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WO2022009809A1 - Industrial robot - Google Patents

Industrial robot Download PDF

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Publication number
WO2022009809A1
WO2022009809A1 PCT/JP2021/025204 JP2021025204W WO2022009809A1 WO 2022009809 A1 WO2022009809 A1 WO 2022009809A1 JP 2021025204 W JP2021025204 W JP 2021025204W WO 2022009809 A1 WO2022009809 A1 WO 2022009809A1
Authority
WO
WIPO (PCT)
Prior art keywords
drive
drive mechanism
arm portion
pulley
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2021/025204
Other languages
French (fr)
Japanese (ja)
Inventor
保 栗林
俊道 風間
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Instruments Corp
Original Assignee
Nidec Sankyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Publication of WO2022009809A1 publication Critical patent/WO2022009809A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms

Definitions

  • the present invention relates to a horizontal articulated industrial robot.
  • a horizontal articulated industrial robot for transporting a semiconductor wafer is known (see, for example, Patent Document 1).
  • the industrial robot described in Patent Document 1 two hands on which a semiconductor wafer is mounted, an arm in which the two hands are rotatably connected to the tip side, and a base end side of the arm are rotatable. It has a main body to be connected.
  • the industrial robot described in Patent Document 1 includes a first hand drive mechanism for rotating one of the two hands and a second hand drive mechanism for rotating the other hand. There is.
  • the arm is composed of a first arm portion, a second arm portion, and a third arm portion.
  • the base end side of the first arm portion is rotatably connected to the main body portion, and the proximal end side of the second arm portion is rotatably connected to the tip end side of the first arm portion.
  • the base end side of the third arm portion is rotatably connected to the tip end side of the second arm portion, and two hands are rotatably connected to the tip end side of the third arm portion.
  • the two hands rotate with the vertical direction as the axial direction of rotation. The centers of rotation of the two hands are aligned.
  • the first hand drive mechanism and the second hand drive mechanism are arranged inside the third arm portion formed in a hollow shape.
  • the first hand drive mechanism is on one hand side of a first motor as a drive source, a first speed reducer connected to the first motor, and a first drive pulley attached to the output shaft of the first speed reducer. It includes a first driven pulley to be fixed, and a first belt to be hung on the first drive pulley and the first driven pulley.
  • the second hand drive mechanism is on the other hand side of the second motor that is the drive source, the second speed reducer connected to the second motor, the second drive pulley attached to the output shaft of the second speed reducer, and the other hand side. It includes a second driven pulley that is fixed, and a second belt that is hung between the second drive pulley and the second driven pulley.
  • the first driven pulley and the second driven pulley overlap in the vertical direction, and the axis of the first driven pulley and the axis of the second driven pulley coincide with each other.
  • the first motor, the first speed reducer, and the first drive pulley are arranged on the tip side of the third arm portion with respect to the second motor, the second speed reducer, and the second drive pulley.
  • the second belt is arranged above the first belt. A part of the second belt is arranged on the side of the first speed reducer.
  • the width of the tip portion of the third arm portion on which the second driven pulley 103 is arranged may become wider.
  • the second belt 101 is hung on the second drive pulley 104 and the second driven pulley 103.
  • the subject of the present invention is to provide a plurality of rotating portions such as a plurality of hands rotatably connected to the tip portion of the arm portion and a plurality of driving mechanisms for rotating each of the plurality of rotating portions.
  • a horizontal articulated industrial robot provided, even if a plurality of drive mechanisms having belts are arranged inside an arm portion formed in a hollow shape, the belt of one drive mechanism interferes with another drive mechanism. It is an object of the present invention to provide an industrial robot capable of narrowing the width of the tip portion of the arm portion while surely preventing the above.
  • the industrial robot of the present invention is a horizontal articulated industrial robot, in which a hollow arm portion constituting a part of the arm and a tip portion of the arm portion can be rotated.
  • a plurality of rotating portions to be connected and a plurality of drive mechanisms for rotating each of the plurality of rotating portions are provided, and the plurality of rotating portions rotate with the vertical direction as the axial direction of rotation, and a plurality of rotating portions are provided.
  • the rotation centers of the rotating parts of the above are the same, and each of the plurality of drive mechanisms is fixed to the rotating part side and the driving part including the motor as a driving source and the driving pulley fixed to the motor side.
  • the drive mechanism having the drive unit arranged on the tip end side of the arm portion among the plurality of drive mechanisms is set as the first drive mechanism, and the remaining drive mechanism excluding the first drive mechanism is the second drive mechanism.
  • the second drive mechanism is a gap between the drive unit of the drive mechanism having the drive unit arranged on the tip side of the arm portion of the drive unit of the second drive mechanism and the belt of the second drive mechanism.
  • a plurality of idle pulleys are provided to ensure that, and the plurality of idle pulleys are arranged on the inner peripheral side of the belt to widen the distance between the belts in the width direction of the arm portion orthogonal to the longitudinal direction and the vertical direction of the arm portion. It is characterized by being.
  • the drive mechanism having the drive portion arranged on the tip end side of the arm portion is set as the first drive mechanism.
  • the second drive mechanism is a drive mechanism having a drive unit arranged on the tip side of the arm portion with respect to the drive portion of the second drive mechanism.
  • a plurality of idle pulleys for securing a gap between the drive portion of the second drive mechanism and the belt of the second drive mechanism are provided, and the plurality of idle pulleys arranged on the inner peripheral side of the belt are in the longitudinal direction of the arm portion. The distance between the belts in the width direction of the arm portion orthogonal to the vertical direction is widened.
  • the belt spacing in the width direction of the arm portion is narrower on the tip side of the arm portion than the idle pulley than when the idle pulley is not arranged. It is possible to increase the degree of progress.
  • the present invention while ensuring a gap between the drive unit of the drive mechanism having the drive unit arranged on the tip end side of the arm portion of the drive unit of a certain second drive mechanism and the belt of the second drive mechanism, It is possible to reduce the pitch circle diameter of the driven pulley of the second drive mechanism arranged at the tip of the arm portion. As a result, in the present invention, even if a plurality of drive mechanisms having belts are arranged inside the hollow arm portion, interference between the belt of one drive mechanism and another drive mechanism can be reliably prevented. It is possible to narrow the width of the tip of the arm.
  • the second drive mechanism includes two idle pulleys, and the two idle pulleys push the belts in different directions toward the outside in the width direction of the arm portion.
  • the number of rotating portions and the number of drive mechanisms are two. That is, in the present invention, for example, the number of the second drive mechanism is one. Further, in the present invention, for example, the rotating portion is a hand on which the object to be conveyed is mounted.
  • the idle pulley is preferably arranged between the drive portion of the first drive mechanism and the driven pulley in the longitudinal direction of the arm portion.
  • the idle pulley is arranged in the longitudinal direction of the arm portion between the drive portion of the first drive mechanism and the drive portion of the second drive mechanism, as compared with the case where the first drive mechanism is arranged. It becomes easy to secure a gap between the drive unit of the above and the belt of the second drive mechanism.
  • the pitch circle diameter of the drive pulley of the second drive mechanism is larger than the pitch circle diameter of the drive pulley of the first drive mechanism.
  • a plurality of rotating portions such as a plurality of hands rotatably connected to the tip portion of the arm portion, and a plurality of drive mechanisms for rotating each of the plurality of rotating portions.
  • a horizontal articulated industrial robot provided with a belt of one drive mechanism and another drive mechanism, even if a plurality of drive mechanisms having a belt are arranged inside an arm portion formed in a hollow shape. It is possible to narrow the width of the tip of the arm while reliably preventing interference.
  • FIG. It is a side view of the industrial robot which concerns on embodiment of this invention. It is a top view of the industrial robot shown in FIG. It is sectional drawing for demonstrating the internal structure of the arm part shown in FIG. It is a top view for demonstrating the internal structure of the arm part shown in FIG. It is sectional drawing for demonstrating the structure of the EE cross section of FIG. It is a top view for demonstrating the effect of the industrial robot shown in FIG. It is a schematic plan view for demonstrating the problem of the prior art.
  • FIG. 1 is a side view of the industrial robot 1 according to the embodiment of the present invention.
  • FIG. 2 is a plan view of the industrial robot 1 shown in FIG.
  • FIG. 3 is a cross-sectional view for explaining the internal configuration of the arm portion 12 shown in FIG.
  • the industrial robot 1 of this embodiment (hereinafter referred to as "robot 1") is a horizontal articulated robot for transporting a semiconductor wafer 2 which is a transport target, and is used by being incorporated in a semiconductor manufacturing system. Will be done.
  • the robot 1 includes two hands 4 and 5 on which the semiconductor wafer 2 is mounted, an arm 6 in which the hands 4 and 5 are rotatably connected to the tip side and operates in the horizontal direction, and a base end of the arm 6. It includes a main body 7 whose sides are rotatably connected.
  • the arm 6 is composed of three arm portions 10 to 12.
  • the base end portion of the arm portion 10 is rotatably connected to the main body portion 7.
  • the base end portion of the arm portion 11 is rotatably connected to the tip end portion of the arm portion 10.
  • the base end portion of the arm portion 12 is rotatably connected to the tip end portion of the arm portion 11.
  • the arm portions 10 to 12 rotate with the vertical direction as the axial direction of rotation.
  • the arm portions 10 to 12 are formed in a hollow shape.
  • the main body portion 7, the arm portion 10, the arm portion 11, and the arm portion 12 are arranged in this order from the lower side in the vertical direction.
  • the hands 4 and 5 are formed so that the shape when viewed from the vertical direction is substantially a Y shape.
  • the base ends of the hands 4 and 5 are rotatably connected to the tip of the arm portion 12.
  • the hands 4 and 5 rotate with the vertical direction as the axial direction of rotation.
  • the base end portion of the hand 4 and the base end portion of the hand 5 overlap each other in the vertical direction.
  • the hand 4 is arranged on the upper side and the hand 5 is arranged on the lower side.
  • the center of rotation of the hand 4 and the center of rotation of the hand 5 coincide with each other. That is, the rotation centers of the two hands 4 and 5 coincide with each other.
  • the hands 4 and 5 are arranged above the arm portion 12.
  • the hands 4 and 5 of this embodiment are rotating portions that are rotatably connected to the tip end portion of the arm portion 12, and the robot 1 includes two rotating portions.
  • the main body 7 includes a housing 13 and a columnar member (not shown) to which the base end of the arm 10 is rotatably connected.
  • the base end portion of the arm portion 10 is rotatably connected to the upper end portion of the columnar member.
  • An arm elevating mechanism (not shown) for elevating and lowering a columnar member is housed inside the housing 13. The arm elevating mechanism raises and lowers the arm 6 and the columnar member between the position where the columnar member is housed in the housing 13 and the position where the columnar member projects upward from the housing 13.
  • the robot 1 has an arm drive mechanism (not shown) that rotates the arm portions 10 and 11 to expand and contract a part of the arm 6 including the arm portion 10 and the arm portion 11, and an arm with respect to the arm portion 11. It is provided with an arm rotation mechanism (not shown) for rotating the portion 12.
  • the robot 1 includes a hand drive mechanism 16 that rotates the hand 4 with respect to the arm portion 12, and a hand drive mechanism 17 that rotates the hand 5 with respect to the arm portion 12. That is, the robot 1 includes two hand drive mechanisms 16 and 17 that rotate each of the two hands 4 and 5.
  • specific configurations of the arm portion 12 and the hand drive mechanisms 16 and 17 will be described.
  • FIG. 4 is a plan view for explaining the internal configuration of the arm portion 12 shown in FIG.
  • FIG. 5 is a cross-sectional view for explaining the configuration of the EE cross section of FIG.
  • the arm portion 12 is formed in a box shape having a substantially oval shape when viewed from the vertical direction. Further, the arm portion 12 is formed in a flat box shape having a thin vertical thickness.
  • the arm portion 12 includes an arm portion main body 20 having openings formed on both upper and lower surfaces, an upper cover 21 that closes an opening on the upper surface of the arm portion main body 20, and a lower cover that closes an opening on the lower surface of the arm portion main body 20. It has 22 and. In FIG. 4, the arm portion 12 with the upper cover 21 removed is shown.
  • the longitudinal direction (X direction in FIG. 4 and the like) of the arm portion 12 having a substantially oval shape is defined as the “horizontal direction” among the directions orthogonal to the vertical direction, and the vertical direction and the horizontal direction are defined below.
  • the width direction of the arm portion 12 orthogonal to the above direction is defined as the “front-back direction”.
  • the X1 direction side of FIG. 4 which is one side in the left-right direction, is referred to as the “right” side
