accessing the floor plenum and/or ceiling plenum for maintenance.

15. System for ventilating at least one climate chamber according to one of the preceding claims, wherein the system is accessible from the outside via a first intermediate chamber that is connected via an access gate with the climate chamber.