WO2022007449A1 - Image sensor pixel circuit, image sensor, and depth camera - Google Patents
Image sensor pixel circuit, image sensor, and depth camera Download PDFInfo
- Publication number
- WO2022007449A1 WO2022007449A1 PCT/CN2021/085005 CN2021085005W WO2022007449A1 WO 2022007449 A1 WO2022007449 A1 WO 2022007449A1 CN 2021085005 W CN2021085005 W CN 2021085005W WO 2022007449 A1 WO2022007449 A1 WO 2022007449A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- unit
- charge
- image sensor
- charge storage
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Images
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/50—Control of the SSIS exposure
- H04N25/57—Control of the dynamic range
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
- H04N25/62—Detection or reduction of noise due to excess charges produced by the exposure, e.g. smear, blooming, ghost image, crosstalk or leakage between pixels
Definitions
- the present application relates to the technical field of image sensors, and in particular, to an image sensor pixel circuit, an image sensor and a depth camera.
- TOF ranging technology is a technology that achieves precise ranging by measuring the round-trip flight time of light pulses between the transmitting/receiving device and the target object.
- TOF technology the technology of directly measuring the time of flight of light is called d-TOF (direct-TOF); the emitted light signal is periodically modulated, and the phase delay of the reflected light signal relative to the emitted light signal is measured.
- i-TOF Indirect-TOF
- i-TOF Indirect-TOF
- continuous wave Continuous Wave, CW
- pulse modulation Pulse Modulated, PM
- CW modulation usually uses sine wave modulation, and the demodulation end detects the waveform phase change after being reflected by the target object.
- This measurement method first binds the light flight distance information and the phase information of the light intensity change, and then converts the phase information. For the light intensity information detectable by the photodetector, the measurement of the time of flight of light is realized indirectly.
- PW modulation measures distance directly by calculating the ratio of the number of electrons collected by different taps based on the time difference between transmitting and receiving the pulsed beam.
- the transmitter emits short pulse beams.
- the interference of the background light is reduced to a certain extent, which can improve the measurement accuracy; on the other hand, due to the lower duty cycle, the laser power consumption can be reduced.
- the transmitter needs to generate high-frequency and high-intensity pulses, which requires high laser drive performance, and cannot use multi-frequency modulation like the CW modulation method.
- a laser pulse with a wider pulse width is required, and the accuracy will also be reduced. as the pulse width decreases.
- Chinese Patent Application Publication No. 201910385779.6 provides a time-of-flight depth camera and a distance measurement method for single-frequency modulation and demodulation, which extends the measurement distance with the same pulse width compared to the existing PM-iTOF measurement scheme;
- the CW-iTOF measurement scheme only needs one exposure to output the signal volume of three taps to obtain one frame of depth information, thus significantly reducing the overall measurement power consumption and increasing the measurement frame rate.
- Chinese Patent Application Publication No. 201910386369.3 provides a time-of-flight depth camera and a distance measurement method for multi-frequency modulation and demodulation, which gets rid of the existing PM-iTOF measurement scheme in which the pulse width is proportional to the measurement distance and power consumption.
- the contradiction is negatively correlated with the measurement accuracy; the expansion of the measurement distance is no longer limited by the pulse width, so that the lower measurement power consumption and higher measurement accuracy can still be maintained under the condition of a longer measurement distance.
- the taps receiving equal signals may have different sensitivities from each other in each unit pixel, which is prone to errors in distance information. Therefore, it is necessary to propose a technical solution to solve the above problems.
- the purpose of the present application is to provide an image sensor pixel circuit, an image sensor and a depth camera to solve at least one of the above background technical problems.
- An embodiment of the present application provides an image sensor pixel circuit, including: a charge generation unit for converting an incident optical signal into an electrical signal, which includes a photodiode and a plurality of exposure control transistors; a charge storage unit, connected to the charge a generating unit configured to store the electrical signal; a charge transfer unit, connected to the charge storage unit, configured to transfer the electrical signal to a readout unit; a readout unit configured to transfer the charge storage unit
- the electrical signal of the photodiode is transmitted as a pixel signal and the signal of the pixel is read; wherein, the signal generated by the photodiode obtains a plurality of electrical signals through the plurality of exposure control transistors, and the plurality of exposure control transistors alternately The charges accumulated by the photodiodes are stored in the corresponding charge storage cells.
- the plurality of exposure control transistors are first, second, and third exposure control transistors, and the first, second, and third exposure control transistors are obtained through the first, second, and third exposure control transistors, respectively.
- an electrical signal the charge storage unit includes first, second, and third charge storage units, which are respectively connected with the first, second, and third exposure control transistors to store the first, second, and third electric signal.
- the charge transfer unit includes first, second, and third charge transfer units, which are respectively connected to the first, second, and third charge storage units to transfer the charges stored in each charge storage unit. to the readout unit.
- the readout unit includes first, second, and third readout units, which are respectively connected to the first, second, and third transmission units to read the first, second, and third transmission units. The charge stored by the third charge storage unit.
- the first, second and third charge transfer units are connected to the same readout unit;
- the readout unit includes a reset transistor, a source follower transistor, a selection transistor and a floating diffusion node; the The stored charges of the first, second, and third charge storage units are sequentially transferred to the same floating diffusion node through the first, second, and third charge transfer units in a time-sharing manner.
- an anti-overflow transistor is further included, and the source of the anti-overflow transistor is connected to the charge generation unit, so as to prevent electrons of the charge generation unit from overflowing to the charge storage unit after exposure is completed.
- the readout unit includes a reset transistor, a source follower transistor, a select transistor and a floating diffusion node; wherein the floating diffusion node is connected to the source of the charge transfer unit and the reset transistor, respectively pole, the reset transistor is configured to reset the voltage of the floating diffusion node according to a reset control signal.
- the readout unit further includes a conversion gain control transistor and a double conversion gain capacitor; wherein the conversion gain control transistor is connected between the reset transistor and the floating diffusion node, and the The double conversion gain capacitor is connected to the drain of the conversion gain control transistor, and the conversion gain control is realized by controlling the gate voltage of the conversion gain control transistor.
- An embodiment of the present application further provides an image sensor, including: a row decoder/driver, a column decoder, a pixel column unit, and a pixel array; wherein the pixel array includes a plurality of pixels, and the pixels include an image sensor a pixel circuit; the image sensor pixel circuit includes: a charge generation unit for converting an incident optical signal into an electrical signal, which includes a photodiode and a plurality of exposure control transistors; a charge storage unit, connected to the charge generation unit, is configured to store the electrical signal; a charge transfer unit, connected to the charge storage unit, is configured to transfer the electrical signal to a readout unit; a readout unit is configured to transfer the electrical signal of the charge storage unit The signal is transmitted and read as the pixel; wherein, the signal generated by the photodiode obtains a plurality of electrical signals through the plurality of exposure control transistors, and the plurality of exposure control transistors alternately connect the photoelectric The charges accumulated by the diodes are stored in the
- the embodiment of the present application also provides a depth camera, including an emission module, a collection module, and a control and processor; wherein the emission module includes a light source and a light source driver; the collection module includes an image sensor; the The control and processor are respectively connected with the launch module and the acquisition module, and synchronize the trigger signals of the launch module and the acquisition module to calculate that the light beam is emitted by the launch module and sent by the acquisition module.
- the image sensor includes: a row decoder/driver, a column decoder, a pixel column unit, and a pixel array; wherein the pixel array includes a plurality of pixels, and the pixels include an image sensor a pixel circuit, the image sensor pixel circuit includes: a charge generation unit for converting an incident optical signal into an electrical signal, which includes a photodiode and a plurality of exposure control transistors; a charge storage unit, connected to the charge generation unit, is configured to store the electrical signal; a charge transfer unit, connected to the charge storage unit, is configured to transfer the electrical signal to a readout unit; a readout unit is configured to transfer the electrical signal of the charge storage unit The signal is transmitted and read as the pixel; wherein, the signal generated by the photodiode obtains a plurality of electrical signals through the plurality of exposure control transistors, and the plurality of exposure control transistors alternately connect the photoelectric The charges accumulated by the diodes are stored in the corresponding charge storage
- An embodiment of the present application provides an image sensor pixel circuit, including: a charge generation unit for converting an incident optical signal into an electrical signal, which includes a photodiode and a plurality of exposure control transistors; a charge storage unit, connected to the charge a generating unit configured to store the electrical signal; a charge transfer unit, connected to the charge storage unit, configured to transfer the electrical signal to a readout unit; a readout unit configured to transfer the charge storage unit
- the electrical signal of the photodiode is transmitted as a pixel signal and the signal of the pixel is read; wherein, the signal generated by the photodiode obtains a plurality of electrical signals through the plurality of exposure control transistors, and the plurality of exposure control transistors alternately
- the charges accumulated by the photodiodes are stored in the corresponding charge storage units, and the charges accumulated by the photodiodes during the exposure process are transferred to different charge storage units for storage through exposure control transistors with different taps, and after the exposure ends
- the stored charge
- FIG. 1 is a schematic diagram of a TOF depth camera according to an embodiment of the present application.
