[go: up one dir, main page]

WO2024099378A1 - Conformal-shielding packaging method and structure for substrate - Google Patents

Conformal-shielding packaging method and structure for substrate Download PDF

Info

Publication number
WO2024099378A1
WO2024099378A1 PCT/CN2023/130576 CN2023130576W WO2024099378A1 WO 2024099378 A1 WO2024099378 A1 WO 2024099378A1 CN 2023130576 W CN2023130576 W CN 2023130576W WO 2024099378 A1 WO2024099378 A1 WO 2024099378A1
Authority
WO
WIPO (PCT)
Prior art keywords
electronic modules
substrate
cutting
electromagnetic shielding
adhesive film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2023/130576
Other languages
French (fr)
Chinese (zh)
Inventor
洪胜平
林红宽
余财祥
周斌
葛恒东
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Vanchip Testing Technologies Co Ltd
Original Assignee
Beijing Vanchip Testing Technologies Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Vanchip Testing Technologies Co Ltd filed Critical Beijing Vanchip Testing Technologies Co Ltd
Publication of WO2024099378A1 publication Critical patent/WO2024099378A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H10W42/20
    • H10W74/01
    • H10W74/10

Definitions

  • the invention relates to a substrate conformal shielding packaging method, and also to a packaging structure realized by using the substrate conformal shielding packaging method, belonging to the technical field of semiconductor packaging.
  • conformal shielding is mainly used in the packaging of SIP (System In a Package) modules such as WiFi and Memory to isolate the interference between the internal circuit of the package and the external system.
  • SIP System In a Package
  • the industry mainly adopts magnetron sputtering (Sputter) for conformal shielding.
  • Sputter magnetron sputtering
  • this method uses half-cut plastic package, with less ground layer; the purchase of gradual plating machine and its auxiliary equipment is expensive, the production cost is high, and the process flow is complicated.
  • the primary technical problem to be solved by the present invention is to provide a substrate conformal shielding packaging method.
  • Another technical problem to be solved by the present invention is to provide a substrate conformal shielding packaging structure.
  • a substrate conformal shielding packaging method comprising:
  • the electronic modules after electromagnetic shielding are separated from the adhesive film and packaged separately.
  • a plurality of grounding posts are preset in the substrate, each of the electronic modules corresponds to at least one of the grounding posts, metal wires are connected to the grounding posts, and the metal wires are led out to the cutting paths corresponding to the electronic modules.
  • the adhesive film is cut into but not cut through.
  • the method of cutting the cutting path at least includes: mechanical cutting by a cutting knife or laser cutting by a laser beam.
  • performing electromagnetic shielding treatment on each of the electronic modules to form an electromagnetic shielding layer, and grounding the electromagnetic shielding layer comprises:
  • Metal material is electroplated or sputtered on the top and around the electronic module to form the electromagnetic shielding layer, and the electromagnetic shielding layer is made to contact with the exposed metal wires in the cutting path, so as to be grounded through the grounding column.
  • the step of separating the electromagnetically shielded electronic module from the adhesive film and packaging the module comprises:
  • Each of the electronic modules is separated from the flip film to be packaged separately.
  • the viscosity of the adhesive film is reduced by light or heat so that the viscosity of the adhesive film is lower than that of the flip film, thereby separating the plurality of electronic modules after electromagnetic shielding from the adhesive film on the carrier board.
  • the flip film is made of a light-curing material or a heat-curing material
  • the adhesive film is made of a light-curing material or a heat-curing material.
  • the cutting width of the cutting road is 150um to 500um.
  • a substrate conformal shielding packaging structure comprising:
  • a carrier plate a surface of which is provided with an adhesive film
  • a substrate is mounted on the adhesive film, and a plurality of electronic components are mounted on the substrate to form a plurality of electronic modules; wherein a cutting path is formed between two adjacent electronic modules, A plurality of grounding posts are preset in the substrate, each of the electronic modules corresponds to at least one of the grounding posts, a metal wire is connected to the grounding post, and the metal wire is led out to the cutting path corresponding to the electronic module;
  • An electromagnetic shielding layer coated on the surface of the plastic package body, and the electromagnetic shielding layer is in contact with the metal wire led out into the cutting path;
  • the flip-over film covers the electromagnetic shielding layer.
  • the substrate conformal shielding packaging method and structure provided in the embodiment of the present invention uses a carrier board to mount the plastic-sealed electronic module on the adhesive film of the carrier board 1.
  • PKG saw process stability improvement, process optimization and yield improvement
  • the metal plating of the electronic module is directly completed, and then the electronic module can be separated.
  • the electronic module does not need to be half-cut, the grounding is sufficient, and double-sided plastic sealing is not required, which simplifies the entire packaging process.
  • FIG1 is a flow chart of a substrate conformal shielding packaging method provided by an embodiment of the present invention.
  • FIG2 is a schematic diagram of a structure in which electronic components are mounted on a substrate to form an electronic module in an embodiment of the present invention
  • FIG3 is a schematic diagram of a structure for plastic-sealing an electronic module in an embodiment of the present invention.
  • FIG4 is a schematic structural diagram of mounting a plastic-sealed electronic module on a carrier board with an adhesive film in an embodiment of the present invention
  • FIG5 is a schematic structural diagram of cutting a plastic-sealed electronic module in an embodiment of the present invention.
  • FIG6 is a schematic diagram of a structure for performing electromagnetic shielding treatment on each electronic module in an embodiment of the present invention.
  • FIG7 is a schematic diagram of a structure in which a flip film is covered on top of a plurality of electronic modules in an embodiment of the present invention
  • FIG8 is a schematic diagram of a structure in which a plurality of electronic modules are separated from an adhesive film of a carrier board in an embodiment of the present invention
  • FIG. 9 is a schematic diagram of the structure of packaging a single electronic module in an embodiment of the present invention.
  • the substrate required for implementing the substrate conformal shielding packaging method includes: a carrier 1, an adhesive film 2, a substrate 3, an electronic component 4, a plastic package 5, an electromagnetic shielding layer 6, a flip film 7 and a cutting knife 30.
  • the specific implementation process is as follows:
  • a substrate conformal shielding packaging method provided by an embodiment of the present invention specifically includes steps S1 to S5:
  • multiple electronic modules 10 can be formed by mounting electronic components 4 (e.g., chips or components) on the surface of the substrate 3.
  • a cutting path 20 is formed between two adjacent electronic modules 10.
  • a plurality of grounding posts 31 are preset in the substrate 3, and each electronic module 10 corresponds to at least one grounding post 31.