  • the X2 direction side of FIG. 4, which is the opposite side is referred to as the “left” side.
  • the right side (X1 direction side) is the base end side of the arm portion 12
  • the left side (X2 direction side) is the tip end side of the arm portion 12.
  • the hand drive mechanism 16 is arranged inside the arm portion 12.
  • the hand drive mechanism 16 is passed over a motor 25 as a drive source, a drive pulley 26 fixed to the motor 25 side, a driven pulley 27 fixed to the hand 4 side, and a drive pulley 26 and a driven pulley 27. It is equipped with a belt 28. Further, the hand drive mechanism 16 includes a speed reducer 29 connected to the output shaft of the motor 25.
  • the hand drive mechanism 17 is arranged inside the arm portion 12. Similar to the hand drive mechanism 16, the hand drive mechanism 17 includes a motor 30 as a drive source, a drive pulley 31 fixed to the motor 30 side, a driven pulley 32 fixed to the hand 5 side, and a drive pulley 31. It is provided with a belt 33 that is hung on the driven pulley 32. Further, the hand drive mechanism 17 includes a speed reducer 34 connected to the output shaft of the motor 30.
  • the driven pulleys 27 and 32 are arranged inside the tip of the arm portion 12.
  • the driven pulley 27 and the driven pulley 32 overlap each other in the vertical direction.
  • the driven pulley 27 is arranged below the driven pulley 32.
  • the axis of the driven pulley 27 and the axis of the driven pulley 32 coincide with each other. Further, the axial centers of the driven pulleys 27 and 32 coincide with the rotation centers of the hands 4 and 5.
  • the pitch circle diameter (pitch circle outer diameter) of the driven pulley 27 and the pitch circle diameter of the driven pulley 32 are equal to each other.
  • the driven pulley 27 is fixed to the lower end of the hollow rotating shaft 35.
  • the upper end portion of the rotating shaft 35 is fixed to the lower side of the base end portion of the hand 4. That is, the driven pulley 27 is fixed to the hand 4 via the rotating shaft 35.
  • the driven pulley 32 is fixed to the lower end of the hollow rotating shaft 36.
  • the rotation shaft 36 is arranged on the outer peripheral side of the rotation shaft 35.
  • the upper end portion of the rotating shaft 36 is fixed to the lower side of the base end portion of the hand 5. That is, the driven pulley 32 is fixed to the hand 5 via the rotating shaft 36.
  • the motor 25 is fixed to the arm body 20. Specifically, as shown in FIG. 5, the motor 25 is fixed to the motor fixing member 39 fixed to the arm portion main body 20. That is, the motor 25 is fixed to the arm portion main body 20 via the motor fixing member 39. Similarly, the motor 30 is fixed to the motor fixing member 40 (see FIG. 4) fixed to the arm portion main body 20, and the motor 30 is fixed to the arm portion main body 20 via the motor fixing member 40. .. The output shafts of the motors 25 and 30 project downward. The motor 25 and the motor 30 are the same motor.
  • the speed reducers 29 and 34 are hollow speed reducers having a through hole formed in the center in the radial direction. Specifically, the speed reducers 29 and 34 are hollow wave gear devices (harmonic drive (registered trademark)) formed in a hollow shape. The speed reducer 29 and the speed reducer 34 are the same speed reducer.
  • the input shaft of the speed reducer 29 is connected to the output shaft of the motor 25.
  • the output shaft of the motor 25 and the input shaft of the speed reducer 29 are arranged coaxially.
  • the input shaft of the speed reducer 34 is connected to the output shaft of the motor 30.
  • the output shaft of the motor 30 and the input shaft of the speed reducer 34 are arranged coaxially.
  • the drive pulley 26 is fixed to the output shaft of the speed reducer 29.
  • the output shaft of the motor 25 and the drive pulley 26 are arranged coaxially.
  • the drive pulley 31 is fixed to the output shaft of the speed reducer 34.
  • the output shaft of the motor 30 and the drive pulley 31 are arranged coaxially.
  • the pitch circle diameter (pitch circle outer diameter) of the drive pulley 31 is larger than the pitch circle diameter of the drive pulley 26. Further, the pitch circle diameter of the drive pulley 26 and the pitch circle diameter of the drive pulley 31 are larger than the pitch circle diameters of the driven pulleys 27 and 32.
  • the motor 25, the drive pulley 26, the speed reducer 29, the motor fixing member 39, and the like constitute a drive unit 42 including the motor 25 and the drive pulley 26.
  • the motor 30, the drive pulley 31, the speed reducer 34, the motor fixing member 40, and the like constitute a drive unit 43 including the motor 30 and the drive pulley 31.
  • the two drive units 42 and 43 are arranged at positions offset from each other in the left-right direction (longitudinal direction of the arm unit 12). Specifically, the drive unit 42 is arranged on the left side of the drive unit 43. That is, the drive unit 42 is arranged on the tip end side of the arm unit 12 with respect to the drive unit 43. The drive unit 42 and the drive unit 43 are arranged at the same position in the vertical direction. Further, the drive unit 42 and the drive unit 43 are arranged at the same position in the front-rear direction.
  • the hand drive mechanisms 16 and 17 of the present embodiment are drive mechanisms for rotating each of the two hands 4 and 5, and the robot 1 includes two drive mechanisms. Further, the hand drive mechanism 16 of the present embodiment is a first drive mechanism having a drive unit 42 arranged on the tip end side of the arm unit 12 among the two drive mechanisms (hand drive mechanisms 16 and 17). It is a drive mechanism The hand drive mechanism 17 is a second drive mechanism which is the remaining drive mechanism excluding the hand drive mechanism 16 which is the first drive mechanism.
  • Belts 28 and 33 are endless belts formed in an annular shape. Further, the belts 28 and 33 are toothed belts having teeth formed on the inner peripheral side. The two belts 28 and 33 are arranged at positions offset from each other in the vertical direction. Specifically, the belt 28 is arranged below the belt 33. That is, the portion of the drive pulley 26 with which the belt 28 is engaged is arranged below the portion of the drive pulley 31 with which the belt 33 is engaged. A part of the belt 33 is arranged on the side of the drive unit 42. Specifically, a part of the belt 33 is arranged outside the motor fixing member 39 in the front-rear direction (see FIG. 5).
  • the hand drive mechanism 17 includes a plurality of idle pulleys 45 for securing a gap between the drive unit 42 and the belt 33 (specifically, a gap between the motor fixing member 39 and the belt 33).
  • the hand drive mechanism 17 includes a drive unit 42 of the hand drive mechanism 16 having a drive unit 42 arranged on the tip end side of the arm unit 12 with respect to the drive unit 43 of the hand drive mechanism 17, and a belt 33 of the hand drive mechanism 17. It is provided with a plurality of idle pulleys 45 for ensuring a gap between the two.
  • the hand drive mechanism 17 of this embodiment includes two idle pulleys 45.
  • the idle pulley 45 is rotatably held by the arm body 20.
  • the idle pulley 45 can rotate with the vertical direction as the axial direction of rotation.
  • the two idle pulleys 45 are arranged on the inner peripheral side of the belt 33. Further, the two idle pulleys 45 are arranged at the same position in the left-right direction. Further, the two idle pulleys 45 are arranged so as to be spaced apart in the front-rear direction, and the distance between the belts 33 in the front-rear direction (the width direction of the arm portion 12) is widened. That is, the front end of the idle pulley 45 arranged on the front side and the rear end of the idle pulley 45 arranged on the rear side are hooked on the drive pulley 31 and the driven pulley 32 in a state where the two idle pulleys 45 are not arranged.
  • the two idle pulleys 45 are arranged outside the position of the inner peripheral surface of the belt 33 in the case of being passed, and the two idle pulleys 45 move the belt 33 in different directions toward the outside in the front-rear direction. I'm pushing.
  • the idle pulley 45 is arranged between the drive unit 42 and the driven pulley 32 in the left-right direction. Specifically, the idle pulley 45 is arranged on the right side of the center position in the left-right direction between the drive unit 42 and the driven pulley 32. That is, the idle pulley 45 is arranged on the drive unit 42 side from the center position in the left-right direction between the drive unit 42 and the driven pulley 32. The distance between the front end of the idle pulley 45 arranged on the front side and the rear end of the idle pulley 45 arranged on the rear side in the front-rear direction is shorter than the pitch circle diameter of the drive pulley 31.
  • the hand drive mechanism 17 is the drive unit 42 of the hand drive mechanism 16 having the drive unit 42 arranged on the tip end side of the arm unit 12 with respect to the drive unit 43 of the hand drive mechanism 17.
  • Two idle pulleys 45 for securing a gap between the hand drive mechanism 17 and the belt 33 are provided, and the two idle pulleys 45 arranged on the inner peripheral side of the belt 33 are in the width direction of the arm portion 12. The distance between the belts 33 in the (front-back direction) is widened.
  • the idle pulley 45 in order to secure a gap between the drive unit 42 and the belt 33, the idle pulley 45 widens the distance between the belts 33 in the width direction of the arm portion 12 and the tip of the arm portion 12 rather than the idle pulley 45. On the side, it is possible to increase the degree to which the distance between the belts 33 in the width direction of the arm portion 12 is narrowed as compared with the case where the idle pulley 45 is not arranged. Therefore, in this embodiment, it is possible to reduce the pitch circle diameter of the driven pulley 32 while ensuring a gap between the drive unit 42 and the belt 33.
  • FIG. 6 is shown on the tip end side of the arm unit 12.
  • the degree of narrowing the distance between the belts 33 in the width direction of the arm portion 12 is smaller than that in the case where the idle pulley 45 is arranged, and as a result, the pitch circle of the driven pulley 32. The diameter becomes large.
  • this embodiment it is possible to reduce the pitch circle diameter of the driven pulley 32 arranged at the tip of the arm portion 12 while ensuring a gap between the drive portion 42 and the belt 33. Therefore, in this embodiment, even if the two hand drive mechanisms 16 and 17 are arranged inside the hollow arm portion 12, interference between the belt 33 of the hand drive mechanism 17 and the hand drive mechanism 16 is surely prevented. While doing so, it becomes possible to narrow the width of the tip portion of the arm portion 12.
  • the idle pulley 45 is arranged between the drive unit 42 and the driven pulley 32 in the left-right direction (longitudinal direction of the arm unit 12). Therefore, in the present embodiment, it becomes easier to secure a gap between the drive unit 42 and the belt 33 as compared with the case where the idle pulley 45 is arranged between the drive unit 42 and the drive unit 43 in the left-right direction. Further, in the present embodiment, the pitch circle diameter of the drive pulley 31 is larger than the pitch circle diameter of the drive pulley 26, and the pitch circle diameter of the drive pulley 31 is relatively large, so that the drive unit 42 and the belt 33 are relatively large. It becomes easier to secure a gap with.
  • the drive pulley 26 may be connected to the output shaft of the motor 25 without going through the speed reducer 29. That is, the drive unit 42 does not have to include the speed reducer 29.
  • the drive pulley 31 may be connected and fixed to the output shaft of the motor 30 without going through the speed reducer 34. That is, the drive unit 43 does not have to include the speed reducer 34.
  • the motor 25 may be directly fixed to the arm portion main body 20. That is, the drive unit 42 does not have to include the motor fixing member 39.
  • the motor 30 may be directly fixed to the arm portion main body 20. That is, the drive unit 43 does not have to include the motor fixing member 40.
  • the two idle pulleys 45 may be arranged at positions offset from each other in the left-right direction. Further, in the above-described embodiment, the idle pulley 45 may be arranged between the drive unit 42 and the drive unit 43 in the left-right direction. Further, in the above-described embodiment, the pitch circle diameter of the drive pulley 31 may be equal to or smaller than the pitch circle diameter of the drive pulley 26. Further, in the above-described embodiment, the hand drive mechanism 17 may include three or more idle pulleys 45.
  • the distance between the belts 33 in the front-rear direction can be set by a simple configuration using the two idle pulleys 45. It will be possible to spread it.
  • the robot 1 may include three or more hands having the same rotation center and three or more hand drive mechanisms for rotating each of the three or more hands.
  • the robot 1 may include three hands having the same rotation center and three hand drive mechanisms for rotating each of the three hands.
  • the drive portions of the three hand drive mechanisms are arranged at positions displaced from each other in the left-right direction, and the three belts are arranged at positions displaced from each other in the vertical direction.
  • the hand drive mechanism having the drive portion arranged on the leftmost side is the first drive mechanism, and the remaining two are.
  • the hand drive mechanism becomes the second drive mechanism.
  • the hand drive mechanism having the drive unit arranged second from the left is the drive unit of the hand drive mechanism having the drive unit arranged on the leftmost side and the second from the left. It is provided with a plurality of idle pulleys (for example, two idle pulleys) for ensuring a gap between the hand drive mechanism having the arranged drive unit and the belt.
  • the hand drive mechanism having the drive unit arranged on the rightmost side is arranged with the drive unit of the hand drive mechanism having the drive unit arranged on the leftmost side and the rightmost side.
  • two arm portions may be rotatably connected to the tip end portion of the arm portion 12.
  • the rotation centers of the two arm portions are the same.
  • the robot 1 includes a first drive mechanism for rotating one of the two arm portions and a second drive mechanism for rotating the other arm portion.
  • the first drive mechanism is configured in the same manner as the hand drive mechanism 16
  • the second drive mechanism is configured in the same manner as the hand drive mechanism 17.
  • the arm portion connected to the tip portion of the arm portion 12 becomes the rotating portion.
  • the arm 6 may be composed of two arm portions or may be composed of four or more arm portions.
  • the robot 1 may be a robot for transporting an object to be transported other than the semiconductor wafer 2, or may be a horizontal articulated robot used for other purposes. ..