- FIG. 2 is Figure 2 in the accompanying drawings of Chinese Patent Application Publication No. 201910385779.6;
- FIG 3 is Figure 3 in the accompanying drawings of Chinese Patent Application Publication No. 201910386369.3;
- FIG. 4 is a partial diagram of an image sensor according to an embodiment of the present application.
- FIG. 5 is a block diagram of a pixel circuit of an image sensor according to an embodiment of the present application.
- FIG. 6 is a circuit diagram of a pixel circuit of an image sensor according to an embodiment of the present application.
- FIG. 7 is a circuit diagram of a pixel circuit of an image sensor according to another embodiment of the present application.
- FIG. 8 is a circuit diagram of a pixel circuit of an image sensor according to still another embodiment of the present application.
- connection can be used for both the fixing function and the circuit connection function.
- first and second are only used for descriptive purposes, and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, a feature defined as “first”, “second” may expressly or implicitly include one or more of that feature. In the description of the embodiments of the present application, “plurality” means two or more, unless otherwise expressly and specifically defined.
- FIG. 1 is a schematic structural diagram of a TOF depth camera 10 .
- the TOF depth camera 10 includes an emission module 11 , an acquisition module 12 and a control and processor 13 .
- the emission module 11 provides the emission beam 30 to the target space to illuminate the object 20 in the space, at least part of the emission beam 30 is reflected by the object 20 to form a reflected beam 40, and at least part of the reflected beam 40 is collected by the acquisition module 12;
- the processor 13 is respectively connected with the emission module 11 and the collection module 12, and synchronizes the trigger signals of the emission module 11 and the collection module 12 to calculate the time required for the light beam to be emitted by the emission module 11 and received by the collection module 12, That is, the flight time t between the emitted light beam 30 and the reflected light beam 40, and further, the distance D of the corresponding point on the object can be calculated by the following formula:
- c is the speed of light
- t is the flight time between the emitted beam and the reflected beam.
- the emission module 11 includes a light source, a light source driver (not shown in the figure), and the like.
- the light source can be a light source such as a light emitting diode (LED), an edge emitting laser (EEL), a vertical cavity surface emitting laser (VCSEL), etc., or a light source array composed of multiple light sources, and the light beam emitted by the light source can be visible light, infrared light, ultraviolet light, etc.
- the acquisition module 12 includes an image sensor 121, a lens unit, a filter (not shown), and the like.
- the lens unit receives at least part of the light beams reflected back by the object and guides the at least part of the light beams to the image sensor 121, and the filter is a narrow-band filter matching the wavelength of the light source, used to suppress background light noise in the remaining wavelength bands or Stray light.
- the image sensor 121 may be an image sensor array composed of a charge coupled element (CCD), a complementary metal oxide semiconductor (CMOS), an avalanche diode (AD), a single photon avalanche diode (SPAD), etc.
- the size of the image sensor array represents the depth The resolution of the camera, such as 320 ⁇ 240, etc.
- a readout circuit (not shown in the figure) composed of one or more of a signal amplifier, a time-to-digital converter (TDC), an analog-to-digital converter (ADC) and other devices. ).
- TDC time-to-digital converter
- ADC analog-to-digital converter
- the image sensor 121 includes at least one pixel, and each pixel includes a plurality of taps (for storing and reading or discharging charge signals generated by incident photons under the control of the corresponding electrodes), such as including 2 taps, to use for reading charge signal data.
- a plurality of taps for storing and reading or discharging charge signals generated by incident photons under the control of the corresponding electrodes, such as including 2 taps, to use for reading charge signal data.
- the control and processor 13 can be an independent dedicated circuit, such as a dedicated SOC chip, FPGA chip, ASIC chip, etc. composed of CPU, memory, bus, etc., or a general-purpose processing circuit, such as when the TOF depth camera is integrated into a In smart terminals such as mobile phones, televisions, and computers, the processing circuit of the terminal can be used as at least a part of the control and processor 13 .
- control and processor 13 is used to provide a modulation signal (emission signal) required when the light source emits laser light, and the light source emits a pulsed beam to the object to be measured under the control of the modulation signal; in addition, the control and processor 13
- the demodulation signal (collection signal) of the taps in each pixel of the image sensor 121 is also provided. Under the control of the demodulation signal, the tap collects the charge signal generated by the pulsed beam including the reflected back of the object to be tested, and calculates the phase based on the charge signal. difference to obtain the distance of object 20.
- the reflected pulse beam reflected back by the object to be tested there will also be some background light, interference light and other light beams.
- the modulation and demodulation method, control, processing and other functions performed by the control and processor 13 may adopt the solutions described in Chinese Patent Application Publication Nos. 201910385779.6 and 201910386369.3. It can be understood that, for the convenience of description, the PM-iTOF modulation and demodulation method is used as an example for description in the embodiments of the present application, but is not limited to PM-iTOF modulation and demodulation.
- Fig. 2 in Chinese Patent Application Publication No. 201910385779.6, the embodiment of Fig. 2 exemplarily shows the laser emission signal (modulated signal), received signal and collected signal (decoded signal) within two frame periods T
- the timing diagram of the modulation signal The meaning of each signal is: Sp represents the pulse emission signal of the light source, each pulse emission signal represents a pulse beam; Sr represents the reflected light signal of the pulsed light reflected back by the object, and each reflected light signal represents the reflected light from the object to be measured.
- each pulse acquisition signal represents that the tap collects the charge signal (electron) generated by the pixel in the time period corresponding to the signal.
- the entire frame period T is divided into two time periods Ta and Tb, where Ta represents the time period during which each tap of the pixel performs charge collection and storage, and Tb represents the time period during which the charge signal is read out.
- Ta each tap collects electrons generated on the pixel during its pulse period as the reflected light signal is reflected back to the pixel by the object.
- the first tap, the second tap, and the third tap perform charge collection and storage in sequence, respectively, to obtain the charge amounts q1, q2, and q3, so as to complete one pulse period Tp.
- two pulse periods Tp are included in a single frame period, and a total of two laser pulse signals are emitted.
- each tap collects and reads out the total charge amount corresponding to the charge amount of the optical signal collected twice.
- the pulse period Tp or the number of times the laser pulse signal is emitted can be K times, and K is not less than 1, and can also be as high as tens of thousands of times, or even higher. The specific number is based on actual In addition, the number of pulses in different frame periods can also be different.
- the total charge collected and read out by each tap in the Tb time period is the sum of the charges corresponding to the optical signals collected multiple times by each tap in the entire frame period T, and the total charge of each tap in a single frame period can be It is expressed as follows:
- the total charge amount in a single frame period of the first tap, the second tap, and the third tap can be obtained as Q1, Q2 and Q3.
- the measurement range is limited to a single pulse width time, that is, it is assumed that the reflected light signal is collected by the first tap and the second tap, and the third tap is used to collect the ambient light signal.
- the control and processor can calculate the total light flight distance of the pulsed light signal from emission to reflection to the pixel according to the following formula:
- c is the speed of light
- Th is the pulse width of the single exposure laser
- Q1, Q2, Q3 are the total charge of the three taps respectively.
- the first tap and the second tap will collect ambient light signals in addition to the reflected light signals, and according to formula (2), it can be seen that when all the returned laser light falls on Second tap, so the maximum distance that can be detected If the returned laser falls between the second tap and the third tap exposure enable signal, or between the third tap and the first tap of the next cycle, the measurement range is exceeded and an erroneous result is obtained , if you need to measure longer distances, you must increase the pulse width of the laser, but this will reduce the measurement accuracy.
- the tap for collecting background light can not be fixed.
- the reflected light signal can not only fall into the first tap and the second tap. It can also be allowed to fall between the second tap and the third tap enable, or even allow it to fall between the third tap and the first tap in the next pulse period Tp (for at least two pulse periods) above Tp).
- Tp for at least two pulse periods
- the control and processor 13 judges the three total charge amounts Q1, Q2 and Q3 obtained to determine the obtained amount of charge.
- the control and processor 13 judges the three total charge amounts Q1, Q2 and Q3 obtained to determine the obtained amount of charge.
- the multi-frequency spreading method in the CW modulation method is borrowed, which can meet the measurement of longer distances.
- the embodiment of FIG. 3 describes a method for multi-frequency modulation and demodulation, that is, different modulation and demodulation frequencies are used in adjacent frames.