  • a metal wire 32 is connected to the grounding post 31, and the metal wire 32 is led out to the cutting path 20 corresponding to the electronic module 10. Therefore, when the cutting is completed, the metal wire 32 will be exposed in the cutting path 20, so as to be connected to the electromagnetic shielding layer for electromagnetic signal shielding (described in detail below).
  • the types of the electronic components 4 can be adaptively adjusted as needed.
  • the multiple electronic components 4 can be the same, different, or partially the same and partially different, which is not specifically limited here.
  • S2 plastic-encapsulating a plurality of electronic modules 10, and mounting the plastic-encapsulated electronic modules 10 on a carrier board 1 with an adhesive film 2 attached thereto.
  • a plastic encapsulation material is filled on the surface of the substrate 3 so that the plastic encapsulation material completely covers each electronic module 10, thereby forming a plastic encapsulation layer 5.
  • the specific type of the plastic encapsulation material can be adaptively selected according to needs and is not limited herein.
  • the plastic encapsulation layer 5 formed after plastic encapsulation should have a set size.
  • the height of the plastic encapsulation layer 5 is 0.2 mm to 0.5 mm and completely covers the surface of the substrate 3, thereby ensuring the stability of the electronic module 10 after plastic encapsulation on the one hand and avoiding occupying too much space on the other hand.
  • the sealed electronic modules are mounted on a carrier board 1 with an adhesive film 2 attached thereto.
  • the component is used to contact the bearing surface (for example, the ground or the work surface);
  • the adhesive film 2 is a layer of film with a certain viscosity covering the carrier 1, and both sides of the adhesive film 2 are adhesive, so that one side is adhered to the carrier 1 and the other side is adhered to the plastic-sealed electronic module, so that the plastic-sealed electronic module is bonded to the carrier 1.
  • a cutting knife 30 is used to cut at a cutting path 20.
  • the cutting knife 30 needs to cut into the adhesive film 2 but not through the adhesive film 2, thereby separating a plurality of electronic modules 10.
  • the cutting width of the cutting path needs to be within a certain range to ensure that the cutting blade 30 can cut the metal wire 32 when cutting in the cutting path 20.
  • the cutting width of the cutting path is 150um to 500um, but is not limited to the specific range of the cutting path, and can be adaptively adjusted according to the actual layout form.
  • laser cutting using laser light may be used to replace mechanical cutting using the cutting blade 30.
  • a portion of the metal wire 32 introduced into the cutting path 20 needs to be cut off, so that the end of the metal wire 32 is exposed in the cutting path 20.
  • S4 Perform electromagnetic shielding treatment on each electronic module 10 to form an electromagnetic shielding layer 6, and ground the electromagnetic shielding layer 6.
  • a metal material is electroplated or sputtered on the top and around each electronic module 10 to form an electromagnetic shielding layer 6 (i.e., a metal layer).
  • an electromagnetic shielding layer 6 i.e., a metal layer.
  • the inner wall of the electromagnetic shielding layer 6 can contact the exposed metal wire 32 in the cutting path 20, thereby being grounded through the grounding column 31 to form an electromagnetic shielding effect.
  • grounding post 31 by presetting the grounding post 31 in the substrate 3 and coordinating the metal wire 32 to contact the electromagnetic shielding layer 6 to achieve grounding operation, not only the grounding method is simple, but also the grounding area is larger, which can effectively improve the electromagnetic shielding effect.
  • the grounding post 31 when the grounding post 31 is preset in the substrate 3, the bottom area of the grounding post 31 can be selected. The larger the bottom area, the better the electromagnetic shielding effect. The larger the value, the more sufficient the grounding is. It can be adaptively adjusted according to the grounding requirements.
  • the electromagnetically shielded electronic modules 10 need to be separated from the adhesive film 2 for separate packaging.
  • S51 Covering the top of the plurality of electronic modules 10 after electromagnetic shielding with a flip film 7 (as shown in FIG. 7 ).
  • the flip film 7 is made of a light-curing material or a heat-curing material
  • the adhesive film 2 is made of a light-curing material or a heat-curing material, but the specific materials of the flip film 7 and the adhesive film 2 are not limited and can be adaptively adjusted according to actual needs.
  • an embodiment of the present invention also provides a substrate conformal shielding packaging structure, including a carrier 1, an adhesive film 2, a substrate 3, an electronic component 4, a plastic package 5, an electromagnetic shielding layer 6 and a flip film 7.
  • an adhesive film 2 is provided on the surface of the carrier 1.
  • a substrate 3 is mounted on the adhesive film 2, and a plurality of electronic components 4 are mounted on the substrate 3 to form a plurality of electronic modules 10.
  • a cutting path 20 is formed between two adjacent electronic modules 10, and a plurality of grounding posts 31 are preset in the substrate 3.
  • Each electronic module 10 corresponds to at least one grounding post 31, and a metal wire 32 is connected to the grounding post 31, and the metal wire 32 is led out to the cutting path 20 corresponding to the electronic module 10.
  • a plastic encapsulation body 5 is filled on the substrate 3 to encapsulate a plurality of electronic modules 10.
  • An electromagnetic shielding layer 6 is coated on the surface of the plastic encapsulation body 5, and the electromagnetic shielding layer 3 is in contact with the metal wire 32 led out to the cutting path 20.
  • a flip film 7 covers the electromagnetic shielding layer 6.
  • the substrate conformal shielding packaging method and structure provided by the embodiment of the present invention uses the carrier board 1 so that the plastic-sealed electronic module 10 is mounted on the adhesive film 2 of the carrier board 1.
  • PKG saw process stability improvement, process optimization and yield improvement
  • the metal plating of the electronic module 10 is directly completed, and then the electronic module 10 can be separated.
  • the electronic module 10 does not need to be half-cut, the grounding is sufficient, and double-sided plastic packaging is not required, which simplifies the entire packaging process.

Landscapes

  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

Disclosed in the present invention are a conformal-shielding packaging method and structure for a substrate. The packaging method comprises the following steps: mounting a plurality of electronic elements on a substrate to form a plurality of electronic modules, wherein a cutting channel is formed between every two adjacent electronic modules; performing plastic packaging on the plurality of electronic modules, and mounting the plastically packaged electronic modules on a carrier plate to which an adhesive film is attached; performing cutting at the cutting channels to separate the plurality of electronic modules; performing electromagnetic shielding processing on each electronic module to form an electromagnetic shielding layer, and grounding the electromagnetic shielding layer; and separating the electromagnetically shielded electronic modules from the adhesive film, and performing packaging. In the packaging method, by using the carrier plate, the plastically packaged electronic modules are mounted on the adhesive film of the carrier plate, such that metal coating for the electronic modules is directly completed, and then the electronic modules are separated. During the process, half-dicing of the electronic modules is not required, sufficient grounding is achieved, and double-sided plastic packaging is not required, thereby simplifying the whole packaging process.