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present invention provides an industrial robot in which, even if a plurality of belt-equipped drive mechanisms are disposed inside an arm portion formed in a hollow shape, it is possible to narrow the width of a distal end portion of the arm portion while also reliably preventing interference between the belt of a given drive mechanism and another drive mechanism. In said industrial robot, a drive mechanism 17 is provided with a plurality of idle pulleys 45 for ensuring a clearance between a belt 33 of the drive mechanism 17 and a drive unit 42 of a drive mechanism 16, which has the drive unit 42 disposed further toward the distal end of the arm portion 12 than a drive unit 43 of the drive mechanism 17. The plurality of idle pulleys 45 disposed on the inner peripheral side of the belt 33 widen the interval of the belt 33 in the width direction of the arm portion 12, which is perpendicular to the up-down direction and the long direction of the arm portion 12.

Description

産業用ロボットIndustrial robot

　本発明は、水平多関節型の産業用ロボットに関する。 The present invention relates to a horizontal articulated industrial robot.

　従来、半導体ウエハを搬送するための水平多関節型の産業用ロボットが知られている（たとえば、特許文献１参照）。特許文献１に記載の産業用ロボットは、半導体ウエハが搭載される２個のハンドと、２個のハンドが先端側に回動可能に連結されるアームと、アームの基端側が回動可能に連結される本体部とを備えている。また、特許文献１に記載の産業用ロボットは、２個のハンドのうちの一方のハンドを回動させる第１ハンド駆動機構と、他方のハンドを回動させる第２ハンド駆動機構とを備えている。 Conventionally, a horizontal articulated industrial robot for transporting a semiconductor wafer is known (see, for example, Patent Document 1). In the industrial robot described in Patent Document 1, two hands on which a semiconductor wafer is mounted, an arm in which the two hands are rotatably connected to the tip side, and a base end side of the arm are rotatable. It has a main body to be connected. Further, the industrial robot described in Patent Document 1 includes a first hand drive mechanism for rotating one of the two hands and a second hand drive mechanism for rotating the other hand. There is.

　特許文献１に記載の産業用ロボットでは、アームは、第１アーム部と第２アーム部と第３アーム部とから構成されている。本体部には、第１アーム部の基端側が回動可能に連結され、第１アーム部の先端側には、第２アーム部の基端側が回動可能に連結されている。
第２アーム部の先端側には、第３アーム部の基端側が回動可能に連結され、第３アーム部の先端側には、２個のハンドが回動可能に連結されている。２個のハンドは、上下方向を回動の軸方向として回動する。２個のハンドの回動中心は一致している。 In the industrial robot described in Patent Document 1, the arm is composed of a first arm portion, a second arm portion, and a third arm portion. The base end side of the first arm portion is rotatably connected to the main body portion, and the proximal end side of the second arm portion is rotatably connected to the tip end side of the first arm portion.
The base end side of the third arm portion is rotatably connected to the tip end side of the second arm portion, and two hands are rotatably connected to the tip end side of the third arm portion. The two hands rotate with the vertical direction as the axial direction of rotation. The centers of rotation of the two hands are aligned.

　第１ハンド駆動機構および第２ハンド駆動機構は、中空状に形成される第３アーム部の内部に配置されている。第１ハンド駆動機構は、駆動源となる第１モータと、第１モータに連結される第１減速機と、第１減速機の出力軸に取り付けられる第１駆動プーリと、一方のハンド側に固定される第１従動プーリと、第１駆動プーリと第１従動プーリとに掛け渡される第１ベルトとを備えている。第２ハンド駆動機構は、駆動源となる第２モータと、第２モータに連結される第２減速機と、第２減速機の出力軸に取り付けられる第２駆動プーリと、他方のハンド側に固定される第２従動プーリと、第２駆動プーリと第２従動プーリとに掛け渡される第２ベルトとを備えている。 The first hand drive mechanism and the second hand drive mechanism are arranged inside the third arm portion formed in a hollow shape. The first hand drive mechanism is on one hand side of a first motor as a drive source, a first speed reducer connected to the first motor, and a first drive pulley attached to the output shaft of the first speed reducer. It includes a first driven pulley to be fixed, and a first belt to be hung on the first drive pulley and the first driven pulley. The second hand drive mechanism is on the other hand side of the second motor that is the drive source, the second speed reducer connected to the second motor, the second drive pulley attached to the output shaft of the second speed reducer, and the other hand side. It includes a second driven pulley that is fixed, and a second belt that is hung between the second drive pulley and the second driven pulley.

　第１従動プーリと第２従動プーリとは、上下方向で重なっており、第１従動プーリの軸心と第２従動プーリの軸心とは一致している。第１モータ、第１減速機および第１駆動プーリは、第２モータ、第２減速機および第２駆動プーリよりも第３アーム部の先端側に配置されている。第２ベルトは、第１ベルトよりも上側に配置されている。第２ベルトの一部は、第１減速機の側方に配置されている。 The first driven pulley and the second driven pulley overlap in the vertical direction, and the axis of the first driven pulley and the axis of the second driven pulley coincide with each other. The first motor, the first speed reducer, and the first drive pulley are arranged on the tip side of the third arm portion with respect to the second motor, the second speed reducer, and the second drive pulley. The second belt is arranged above the first belt. A part of the second belt is arranged on the side of the first speed reducer.

特開２０１１－２３０２５６号公報Japanese Unexamined Patent Publication No. 2011-23256

　特許文献１に記載の産業用ロボットでは、第２ベルトの一部が第１減速機の側方に配置されているため、第２ベルトと第１減速機との隙間を確保して、第２ベルトと第１減速機との干渉を防止する必要がある。一方で、図７の概略平面図に示すように、第２アーム部に対する第３アーム部の回動中心と第２アーム部に対するハンドの回動中心との距離を保ちつつ、第２ベルト１０１と第１減速機１０２との隙間を広げていくと、第２従動プーリ１０３のピッチ円径が大きくなる（図７の破線参照）。そのため、第２ベルト１０１と第１減速機１０２との隙間を確保しようとすると、第２従動プーリ１０３が配置される第３アーム部の先端部の幅が広くなるおそれがある。なお、図７において、第２ベルト１０１は、第２駆動プーリ１０４と第２従動プーリ１０３とに掛け渡されている。 In the industrial robot described in Patent Document 1, since a part of the second belt is arranged on the side of the first speed reducer, a gap between the second belt and the first speed reducer is secured to ensure a second speed reduction. It is necessary to prevent the belt from interfering with the first speed reducer. On the other hand, as shown in the schematic plan view of FIG. 7, the second belt 101 and the second belt 101 while maintaining the distance between the rotation center of the third arm portion with respect to the second arm portion and the rotation center of the hand with respect to the second arm portion. As the gap with the first speed reducer 102 is widened, the pitch circle diameter of the second driven pulley 103 becomes larger (see the broken line in FIG. 7). Therefore, if an attempt is made to secure a gap between the second belt 101 and the first speed reducer 102, the width of the tip portion of the third arm portion on which the second driven pulley 103 is arranged may become wider. In FIG. 7, the second belt 101 is hung on the second drive pulley 104 and the second driven pulley 103.

　そこで、本発明の課題は、アーム部の先端部に回動可能に連結される複数のハンド等の複数の回動部と、複数の回動部のそれぞれを回動させる複数の駆動機構とを備える水平多関節型の産業用ロボットにおいて、中空状に形成されるアーム部の内部に、ベルトを有する複数の駆動機構が配置されていても、ある駆動機構のベルトと他の駆動機構との干渉を確実に防止しつつ、アーム部の先端部の幅を狭めることが可能な産業用ロボットを提供することにある。 Therefore, the subject of the present invention is to provide a plurality of rotating portions such as a plurality of hands rotatably connected to the tip portion of the arm portion and a plurality of driving mechanisms for rotating each of the plurality of rotating portions. In a horizontal articulated industrial robot provided, even if a plurality of drive mechanisms having belts are arranged inside an arm portion formed in a hollow shape, the belt of one drive mechanism interferes with another drive mechanism. It is an object of the present invention to provide an industrial robot capable of narrowing the width of the tip portion of the arm portion while surely preventing the above.