- two adjacent frame periods and two modulation frequencies are used as examples for description.
- Th2 the accumulated charges of the three taps per pulse are q11, q12, q21, q22, q31, and q32 respectively.
- control and processor 13 uses the modulation and demodulation method shown in FIG. 2 to measure the distance in each frame period respectively, The measurement distance in each frame period is calculated by the above judgment method, and then the final distance can be obtained by using the least common multiple method.
- the long-distance measurement target distance can reach 6.75m.
- the embodiment of the present application proposes an image sensor including multi-tap pixels, which can implement the above-mentioned modulation and demodulation method, thereby realizing long-distance and high-precision measurement of the TOF depth camera.
- FIG. 4 is a partial schematic layout diagram of an image sensor according to an embodiment of the present application.
- the image sensor 121 shown in FIG. 4 receives a part of the reflected light 40 reflected by the object 20, and calculates the charge signals Q1, Q2 and Q3 accumulated by the three taps according to the reflected light. According to the charge amount, the three possibilities described above can be used.
- the distance of the object is calculated by a linear expression; it can be understood that the embodiment of the present application uses three taps as an example for description, but is not limited to three taps.
- pixel array 42 in image sensor 121 in FIG. 4 is shown as 9 pixels arranged in a 3 ⁇ 3 array; in practice, pixel arrays may contain thousands or numbers in multiple rows and columns megapixel. In particular embodiments, each pixel in pixel array 42 may have the same configuration, so each pixel is represented by the same reference numeral "41" as shown in FIG. 4 .
- the image sensor 121 in the embodiment of FIG. 4 may also include a row decoder/driver 47 , a column decoder 53 and a pixel column unit 54 .
- the pixel column unit 54 includes circuitry for correlated double sampling (CDS) and column-specific analog-to-digital converters (ADCs) used in 3D imaging devices.
- CDS correlated double sampling
- ADCs column-specific analog-to-digital converters
- each column in a pixel may have one ADC.
- row decoder/driver 47, column decoder 53 and pixel column unit 54 may be part of control and processor 13 shown in FIG. In the embodiment of FIG.
- row decoder/driver 47 is shown as providing 8 different signals as input to each pixel 41 in a row of pixels to control the pixels in pixel array 42 and thereby enable the generation of column specific PIXOUT ( pixel output signal) 50, 51, 52.
- the arrows numbered 44, 45, 46 in FIG. 4 show that a specific signal is input to each pixel 41 in the corresponding row.
- These signals include: overflow prevention signal (DRN), reset signal (RST), charge storage signal (SG), three-tap exposure control signals (MG1, MG2, MG3) and row select signal (SEL).
- a row select (SEL) signal is used to select the appropriate row of pixels.
- Row decoder/driver 47 may decode via row address/control input 47 to enable it to select the appropriate row using the SEL signal and provide corresponding RST, TG and other signals to the row selected for decoding.
- the RST signal may be applied to pixels in selected rows to reset the pixels to a predetermined high voltage level.
- the DRN signal releases the electrons collected by the photodiode (PD) to the power supply after exposure, preventing the collected electrons from overflowing into the three-tap charge storage section.
- the pixel column unit 54 may receive the PIXOUT signals 50, 51, 52 from the pixels in the row and process these signals to calculate the amount of charge Q1, Q2 and Q3 from which the distance of the object is calculated. Column selection allows sequential reception of pixel output from each pixel in the row selected by the corresponding SEL signal. Control and processor 13 may provide appropriate row address inputs to select rows of pixels and may also provide appropriate column address inputs to column decoder 53 to enable pixel column unit 54 to receive outputs from individual pixels in the selected row (PIXOUT).
- FIG. 5 is a schematic block diagram of a pixel circuit of an image sensor according to an embodiment of the present application.
- a three-tap pixel is used as an example for description in the embodiment of the present application.
- each pixel 41 in pixel array 42 may have the pixel configuration in FIG. 5 .
- the image sensor pixel circuit 100 includes a charge generation unit 60 , a charge storage unit 70 , a charge transfer unit 80 and a readout unit 90 .
- the charge generation unit 60 is used for converting the incident optical signal into an electrical signal, and includes a photodiode (PD) and a plurality of exposure control transistors, and the plurality of exposure control transistors alternately store the charges accumulated by the photodiodes to corresponding charges storage unit.
- the electrical signal generates the first electrical signal according to the first exposure control transistor (MG1), generates the second electrical signal according to the second exposure control transistor (MG2), and generates the second electrical signal according to the third exposure control transistor (MG3) A third electrical signal is generated.
- MG1, MG2 and MG3 alternately store the charges accumulated by the photodiodes to the corresponding charge storage units.
- the charge storage unit 70 is connected to the charge generation unit and is configured to store the electrical signal.
- the charge storage unit includes a first charge storage unit SG1, a second charge storage unit SG2, and a third charge storage unit SG3, which are connected with the first exposure transistor MG1, the second exposure transistor MG2, and the third exposure transistor respectively.
- MG3 is connected and configured to store the first electrical signal, the second electrical signal and the third electrical signal, respectively.
- the charge storage unit may be a capacitor, a PN junction or others, which are not limited herein.
- the charge transfer unit 80 is connected to the charge storage unit and is configured to transfer the electrical signal to the readout unit.
- the charge transfer unit 80 includes a first charge transfer unit TG1, a second charge transfer unit TG2, and a third charge transfer unit TG3, so as to connect the first charge storage unit SG1 and the second charge storage unit SG2 respectively and a third charge storage unit SG3 for transferring the charges stored in the charge storage unit to the readout unit.
- the charge transfer unit may be an electron transfer transistor.
- the readout unit 90 is configured to transmit the electrical signal of the charge storage unit as a pixel and to read the signal of the pixel. Specifically, in the embodiment of the present application, the readout unit 90 is configured to transmit the charges stored in the first charge storage unit SG1 , the second charge storage unit SG2 and the third charge storage unit SG3 as pixels and read the pixels signal of.
- the image sensor pixel circuit 100 further includes an overflow prevention transistor (DRN), and the source of the overflow prevention transistor is connected to the charge generation unit, and is configured to prevent electrons from the charge generation unit from overflowing to the charge storage unit.
- DRN overflow prevention transistor
- the source of the overflow prevention transistor is connected to the photodiode, so as to prevent the photodiode from collecting electrons and overflowing to the charge storage unit after exposure.
- the readout cell 90 includes a reset transistor (RST), a source follower transistor (SF), a select transistor (SEL), and a floating diffusion node (FD).
- the floating diffusion node is respectively connected to the charge transfer unit and the source of the reset transistor, and the reset transistor is configured to reset the voltage of the floating diffusion node according to the reset control signal.
- the readout unit 90 includes a first readout unit 901 , a second readout unit 902 and a third readout unit 903 .
- the first readout unit 901 is connected to the first charge transfer unit
- the second readout unit 902 is connected to the second charge transfer unit
- the third readout unit 903 is connected to the third charge transfer unit, so as to read the first charge transfer unit respectively.
- the first readout unit 901 is taken as an example for description below.
- the drain of the reset transistor (RST) of the first readout unit 901 is connected to a voltage source, and the voltage of the floating diffusion node (FD) is reset according to the reset control signal.
- the charge transfer unit transfers the electrons stored in the first charge storage unit to the floating diffusion node FD, and the gate of the source follower transistor (SF) of the first readout unit is connected to the floating diffusion node (FD), and the drain thereof is connected.
- the voltage source, the source follower transistor amplifies the voltage signal of the floating diffusion node as the output of PIXOUT1, and transmits it to the ADC unit to be converted into an appropriate digital signal. It can be understood that the structures and transmission modes of the second readout unit, the third readout unit and the first readout unit are the same, and details are not described herein again.
- each readout unit has a separate floating diffusion node FD
- the parasitic capacitance value on the floating diffusion node FD is small, and a large conversion gain can be achieved. However, this will increase the number of transistors in a single pixel, thereby reducing the fill factor.
- the charge stored in the memory cell is transferred to the corresponding floating diffusion node FD. The amount of charge is theoretically the same, but due to process production deviations, such as the gain deviation of the source follower (SF), the gain error between multiple time windows will increase, making subsequent calibration more difficult.
- process production deviations such as the gain deviation of the source follower (SF)
- FIG. 7 The first charge transfer unit, the second charge transfer unit and the third charge transfer unit are connected to the same readout unit.
- a reset transistor (RST), a source follower transistor (SF), a select transistor (SEL) and a floating diffusion node (FD) are shared as part of the readout cell.