Description

基板共形屏蔽封装方法及结构Substrate conformal shielding packaging method and structure 技术领域Technical Field

本发明涉及一种基板共形屏蔽封装方法,同时也涉及利用该基板共形屏蔽封装方法实现的封装结构,属于半导体封装技术领域。The invention relates to a substrate conformal shielding packaging method, and also to a packaging structure realized by using the substrate conformal shielding packaging method, belonging to the technical field of semiconductor packaging.

背景技术Background technique

随着手机市场的发展,手机内部的空间越来越小,这就要求主板上的射频芯片往模块化集成化的方向发展。模块化的射频芯片由于之间电磁波干扰严重,影响其性能发挥,因此电磁干扰(简称为EMI)屏蔽技术将发挥越来越重要的作用。With the development of the mobile phone market, the space inside the mobile phone is getting smaller and smaller, which requires the RF chip on the motherboard to develop in the direction of modular integration. Modular RF chips have serious electromagnetic interference between them, which affects their performance, so electromagnetic interference (EMI) shielding technology will play an increasingly important role.

另一方面,共形屏蔽主要用于WiFi、Memory等SIP(System In a Package,系统级封装)模组的封装上,用来隔离封装内部电路与外部系统之间的干扰。目前,业内主要采取磁控溅射(Sputter)的方式进行共形屏蔽(Conformal shielding)。但是,这种方式采用塑封体半切,接地层比较少;购买渐镀机及其辅助设备价格昂贵,生产成本高,工艺流程复杂。On the other hand, conformal shielding is mainly used in the packaging of SIP (System In a Package) modules such as WiFi and Memory to isolate the interference between the internal circuit of the package and the external system. At present, the industry mainly adopts magnetron sputtering (Sputter) for conformal shielding. However, this method uses half-cut plastic package, with less ground layer; the purchase of gradual plating machine and its auxiliary equipment is expensive, the production cost is high, and the process flow is complicated.

发明内容Summary of the invention

本发明所要解决的首要技术问题在于提供一种基板共形屏蔽封装方法。The primary technical problem to be solved by the present invention is to provide a substrate conformal shielding packaging method.

本发明所要解决的另一技术问题在于提供一种基板共形屏蔽封装结构。Another technical problem to be solved by the present invention is to provide a substrate conformal shielding packaging structure.

为实现上述技术目的,本发明采用以下技术方案:In order to achieve the above technical objectives, the present invention adopts the following technical solutions:

根据本发明实施例的第一方面,提供一种基板共形屏蔽封装方法,包括:According to a first aspect of an embodiment of the present invention, a substrate conformal shielding packaging method is provided, comprising:

在基板上贴装多个电子元件,以形成多个电子模组;其中,相邻两个电子模组之间形成切割道;Mounting a plurality of electronic components on a substrate to form a plurality of electronic modules, wherein a cutting path is formed between two adjacent electronic modules;

将所述多个电子模组进行塑封,并将塑封后的电子模组贴装在附有粘合膜的载板上;Plastic-sealing the plurality of electronic modules, and mounting the plastic-sealed electronic modules on a carrier board with an adhesive film;

在所述切割道处进行切割,以将多个所述电子模组分隔开;Performing cutting at the cutting streets to separate the plurality of electronic modules;

对各个所述电子模组进行电磁屏蔽处理,形成电磁屏蔽层,并将所 述电磁屏蔽层接地;Perform electromagnetic shielding treatment on each of the electronic modules to form an electromagnetic shielding layer, and The electromagnetic shielding layer is grounded;

将电磁屏蔽后的所述电子模组从所述粘合膜上分离,并分别进行封装。The electronic modules after electromagnetic shielding are separated from the adhesive film and packaged separately.

其中较优地,所述基板内预设有多个接地柱,每一个所述电子模组均对应至少一个所述接地柱,所述接地柱上连接有金属线,且所述金属线引出至所述电子模组对应的切割道内。Preferably, a plurality of grounding posts are preset in the substrate, each of the electronic modules corresponds to at least one of the grounding posts, metal wires are connected to the grounding posts, and the metal wires are led out to the cutting paths corresponding to the electronic modules.

其中较优地,在所述切割道处进行切割时,切入且不切透所述粘合膜。Preferably, when cutting is performed at the cutting street, the adhesive film is cut into but not cut through.

其中较优地,对所述切割道处进行切割的方式至少包括:通过切割刀进行机械切割或通过镭射光线进行镭射切割。Preferably, the method of cutting the cutting path at least includes: mechanical cutting by a cutting knife or laser cutting by a laser beam.

其中较优地,所述对各个所述电子模组进行电磁屏蔽处理,形成电磁屏蔽层,并将所述电磁屏蔽层接地包括:Preferably, performing electromagnetic shielding treatment on each of the electronic modules to form an electromagnetic shielding layer, and grounding the electromagnetic shielding layer comprises:

在所述电子模组的顶部及四周电镀或溅射金属材料,以形成所述电磁屏蔽层,并使得所述电磁屏蔽层与切割道内裸露的金属线相接触,从而通过所述接地柱进行接地。Metal material is electroplated or sputtered on the top and around the electronic module to form the electromagnetic shielding layer, and the electromagnetic shielding layer is made to contact with the exposed metal wires in the cutting path, so as to be grounded through the grounding column.

其中较优地,所述将电磁屏蔽后的所述电子模组从所述粘合膜上分离,并进行封装包括:Preferably, the step of separating the electromagnetically shielded electronic module from the adhesive film and packaging the module comprises:

在电磁屏蔽后的多个所述电子模组顶部覆盖翻贴膜,以将电磁屏蔽后的多个所述电子模组共同从载板上的粘合膜上分离;Covering the top of the plurality of electronic modules after electromagnetic shielding with flip films to separate the plurality of electronic modules after electromagnetic shielding from the adhesive film on the carrier board;

将各个所述电子模组分别从所述翻贴膜上分离,以分别进行封装。Each of the electronic modules is separated from the flip film to be packaged separately.

其中较优地,覆盖翻贴膜后,通过光、热方式降低所述粘合膜的黏度,以使得所述粘合膜的黏度低于所述翻贴膜的黏度,从而将电磁屏蔽后的多个所述电子模组共同从载板上的粘合膜上分离。Preferably, after covering with the flip film, the viscosity of the adhesive film is reduced by light or heat so that the viscosity of the adhesive film is lower than that of the flip film, thereby separating the plurality of electronic modules after electromagnetic shielding from the adhesive film on the carrier board.