　上記の課題を解決するため、本発明の産業用ロボットは、水平多関節型の産業用ロボットにおいて、アームの一部を構成する中空状のアーム部と、アーム部の先端部に回動可能に連結される複数の回動部と、複数の回動部のそれぞれを回動させる複数の駆動機構とを備え、複数の回動部は、上下方向を回動の軸方向として回動し、複数の回動部の回動中心は、一致しており、複数の駆動機構のそれぞれは、駆動源としてのモータとモータ側に固定される駆動プーリとを含む駆動部と、回動部側に固定される従動プーリと、駆動プーリと従動プーリとに掛け渡されるベルトとを備えるとともに、アーム部の内部に配置され、複数の従動プーリは、上下方向で重なり、複数の従動プーリの軸心は、回動部の回動中心と一致しており、複数の駆動部は、上下方向に直交するアーム部の長手方向において互いにずれた位置に配置され、複数のベルトは、上下方向において互いにずれた位置に配置され、複数の駆動機構のうちの、最もアーム部の先端側に配置される駆動部を有する駆動機構を第１駆動機構とし、第１駆動機構を除いた残りの駆動機構を第２駆動機構とすると、第２駆動機構は、この第２駆動機構の駆動部よりもアーム部の先端側に配置される駆動部を有する駆動機構の駆動部と、この第２駆動機構のベルトとの隙間を確保するための複数のアイドルプーリを備え、複数のアイドルプーリは、ベルトの内周側に配置され、アーム部の長手方向と上下方向とに直交するアーム部の幅方向におけるベルトの間隔を広げていることを特徴とする。 In order to solve the above problems, the industrial robot of the present invention is a horizontal articulated industrial robot, in which a hollow arm portion constituting a part of the arm and a tip portion of the arm portion can be rotated. A plurality of rotating portions to be connected and a plurality of drive mechanisms for rotating each of the plurality of rotating portions are provided, and the plurality of rotating portions rotate with the vertical direction as the axial direction of rotation, and a plurality of rotating portions are provided. The rotation centers of the rotating parts of the above are the same, and each of the plurality of drive mechanisms is fixed to the rotating part side and the driving part including the motor as a driving source and the driving pulley fixed to the motor side. It is provided with a driven pulley to be driven and a belt to be hung between the drive pulley and the driven pulley, and is arranged inside the arm portion. It coincides with the rotation center of the rotating part, and the plurality of driving parts are arranged at positions shifted from each other in the longitudinal direction of the arm part orthogonal to the vertical direction, and the plurality of belts are arranged at positions shifted from each other in the vertical direction. The drive mechanism having the drive unit arranged on the tip end side of the arm portion among the plurality of drive mechanisms is set as the first drive mechanism, and the remaining drive mechanism excluding the first drive mechanism is the second drive mechanism. As a mechanism, the second drive mechanism is a gap between the drive unit of the drive mechanism having the drive unit arranged on the tip side of the arm portion of the drive unit of the second drive mechanism and the belt of the second drive mechanism. A plurality of idle pulleys are provided to ensure that, and the plurality of idle pulleys are arranged on the inner peripheral side of the belt to widen the distance between the belts in the width direction of the arm portion orthogonal to the longitudinal direction and the vertical direction of the arm portion. It is characterized by being.

　本発明の産業用ロボットでは、中空状のアーム部の内部に配置される複数の駆動機構のうちの、最もアーム部の先端側に配置される駆動部を有する駆動機構を第１駆動機構とし、第１駆動機構を除いた残りの駆動機構を第２駆動機構とすると、第２駆動機構は、この第２駆動機構の駆動部よりもアーム部の先端側に配置される駆動部を有する駆動機構の駆動部と、この第２駆動機構のベルトとの隙間を確保するための複数のアイドルプーリを備えており、ベルトの内周側に配置される複数のアイドルプーリは、アーム部の長手方向と上下方向とに直交するアーム部の幅方向におけるベルトの間隔を広げている。 In the industrial robot of the present invention, among the plurality of drive mechanisms arranged inside the hollow arm portion, the drive mechanism having the drive portion arranged on the tip end side of the arm portion is set as the first drive mechanism. Assuming that the remaining drive mechanism excluding the first drive mechanism is the second drive mechanism, the second drive mechanism is a drive mechanism having a drive unit arranged on the tip side of the arm portion with respect to the drive portion of the second drive mechanism. A plurality of idle pulleys for securing a gap between the drive portion of the second drive mechanism and the belt of the second drive mechanism are provided, and the plurality of idle pulleys arranged on the inner peripheral side of the belt are in the longitudinal direction of the arm portion. The distance between the belts in the width direction of the arm portion orthogonal to the vertical direction is widened.

　したがって、本発明では、ある第２駆動機構の駆動部よりもアーム部の先端側に配置される駆動部を有する駆動機構の駆動部とこの第２駆動機構のベルトとの隙間を確保するために、アイドルプーリによってアーム部の幅方向におけるベルトの間隔を広げつつ、アイドルプーリよりもアーム部の先端側では、アイドルプーリが配置されていない場合よりも、アーム部の幅方向におけるベルトの間隔を狭めていく度合いを大きくすることが可能になる。 Therefore, in the present invention, in order to secure a gap between the drive unit of the drive mechanism having the drive unit arranged on the tip end side of the arm portion of the drive unit of a certain second drive mechanism and the belt of the second drive mechanism. , While widening the belt spacing in the width direction of the arm portion by the idle pulley, the belt spacing in the width direction of the arm portion is narrower on the tip side of the arm portion than the idle pulley than when the idle pulley is not arranged. It is possible to increase the degree of progress.

　そのため、本発明では、ある第２駆動機構の駆動部よりもアーム部の先端側に配置される駆動部を有する駆動機構の駆動部とこの第２駆動機構のベルトとの隙間を確保しつつ、アーム部の先端部に配置されるこの第２駆動機構の従動プーリのピッチ円径を小さくすることが可能になる。その結果、本発明では、中空状のアーム部の内部に、ベルトを有する複数の駆動機構が配置されていても、ある駆動機構のベルトと他の駆動機構との干渉を確実に防止しつつ、アーム部の先端部の幅を狭めることが可能になる。 Therefore, in the present invention, while ensuring a gap between the drive unit of the drive mechanism having the drive unit arranged on the tip end side of the arm portion of the drive unit of a certain second drive mechanism and the belt of the second drive mechanism, It is possible to reduce the pitch circle diameter of the driven pulley of the second drive mechanism arranged at the tip of the arm portion. As a result, in the present invention, even if a plurality of drive mechanisms having belts are arranged inside the hollow arm portion, interference between the belt of one drive mechanism and another drive mechanism can be reliably prevented. It is possible to narrow the width of the tip of the arm.

　本発明において、第２駆動機構は、２個のアイドルプーリを備え、２個のアイドルプーリは、アーム部の幅方向の外側に向かって互いに異なる方向へベルトを押していることが好ましい。このように構成すると、２個のアイドルプーリを用いた簡易な構成でアーム部の幅方向におけるベルトの間隔を広げることが可能になる。 In the present invention, it is preferable that the second drive mechanism includes two idle pulleys, and the two idle pulleys push the belts in different directions toward the outside in the width direction of the arm portion. With this configuration, it is possible to widen the distance between the belts in the width direction of the arm portion with a simple configuration using two idle pulleys.

　本発明において、たとえば、回動部の数および駆動機構の数は２個である。すなわち、本発明において、たとえば、第２駆動機構の数は１個である。また、本発明において、たとえば、回動部は、搬送対象物が搭載されるハンドである。 In the present invention, for example, the number of rotating portions and the number of drive mechanisms are two. That is, in the present invention, for example, the number of the second drive mechanism is one. Further, in the present invention, for example, the rotating portion is a hand on which the object to be conveyed is mounted.

　本発明において、アイドルプーリは、アーム部の長手方向において、第１駆動機構の駆動部と従動プーリとの間に配置されていることが好ましい。このように構成すると、アイドルプーリが、アーム部の長手方向において、第１駆動機構の駆動部と第２駆動機構の駆動部との間に配置されている場合と比較して、第１駆動機構の駆動部と第２駆動機構のベルトとの隙間を確保しやすくなる。 In the present invention, the idle pulley is preferably arranged between the drive portion of the first drive mechanism and the driven pulley in the longitudinal direction of the arm portion. With this configuration, the idle pulley is arranged in the longitudinal direction of the arm portion between the drive portion of the first drive mechanism and the drive portion of the second drive mechanism, as compared with the case where the first drive mechanism is arranged. It becomes easy to secure a gap between the drive unit of the above and the belt of the second drive mechanism.

　本発明において、第２駆動機構の駆動プーリのピッチ円径は、第１駆動機構の駆動プーリのピッチ円径よりも大きくなっていることが好ましい。このように構成すると、第２駆動機構の駆動プーリのピッチ円径が比較的大きくなるため、第１駆動機構の駆動部と第２駆動機構のベルトとの隙間を確保しやすくなる。 In the present invention, it is preferable that the pitch circle diameter of the drive pulley of the second drive mechanism is larger than the pitch circle diameter of the drive pulley of the first drive mechanism. With this configuration, the pitch circle diameter of the drive pulley of the second drive mechanism becomes relatively large, so that it becomes easy to secure a gap between the drive unit of the first drive mechanism and the belt of the second drive mechanism.

　以上のように、本発明では、アーム部の先端部に回動可能に連結される複数のハンド等の複数の回動部と、複数の回動部のそれぞれを回動させる複数の駆動機構とを備える水平多関節型の産業用ロボットにおいて、中空状に形成されるアーム部の内部に、ベルトを有する複数の駆動機構が配置されていても、ある駆動機構のベルトと他の駆動機構との干渉を確実に防止しつつ、アーム部の先端部の幅を狭めることが可能になる。 As described above, in the present invention, a plurality of rotating portions such as a plurality of hands rotatably connected to the tip portion of the arm portion, and a plurality of drive mechanisms for rotating each of the plurality of rotating portions. In a horizontal articulated industrial robot provided with a belt of one drive mechanism and another drive mechanism, even if a plurality of drive mechanisms having a belt are arranged inside an arm portion formed in a hollow shape. It is possible to narrow the width of the tip of the arm while reliably preventing interference.

本発明の実施の形態にかかる産業用ロボットの側面図である。It is a side view of the industrial robot which concerns on embodiment of this invention. 図１に示す産業用ロボットの平面図である。It is a top view of the industrial robot shown in FIG. 図１に示すアーム部の内部の構成を説明するための断面図である。It is sectional drawing for demonstrating the internal structure of the arm part shown in FIG. 図１に示すアーム部の内部の構成を説明するための平面図である。It is a top view for demonstrating the internal structure of the arm part shown in FIG. 図４のＥ－Ｅ断面の構成を説明するための断面図である。It is sectional drawing for demonstrating the structure of the EE cross section of FIG. 図１に示す産業用ロボットの効果を説明するための平面図である。It is a top view for demonstrating the effect of the industrial robot shown in FIG. 従来技術の問題点を説明するための概略平面図である。It is a schematic plan view for demonstrating the problem of the prior art.

　以下、図面を参照しながら、本発明の実施の形態を説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.