- the stored charges of the first charge storage unit, the second charge storage unit and the third charge storage unit in the circuit shown in FIG. 7 are sequentially transferred to the first charge transfer unit, the second charge transfer unit and the third charge transfer unit in a time-sharing manner
- the same floating diffusion node, and the voltage at the floating diffusion node FD is output through the PIXOUT of the same readout circuit, and then transmitted to the ADC unit in turn. It can be understood that the voltage acquisition method at the floating diffusion node FD is the same as the voltage acquisition method of the floating diffusion node FD in the first readout unit in the embodiment shown in FIG. 6 , and details are not described herein again.
- the number of transistors in the pixel is greatly reduced, the fill factor of the pixel is improved, and the Process deviation brings gain error in depth, reducing subsequent correction work.
- the readout unit further includes a conversion gain control transistor (LG) and a double conversion gain capacitor (CLG), the conversion gain control transistor is connected between the reset transistor and the floating diffusion node, and the double conversion gain capacitor is connected between the fixed level and the conversion gain control transistor. drain, so that the conversion gain control is achieved by controlling the gate voltage of the conversion gain control transistor.
- LG conversion gain control transistor
- CLG double conversion gain capacitor
- the capacitance of the double conversion gain can be realized by MIM, MOM, MOS capacitance, parasitic capacitance, and the like.
- the conversion gain control transistor is turned off, and the integral capacitance of the floating diffusion node is the parasitic capacitance brought by the reset transistor (RST), the source follower transistor (SF), the select transistor (SEL), and the floating diffusion node to the liner. It is composed of the bottom junction capacitance, and the capacitance value is relatively small, so that a high conversion gain can be achieved; after obtaining the image frame with high conversion gain of each of the three taps, the gain control transistor is enabled, and the integral capacitance of the floating diffusion node is now floating. On the basis of the original, a double conversion gain capacitor CLG is added, and the value of the integral capacitor becomes larger, which reduces the conversion gain of the pixel. The three taps obtain their respective image frames with low conversion gain in turn. For fusion, 3D depth information with high dynamic range can be achieved.
- readout unit 90 also includes a correlated double sampling (CDS) circuit (not shown) in which the output of a pixel can be measured twice: once under known conditions, and the other Once under unknown conditions, the value measured under known conditions can be subtracted from the value measured under unknown conditions to generate a value with a known relationship to the measured physical quantity, representing the photoelectrons of a particular portion of the pixel receiving light charge.
- CDS correlated double sampling
- noise can be reduced by removing the pixel's reference voltage, such as the reset pixel voltage, from the pixel's signal voltage at the end of each integration period.
- the pixels in the pixel array 42 are the pixels described in any one of the embodiments of FIG. 5 to FIG. 8 .
- the image sensor 121 included in the acquisition module is the image sensor described in the solution of the embodiment of FIG. 4 , and details are not repeated here.
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Abstract
Description
本申请要求于2020年7月9日提交中国专利局,申请号为202010659009.9,发明名称为“一种图像传感器像素电路、图像传感器及深度相机”的中国专利申请的优先权,其全部内容通过引用结合在本申请中。This application claims the priority of the Chinese patent application filed on July 9, 2020 with the application number of 202010659009.9 and the invention titled "An Image Sensor Pixel Circuit, Image Sensor and Depth Camera", the entire contents of which are by reference Incorporated in this application.
本申请涉及图像传感器技术领域,尤其涉及一种图像传感器像素电路、图像传感器及深度相机。The present application relates to the technical field of image sensors, and in particular, to an image sensor pixel circuit, an image sensor and a depth camera.
TOF的全称是Time-of-Flight,即飞行时间,TOF测距技术是一种通过测量光脉冲在发射/接收装置和目标物体间的往返飞行时间来实现精确测距的技术。在TOF技术中直接对光飞行时间进行测量的技术被称为d-TOF(direct-TOF);对发射光信号进行周期性调制,通过对反射光信号相对于发射光信号的相位延迟进行测量,再由相位延迟对飞行时间进行计算的测量技术被成为i-TOF(Indirect-TOF)技术。而在i-TOF(Indirect-TOF)技术中,按照调制解调类型方式的不同可以分为连续波(Continuous Wave,CW)调制解调方法和脉冲调制(Pulse Modulated,PM)调制解调方法。The full name of TOF is Time-of-Flight, that is, time of flight. TOF ranging technology is a technology that achieves precise ranging by measuring the round-trip flight time of light pulses between the transmitting/receiving device and the target object. In TOF technology, the technology of directly measuring the time of flight of light is called d-TOF (direct-TOF); the emitted light signal is periodically modulated, and the phase delay of the reflected light signal relative to the emitted light signal is measured. The measurement technology that calculates the time of flight from the phase delay is called i-TOF (Indirect-TOF) technology. In i-TOF (Indirect-TOF) technology, it can be divided into continuous wave (Continuous Wave, CW) modulation and demodulation method and pulse modulation (Pulse Modulated, PM) modulation and demodulation method according to different modulation and demodulation types.
CW调制通常采用的是正弦波调制,解调端检测经目标物体反射后的波形相位变化,这种测量方法首先将光飞行距离信息与光强变化的相位信息进行绑定,再将相位信息转换为光电探测器可检测的光强信息,间接实现了光飞行时间的测量。CW modulation usually uses sine wave modulation, and the demodulation end detects the waveform phase change after being reflected by the target object. This measurement method first binds the light flight distance information and the phase information of the light intensity change, and then converts the phase information. For the light intensity information detectable by the photodetector, the measurement of the time of flight of light is realized indirectly.
PW调制直接根据发射和接收脉冲光束的时间差,通过计算不同抽头收集到的电子数量比例测量距离。发射端通过发射短脉冲光束,一方面由于发射端能 量较高,在一定程度上降低了背景光的干扰,可以提升测量精度;另一方面由于较低的占空比,可以降低激光功耗。但是发射端需要产生高频高强度脉冲,对激光驱动性能要求很高,且不能像CW调制方式一样采用多频率调制,在进行远距离测距时需要更宽脉宽的激光脉冲,精度也会随着脉冲脉宽降低。PW modulation measures distance directly by calculating the ratio of the number of electrons collected by different taps based on the time difference between transmitting and receiving the pulsed beam. The transmitter emits short pulse beams. On the one hand, due to the high energy of the transmitter, the interference of the background light is reduced to a certain extent, which can improve the measurement accuracy; on the other hand, due to the lower duty cycle, the laser power consumption can be reduced. However, the transmitter needs to generate high-frequency and high-intensity pulses, which requires high laser drive performance, and cannot use multi-frequency modulation like the CW modulation method. When performing long-distance ranging, a laser pulse with a wider pulse width is required, and the accuracy will also be reduced. as the pulse width decreases.
中国专利申请公开第201910385779.6号中提供一种时间飞行深度相机及单频调制解调的距离测量方法,相对于现有的PM-iTOF测量方案在相同脉宽的情况下扩展了测量距离;相对于CW-iTOF测量方案,只需要一次曝光输出三个抽头的信号量即可获得一帧深度信息,从而显著降低了整体的测量功耗并提高了测量帧频。Chinese Patent Application Publication No. 201910385779.6 provides a time-of-flight depth camera and a distance measurement method for single-frequency modulation and demodulation, which extends the measurement distance with the same pulse width compared to the existing PM-iTOF measurement scheme; The CW-iTOF measurement scheme only needs one exposure to output the signal volume of three taps to obtain one frame of depth information, thus significantly reducing the overall measurement power consumption and increasing the measurement frame rate.
而中国专利申请公开第201910386369.3号中提供一种时间飞行深度相机及多频调制解调的距离测量方法,摆脱了现有的PM-iTOF测量方案中脉宽与测量距离和功耗成正比,而与测量精度负相关的矛盾;使测量距离的扩展不再受限于脉宽,从而在具有较远测量距离的情况下仍能保持较低的测量功耗和较高的测量精度。However, Chinese Patent Application Publication No. 201910386369.3 provides a time-of-flight depth camera and a distance measurement method for multi-frequency modulation and demodulation, which gets rid of the existing PM-iTOF measurement scheme in which the pulse width is proportional to the measurement distance and power consumption. The contradiction is negatively correlated with the measurement accuracy; the expansion of the measurement distance is no longer limited by the pulse width, so that the lower measurement power consumption and higher measurement accuracy can still be maintained under the condition of a longer measurement distance.
在上述调制类型的TOF图像传感器中,光照射到测量范围内的目标物,之后计算光的反射脉冲从目标物到达接收器所需的时间以获得距离信息。当TOF图像传感器采用多抽头解调像素结构时,接收相等信号的抽头可能会在每个单元像素中具有彼此不同的灵敏度,容易发生距离信息的错误。因此需要提出一种解决上述问题的技术方案。In the above modulation type TOF image sensor, light is irradiated to the target object within the measurement range, and then the time required for the reflected pulse of light to reach the receiver from the target object is calculated to obtain distance information. When the TOF image sensor adopts a multi-tap demodulation pixel structure, the taps receiving equal signals may have different sensitivities from each other in each unit pixel, which is prone to errors in distance information. Therefore, it is necessary to propose a technical solution to solve the above problems.