其中较优地,所述翻贴膜由光固化材料或热固化材料制成,所述粘合膜由光固化材料或热固化材料制成。Preferably, the flip film is made of a light-curing material or a heat-curing material, and the adhesive film is made of a light-curing material or a heat-curing material.

其中较优地,所述切割道的切割宽度为150um~500um。Preferably, the cutting width of the cutting road is 150um to 500um.

根据本发明实施例的第二方面,提供一种基板共形屏蔽封装结构,包括:According to a second aspect of an embodiment of the present invention, there is provided a substrate conformal shielding packaging structure, comprising:

载板,所述载板的表面设有粘合膜;A carrier plate, a surface of which is provided with an adhesive film;

基板,贴装于所述粘合膜上,且所述基板上贴装有多个电子元件,以形成多个电子模组;其中,相邻两个所述电子模组之间形成切割道, 所述基板内预设有多个接地柱,每一个所述电子模组均对应至少一个所述接地柱,所述接地柱上连接有金属线,且所述金属线引出至所述电子模组对应的切割道内;A substrate is mounted on the adhesive film, and a plurality of electronic components are mounted on the substrate to form a plurality of electronic modules; wherein a cutting path is formed between two adjacent electronic modules, A plurality of grounding posts are preset in the substrate, each of the electronic modules corresponds to at least one of the grounding posts, a metal wire is connected to the grounding post, and the metal wire is led out to the cutting path corresponding to the electronic module;

塑封体,填充于所述基板上,以塑封所述多个电子模组;A plastic sealing body filled on the substrate to plastic seal the multiple electronic modules;

电磁屏蔽层,包覆在所述塑封体的表面,且所述电磁屏蔽层与引出至所述切割道内的金属线相接触;An electromagnetic shielding layer, coated on the surface of the plastic package body, and the electromagnetic shielding layer is in contact with the metal wire led out into the cutting path;

翻贴膜,覆盖在所述电磁屏蔽层上。The flip-over film covers the electromagnetic shielding layer.

与现有技术相比较,本发明实施例所提供的基板共形屏蔽封装方法及结构,通过使用载板的方式,使得塑封后电子模组贴装在载板1的粘合膜上,完成PKG saw(工艺稳定性提升,制程优化及良率的改善)后,直接完成电子模组的金属镀层,然后分离电子模组即可。在此过程中,电子模组不需要半切,接地充分,不需要双面塑封,简化了整个封装流程。Compared with the prior art, the substrate conformal shielding packaging method and structure provided in the embodiment of the present invention uses a carrier board to mount the plastic-sealed electronic module on the adhesive film of the carrier board 1. After completing PKG saw (process stability improvement, process optimization and yield improvement), the metal plating of the electronic module is directly completed, and then the electronic module can be separated. In this process, the electronic module does not need to be half-cut, the grounding is sufficient, and double-sided plastic sealing is not required, which simplifies the entire packaging process.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1为本发明实施例提供的一种基板共形屏蔽封装方法的流程图;FIG1 is a flow chart of a substrate conformal shielding packaging method provided by an embodiment of the present invention;

图2为本发明实施例中,在基板上贴装电子元件以形成电子模组的结构示意图;FIG2 is a schematic diagram of a structure in which electronic components are mounted on a substrate to form an electronic module in an embodiment of the present invention;

图3为本发明实施例中,对电子模组进行塑封的结构示意图;FIG3 is a schematic diagram of a structure for plastic-sealing an electronic module in an embodiment of the present invention;

图4为本发明实施例中,将塑封后的电子模组贴装在附有粘合膜的载板上的结构示意图;FIG4 is a schematic structural diagram of mounting a plastic-sealed electronic module on a carrier board with an adhesive film in an embodiment of the present invention;

图5为本发明实施例中,对塑封后的电子模组进行切割的结构示意图;FIG5 is a schematic structural diagram of cutting a plastic-sealed electronic module in an embodiment of the present invention;

图6为本发明实施例中,对各个电子模组进行电磁屏蔽处理的结构示意图;FIG6 is a schematic diagram of a structure for performing electromagnetic shielding treatment on each electronic module in an embodiment of the present invention;

图7为本发明实施例中,在多个电子模组顶部覆盖翻贴膜的结构示意图;FIG7 is a schematic diagram of a structure in which a flip film is covered on top of a plurality of electronic modules in an embodiment of the present invention;

图8为本发明实施例中,将多个电子模组共同从载板的粘合膜上分离的结构示意图;FIG8 is a schematic diagram of a structure in which a plurality of electronic modules are separated from an adhesive film of a carrier board in an embodiment of the present invention;

图9为本发明实施例中,单个电子模组进行封装的结构示意图。FIG. 9 is a schematic diagram of the structure of packaging a single electronic module in an embodiment of the present invention.

具体实施方式Detailed ways

下面结合附图和具体实施例对本发明的技术内容进行详细具体的 说明。The technical content of the present invention is described in detail below with reference to the accompanying drawings and specific embodiments. illustrate.

在本发明的一个实施例中,实施基板共形屏蔽封装方法所需的基材包括:载板1、粘合膜2、基板3、电子元件4、塑封体5、电磁屏蔽层6、翻贴膜7以及切割刀30。具体实施过程如下:In one embodiment of the present invention, the substrate required for implementing the substrate conformal shielding packaging method includes: a carrier 1, an adhesive film 2, a substrate 3, an electronic component 4, a plastic package 5, an electromagnetic shielding layer 6, a flip film 7 and a cutting knife 30. The specific implementation process is as follows:

如图1所示,本发明实施例提供的一种基板共形屏蔽封装方法,具体包括步骤S1~S5:As shown in FIG1 , a substrate conformal shielding packaging method provided by an embodiment of the present invention specifically includes steps S1 to S5:

S1:在基板3上贴装多个电子元件4,以形成多个电子模组10。S1: mounting a plurality of electronic components 4 on a substrate 3 to form a plurality of electronic modules 10 .

具体的,如图2所示,当基板3预制成型后,通过在基板3的表面贴装电子元件4(例如:芯片或元器件等),从而能够形成多个电子模组10(如图2中虚线所示区域)。其中,相邻两个电子模组10之间形成切割道20(如图2中点划线所示区域)。Specifically, as shown in FIG2 , after the substrate 3 is prefabricated, multiple electronic modules 10 (indicated by the dotted line in FIG2 ) can be formed by mounting electronic components 4 (e.g., chips or components) on the surface of the substrate 3. A cutting path 20 (indicated by the dotted line in FIG2 ) is formed between two adjacent electronic modules 10.