　（産業用ロボットの概略構成）
　図１は、本発明の実施の形態にかかる産業用ロボット１の側面図である。図２は、図１に示す産業用ロボット１の平面図である。図３は、図１に示すアーム部１２の内部の構成を説明するための断面図である。 (Outline configuration of industrial robot)
FIG. 1 is a side view of the industrial robot 1 according to the embodiment of the present invention. FIG. 2 is a plan view of the industrial robot 1 shown in FIG. FIG. 3 is a cross-sectional view for explaining the internal configuration of the arm portion 12 shown in FIG.

　本形態の産業用ロボット１（以下、「ロボット１」とする。）は、搬送対象物である半導体ウエハ２を搬送するための水平多関節型のロボットであり、半導体製造システムに組み込まれて使用される。ロボット１は、半導体ウエハ２が搭載される２個のハンド４、５と、ハンド４、５が先端側に回動可能に連結されるとともに水平方向に動作するアーム６と、アーム６の基端側が回動可能に連結される本体部７とを備えている。 The industrial robot 1 of this embodiment (hereinafter referred to as "robot 1") is a horizontal articulated robot for transporting a semiconductor wafer 2 which is a transport target, and is used by being incorporated in a semiconductor manufacturing system. Will be done. The robot 1 includes two hands 4 and 5 on which the semiconductor wafer 2 is mounted, an arm 6 in which the hands 4 and 5 are rotatably connected to the tip side and operates in the horizontal direction, and a base end of the arm 6. It includes a main body 7 whose sides are rotatably connected.

　アーム６は、３個のアーム部１０～１２によって構成されている。アーム部１０の基端部は、本体部７に回動可能に連結されている。アーム部１１の基端部は、アーム部１０の先端部に回動可能に連結されている。アーム部１２の基端部は、アーム部１１の先端部に回動可能に連結されている。アーム部１０～１２は、上下方向を回動の軸方向として回動する。アーム部１０～１２は、中空状に形成されている。本体部７とアーム部１０とアーム部１１とアーム部１２とは、上下方向において、下側からこの順番で配置されている。 The arm 6 is composed of three arm portions 10 to 12. The base end portion of the arm portion 10 is rotatably connected to the main body portion 7. The base end portion of the arm portion 11 is rotatably connected to the tip end portion of the arm portion 10. The base end portion of the arm portion 12 is rotatably connected to the tip end portion of the arm portion 11. The arm portions 10 to 12 rotate with the vertical direction as the axial direction of rotation. The arm portions 10 to 12 are formed in a hollow shape. The main body portion 7, the arm portion 10, the arm portion 11, and the arm portion 12 are arranged in this order from the lower side in the vertical direction.

　ハンド４、５は、上下方向から見たときの形状が略Ｙ形状となるように形成されている。ハンド４、５の基端部は、アーム部１２の先端部に回動可能に連結されている。ハンド４、５は、上下方向を回動の軸方向として回動する。ハンド４の基端部とハンド５の基端部とは上下方向で重なっている。本形態では、ハンド４が上側に配置され、ハンド５が下側に配置されている。ハンド４の回動中心とハンド５の回動中心とは一致している。すなわち、２個のハンド４、５の回動中心は一致している。ハンド４、５は、アーム部１２よりも上側に配置されている。本形態のハンド４、５は、アーム部１２の先端部に回動可能に連結される回動部であり、ロボット１は、２個の回動部を備えている。 The hands 4 and 5 are formed so that the shape when viewed from the vertical direction is substantially a Y shape. The base ends of the hands 4 and 5 are rotatably connected to the tip of the arm portion 12. The hands 4 and 5 rotate with the vertical direction as the axial direction of rotation. The base end portion of the hand 4 and the base end portion of the hand 5 overlap each other in the vertical direction. In this embodiment, the hand 4 is arranged on the upper side and the hand 5 is arranged on the lower side. The center of rotation of the hand 4 and the center of rotation of the hand 5 coincide with each other. That is, the rotation centers of the two hands 4 and 5 coincide with each other. The hands 4 and 5 are arranged above the arm portion 12. The hands 4 and 5 of this embodiment are rotating portions that are rotatably connected to the tip end portion of the arm portion 12, and the robot 1 includes two rotating portions.

　本体部７は、筐体１３と、アーム部１０の基端部が回動可能に連結される柱状部材（図示省略）とを備えている。アーム部１０の基端部は、柱状部材の上端部に回動可能に連結されている。筐体１３の内部には、柱状部材を昇降させるアーム昇降機構（図示省略）が収納されている。アーム昇降機構は、柱状部材が筐体１３に収容される位置と、柱状部材が筐体１３から上側に突出する位置との間で、アーム６および柱状部材を昇降させる。 The main body 7 includes a housing 13 and a columnar member (not shown) to which the base end of the arm 10 is rotatably connected. The base end portion of the arm portion 10 is rotatably connected to the upper end portion of the columnar member. An arm elevating mechanism (not shown) for elevating and lowering a columnar member is housed inside the housing 13. The arm elevating mechanism raises and lowers the arm 6 and the columnar member between the position where the columnar member is housed in the housing 13 and the position where the columnar member projects upward from the housing 13.

　また、ロボット１は、アーム部１０、１１を回動させてアーム部１０とアーム部１１とからなるアーム６の一部を伸縮させるアーム駆動機構（図示省略）と、アーム部１１に対してアーム部１２を回動させるアーム回動機構（図示省略）とを備えている。さらに、ロボット１は、アーム部１２に対してハンド４を回動させるハンド駆動機構１６と、アーム部１２に対してハンド５を回動させるハンド駆動機構１７とを備えている。すなわち、ロボット１は、２個のハンド４、５のそれぞれを回動させる２個のハンド駆動機構１６、１７を備えている。以下、アーム部１２およびハンド駆動機構１６、１７の具体的な構成について説明する。 Further, the robot 1 has an arm drive mechanism (not shown) that rotates the arm portions 10 and 11 to expand and contract a part of the arm 6 including the arm portion 10 and the arm portion 11, and an arm with respect to the arm portion 11. It is provided with an arm rotation mechanism (not shown) for rotating the portion 12. Further, the robot 1 includes a hand drive mechanism 16 that rotates the hand 4 with respect to the arm portion 12, and a hand drive mechanism 17 that rotates the hand 5 with respect to the arm portion 12. That is, the robot 1 includes two hand drive mechanisms 16 and 17 that rotate each of the two hands 4 and 5. Hereinafter, specific configurations of the arm portion 12 and the hand drive mechanisms 16 and 17 will be described.

　（アーム部およびハンド駆動機構の構成）
　図４は、図１に示すアーム部１２の内部の構成を説明するための平面図である。図５は、図４のＥ－Ｅ断面の構成を説明するための断面図である。 (Structure of arm and hand drive mechanism)
FIG. 4 is a plan view for explaining the internal configuration of the arm portion 12 shown in FIG. FIG. 5 is a cross-sectional view for explaining the configuration of the EE cross section of FIG.

　アーム部１２は、上下方向から見たときの形状が略長円形状となる箱状に形成されている。また、アーム部１２は、上下方向の厚さが薄い扁平な箱状に形成されている。アーム部１２は、上下の両面に開口部が形成されるアーム部本体２０と、アーム部本体２０の上面の開口部を塞ぐ上カバー２１と、アーム部本体２０の下面の開口部を塞ぐ下カバー２２とを備えている。図４では、上カバー２１が取り外された状態のアーム部１２が図示されている。 The arm portion 12 is formed in a box shape having a substantially oval shape when viewed from the vertical direction. Further, the arm portion 12 is formed in a flat box shape having a thin vertical thickness. The arm portion 12 includes an arm portion main body 20 having openings formed on both upper and lower surfaces, an upper cover 21 that closes an opening on the upper surface of the arm portion main body 20, and a lower cover that closes an opening on the lower surface of the arm portion main body 20. It has 22 and. In FIG. 4, the arm portion 12 with the upper cover 21 removed is shown.

　以下では、説明の便宜上、上下方向に直交する方向のうちの、略長円形状をなすアーム部１２の長手方向（図４等のＸ方向）を「左右方向」とし、上下方向と左右方向とに直交するアーム部１２の幅方向（アーム部１２の短手方向、図４等のＹ方向）を「前後方向」とする。また、以下の説明では、左右方向の一方側である図４等のＸ１方向側を「右」側とし、その反対側である図４等のＸ２方向側を「左」側とする。本形態では、右側（Ｘ１方向側）がアーム部１２の基端側となっており、左側（Ｘ２方向側）がアーム部１２の先端側となっている。 In the following, for convenience of explanation, the longitudinal direction (X direction in FIG. 4 and the like) of the arm portion 12 having a substantially oval shape is defined as the “horizontal direction” among the directions orthogonal to the vertical direction, and the vertical direction and the horizontal direction are defined below. The width direction of the arm portion 12 orthogonal to the above direction (the lateral direction of the arm portion 12, the Y direction in FIG. 4 and the like) is defined as the “front-back direction”. Further, in the following description, the X1 direction side of FIG. 4, which is one side in the left-right direction, is referred to as the “right” side, and the X2 direction side of FIG. 4, which is the opposite side, is referred to as the “left” side. In this embodiment, the right side (X1 direction side) is the base end side of the arm portion 12, and the left side (X2 direction side) is the tip end side of the arm portion 12.

　ハンド駆動機構１６は、アーム部１２の内部に配置されている。ハンド駆動機構１６は、駆動源としてのモータ２５と、モータ２５側に固定される駆動プーリ２６と、ハンド４側に固定される従動プーリ２７と、駆動プーリ２６と従動プーリ２７とに掛け渡されるベルト２８とを備えている。また、ハンド駆動機構１６は、モータ２５の出力軸に連結される減速機２９を備えている。 The hand drive mechanism 16 is arranged inside the arm portion 12. The hand drive mechanism 16 is passed over a motor 25 as a drive source, a drive pulley 26 fixed to the motor 25 side, a driven pulley 27 fixed to the hand 4 side, and a drive pulley 26 and a driven pulley 27. It is equipped with a belt 28. Further, the hand drive mechanism 16 includes a speed reducer 29 connected to the output shaft of the motor 25.

　ハンド駆動機構１７は、アーム部１２の内部に配置されている。ハンド駆動機構１７は、ハンド駆動機構１６と同様に、駆動源としてのモータ３０と、モータ３０側に固定される駆動プーリ３１と、ハンド５側に固定される従動プーリ３２と、駆動プーリ３１と従動プーリ３２とに掛け渡されるベルト３３とを備えている。また、ハンド駆動機構１７は、モータ３０の出力軸に連結される減速機３４を備えている。 The hand drive mechanism 17 is arranged inside the arm portion 12. Similar to the hand drive mechanism 16, the hand drive mechanism 17 includes a motor 30 as a drive source, a drive pulley 31 fixed to the motor 30 side, a driven pulley 32 fixed to the hand 5 side, and a drive pulley 31. It is provided with a belt 33 that is hung on the driven pulley 32. Further, the hand drive mechanism 17 includes a speed reducer 34 connected to the output shaft of the motor 30.