发明内容SUMMARY OF THE INVENTION
本申请的目的在于提供一种图像传感器像素电路、图像传感器及深度相机,以解决上述背景技术问题中的至少一种问题。The purpose of the present application is to provide an image sensor pixel circuit, an image sensor and a depth camera to solve at least one of the above background technical problems.
本申请实施例提供一种图像传感器像素电路,包括:电荷生成单元,用于将入射的光信号转换成电信号,其包括有光电二极管以及多个曝光控制晶体管;电荷存储单元,连接所述电荷生成单元,被配置为存储所述电信号;电荷传输 单元,连接所述电荷存储单元,被配置为将所述电信号传输至读出单元;读出单元,被配置为将所述电荷存储单元的电信号作为像素传输以及读取所述像素的信号;其中,所述光电二极管产生的信号通过所述多个曝光控制晶体管分别得到多个电信号,通过所述多个曝光控制晶体管交替地将所述光电二极管累积的电荷存储至对应的所述电荷存储单元。An embodiment of the present application provides an image sensor pixel circuit, including: a charge generation unit for converting an incident optical signal into an electrical signal, which includes a photodiode and a plurality of exposure control transistors; a charge storage unit, connected to the charge a generating unit configured to store the electrical signal; a charge transfer unit, connected to the charge storage unit, configured to transfer the electrical signal to a readout unit; a readout unit configured to transfer the charge storage unit The electrical signal of the photodiode is transmitted as a pixel signal and the signal of the pixel is read; wherein, the signal generated by the photodiode obtains a plurality of electrical signals through the plurality of exposure control transistors, and the plurality of exposure control transistors alternately The charges accumulated by the photodiodes are stored in the corresponding charge storage cells.
在一些实施例中,所述多个曝光控制晶体管为第一、第二、第三曝光控制晶体管,通过所述第一、第二、第三曝光控制晶体管分别得到第一、第二、第三电信号;所述电荷存储单元包括第一、第二、第三电荷存储单元,分别与所述第一、第二、第三曝光控制晶体管连接,以存储所述第一、第二、第三电信号。In some embodiments, the plurality of exposure control transistors are first, second, and third exposure control transistors, and the first, second, and third exposure control transistors are obtained through the first, second, and third exposure control transistors, respectively. an electrical signal; the charge storage unit includes first, second, and third charge storage units, which are respectively connected with the first, second, and third exposure control transistors to store the first, second, and third electric signal.
在一些实施例中,所述电荷传输单元包括第一、第二、第三电荷传输单元,分别连接所述第一、第二、第三电荷存储单元,以将各电荷存储单元存储的电荷传输至所述读出单元。In some embodiments, the charge transfer unit includes first, second, and third charge transfer units, which are respectively connected to the first, second, and third charge storage units to transfer the charges stored in each charge storage unit. to the readout unit.
在一些实施例中,所述读出单元包括第一、第二、第三读出单元,分别连接所述第一、第二、第三传输单元,以读取所述第一、第二、第三电荷存储单元存储的电荷。In some embodiments, the readout unit includes first, second, and third readout units, which are respectively connected to the first, second, and third transmission units to read the first, second, and third transmission units. The charge stored by the third charge storage unit.
在一些实施例中,所述第一、第二、第三电荷传输单元连接同一个读出单元;所述读出单元包括复位晶体管、源极跟随晶体管、选择晶体管和浮置扩散节点;所述第一、第二、第三电荷存储单元的存储电荷依次通过第一、第二、第三电荷传输单元分时传送至同一个浮置扩散节点。In some embodiments, the first, second and third charge transfer units are connected to the same readout unit; the readout unit includes a reset transistor, a source follower transistor, a selection transistor and a floating diffusion node; the The stored charges of the first, second, and third charge storage units are sequentially transferred to the same floating diffusion node through the first, second, and third charge transfer units in a time-sharing manner.
在一些实施例中,还包括有防溢出晶体管,所述防溢出晶体管的源极连接所述电荷生成单元,以避免曝光结束后,所述电荷生成单元的电子溢出至所述电荷存储单元。In some embodiments, an anti-overflow transistor is further included, and the source of the anti-overflow transistor is connected to the charge generation unit, so as to prevent electrons of the charge generation unit from overflowing to the charge storage unit after exposure is completed.
在一些实施例中,所述读出单元包括复位晶体管、源极跟随晶体管、选择晶体管和浮置扩散节点;其中,所述浮置扩散节点分别连接所述电荷传输单元和所述复位晶体管的源极,所述复位晶体管被配置为根据复位控制信号重置所 述浮置扩散节点的电压。In some embodiments, the readout unit includes a reset transistor, a source follower transistor, a select transistor and a floating diffusion node; wherein the floating diffusion node is connected to the source of the charge transfer unit and the reset transistor, respectively pole, the reset transistor is configured to reset the voltage of the floating diffusion node according to a reset control signal.
在一些实施例中,所述读出单元还包括有转换增益控制晶体管和双转换增益电容;其中,所述转换增益控制晶体管连接于所述复位晶体管与所述浮置扩散节点之间,所述双转换增益电容连接所述转换增益控制晶体管的漏极,通过控制所述转换增益控制晶体管的栅极电压,实现转换增益控制。In some embodiments, the readout unit further includes a conversion gain control transistor and a double conversion gain capacitor; wherein the conversion gain control transistor is connected between the reset transistor and the floating diffusion node, and the The double conversion gain capacitor is connected to the drain of the conversion gain control transistor, and the conversion gain control is realized by controlling the gate voltage of the conversion gain control transistor.
本申请实施例还提供一种图像传感器,包括:行解码器/驱动器、列解码器、像素列单元、以及像素阵列;其中,所述像素阵列包括有多个像素,所述像素包括有图像传感器像素电路;所述图像传感器像素电路包括:电荷生成单元,用于将入射的光信号转换成电信号,其包括有光电二极管以及多个曝光控制晶体管;电荷存储单元,连接所述电荷生成单元,被配置为存储所述电信号;电荷传输单元,连接所述电荷存储单元,被配置为将所述电信号传输至读出单元;读出单元,被配置为将所述电荷存储单元的电信号作为像素传输以及读取所述像素的信号;其中,所述光电二极管产生的信号通过所述多个曝光控制晶体管分别得到多个电信号,通过所述多个曝光控制晶体管交替地将所述光电二极管累积的电荷存储至对应的所述电荷存储单元。An embodiment of the present application further provides an image sensor, including: a row decoder/driver, a column decoder, a pixel column unit, and a pixel array; wherein the pixel array includes a plurality of pixels, and the pixels include an image sensor a pixel circuit; the image sensor pixel circuit includes: a charge generation unit for converting an incident optical signal into an electrical signal, which includes a photodiode and a plurality of exposure control transistors; a charge storage unit, connected to the charge generation unit, is configured to store the electrical signal; a charge transfer unit, connected to the charge storage unit, is configured to transfer the electrical signal to a readout unit; a readout unit is configured to transfer the electrical signal of the charge storage unit The signal is transmitted and read as the pixel; wherein, the signal generated by the photodiode obtains a plurality of electrical signals through the plurality of exposure control transistors, and the plurality of exposure control transistors alternately connect the photoelectric The charges accumulated by the diodes are stored in the corresponding charge storage cells.
本申请实施例还提供一种深度相机,包括发射模组、采集模组以及控制与处理器;其中,所述发射模组包括光源以及光源驱动器;所述采集模组包括有图像传感器;所述控制与处理器分别与所述发射模组和所述采集模组连接,同步所述发射模组以及所述采集模组的触发信号以计算光束由所述发射模组发出并被所述采集模组接收所需要的时间;所述图像传感器包括:行解码器/驱动器、列解码器、像素列单元、以及像素阵列;其中,所述像素阵列包括有多个像素,所述像素包括有图像传感器像素电路,所述图像传感器像素电路包括:电荷生成单元,用于将入射的光信号转换成电信号,其包括有光电二极管以及多个曝光控制晶体管;电荷存储单元,连接所述电荷生成单元,被配置为存储所述电 信号;电荷传输单元,连接所述电荷存储单元,被配置为将所述电信号传输至读出单元;读出单元,被配置为将所述电荷存储单元的电信号作为像素传输以及读取所述像素的信号;其中,所述光电二极管产生的信号通过所述多个曝光控制晶体管分别得到多个电信号,通过所述多个曝光控制晶体管交替地将所述光电二极管累积的电荷存储至对应的所述电荷存储单元。The embodiment of the present application also provides a depth camera, including an emission module, a collection module, and a control and processor; wherein the emission module includes a light source and a light source driver; the collection module includes an image sensor; the The control and processor are respectively connected with the launch module and the acquisition module, and synchronize the trigger signals of the launch module and the acquisition module to calculate that the light beam is emitted by the launch module and sent by the acquisition module. The time required for group reception; the image sensor includes: a row decoder/driver, a column decoder, a pixel column unit, and a pixel array; wherein the pixel array includes a plurality of pixels, and the pixels include an image sensor a pixel circuit, the image sensor pixel circuit includes: a charge generation unit for converting an incident optical signal into an electrical signal, which includes a photodiode and a plurality of exposure control transistors; a charge storage unit, connected to the charge generation unit, is configured to store the electrical signal; a charge transfer unit, connected to the charge storage unit, is configured to transfer the electrical signal to a readout unit; a readout unit is configured to transfer the electrical signal of the charge storage unit The signal is transmitted and read as the pixel; wherein, the signal generated by the photodiode obtains a plurality of electrical signals through the plurality of exposure control transistors, and the plurality of exposure control transistors alternately connect the photoelectric The charges accumulated by the diodes are stored in the corresponding charge storage cells.