此外,本实施例中,基板3内预设有多个接地柱31,每一个电子模组10均对应至少一个接地柱31,接地柱31上连接有金属线32,且金属线32引出至电子模组10对应的切割道20内。由此,当切割完成后,金属线32会裸露在切割道20内,以用于与电磁屏蔽层连接进行电磁信号屏蔽(下文进行详细说明)。In addition, in this embodiment, a plurality of grounding posts 31 are preset in the substrate 3, and each electronic module 10 corresponds to at least one grounding post 31. A metal wire 32 is connected to the grounding post 31, and the metal wire 32 is led out to the cutting path 20 corresponding to the electronic module 10. Therefore, when the cutting is completed, the metal wire 32 will be exposed in the cutting path 20, so as to be connected to the electromagnetic shielding layer for electromagnetic signal shielding (described in detail below).

上述电子元件4的种类可根据需要进行适应性调整,例如:多个电子元件4可以均相同,也可以均不同,还可以部分相同部分不同,在此不对其进行具体限定。The types of the electronic components 4 can be adaptively adjusted as needed. For example, the multiple electronic components 4 can be the same, different, or partially the same and partially different, which is not specifically limited here.

S2:将多个电子模组10进行塑封,并将塑封后的电子模组10贴装在附有粘合膜2的载板1上。S2: plastic-encapsulating a plurality of electronic modules 10, and mounting the plastic-encapsulated electronic modules 10 on a carrier board 1 with an adhesive film 2 attached thereto.

具体的,如图3所示,当多个电子元件4分别贴装在基板3的不同区域以形成多个电子模组10后,利用塑封材料填充于基板3的表面,使得塑封材料完全覆盖各个电子模组10,从而形成塑封层5。其中,塑封材料的具体类型可根据需要进行适应性选择,在此不对其进行限定。Specifically, as shown in FIG3 , after a plurality of electronic components 4 are mounted on different regions of a substrate 3 to form a plurality of electronic modules 10, a plastic encapsulation material is filled on the surface of the substrate 3 so that the plastic encapsulation material completely covers each electronic module 10, thereby forming a plastic encapsulation layer 5. The specific type of the plastic encapsulation material can be adaptively selected according to needs and is not limited herein.

此外,经过塑封后所形成的塑封层5应具有设定尺寸,本实施例中,该塑封层5的高度为0.2mm~0.5mm,并完全覆盖基板3的表面,从而一方面能够保证塑封后电子模组10的稳定性,另一方面能够避免占用过多的空间。In addition, the plastic encapsulation layer 5 formed after plastic encapsulation should have a set size. In this embodiment, the height of the plastic encapsulation layer 5 is 0.2 mm to 0.5 mm and completely covers the surface of the substrate 3, thereby ensuring the stability of the electronic module 10 after plastic encapsulation on the one hand and avoiding occupying too much space on the other hand.

如图4所示,当完成对多个电子模组10的塑封后,将塑封后的电子模组整体贴装在附有粘合膜2的载板1上。其中,载板1作为底部承载 部件,用于与承载面相接触(例如:地面或工作面);粘合膜2为覆盖在载板1上的一层具有一定黏性的膜,该粘合膜2的双面均具有黏性,从而使得一面与载板1粘贴,另一面与塑封后的电子模组粘贴,以将塑封后的电子模组黏合在载板1上。As shown in FIG4 , after the multiple electronic modules 10 are sealed, the sealed electronic modules are mounted on a carrier board 1 with an adhesive film 2 attached thereto. The component is used to contact the bearing surface (for example, the ground or the work surface); the adhesive film 2 is a layer of film with a certain viscosity covering the carrier 1, and both sides of the adhesive film 2 are adhesive, so that one side is adhered to the carrier 1 and the other side is adhered to the plastic-sealed electronic module, so that the plastic-sealed electronic module is bonded to the carrier 1.

S3:在切割道20处进行切割,以将多个电子模组10分隔开。S3 : Cutting is performed at the cutting streets 20 to separate the plurality of electronic modules 10 .

具体的,如图5所示,本实施例中,当塑封后的电子模组10贴装在附有粘合膜2的载板1上后,利用切割刀30在切割道20处进行切割,在切割时,需要使得切割刀30切入粘合膜2但不切透粘合膜2,从而将多个电子模组10分隔开。Specifically, as shown in FIG. 5 , in this embodiment, after the plastic-sealed electronic module 10 is mounted on a carrier board 1 with an adhesive film 2, a cutting knife 30 is used to cut at a cutting path 20. During cutting, the cutting knife 30 needs to cut into the adhesive film 2 but not through the adhesive film 2, thereby separating a plurality of electronic modules 10.

可以理解的是,由于在步骤S1中金属线32引出至电子模组10对应的切割道20内,因此,当切割刀30在切割道20内进行切割后,会将引入到切割道20内的金属线32切断一部分,从而使得金属线32的端部裸露在切割道20内。由此,切割道的切割宽度需要在一定的范围内,以保证切割刀30在切割道20内进行切割时能够切到金属线32,本实施例中,切割道的切割宽度为150um~500um,但不限定于切割道的具体范围,具体可根据实际布局形式进行适应性调整。It is understandable that, since the metal wire 32 is led out to the cutting path 20 corresponding to the electronic module 10 in step S1, when the cutting blade 30 cuts in the cutting path 20, a portion of the metal wire 32 introduced into the cutting path 20 will be cut off, so that the end of the metal wire 32 is exposed in the cutting path 20. Therefore, the cutting width of the cutting path needs to be within a certain range to ensure that the cutting blade 30 can cut the metal wire 32 when cutting in the cutting path 20. In this embodiment, the cutting width of the cutting path is 150um to 500um, but is not limited to the specific range of the cutting path, and can be adaptively adjusted according to the actual layout form.

此外,可以理解的是,在另一实施例中,也可以采用镭射光线进行镭射切割的方式替换利用切割刀30进行机械切割的方式。但无论哪种切割方式,均需要将引入到切割道20内的金属线32切断一部分,从而使得金属线32的端部裸露在切割道20内。In addition, it is understood that in another embodiment, laser cutting using laser light may be used to replace mechanical cutting using the cutting blade 30. However, no matter which cutting method is used, a portion of the metal wire 32 introduced into the cutting path 20 needs to be cut off, so that the end of the metal wire 32 is exposed in the cutting path 20.

S4:对各个电子模组10进行电磁屏蔽处理,形成电磁屏蔽层6,并将电磁屏蔽层6接地。S4: Perform electromagnetic shielding treatment on each electronic module 10 to form an electromagnetic shielding layer 6, and ground the electromagnetic shielding layer 6.