　従動プーリ２７、３２は、アーム部１２の先端部の内部に配置されている。従動プーリ２７と従動プーリ３２とは、上下方向で重なっている。本形態では、従動プーリ２７が従動プーリ３２の下側に配置されている。従動プーリ２７の軸心と従動プーリ３２の軸心とは一致している。また、従動プーリ２７、３２の軸心は、ハンド４、５の回動中心と一致している。従動プーリ２７のピッチ円径（ピッチ円外径）と従動プーリ３２のピッチ円径とは等しくなっている。 The driven pulleys 27 and 32 are arranged inside the tip of the arm portion 12. The driven pulley 27 and the driven pulley 32 overlap each other in the vertical direction. In this embodiment, the driven pulley 27 is arranged below the driven pulley 32. The axis of the driven pulley 27 and the axis of the driven pulley 32 coincide with each other. Further, the axial centers of the driven pulleys 27 and 32 coincide with the rotation centers of the hands 4 and 5. The pitch circle diameter (pitch circle outer diameter) of the driven pulley 27 and the pitch circle diameter of the driven pulley 32 are equal to each other.

　従動プーリ２７は、中空状の回動軸３５の下端部に固定されている。回動軸３５の上端部は、ハンド４の基端部の下側に固定されている。すなわち、従動プーリ２７は、回動軸３５を介してハンド４に固定されている。従動プーリ３２は、中空状の回動軸３６の下端部に固定されている。回動軸３６は、回動軸３５の外周側に配置されている。回動軸３６の上端部は、ハンド５の基端部の下側に固定されている。すなわち、従動プーリ３２は、回動軸３６を介してハンド５に固定されている。 The driven pulley 27 is fixed to the lower end of the hollow rotating shaft 35. The upper end portion of the rotating shaft 35 is fixed to the lower side of the base end portion of the hand 4. That is, the driven pulley 27 is fixed to the hand 4 via the rotating shaft 35. The driven pulley 32 is fixed to the lower end of the hollow rotating shaft 36. The rotation shaft 36 is arranged on the outer peripheral side of the rotation shaft 35. The upper end portion of the rotating shaft 36 is fixed to the lower side of the base end portion of the hand 5. That is, the driven pulley 32 is fixed to the hand 5 via the rotating shaft 36.

　モータ２５は、アーム部本体２０に固定されている。具体的には、図５に示すように、モータ２５は、アーム部本体２０に固定されるモータ固定部材３９に固定されている。すなわち、モータ２５は、モータ固定部材３９を介してアーム部本体２０に固定されている。同様に、モータ３０は、アーム部本体２０に固定されるモータ固定部材４０（図４参照）に固定されており、モータ３０は、モータ固定部材４０を介してアーム部本体２０に固定されている。モータ２５、３０の出力軸は、下側に向かって突出している。モータ２５とモータ３０とは、同じモータである。 The motor 25 is fixed to the arm body 20. Specifically, as shown in FIG. 5, the motor 25 is fixed to the motor fixing member 39 fixed to the arm portion main body 20. That is, the motor 25 is fixed to the arm portion main body 20 via the motor fixing member 39. Similarly, the motor 30 is fixed to the motor fixing member 40 (see FIG. 4) fixed to the arm portion main body 20, and the motor 30 is fixed to the arm portion main body 20 via the motor fixing member 40. .. The output shafts of the motors 25 and 30 project downward. The motor 25 and the motor 30 are the same motor.

　減速機２９、３４は、径方向の中心に貫通孔が形成された中空減速機である。具体的には、減速機２９、３４は、中空状に形成される中空波動歯車装置（ハーモニックドライブ（登録商標））である。減速機２９と減速機３４とは、同じ減速機である。減速機２９の入力軸は、モータ２５の出力軸に連結されている。モータ２５の出力軸と減速機２９の入力軸とは同軸上に配置されている。同様に、減速機３４の入力軸は、モータ３０の出力軸に連結されている。モータ３０の出力軸と減速機３４の入力軸とは同軸上に配置されている。 The speed reducers 29 and 34 are hollow speed reducers having a through hole formed in the center in the radial direction. Specifically, the speed reducers 29 and 34 are hollow wave gear devices (harmonic drive (registered trademark)) formed in a hollow shape. The speed reducer 29 and the speed reducer 34 are the same speed reducer. The input shaft of the speed reducer 29 is connected to the output shaft of the motor 25. The output shaft of the motor 25 and the input shaft of the speed reducer 29 are arranged coaxially. Similarly, the input shaft of the speed reducer 34 is connected to the output shaft of the motor 30. The output shaft of the motor 30 and the input shaft of the speed reducer 34 are arranged coaxially.

　駆動プーリ２６は、減速機２９の出力軸に固定されている。モータ２５の出力軸と駆動プーリ２６とは同軸上に配置されている。同様に、駆動プーリ３１は、減速機３４の出力軸に固定されている。モータ３０の出力軸と駆動プーリ３１とは同軸上に配置されている。駆動プーリ３１のピッチ円径（ピッチ円外径）は、駆動プーリ２６のピッチ円径よりも大きくなっている。また、駆動プーリ２６のピッチ円径および駆動プーリ３１のピッチ円径は、従動プーリ２７、３２のピッチ円径よりも大きくなっている。 The drive pulley 26 is fixed to the output shaft of the speed reducer 29. The output shaft of the motor 25 and the drive pulley 26 are arranged coaxially. Similarly, the drive pulley 31 is fixed to the output shaft of the speed reducer 34. The output shaft of the motor 30 and the drive pulley 31 are arranged coaxially. The pitch circle diameter (pitch circle outer diameter) of the drive pulley 31 is larger than the pitch circle diameter of the drive pulley 26. Further, the pitch circle diameter of the drive pulley 26 and the pitch circle diameter of the drive pulley 31 are larger than the pitch circle diameters of the driven pulleys 27 and 32.

　本形態では、モータ２５、駆動プーリ２６、減速機２９およびモータ固定部材３９等によって、モータ２５および駆動プーリ２６を含む駆動部４２が構成されている。また、本形態では、モータ３０、駆動プーリ３１、減速機３４およびモータ固定部材４０等によって、モータ３０および駆動プーリ３１を含む駆動部４３が構成されている。 In this embodiment, the motor 25, the drive pulley 26, the speed reducer 29, the motor fixing member 39, and the like constitute a drive unit 42 including the motor 25 and the drive pulley 26. Further, in the present embodiment, the motor 30, the drive pulley 31, the speed reducer 34, the motor fixing member 40, and the like constitute a drive unit 43 including the motor 30 and the drive pulley 31.

　２個の駆動部４２、４３は、左右方向（アーム部１２の長手方向）において互いにずれた位置に配置されている。具体的には、駆動部４２は、駆動部４３よりも左側に配置されている。すなわち、駆動部４２は、駆動部４３よりもアーム部１２の先端側に配置されている。駆動部４２と駆動部４３は、上下方向において同じ位置に配置されている。また、駆動部４２と駆動部４３は、前後方向において同じ位置に配置されている。 The two drive units 42 and 43 are arranged at positions offset from each other in the left-right direction (longitudinal direction of the arm unit 12). Specifically, the drive unit 42 is arranged on the left side of the drive unit 43. That is, the drive unit 42 is arranged on the tip end side of the arm unit 12 with respect to the drive unit 43. The drive unit 42 and the drive unit 43 are arranged at the same position in the vertical direction. Further, the drive unit 42 and the drive unit 43 are arranged at the same position in the front-rear direction.

　本形態のハンド駆動機構１６、１７は、２個のハンド４、５のそれぞれを回動させる駆動機構であり、ロボット１は、２個の駆動機構を備えている。また、本形態のハンド駆動機構１６は、２個の駆動機構（ハンド駆動機構１６、１７）のうちの、最もアーム部１２の先端側に配置される駆動部４２を有する駆動機構である第１駆動機構となっており、
ハンド駆動機構１７は、第１駆動機構であるハンド駆動機構１６を除いた残りの駆動機構である第２駆動機構となっている。 The hand drive mechanisms 16 and 17 of the present embodiment are drive mechanisms for rotating each of the two hands 4 and 5, and the robot 1 includes two drive mechanisms. Further, the hand drive mechanism 16 of the present embodiment is a first drive mechanism having a drive unit 42 arranged on the tip end side of the arm unit 12 among the two drive mechanisms (hand drive mechanisms 16 and 17). It is a drive mechanism
The hand drive mechanism 17 is a second drive mechanism which is the remaining drive mechanism excluding the hand drive mechanism 16 which is the first drive mechanism.

　ベルト２８、３３は、環状に形成される無端ベルトである。また、ベルト２８、３３は、内周側に歯が形成される歯付きベルトである。２個のベルト２８、３３は、上下方向において互いにずれた位置に配置されている。具体的には、ベルト２８がベルト３３よりも下側に配置されている。すなわち、駆動プーリ２６の、ベルト２８が係合する部分は、駆動プーリ３１の、ベルト３３が係合する部分よりも下側に配置されている。ベルト３３の一部は、駆動部４２の側方に配置されている。具体的には、ベルト３３の一部は、モータ固定部材３９の前後方向の外側に配置されている（図５参照）。 Belts 28 and 33 are endless belts formed in an annular shape. Further, the belts 28 and 33 are toothed belts having teeth formed on the inner peripheral side. The two belts 28 and 33 are arranged at positions offset from each other in the vertical direction. Specifically, the belt 28 is arranged below the belt 33. That is, the portion of the drive pulley 26 with which the belt 28 is engaged is arranged below the portion of the drive pulley 31 with which the belt 33 is engaged. A part of the belt 33 is arranged on the side of the drive unit 42. Specifically, a part of the belt 33 is arranged outside the motor fixing member 39 in the front-rear direction (see FIG. 5).

　ハンド駆動機構１７は、上記の構成に加えて、駆動部４２とベルト３３との隙間（具体的には、モータ固定部材３９とベルト３３との隙間）を確保するための複数のアイドルプーリ４５を備えている。すなわち、ハンド駆動機構１７は、ハンド駆動機構１７の駆動部４３よりもアーム部１２の先端側に配置される駆動部４２を有するハンド駆動機構１６の駆動部４２と、ハンド駆動機構１７のベルト３３との隙間を確保するための複数のアイドルプーリ４５を備えている。本形態のハンド駆動機構１７は、２個のアイドルプーリ４５を備えている。アイドルプーリ４５は、アーム部本体２０に回転可能に保持されている。
アイドルプーリ４５は、上下方向を回転の軸方向として回転可能になっている。 In addition to the above configuration, the hand drive mechanism 17 includes a plurality of idle pulleys 45 for securing a gap between the drive unit 42 and the belt 33 (specifically, a gap between the motor fixing member 39 and the belt 33). I have. That is, the hand drive mechanism 17 includes a drive unit 42 of the hand drive mechanism 16 having a drive unit 42 arranged on the tip end side of the arm unit 12 with respect to the drive unit 43 of the hand drive mechanism 17, and a belt 33 of the hand drive mechanism 17. It is provided with a plurality of idle pulleys 45 for ensuring a gap between the two. The hand drive mechanism 17 of this embodiment includes two idle pulleys 45. The idle pulley 45 is rotatably held by the arm body 20.
The idle pulley 45 can rotate with the vertical direction as the axial direction of rotation.