本申请实施例提供一种图像传感器像素电路,包括:电荷生成单元,用于将入射的光信号转换成电信号,其包括有光电二极管以及多个曝光控制晶体管;电荷存储单元,连接所述电荷生成单元,被配置为存储所述电信号;电荷传输单元,连接所述电荷存储单元,被配置为将所述电信号传输至读出单元;读出单元,被配置为将所述电荷存储单元的电信号作为像素传输以及读取所述像素的信号;其中,所述光电二极管产生的信号通过所述多个曝光控制晶体管分别得到多个电信号,通过所述多个曝光控制晶体管交替地将所述光电二极管累积的电荷存储至对应的所述电荷存储单元,通过不同抽头的曝光控制晶体管将光电二极管在曝光过程中累积的电荷转移至存储不同的电荷存储单元进行存储,并在曝光结束后通过多路传输晶体管将存储的电荷转移至对应的浮置扩散节点/同一个浮置扩散节点,使得该像素结构能够支持全局曝光模式,并且通过后续相关双采样电路可以降低噪声,从而实现精度高、距离远的测量。An embodiment of the present application provides an image sensor pixel circuit, including: a charge generation unit for converting an incident optical signal into an electrical signal, which includes a photodiode and a plurality of exposure control transistors; a charge storage unit, connected to the charge a generating unit configured to store the electrical signal; a charge transfer unit, connected to the charge storage unit, configured to transfer the electrical signal to a readout unit; a readout unit configured to transfer the charge storage unit The electrical signal of the photodiode is transmitted as a pixel signal and the signal of the pixel is read; wherein, the signal generated by the photodiode obtains a plurality of electrical signals through the plurality of exposure control transistors, and the plurality of exposure control transistors alternately The charges accumulated by the photodiodes are stored in the corresponding charge storage units, and the charges accumulated by the photodiodes during the exposure process are transferred to different charge storage units for storage through exposure control transistors with different taps, and after the exposure ends The stored charge is transferred to the corresponding floating diffusion node/the same floating diffusion node through the multiplexing transistor, so that the pixel structure can support the global exposure mode, and the noise can be reduced through the subsequent correlated double sampling circuit, so as to achieve high precision , distance measurement.
为了更清楚地说明本申请实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动性的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the accompanying drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only These are some embodiments of the present application, and for those of ordinary skill in the art, other drawings can also be obtained from these drawings without any creative effort.
图1是根据本申请一个实施例TOF深度相机的示意图。FIG. 1 is a schematic diagram of a TOF depth camera according to an embodiment of the present application.
图2为中国专利申请公开第201910385779.6号说明书附图中的图2;Figure 2 is Figure 2 in the accompanying drawings of Chinese Patent Application Publication No. 201910385779.6;
图3为中国专利申请公开第201910386369.3号说明书附图中的图3;Figure 3 is Figure 3 in the accompanying drawings of Chinese Patent Application Publication No. 201910386369.3;
图4为本申请一个实施例图像传感器的部分图示;FIG. 4 is a partial diagram of an image sensor according to an embodiment of the present application;
图5为本申请一个实施例图像传感器像素电路的框图;5 is a block diagram of a pixel circuit of an image sensor according to an embodiment of the present application;
图6为本申请一个实施例图像传感器像素电路的电路图示;FIG. 6 is a circuit diagram of a pixel circuit of an image sensor according to an embodiment of the present application;
图7为本申请另一个实施例图像传感器像素电路的电路图示;FIG. 7 is a circuit diagram of a pixel circuit of an image sensor according to another embodiment of the present application;
图8为本申请又一个实施例图像传感器像素电路的电路图示。FIG. 8 is a circuit diagram of a pixel circuit of an image sensor according to still another embodiment of the present application.
为了使本申请实施例所要解决的技术问题、技术方案及有益效果更加清楚明白,以下结合附图及实施例,对本申请进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本申请,并不用于限定本申请。In order to make the technical problems, technical solutions and beneficial effects to be solved by the embodiments of the present application more clearly understood, the present application will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, but not to limit the present application.
需要说明的是,当元件被称为“固定于”或“设置于”另一个元件,它可以直接在另一个元件上或者间接在另一个元件上。当一个元件被称为是“连接于”另一个元件,它可以是直接连接到另一个元件或间接连接至另一个元件上。另外,连接既可以是用于固定作用也可以是用于电路连通作用。It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element. In addition, the connection can be used for both the fixing function and the circuit connection function.
需要理解的是,术语“长度”、“宽度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本申请实施例和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本申请的限制。It is to be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top" , "bottom", "inside", "outside", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that The device or element must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be construed as a limitation of the present application.
此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多该特征。在本申请实施例的描述中,“多个”的含义是两个或两个以上,除非另有明确具体的限定。In addition, the terms "first" and "second" are only used for descriptive purposes, and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, a feature defined as "first", "second" may expressly or implicitly include one or more of that feature. In the description of the embodiments of the present application, "plurality" means two or more, unless otherwise expressly and specifically defined.
照图1所示,图1为一种TOF深度相机10的结构示意图。TOF深度相机10包括发射模组11、采集模组12以及控制与处理器13。其中,发射模组11提供 发射光束30至目标空间以照明空间中的物体20,至少部分发射光束30经物体20反射后形成反射光束40,反射光束40至少部分被采集模组12采集;控制与处理器13分别与发射模组11和采集模组12连接,同步发射模组11以及采集模组12的触发信号以计算光束由发射模组11发出并被采集模组12接收所需要的时间,即发射光束30与反射光束40之间的飞行时间t,进一步的,物体上对应点的距离D可由下式计算出:As shown in FIG. 1 , FIG. 1 is a schematic structural diagram of a TOF depth camera 10 . The TOF depth camera 10 includes an emission module 11 , an acquisition module 12 and a control and processor 13 . The emission module 11 provides the emission beam 30 to the target space to illuminate the object 20 in the space, at least part of the emission beam 30 is reflected by the object 20 to form a reflected beam 40, and at least part of the reflected beam 40 is collected by the acquisition module 12; The processor 13 is respectively connected with the emission module 11 and the collection module 12, and synchronizes the trigger signals of the emission module 11 and the collection module 12 to calculate the time required for the light beam to be emitted by the emission module 11 and received by the collection module 12, That is, the flight time t between the emitted light beam 30 and the reflected light beam 40, and further, the distance D of the corresponding point on the object can be calculated by the following formula:
其中,c为光速;t为发射光束与反射光束之间的飞行时间。where c is the speed of light; t is the flight time between the emitted beam and the reflected beam.
发射模组11包括光源以及光源驱动器(图中未示出)等。其中,光源可以是发光二极管(LED)、边发射激光器(EEL)、垂直腔面发射激光器(VCSEL)等光源,也可以是多个光源组成的光源阵列,光源所发射的光束可以是可见光、红外光、紫外光等。The emission module 11 includes a light source, a light source driver (not shown in the figure), and the like. Among them, the light source can be a light source such as a light emitting diode (LED), an edge emitting laser (EEL), a vertical cavity surface emitting laser (VCSEL), etc., or a light source array composed of multiple light sources, and the light beam emitted by the light source can be visible light, infrared light, ultraviolet light, etc.