具体的,如图6所示,当各个电子模组10相互隔开后,在各个电子模组10的顶部及四周电镀或溅射金属材料,以形成电磁屏蔽层6(即金属层)。并且,由于在步骤S3中金属线32的端部裸露在切割道20内,因此,该电磁屏蔽层6的内壁能够与切割道20内裸露的金属线32相接触,从而通过接地柱31进行接地,以形成电磁屏蔽效果。Specifically, as shown in FIG6 , after each electronic module 10 is separated from each other, a metal material is electroplated or sputtered on the top and around each electronic module 10 to form an electromagnetic shielding layer 6 (i.e., a metal layer). In addition, since the end of the metal wire 32 is exposed in the cutting path 20 in step S3, the inner wall of the electromagnetic shielding layer 6 can contact the exposed metal wire 32 in the cutting path 20, thereby being grounded through the grounding column 31 to form an electromagnetic shielding effect.

可以理解的是,本实施例中,通过在基板3内预设接地柱31,并配合金属线32与电磁屏蔽层6相接触的方式实现接地操作,不仅接地方式简单,而且接地面积更大,能够有效提高电磁屏蔽效果。此外,在基板3内预设接地柱31时,可对接地柱31的底部面积进行选择,底部面积越 大则接地越充分,具体可根据接地需求进行适应性调整。It can be understood that in this embodiment, by presetting the grounding post 31 in the substrate 3 and coordinating the metal wire 32 to contact the electromagnetic shielding layer 6 to achieve grounding operation, not only the grounding method is simple, but also the grounding area is larger, which can effectively improve the electromagnetic shielding effect. In addition, when the grounding post 31 is preset in the substrate 3, the bottom area of the grounding post 31 can be selected. The larger the bottom area, the better the electromagnetic shielding effect. The larger the value, the more sufficient the grounding is. It can be adaptively adjusted according to the grounding requirements.

S5:将电磁屏蔽后的电子模组从粘合膜上分离,并分别进行封装。S5: Separating the electromagnetically shielded electronic modules from the adhesive film and packaging them separately.

具体的,如图7所示,当完成对各个电子模组10的电磁屏蔽处理后,需要将电磁屏蔽后的电子模组10从粘合膜2上分离,以分别进行封装。Specifically, as shown in FIG. 7 , after the electromagnetic shielding process is completed for each electronic module 10 , the electromagnetically shielded electronic modules 10 need to be separated from the adhesive film 2 for separate packaging.

本实施例中,具体通过步骤S51~S53实现:In this embodiment, the following is specifically achieved through steps S51 to S53:

S51:在电磁屏蔽后的多个电子模组10的顶部覆盖翻贴膜7(如图7所示)。S51: Covering the top of the plurality of electronic modules 10 after electromagnetic shielding with a flip film 7 (as shown in FIG. 7 ).

S52:覆盖翻贴膜7后,通过光、热方式降低粘合膜2的黏度,以使得粘合膜2的黏度低于翻贴膜7的黏度,从而将电磁屏蔽后的多个电子模组10共同从载板的粘合膜2上分离(如图8所述)。S52: After covering with the flip film 7, the viscosity of the adhesive film 2 is reduced by light or heat so that the viscosity of the adhesive film 2 is lower than that of the flip film 7, thereby separating the multiple electronic modules 10 after electromagnetic shielding from the adhesive film 2 of the carrier board (as shown in FIG. 8 ).

S53:将各个电子模组10分别从翻贴膜7上分离,以分别进行封装(如图9所示)。S53: Separate each electronic module 10 from the flip film 7 to package them separately (as shown in FIG. 9 ).

本实施例中,翻贴膜7由光固化材料或热固化材料制成,粘合膜2由光固化材料或热固化材料制成,但不限定于翻贴膜7和粘合膜2的具体材质,可根据实际需求进行适应性调整。In this embodiment, the flip film 7 is made of a light-curing material or a heat-curing material, and the adhesive film 2 is made of a light-curing material or a heat-curing material, but the specific materials of the flip film 7 and the adhesive film 2 are not limited and can be adaptively adjusted according to actual needs.

可以理解的是,本实施例中采用翻贴膜7从粘合膜2上分离电子模组10,仅为一种较优的实时方式,在其他实施例中,也可以采用其他工艺手段将电子模组10从粘合膜2上分离,在此不做具体说明。It is understandable that the use of the flip film 7 to separate the electronic module 10 from the adhesive film 2 in this embodiment is only a preferred real-time method. In other embodiments, other process means can also be used to separate the electronic module 10 from the adhesive film 2, which will not be described in detail here.

在上述基板共形屏蔽封装方法的基础上,本发明实施例还提供一种基板共形屏蔽封装结构,包括载板1、粘合膜2、基板3、电子元件4、塑封体5、电磁屏蔽层6以及翻贴膜7。Based on the above-mentioned substrate conformal shielding packaging method, an embodiment of the present invention also provides a substrate conformal shielding packaging structure, including a carrier 1, an adhesive film 2, a substrate 3, an electronic component 4, a plastic package 5, an electromagnetic shielding layer 6 and a flip film 7.

具体的,如图7所示,载板1的表面设有粘合膜2。基板3贴装于粘合膜2上,且基板3上贴装有多个电子元件4,以形成多个电子模组10。其中,相邻两个电子模组10之间形成切割道20,基板3内预设有多个接地柱31,每一个电子模组10均对应至少一个接地柱31,接地柱31上连接有金属线32,且金属线32引出至电子模组10对应的切割道20内。塑封体5填充于基板3上,以塑封多个电子模组10。电磁屏蔽层6包覆在塑封体5的表面,且电磁屏蔽层3与引出至切割道20内的金属线32相接触。翻贴膜7覆盖在电磁屏蔽层6上。Specifically, as shown in FIG7 , an adhesive film 2 is provided on the surface of the carrier 1. A substrate 3 is mounted on the adhesive film 2, and a plurality of electronic components 4 are mounted on the substrate 3 to form a plurality of electronic modules 10. A cutting path 20 is formed between two adjacent electronic modules 10, and a plurality of grounding posts 31 are preset in the substrate 3. Each electronic module 10 corresponds to at least one grounding post 31, and a metal wire 32 is connected to the grounding post 31, and the metal wire 32 is led out to the cutting path 20 corresponding to the electronic module 10. A plastic encapsulation body 5 is filled on the substrate 3 to encapsulate a plurality of electronic modules 10. An electromagnetic shielding layer 6 is coated on the surface of the plastic encapsulation body 5, and the electromagnetic shielding layer 3 is in contact with the metal wire 32 led out to the cutting path 20. A flip film 7 covers the electromagnetic shielding layer 6.