　図４に示すように、２個のアイドルプーリ４５は、ベルト３３の内周側に配置されている。また、２個のアイドルプーリ４５は、左右方向において同じ位置に配置されている。
さらに、２個のアイドルプーリ４５は、前後方向において間隔をあけた状態で配置されており、前後方向（アーム部１２の幅方向）におけるベルト３３の間隔を広げている。すなわち、前側に配置されるアイドルプーリ４５の前端および後ろ側に配置されるアイドルプーリ４５の後端は、２個のアイドルプーリ４５が配置されていない状態で駆動プーリ３１と従動プーリ３２とに掛け渡されているとした場合のベルト３３の内周面の位置よりも前後方向の外側に配置されており、２個のアイドルプーリ４５は、前後方向の外側に向かって互いに異なる方向へベルト３３を押している。 As shown in FIG. 4, the two idle pulleys 45 are arranged on the inner peripheral side of the belt 33. Further, the two idle pulleys 45 are arranged at the same position in the left-right direction.
Further, the two idle pulleys 45 are arranged so as to be spaced apart in the front-rear direction, and the distance between the belts 33 in the front-rear direction (the width direction of the arm portion 12) is widened. That is, the front end of the idle pulley 45 arranged on the front side and the rear end of the idle pulley 45 arranged on the rear side are hooked on the drive pulley 31 and the driven pulley 32 in a state where the two idle pulleys 45 are not arranged. The two idle pulleys 45 are arranged outside the position of the inner peripheral surface of the belt 33 in the case of being passed, and the two idle pulleys 45 move the belt 33 in different directions toward the outside in the front-rear direction. I'm pushing.

　また、アイドルプーリ４５は、左右方向において、駆動部４２と従動プーリ３２との間に配置されている。具体的には、アイドルプーリ４５は、駆動部４２と従動プーリ３２との間の左右方向の中心位置よりも右側に配置されている。すなわち、アイドルプーリ４５は、駆動部４２と従動プーリ３２との間の左右方向の中心位置より駆動部４２側に配置されている。前側に配置されるアイドルプーリ４５の前端と、後ろ側に配置されるアイドルプーリ４５の後端との前後方向の距離は、駆動プーリ３１のピッチ円径よりも短くなっている。 Further, the idle pulley 45 is arranged between the drive unit 42 and the driven pulley 32 in the left-right direction. Specifically, the idle pulley 45 is arranged on the right side of the center position in the left-right direction between the drive unit 42 and the driven pulley 32. That is, the idle pulley 45 is arranged on the drive unit 42 side from the center position in the left-right direction between the drive unit 42 and the driven pulley 32. The distance between the front end of the idle pulley 45 arranged on the front side and the rear end of the idle pulley 45 arranged on the rear side in the front-rear direction is shorter than the pitch circle diameter of the drive pulley 31.

　（本形態の主な効果）
　以上説明したように、本形態では、ハンド駆動機構１７は、ハンド駆動機構１７の駆動部４３よりもアーム部１２の先端側に配置される駆動部４２を有するハンド駆動機構１６の駆動部４２と、ハンド駆動機構１７のベルト３３との隙間を確保するための２個のアイドルプーリ４５を備えており、ベルト３３の内周側に配置される２個のアイドルプーリ４５がアーム部１２の幅方向（前後方向）におけるベルト３３の間隔を広げている。 (Main effect of this form)
As described above, in the present embodiment, the hand drive mechanism 17 is the drive unit 42 of the hand drive mechanism 16 having the drive unit 42 arranged on the tip end side of the arm unit 12 with respect to the drive unit 43 of the hand drive mechanism 17. , Two idle pulleys 45 for securing a gap between the hand drive mechanism 17 and the belt 33 are provided, and the two idle pulleys 45 arranged on the inner peripheral side of the belt 33 are in the width direction of the arm portion 12. The distance between the belts 33 in the (front-back direction) is widened.

　したがって、本形態では、駆動部４２とベルト３３との隙間を確保するために、アイドルプーリ４５によってアーム部１２の幅方向におけるベルト３３の間隔を広げつつ、アイドルプーリ４５よりもアーム部１２の先端側では、アイドルプーリ４５が配置されていない場合よりも、アーム部１２の幅方向におけるベルト３３の間隔を狭めていく度合いを大きくすることが可能になる。そのため、本形態では、駆動部４２とベルト３３との隙間を確保しつつ、従動プーリ３２のピッチ円径を小さくすることが可能になる。 Therefore, in this embodiment, in order to secure a gap between the drive unit 42 and the belt 33, the idle pulley 45 widens the distance between the belts 33 in the width direction of the arm portion 12 and the tip of the arm portion 12 rather than the idle pulley 45. On the side, it is possible to increase the degree to which the distance between the belts 33 in the width direction of the arm portion 12 is narrowed as compared with the case where the idle pulley 45 is not arranged. Therefore, in this embodiment, it is possible to reduce the pitch circle diameter of the driven pulley 32 while ensuring a gap between the drive unit 42 and the belt 33.

　すなわち、アイドルプーリ４５を使用せずに、駆動部４２とベルト３３との間に、アイドルプーリ４５を使用した場合と同程度の隙間を確保しようとすると、アーム部１２の先端側において、図６の二点鎖線で示すように、アイドルプーリ４５が配置されている場合よりも、アーム部１２の幅方向におけるベルト３３の間隔を狭めていく度合いが小さくなり、その結果、従動プーリ３２のピッチ円径が大きくなる。 That is, if an attempt is made to secure a gap between the drive unit 42 and the belt 33 to the same extent as when the idle pulley 45 is used without using the idle pulley 45, FIG. 6 is shown on the tip end side of the arm unit 12. As shown by the two-dot chain line of No. 1, the degree of narrowing the distance between the belts 33 in the width direction of the arm portion 12 is smaller than that in the case where the idle pulley 45 is arranged, and as a result, the pitch circle of the driven pulley 32. The diameter becomes large.

　これに対して、本形態では、駆動部４２とベルト３３との隙間を確保しつつ、アーム部１２の先端部に配置される従動プーリ３２のピッチ円径を小さくすることが可能になる。
したがって、本形態では、中空状のアーム部１２の内部に２個のハンド駆動機構１６、１７が配置されていても、ハンド駆動機構１７のベルト３３とハンド駆動機構１６との干渉を確実に防止しつつ、アーム部１２の先端部の幅を狭めることが可能になる。 On the other hand, in this embodiment, it is possible to reduce the pitch circle diameter of the driven pulley 32 arranged at the tip of the arm portion 12 while ensuring a gap between the drive portion 42 and the belt 33.
Therefore, in this embodiment, even if the two hand drive mechanisms 16 and 17 are arranged inside the hollow arm portion 12, interference between the belt 33 of the hand drive mechanism 17 and the hand drive mechanism 16 is surely prevented. While doing so, it becomes possible to narrow the width of the tip portion of the arm portion 12.

　本形態では、アイドルプーリ４５は、左右方向（アーム部１２の長手方向）において駆動部４２と従動プーリ３２との間に配置されている。そのため、本形態では、アイドルプーリ４５が左右方向において駆動部４２と駆動部４３との間に配置されている場合と比較して、駆動部４２とベルト３３との隙間を確保しやすくなる。また、本形態では、駆動プーリ３１のピッチ円径が駆動プーリ２６のピッチ円径よりも大きくなっており、駆動プーリ３１のピッチ円径が比較的大きくなっているため、駆動部４２とベルト３３との隙間を確保しやすくなる。 In this embodiment, the idle pulley 45 is arranged between the drive unit 42 and the driven pulley 32 in the left-right direction (longitudinal direction of the arm unit 12). Therefore, in the present embodiment, it becomes easier to secure a gap between the drive unit 42 and the belt 33 as compared with the case where the idle pulley 45 is arranged between the drive unit 42 and the drive unit 43 in the left-right direction. Further, in the present embodiment, the pitch circle diameter of the drive pulley 31 is larger than the pitch circle diameter of the drive pulley 26, and the pitch circle diameter of the drive pulley 31 is relatively large, so that the drive unit 42 and the belt 33 are relatively large. It becomes easier to secure a gap with.

　（他の実施の形態）
　上述した形態は、本発明の好適な形態の一例ではあるが、これに限定されるものではなく本発明の要旨を変更しない範囲において種々変形実施が可能である。 (Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but the present invention is not limited thereto, and various modifications can be carried out without changing the gist of the present invention.

　上述した形態において、駆動プーリ２６は、減速機２９を介さずにモータ２５の出力軸に連結されていても良い。すなわち、駆動部４２は、減速機２９を備えていなくても良い。同様に、駆動プーリ３１は、減速機３４を介さずにモータ３０の出力軸に連結定されていても良い。すなわち、駆動部４３は、減速機３４を備えていなくても良い。また、上述した形態において、モータ２５は、アーム部本体２０に直接固定されていても良い。すなわち、駆動部４２は、モータ固定部材３９を備えていなくても良い。同様に、モータ３０は、アーム部本体２０に直接固定されていても良い。すなわち、駆動部４３は、モータ固定部材４０を備えていなくても良い。 In the above-described embodiment, the drive pulley 26 may be connected to the output shaft of the motor 25 without going through the speed reducer 29. That is, the drive unit 42 does not have to include the speed reducer 29. Similarly, the drive pulley 31 may be connected and fixed to the output shaft of the motor 30 without going through the speed reducer 34. That is, the drive unit 43 does not have to include the speed reducer 34. Further, in the above-described embodiment, the motor 25 may be directly fixed to the arm portion main body 20. That is, the drive unit 42 does not have to include the motor fixing member 39. Similarly, the motor 30 may be directly fixed to the arm portion main body 20. That is, the drive unit 43 does not have to include the motor fixing member 40.

　上述した形態において、２個のアイドルプーリ４５は、左右方向において互いにずれた位置に配置されていても良い。また、上述した形態において、アイドルプーリ４５は、左右方向において駆動部４２と駆動部４３との間に配置されていても良い。また、上述した形態において、駆動プーリ３１のピッチ円径は、駆動プーリ２６のピッチ円径以下となっていても良い。さらに、上述した形態において、ハンド駆動機構１７は、３個以上のアイドルプーリ４５を備えていても良い。ただし、上述した形態のように、ハンド駆動機構１７が有するアイドルプーリ４５の数が２個である場合には、２個のアイドルプーリ４５を用いた簡易な構成で前後方向におけるベルト３３の間隔を広げることが可能になる。 In the above-described form, the two idle pulleys 45 may be arranged at positions offset from each other in the left-right direction. Further, in the above-described embodiment, the idle pulley 45 may be arranged between the drive unit 42 and the drive unit 43 in the left-right direction. Further, in the above-described embodiment, the pitch circle diameter of the drive pulley 31 may be equal to or smaller than the pitch circle diameter of the drive pulley 26. Further, in the above-described embodiment, the hand drive mechanism 17 may include three or more idle pulleys 45. However, as in the above-described embodiment, when the number of idle pulleys 45 included in the hand drive mechanism 17 is two, the distance between the belts 33 in the front-rear direction can be set by a simple configuration using the two idle pulleys 45. It will be possible to spread it.

　上述した形態において、ロボット１は、回動中心が一致する３個以上のハンドと、３個以上のハンドのそれぞれを回動させる３個以上のハンド駆動機構とを備えていても良い。
たとえば、ロボット１は、回動中心が一致する３個のハンドと、３個のハンドのそれぞれを回動させる３個のハンド駆動機構とを備えていても良い。この場合には、３個のハンド駆動機構の駆動部が左右方向において互いにずれた位置に配置され、３本のベルトが上下方向において互いにずれた位置に配置されている。 In the above-described embodiment, the robot 1 may include three or more hands having the same rotation center and three or more hand drive mechanisms for rotating each of the three or more hands.
For example, the robot 1 may include three hands having the same rotation center and three hand drive mechanisms for rotating each of the three hands. In this case, the drive portions of the three hand drive mechanisms are arranged at positions displaced from each other in the left-right direction, and the three belts are arranged at positions displaced from each other in the vertical direction.