采集模组12包括图像传感器121、透镜单元、滤光片(未图示)等。透镜单元接收由物体反射回的至少部分光束并将所述至少部分光束引导至图像传感器121上,滤光片为与光源波长相匹配的窄带滤光片,用于抑制其余波段的背景光噪声或杂散光。图像传感器121可以是电荷耦合元件(CCD)、互补金属氧化物半导体(CMOS)、雪崩二极管(AD)、单光子雪崩二极管(SPAD)等组成的图像传感器阵列,图像传感器的阵列大小代表着该深度相机的分辨率,比如320×240等。一般地,与图像传感器121连接的还包括由信号放大器、时数转换器(TDC)、模数转换器(ADC)等器件中的一种或多种组成的读出电路(图中未示出)。The
图像传感器121包括至少一个像素,每个像素则包含多个抽头(tap,用于在相应电极的控制下存储并读取或者排出由入射光子产生的电荷信号),比如包括2个抽头,以用于读取电荷信号数据。其中,所述图像传感器121的具体描述将会在后面参照图4进行详细阐述。The
控制与处理器13可以是独立的专用电路,比如包含CPU、存储器、总线等组成的专用SOC芯片、FPGA芯片、ASIC芯片等等,也可以包含通用处理电路,比如当TOF深度相机被集成到如手机、电视、电脑等智能终端中去,终端的处理电路可以作为该控制与处理器13的至少一部分。The control and
在一些实施例中,控制与处理器13用于提供光源发射激光时所需的调制信号(发射信号),光源在调制信号的控制下向待测物发射脉冲光束;此外,控制与处理器13还提供图像传感器121各像素中抽头的解调信号(采集信号),抽头在解调信号的控制下采集包含待测物反射回的脉冲光束所产生的电荷信号,并基于该电荷信号计算出相位差以获得物体20的距离。一般地,除了待测物反射回的反射脉冲光束之外还会有一些背景光、干扰光等光束。具体的,控制与处理器13所执行的调制解调方法、控制、处理等功能可采用中国专利申请公开第201910385779.6号、第201910386369.3号中描述的方案。可以理解的是,为了便于阐述,本申请实施例中均以PM-iTOF调制解调方法为例进行说明,但并不局限于PM-iTOF调制解调。In some embodiments, the control and
具体的,参照中国专利申请公开第201910385779.6号中图2所示,图2实施例中示例性地给出了两个帧周期T内的激光发射信号(调制信号)、接收信号以及采集信号(解调信号)的时序示意图。其中各个信号的含义为:Sp表示光源的脉冲发射信号,每个脉冲发射信号表示一次脉冲光束;Sr表示脉冲光被物体反射回的反射光信号,每个反射光信号表示被待测物体反射回的相应的脉冲光束,其在时间线(图中横轴)上相对于脉冲发射信号有一定的延迟,延迟的时间t即是需要计算的脉冲光束的飞行时间;S1表示像素第一抽头的脉冲采集信号、S2表示像素第二抽头的脉冲采集信号、S3表示第三抽头的脉冲采集信号,每个脉冲采集信号表示抽头采集了该信号对应的时间段内像素所产生的电荷信号(电子)。Specifically, referring to Fig. 2 in Chinese Patent Application Publication No. 201910385779.6, the embodiment of Fig. 2 exemplarily shows the laser emission signal (modulated signal), received signal and collected signal (decoded signal) within two frame periods T The timing diagram of the modulation signal). The meaning of each signal is: Sp represents the pulse emission signal of the light source, each pulse emission signal represents a pulse beam; Sr represents the reflected light signal of the pulsed light reflected back by the object, and each reflected light signal represents the reflected light from the object to be measured. There is a certain delay relative to the pulse emission signal on the time line (horizontal axis in the figure), and the delayed time t is the flight time of the pulse beam to be calculated; S1 represents the pulse of the first tap of the pixel Acquisition signal, S2 represents the pulse acquisition signal of the second tap of the pixel, S3 represents the pulse acquisition signal of the third tap, and each pulse acquisition signal represents that the tap collects the charge signal (electron) generated by the pixel in the time period corresponding to the signal.
整个帧周期T被分成两个时间段Ta以及Tb,其中Ta表示像素各抽头进行电荷采集与存储的时间段,Tb表示电荷信号被读出的时间段。Ta中,在反射光 信号被物体反射回像素时,各抽头在其脉冲时间段内对像素上产生的电子进行收集。其中,第一抽头、第二抽头、第三抽头分别依次进行电荷采集与存储,分别获取电荷量q1、q2以及q3,如此完成一个脉冲周期Tp。图2中,在单个帧周期中包含两个脉冲周期Tp,共发射了两次激光脉冲信号,因此在Tb时间段各个抽头共收集及读出总电荷量为两次采集的光信号对应电荷量的和,可以理解的是,在单帧周期内,脉冲周期Tp或者激光脉冲信号发射的次数可以是K次,K不小于1,也可以高达几万次,甚至更高,具体的数目根据实际的需求来确定,另外,不同帧周期内的脉冲次数也可以不等。The entire frame period T is divided into two time periods Ta and Tb, where Ta represents the time period during which each tap of the pixel performs charge collection and storage, and Tb represents the time period during which the charge signal is read out. In Ta, each tap collects electrons generated on the pixel during its pulse period as the reflected light signal is reflected back to the pixel by the object. The first tap, the second tap, and the third tap perform charge collection and storage in sequence, respectively, to obtain the charge amounts q1, q2, and q3, so as to complete one pulse period Tp. In Figure 2, two pulse periods Tp are included in a single frame period, and a total of two laser pulse signals are emitted. Therefore, in the Tb period, each tap collects and reads out the total charge amount corresponding to the charge amount of the optical signal collected twice. It can be understood that in a single frame period, the pulse period Tp or the number of times the laser pulse signal is emitted can be K times, and K is not less than 1, and can also be as high as tens of thousands of times, or even higher. The specific number is based on actual In addition, the number of pulses in different frame periods can also be different.
因此,在Tb时间段各个抽头共收集及读出的总电荷量为各个抽头在整个帧周期T内多次采集的光信号对应的电荷量的和,单个帧周期内各个抽头的总电荷量可以表示如下:Therefore, the total charge collected and read out by each tap in the Tb time period is the sum of the charges corresponding to the optical signals collected multiple times by each tap in the entire frame period T, and the total charge of each tap in a single frame period can be It is expressed as follows:
Qi=∑qi,i=1,2,3 (2)Qi=∑qi,i=1,2,3 (2)
根据公式(2)可得第一抽头、第二抽头、第三抽头单帧周期内总电荷量为Q1、Q2和Q3。According to formula (2), the total charge amount in a single frame period of the first tap, the second tap, and the third tap can be obtained as Q1, Q2 and Q3.
在传统的调制解调方式中,测量范围被限定在单个脉冲宽度时间内,即假定反射光信号被第一抽头以及第二抽头采集,第三抽头则用于采集环境光信号,这样基于各个抽头所采集到的总电荷量,控制与处理器可以根据下式对脉冲光信号从发射到反射至像素上的总光飞行距离进行计算:In the traditional modulation and demodulation method, the measurement range is limited to a single pulse width time, that is, it is assumed that the reflected light signal is collected by the first tap and the second tap, and the third tap is used to collect the ambient light signal. For the collected total charge, the control and processor can calculate the total light flight distance of the pulsed light signal from emission to reflection to the pixel according to the following formula:
其中,c为光速;T h为单此曝光激光脉宽;Q1、Q2、Q3分别为3个抽头的总电荷量。 Among them, c is the speed of light; Th is the pulse width of the single exposure laser; Q1, Q2, Q3 are the total charge of the three taps respectively.
可以理解的是,在实际情况中,第一抽头和第二抽头除了采集到反射光信号之外也会采集到环境光信号,并且根据公式(2)可以看出,当返回的激光全部落在第二抽头,这样能探测的最大距离 如果返回的激光落在第二抽头和第三抽头曝光使能信号之间,或者落在第三抽头和下一个周期的第一抽头 之间,那么超出了测量范围,以至于得到了错误的结果,如果需要测量更远的距离,就必须增加激光的脉宽,但这样会导致测量精度降低。 It can be understood that in the actual situation, the first tap and the second tap will collect ambient light signals in addition to the reflected light signals, and according to formula (2), it can be seen that when all the returned laser light falls on Second tap, so the maximum distance that can be detected If the returned laser falls between the second tap and the third tap exposure enable signal, or between the third tap and the first tap of the next cycle, the measurement range is exceeded and an erroneous result is obtained , if you need to measure longer distances, you must increase the pulse width of the laser, but this will reduce the measurement accuracy.