综上所述,本发明实施例提供的基板共形屏蔽封装方法及结构,通过使用载板1的方式,使得塑封后电子模组10贴装在载板1的粘合膜2 上,完成PKG saw(工艺稳定性提升,制程优化及良率的改善)后,直接完成电子模组10的金属镀层,然后分离电子模组10即可。在此过程中,电子模组10不需要半切,接地充分,不需要双面塑封,简化了整个封装流程。In summary, the substrate conformal shielding packaging method and structure provided by the embodiment of the present invention uses the carrier board 1 so that the plastic-sealed electronic module 10 is mounted on the adhesive film 2 of the carrier board 1. After completing PKG saw (process stability improvement, process optimization and yield improvement), the metal plating of the electronic module 10 is directly completed, and then the electronic module 10 can be separated. In this process, the electronic module 10 does not need to be half-cut, the grounding is sufficient, and double-sided plastic packaging is not required, which simplifies the entire packaging process.

上面对本发明所提供的基板共形屏蔽封装方法及结构进行了详细的说明。对本领域的一般技术人员而言,在不背离本发明实质内容的前提下对它所做的任何显而易见的改动,都将构成对本发明专利权的侵犯,将承担相应的法律责任。 The above is a detailed description of the substrate conformal shielding packaging method and structure provided by the present invention. For those skilled in the art, any obvious changes made to it without departing from the essence of the present invention will constitute an infringement of the patent right of the present invention and will bear corresponding legal responsibilities.

Claims (10)

一种基板共形屏蔽封装方法,其特征在于包括如下步骤:A substrate conformal shielding packaging method, characterized by comprising the following steps: 在基板上贴装多个电子元件,以形成多个电子模组;其中,相邻两个电子模组之间形成切割道;Mounting a plurality of electronic components on a substrate to form a plurality of electronic modules, wherein a cutting path is formed between two adjacent electronic modules; 将所述多个电子模组进行塑封,并将塑封后的电子模组贴装在附有粘合膜的载板上;Plastic-sealing the plurality of electronic modules, and mounting the plastic-sealed electronic modules on a carrier board with an adhesive film; 在所述切割道处进行切割,以将多个所述电子模组分隔开;Performing cutting at the cutting streets to separate the plurality of electronic modules; 对各个所述电子模组进行电磁屏蔽处理,形成电磁屏蔽层,并将所述电磁屏蔽层接地;Performing electromagnetic shielding treatment on each of the electronic modules to form an electromagnetic shielding layer, and grounding the electromagnetic shielding layer; 将电磁屏蔽后的所述电子模组从所述粘合膜上分离,并分别进行封装。The electronic modules after electromagnetic shielding are separated from the adhesive film and packaged separately. 如权利要求1所述的基板共形屏蔽封装方法,其特征在于:The substrate conformal shielding packaging method according to claim 1, characterized in that: 所述基板内预设有多个接地柱,每一个所述电子模组均对应至少一个所述接地柱,所述接地柱上连接有金属线,且所述金属线引出至所述电子模组对应的切割道内。A plurality of grounding posts are preset in the substrate, and each of the electronic modules corresponds to at least one of the grounding posts. Metal wires are connected to the grounding posts, and the metal wires are led out to the cutting paths corresponding to the electronic modules. 如权利要求1所述的基板共形屏蔽封装方法,其特征在于:The substrate conformal shielding packaging method according to claim 1, characterized in that: 在所述切割道处进行切割时,切入且不切透所述粘合膜。When cutting at the dicing street, the adhesive film is cut into but not through. 如权利要求1所述的基板共形屏蔽封装方法,其特征在于:The substrate conformal shielding packaging method according to claim 1, characterized in that: 对所述切割道处进行切割的方式至少包括:通过切割刀进行机械切割或通过镭射光线进行镭射切割。The method of cutting the cutting path at least includes: mechanical cutting by a cutting knife or laser cutting by a laser beam. 如权利要求2所述的基板共形屏蔽封装方法,其特征在于对各个所述电子模组进行电磁屏蔽处理,形成电磁屏蔽层,并将所述电磁屏蔽层接地包括:The substrate conformal shielding packaging method according to claim 2, characterized in that performing electromagnetic shielding treatment on each of the electronic modules to form an electromagnetic shielding layer, and grounding the electromagnetic shielding layer comprises: 在所述电子模组的顶部及四周电镀或溅射金属材料,以形成所述电磁屏蔽层,并使得所述电磁屏蔽层与切割道内裸露的金属线相接触,从而通过所述接地柱进行接地。Metal material is electroplated or sputtered on the top and around the electronic module to form the electromagnetic shielding layer, and the electromagnetic shielding layer is made to contact with the exposed metal wires in the cutting path, so as to be grounded through the grounding column. 如权利要求1所述的基板共形屏蔽封装方法,其特征在于所述将电磁屏蔽后的所述电子模组从所述粘合膜上分离,并进行封装包括:The substrate conformal shielding packaging method according to claim 1, characterized in that the step of separating the electromagnetically shielded electronic module from the adhesive film and packaging the module comprises: 在电磁屏蔽后的多个所述电子模组顶部覆盖翻贴膜,以将电磁屏蔽后的多个所述电子模组共同从载板的粘合膜上分离; Covering the top of the plurality of electronic modules after electromagnetic shielding with flip films to separate the plurality of electronic modules after electromagnetic shielding from the adhesive film of the carrier board; 将各个所述电子模组分别从所述翻贴膜上分离,以分别进行封装。Each of the electronic modules is separated from the flip film to be packaged separately. 如权利要求6所述的基板共形屏蔽封装方法,其特征在于:The substrate conformal shielding packaging method according to claim 6, characterized in that: 覆盖翻贴膜后,通过光、热方式降低所述粘合膜的黏度,以使得所述粘合膜的黏度低于所述翻贴膜的黏度,从而将电磁屏蔽后的多个所述电子模组共同从载板上的粘合膜上分离。After covering with the flip film, the viscosity of the adhesive film is reduced by light or heat so that the viscosity of the adhesive film is lower than that of the flip film, thereby separating the multiple electronic modules after electromagnetic shielding from the adhesive film on the carrier board. 如权利要求6所述的基板共形屏蔽封装方法,其特征在于:The substrate conformal shielding packaging method according to claim 6, characterized in that: 所述翻贴膜由光固化材料或热固化材料制成,所述粘合膜由光固化材料或热固化材料制成。The flip-over film is made of a light-curing material or a heat-curing material, and the adhesive film is made of a light-curing material or a heat-curing material. 如权利要求1~8中任意一项所述的基板共形屏蔽封装方法,其特征在于:The substrate conformal shielding packaging method according to any one of claims 1 to 8, characterized in that: 所述切割道的切割宽度为150um~500um。The cutting width of the cutting road is 150um to 500um. 一种基板共形屏蔽封装结构,其特征在于包括:A substrate conformal shielding packaging structure, characterized by comprising: 载板,所述载板的表面设有粘合膜;A carrier plate, a surface of which is provided with an adhesive film; 基板,贴装于所述粘合膜上,且所述基板上贴装有多个电子元件,以形成多个电子模组;其中,相邻两个所述电子模组之间形成切割道,所述基板内预设有多个接地柱,每一个所述电子模组均对应至少一个所述接地柱,所述接地柱上连接有金属线,且所述金属线引出至所述电子模组对应的切割道内;A substrate is mounted on the adhesive film, and a plurality of electronic components are mounted on the substrate to form a plurality of electronic modules; wherein a cutting path is formed between two adjacent electronic modules, a plurality of grounding posts are preset in the substrate, each of the electronic modules corresponds to at least one grounding post, a metal wire is connected to the grounding post, and the metal wire is led out to the cutting path corresponding to the electronic module; 塑封体,填充于所述基板上,以塑封所述多个电子模组;A plastic sealing body filled on the substrate to plastic seal the multiple electronic modules; 电磁屏蔽层,包覆在所述塑封体的表面,且所述电磁屏蔽层与引出至所述切割道内的金属线相接触;An electromagnetic shielding layer, coated on the surface of the plastic package body, and the electromagnetic shielding layer is in contact with the metal wire led out into the cutting path; 翻贴膜,覆盖在所述电磁屏蔽层上。 The flip-over film covers the electromagnetic shielding layer.
PCT/CN2023/130576 2022-11-08 2023-11-08 Conformal-shielding packaging method and structure for substrate Ceased WO2024099378A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202211394172.2A CN115763275A (en) 2022-11-08 2022-11-08 Substrate conformal shielding packaging method and structure
CN202211394172.2 2022-11-08