　また、この場合には、３個のハンド駆動機構のうちの、最も左側（アーム部１２の先端側）に配置される駆動部を有するハンド駆動機構が第１駆動機構となり、残りの２個のハンド駆動機構が第２駆動機構となる。３個のハンド駆動機構のうちで、左から２番目に配置される駆動部を有するハンド駆動機構は、最も左側に配置される駆動部を有するハンド駆動機構の駆動部と、左から２番目に配置される駆動部を有するハンド駆動機構のベルトとの隙間を確保するための複数のアイドルプーリ（たとえば、２個のアイドルプーリ）を備えている。 Further, in this case, of the three hand drive mechanisms, the hand drive mechanism having the drive portion arranged on the leftmost side (the tip end side of the arm portion 12) is the first drive mechanism, and the remaining two are. The hand drive mechanism becomes the second drive mechanism. Of the three hand drive mechanisms, the hand drive mechanism having the drive unit arranged second from the left is the drive unit of the hand drive mechanism having the drive unit arranged on the leftmost side and the second from the left. It is provided with a plurality of idle pulleys (for example, two idle pulleys) for ensuring a gap between the hand drive mechanism having the arranged drive unit and the belt.

　また、３個のハンド駆動機構のうちで、最も右側に配置される駆動部を有するハンド駆動機構は、最も左側に配置される駆動部を有するハンド駆動機構の駆動部と、最も右側に配置される駆動部を有するハンド駆動機構のベルトとの隙間、および、左から２番目に配置される駆動部を有するハンド駆動機構の駆動部と、最も右側に配置される駆動部を有するハンド駆動機構のベルトとの隙間を確保するための複数のアイドルプーリ（たとえば、２個のアイドルプーリ）を備えている。 Further, among the three hand drive mechanisms, the hand drive mechanism having the drive unit arranged on the rightmost side is arranged with the drive unit of the hand drive mechanism having the drive unit arranged on the leftmost side and the rightmost side. The gap between the belt of the hand drive mechanism having the drive unit, the drive unit of the hand drive mechanism having the drive unit arranged second from the left, and the hand drive mechanism having the drive unit arranged on the rightmost side. It is provided with a plurality of idle pulleys (for example, two idle pulleys) for ensuring a gap with the belt.

　この場合には、左から２番目に配置される駆動部を有するハンド駆動機構のベルトと最も左側に配置される駆動部を有するハンド駆動機構の駆動部との干渉、最も右側に配置される駆動部を有するハンド駆動機構のベルトと最も左側に配置される駆動部を有するハンド駆動機構の駆動部との干渉、および、最も右側に配置される駆動部を有するハンド駆動機構のベルトと左から２番目に配置される駆動部を有するハンド駆動機構の駆動部との干渉を確実に防止しつつ、アーム部１２の先端部の幅を狭めることが可能になる。 In this case, interference between the belt of the hand drive mechanism having the drive unit arranged second from the left and the drive unit of the hand drive mechanism having the drive unit arranged on the leftmost side, the drive arranged on the rightmost side. Interference between the belt of the hand drive mechanism having a part and the drive part of the hand drive mechanism having the drive part arranged on the leftmost side, and the belt of the hand drive mechanism having the drive part arranged on the rightmost side and 2 from the left. It is possible to narrow the width of the tip portion of the arm portion 12 while reliably preventing interference with the drive portion of the hand drive mechanism having the drive portion arranged second.

　上述した形態において、２個のハンド４、５に代えて、アーム部１２の先端部に２個のアーム部が回動可能に連結されていても良い。この場合には、２個のアーム部の回動中心は一致している。また、この場合には、ロボット１は、２個のアーム部のうちの一方のアーム部を回動させる第１駆動機構と、他方のアーム部を回動させる第２駆動機構とを備えており、第１駆動機構は、ハンド駆動機構１６と同様に構成され、第２駆動機構は、ハンド駆動機構１７と同様に構成されている。また、この場合には、アーム部１２の先端部に連結されるアーム部が回動部となる。 In the above-described form, instead of the two hands 4 and 5, two arm portions may be rotatably connected to the tip end portion of the arm portion 12. In this case, the rotation centers of the two arm portions are the same. Further, in this case, the robot 1 includes a first drive mechanism for rotating one of the two arm portions and a second drive mechanism for rotating the other arm portion. The first drive mechanism is configured in the same manner as the hand drive mechanism 16, and the second drive mechanism is configured in the same manner as the hand drive mechanism 17. Further, in this case, the arm portion connected to the tip portion of the arm portion 12 becomes the rotating portion.

　上述した形態において、アーム６は、２個のアーム部によって構成されても良いし、４個以上のアーム部によって構成されても良い。また、上述した形態において、ロボット１は、半導体ウエハ２以外の搬送対象物を搬送するためのロボットであっても良いし、その他の用途で使用される水平多関節型のロボットであっても良い。 In the above-described form, the arm 6 may be composed of two arm portions or may be composed of four or more arm portions. Further, in the above-described embodiment, the robot 1 may be a robot for transporting an object to be transported other than the semiconductor wafer 2, or may be a horizontal articulated robot used for other purposes. ..

　１　ロボット（産業用ロボット）
　２　ウエハ（半導体ウエハ、搬送対象物）
　４、５　ハンド（回動部）
　６　アーム
　１２　アーム部
　１６　ハンド駆動機構（駆動機構、第１駆動機構）
　１７　ハンド駆動機構（駆動機構、第２駆動機構）
　２５、３０　モータ
　２６、３１　駆動プーリ
　２７、３２　従動プーリ
　２８、３３　ベルト
　４２、４３　駆動部
　４５　アイドルプーリ
　Ｘ　アーム部の長手方向
　Ｙ　アーム部の幅方向 1 Robot (industrial robot)
2 Wafers (semiconductor wafers, objects to be transported)
4, 5 hands (rotating part)
6 Arm 12 Arm part 16 Hand drive mechanism (drive mechanism, first drive mechanism)
17 Hand drive mechanism (drive mechanism, second drive mechanism)
25, 30 Motor 26, 31 Drive pulley 27, 32 Driven pulley 28, 33 Belt 42, 43 Drive unit 45 Idle pulley X Longitudinal direction of arm part Y Width direction of arm part

Claims (6)

　水平多関節型の産業用ロボットにおいて、
　アームの一部を構成する中空状のアーム部と、前記アーム部の先端部に回動可能に連結される複数の回動部と、複数の前記回動部のそれぞれを回動させる複数の駆動機構とを備え、
　複数の前記回動部は、上下方向を回動の軸方向として回動し、
　複数の前記回動部の回動中心は、一致しており、
　複数の前記駆動機構のそれぞれは、駆動源としてのモータと前記モータ側に固定される駆動プーリとを含む駆動部と、前記回動部側に固定される従動プーリと、前記駆動プーリと前記従動プーリとに掛け渡されるベルトとを備えるとともに、前記アーム部の内部に配置され、
　複数の前記従動プーリは、上下方向で重なり、
　複数の前記従動プーリの軸心は、前記回動部の回動中心と一致しており、
　複数の前記駆動部は、上下方向に直交する前記アーム部の長手方向において互いにずれた位置に配置され、
　複数の前記ベルトは、上下方向において互いにずれた位置に配置され、
　複数の前記駆動機構のうちの、最も前記アーム部の先端側に配置される前記駆動部を有する前記駆動機構を第１駆動機構とし、前記第１駆動機構を除いた残りの前記駆動機構を第２駆動機構とすると、
　前記第２駆動機構は、この第２駆動機構の前記駆動部よりも前記アーム部の先端側に配置される前記駆動部を有する前記駆動機構の前記駆動部と、この第２駆動機構の前記ベルトとの隙間を確保するための複数のアイドルプーリを備え、
　複数の前記アイドルプーリは、前記ベルトの内周側に配置され、前記アーム部の長手方向と上下方向とに直交する前記アーム部の幅方向における前記ベルトの間隔を広げていることを特徴とする産業用ロボット。 In a horizontal articulated industrial robot
A hollow arm portion forming a part of the arm, a plurality of rotating portions rotatably connected to the tip portion of the arm portion, and a plurality of drives for rotating each of the plurality of rotating portions. Equipped with a mechanism
The plurality of rotating portions rotate with the vertical direction as the axial direction of rotation, and the plurality of rotating portions rotate.
The rotation centers of the plurality of rotating portions are the same, and the rotation centers are the same.
Each of the plurality of drive mechanisms includes a drive unit including a motor as a drive source and a drive pulley fixed to the motor side, a driven pulley fixed to the rotating unit side, and the drive pulley and the driven pulley. It is provided with a belt to be hung on the pulley and is arranged inside the arm portion.
The plurality of driven pulleys overlap in the vertical direction and
The axes of the plurality of driven pulleys coincide with the rotation center of the rotating portion.
The plurality of driving portions are arranged at positions offset from each other in the longitudinal direction of the arm portions orthogonal to the vertical direction.
The plurality of the belts are arranged so as to be offset from each other in the vertical direction.
Among the plurality of the driving mechanisms, the driving mechanism having the driving portion arranged on the tip end side of the arm portion is set as the first driving mechanism, and the remaining driving mechanism excluding the first driving mechanism is the first. With two drive mechanisms,
The second drive mechanism includes the drive unit of the drive mechanism having the drive unit arranged on the tip end side of the arm portion of the drive unit of the second drive mechanism, and the belt of the second drive mechanism. Equipped with multiple idle pulleys to secure a gap with
The plurality of idle pulleys are arranged on the inner peripheral side of the belt, and are characterized in that the distance between the belts in the width direction of the arm portions orthogonal to the longitudinal direction and the vertical direction of the arm portion is widened. Industrial robot. 　前記第２駆動機構は、２個の前記アイドルプーリを備え、
　２個の前記アイドルプーリは、前記アーム部の幅方向の外側に向かって互いに異なる方向へ前記ベルトを押していることを特徴とする請求項１記載の産業用ロボット。 The second drive mechanism includes the two idle pulleys.
The industrial robot according to claim 1, wherein the two idle pulleys push the belts in different directions toward the outside in the width direction of the arm portion. 　前記回動部の数および前記駆動機構の数は２個であることを特徴とする請求項１または２記載の産業用ロボット。 The industrial robot according to claim 1 or 2, wherein the number of the rotating portions and the number of the driving mechanisms are two. 　前記回動部は、搬送対象物が搭載されるハンドであることを特徴とする請求項３記載の産業用ロボット。 The industrial robot according to claim 3, wherein the rotating portion is a hand on which an object to be transported is mounted. 　前記アイドルプーリは、前記アーム部の長手方向において、前記第１駆動機構の前記駆動部と前記従動プーリとの間に配置されていることを特徴とする請求項３または４記載の産業用ロボット。 The industrial robot according to claim 3 or 4, wherein the idle pulley is arranged between the drive portion of the first drive mechanism and the driven pulley in the longitudinal direction of the arm portion. 　前記第２駆動機構の前記駆動プーリのピッチ円径は、前記第１駆動機構の前記駆動プーリの前記ピッチ円径よりも大きくなっていることを特徴とする請求項３から５のいずれかに記載の産業用ロボット。 The invention according to any one of claims 3 to 5, wherein the pitch circle diameter of the drive pulley of the second drive mechanism is larger than the pitch circle diameter of the drive pulley of the first drive mechanism. Industrial robot.
PCT/JP2021/025204 2020-07-10 2021-07-02 Industrial robot Ceased WO2022009809A1 (en)

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