Publications (1)

Publication Number Publication Date
WO2024099378A1 true WO2024099378A1 (en) 2024-05-16

Family

ID=85368284

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2023/130576 Ceased WO2024099378A1 (en) 2022-11-08 2023-11-08 Conformal-shielding packaging method and structure for substrate

Country Status (2)

Country Link
CN (1) CN115763275A (en)
WO (1) WO2024099378A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118695567A (en) * 2024-06-04 2024-09-24 维沃移动通信有限公司 Shielding cover and manufacturing method thereof, and electronic equipment

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115763275A (en) * 2022-11-08 2023-03-07 北京唯捷创芯精测科技有限责任公司 Substrate conformal shielding packaging method and structure

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090194851A1 (en) * 2008-02-05 2009-08-06 Chi-Tsung Chiu Semiconductor device packages with electromagnetic interference shielding
US20120300412A1 (en) * 2011-05-25 2012-11-29 In-Sang Song Memory Device and Fabricating Method Thereof
CN108538813A (en) * 2017-03-02 2018-09-14 艾马克科技公司 Semiconductor packages, semiconductor package and the method for manufacturing semiconductor packages
CN109585421A (en) * 2017-09-29 2019-04-05 Qorvo美国公司 Two-sided module with electromagnetic shielding
CN115763275A (en) * 2022-11-08 2023-03-07 北京唯捷创芯精测科技有限责任公司 Substrate conformal shielding packaging method and structure

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090194851A1 (en) * 2008-02-05 2009-08-06 Chi-Tsung Chiu Semiconductor device packages with electromagnetic interference shielding
US20120300412A1 (en) * 2011-05-25 2012-11-29 In-Sang Song Memory Device and Fabricating Method Thereof
CN108538813A (en) * 2017-03-02 2018-09-14 艾马克科技公司 Semiconductor packages, semiconductor package and the method for manufacturing semiconductor packages
CN109585421A (en) * 2017-09-29 2019-04-05 Qorvo美国公司 Two-sided module with electromagnetic shielding
CN115763275A (en) * 2022-11-08 2023-03-07 北京唯捷创芯精测科技有限责任公司 Substrate conformal shielding packaging method and structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118695567A (en) * 2024-06-04 2024-09-24 维沃移动通信有限公司 Shielding cover and manufacturing method thereof, and electronic equipment

Also Published As

Publication number Publication date
CN115763275A (en) 2023-03-07

Similar Documents

Publication Publication Date Title
WO2024099378A1 (en) Conformal-shielding packaging method and structure for substrate
US8368185B2 (en) Semiconductor device packages with electromagnetic interference shielding
US8178956B2 (en) Integrated circuit package system for shielding electromagnetic interference
US11024585B2 (en) Integrated circuit packaging system with shielding and method of manufacture thereof
US8030750B2 (en) Semiconductor device packages with electromagnetic interference shielding
US10381312B2 (en) Semiconductor package and method of manufacturing the same
US7218001B2 (en) Reduced footprint packaged microelectronic components and methods for manufacturing such microelectronic components
TWI387070B (en) Chip package and manufacturing method thereof
CN1849052A (en) Electromagnetic interference screen packaging body and producing process thereof
US20170162516A1 (en) Semiconductor packages including side shielding parts
US20080029869A1 (en) Vertical stack type multi-chip package having improved grounding performance and lower semiconductor chip reliability
US20100020518A1 (en) RF shielding arrangement for semiconductor packages
US8766416B2 (en) Semiconductor package and fabrication method thereof
CN102176438B (en) Double-sided packaging structure and wireless communication system using it
US20110133316A1 (en) Integrated circuit package system for electromagnetic isolation and method for manufacturing thereof
CN105321933A (en) Semiconductor package with conformal electromagnetic shielding structure and manufacturing method thereof
US11264335B2 (en) Anti-electromagnetic interference radio frequency module and implementation method therefor
US20190287918A1 (en) Integrated circuit (ic) packages with shields and methods of producing the same
TW201926589A (en) Package assembly for divisional electromagnetic shielding and method of manufacturing same
US20080237821A1 (en) Package structure and manufacturing method thereof
CN115763440B (en) A cavity-type electromagnetic shielding structure, preparation method and electronic equipment
US20080197468A1 (en) Package structure and manufacturing method thereof
US11837775B2 (en) Microelectronic device package including antenna and semiconductor device
CN117238781A (en) A wafer-level ultra-thin four-sided leadless chip packaging method and chip packaging structure
CN115763274A (en) Integrated chip packaging method, packaging unit, substrate and electronic product

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 23888064

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 23888064

Country of ref document: EP

Kind code of ref document: A1