为了提升测量距离,可以根据如图2所示的光信号发射与采集的示意图,不对收集背景光的抽头进行固定,此时,反射光信号不仅可以落入到第一抽头与第二抽头的使能信号之间,也可以允许落入到第二抽头与第三抽头使能之间,甚至允许落入到第三抽头与下一个脉冲周期Tp内的第一抽头上(针对至少两个脉冲周期Tp以上的情形)。这里所述的“落入到抽头上”指的是可以被抽头采集。In order to improve the measurement distance, according to the schematic diagram of optical signal emission and collection shown in Figure 2, the tap for collecting background light can not be fixed. At this time, the reflected light signal can not only fall into the first tap and the second tap. It can also be allowed to fall between the second tap and the third tap enable, or even allow it to fall between the third tap and the first tap in the next pulse period Tp (for at least two pulse periods) above Tp). The term "falls on the tap" as used herein means that it can be captured by the tap.
考虑到接收的反射光信号的抽头所采集到的电荷量要大于仅包含背景光信号的抽头,控制与处理器13对所获取的三个总电荷量Q1、Q2以及Q3进行判断,以确定获取包含反射光信号激光电子的抽头和/或获取仅包含背景信号的抽头,对于三抽头图像传感器而言,共有以下三种可能:Considering that the amount of charge collected by the tap of the received reflected light signal is greater than that of the tap containing only the background light signal, the control and processor 13 judges the three total charge amounts Q1, Q2 and Q3 obtained to determine the obtained amount of charge. For a three-tap image sensor, there are three possibilities for taps containing the reflected light signal laser electronics and/or acquiring taps containing only the background signal:
(1)、若Q1、Q2采集反射光信号,Q3采集背景光信号,表达式如下:(1) If Q1 and Q2 collect the reflected light signal, and Q3 collects the background light signal, the expression is as follows:
(2)、若Q2、Q3采集反射光信号,Q1采集背景光信号,表达式如下:(2) If Q2 and Q3 collect the reflected light signal, and Q1 collects the background light signal, the expression is as follows:
(3)、若Q1、Q3采集反射光信号,Q2采集背景光信号,表达式如下:(3) If Q1 and Q3 collect the reflected light signal, and Q2 collects the background light signal, the expression is as follows:
相对于公式(3),可以明显看到测量距离得到了延伸,最大测量飞行距离由传统的调制解调方法中的 扩大到 因而相对于传统调制解调方法其测量距离扩大了3倍。 Compared with formula (3), it can be clearly seen that the measurement distance has been extended, and the maximum measurement flight distance is determined by the traditional modulation and demodulation method. Expanded to Therefore, compared with the traditional modulation and demodulation method, the measurement distance is expanded by 3 times.
上述调制解调方法虽然实现了3倍的测量距离,在不增加脉冲脉宽的情况下,仍无法满足更远距离的测量。Although the above-mentioned modulation and demodulation method achieves three times the measurement distance, it still cannot satisfy the measurement of longer distances without increasing the pulse width.
参照中国专利申请公开第201910386369.3号的图3所示的实施例,图3实施例中借用CW调制方式中的多频扩展方式,可以满足更远距离的测量。Referring to the embodiment shown in FIG. 3 of Chinese Patent Application Publication No. 201910386369.3, in the embodiment of FIG. 3, the multi-frequency spreading method in the CW modulation method is borrowed, which can meet the measurement of longer distances.
图3实施例记载一种多频调制解调的方法,即相邻帧中采用不同的调制解调频率,为了便于阐述,以相邻的两个帧周期和两个调制频率为例进行说明,相邻的帧周期内,脉冲发射次数K=2(也可以为多次,不同帧次数也可以不同),像素的抽头数N=3,脉冲周期分别为Tp1、Tp2,脉冲宽度分别为Th1、Th2,三个抽头每次脉冲积累电荷分别为q11、q12、q21、q22、q31、q32,根据前述公式(2)可得总电荷量为Q11、Q12、Q21、Q22、Q31、Q32。假设相邻帧曝光时间内物体的距离不变,控制与处理器13在接收到各个抽头的总电荷量之后,利用图2所示的调制解调方法分别对各帧周期内的距离进行测量,并通过上述的判断方法计算出各个帧周期内的测量距离,接着采用最小公倍数法可以获得最终的距离。The embodiment of FIG. 3 describes a method for multi-frequency modulation and demodulation, that is, different modulation and demodulation frequencies are used in adjacent frames. For ease of explanation, two adjacent frame periods and two modulation frequencies are used as examples for description. In the adjacent frame period, the number of pulse transmissions K=2 (it can also be multiple times, and the number of frames can also be different), the number of taps of the pixel N=3, the pulse periods are Tp1, Tp2, and the pulse widths are Th1, respectively. Th2, the accumulated charges of the three taps per pulse are q11, q12, q21, q22, q31, and q32 respectively. Assuming that the distance of the object remains unchanged during the exposure time of adjacent frames, after receiving the total charge of each tap, the control and
假设在图3所示实施例中,Tp=9ns,采用图2中的调制解调方法最大测量飞行距离为1.35m;若Tp=15ns,最大测量飞行距离为2.25m。若在图2所示的调制解调方法基础上再采用多频调制解调方法,比如在一些实施例中,Tp1=9ns,Tp2=15ns,9ns与15ns的最小公倍数是45ns,45ns对应的最远测量目标距离可达到6.75m。Assuming that in the embodiment shown in FIG. 3, Tp=9ns, the maximum measured flight distance using the modulation and demodulation method in FIG. 2 is 1.35m; if Tp=15ns, the maximum measured flight distance is 2.25m. If a multi-frequency modulation and demodulation method is used based on the modulation and demodulation method shown in FIG. 2, for example, in some embodiments, Tp1=9ns, Tp2=15ns, the least common multiple of 9ns and 15ns is 45ns, and the maximum value corresponding to 45ns is 45ns. The long-distance measurement target distance can reach 6.75m.
基于前述调制解调方法,本申请实施例提出一种包括多抽头像素的图像传感器,能够实现上述调制解调方法,从而实现TOF深度相机的远距离、高精度的测量。Based on the aforementioned modulation and demodulation method, the embodiment of the present application proposes an image sensor including multi-tap pixels, which can implement the above-mentioned modulation and demodulation method, thereby realizing long-distance and high-precision measurement of the TOF depth camera.
参照图4所示,图4是本申请一个实施例的图像传感器的部分示意性布局图示。图4示出的图像传感器121接收经物体20反射的一部分反射光40,并根据该反射光计算三个抽头累积的电荷信号Q1、Q2和Q3,根据该电荷量可以利用前文叙述的三种可能性的表达式计算物体的距离;可以理解的是,本申请实施例中以三个抽头为例进行说明,但不限于三抽头。Referring to FIG. 4 , FIG. 4 is a partial schematic layout diagram of an image sensor according to an embodiment of the present application. The
为了便于说明,图4中的图像传感器121中的像素阵列42示出布置为3×3阵列的9个像素;实际上,像素阵列可包含在多个行和列中的成千上万或数百万像素。在具体实施例中,像素阵列42中的每个像素可具有相同的配置,因此如图4所示每个像素使用相同的附图标记“41”表示。For ease of illustration,
除了像素阵列42,图4的实施例中的图像传感器121还可包括行解码器/驱动器47、列解码器53和像素列单元54。像素列单元54包括用于在3D成像器件使用的相关双采样(CDS)和列特定模数转换器(ADC)的电路。在一些实施例中,像素中的每列可具有一个ADC。在具体实施例中,行解码器/驱动器47、列解码器53和像素列单元54可为图1所示的控制与处理器13的一部分。在图4的实施例中,行解码器/驱动器47示出为向一行像素中的每个像素41提供8个不同信号作为输入,以控制像素阵列42中的像素并从而能够生成列特定PIXOUT(像素输出信号)50,51,52。图4中的标号44,45,46的箭头示出了对相应行中的每个像素41输入特定的信号。这些信号包括:防溢出信号(DRN)、重置信号(RST)、电荷存储信号(SG)、三个抽头的曝光控制信号(MG1、MG2、MG3)和行选择信号(SEL)。In addition to the
在一些实施例中,行选择(SEL)信号用于选择像素适当的行。行解码器/驱动器47可经由行地址/控制输入47解码以使其能够使用SEL信号选择适当的行并且将对应的RST、TG和其它信号提供至选择解码的行。RST信号可被施加到选择的行中的像素以将这些像素重置为预先确定的高电压电平。DRN信号可在曝光结束后将光电二极管(PD)收集的电子释放到电源,避免收集电子溢出到三个抽头的电荷存储部分。In some embodiments, a row select (SEL) signal is used to select the appropriate row of pixels. Row decoder/
像素列单元54可从行中的像素接收PIXOUT信号50,51,52,并处理这些信号以计算电荷量Q1、Q2和Q3,根据这些电荷量计算物体的距离。列选择允许顺序接收来自由对应的SEL信号选择的行中的每个像素的像素输出。控制与处理器13可提供适当的行地址输入以选择像素的行并且也可将适当的列地址输 入提供至列解码器53,以使像素列单元54能够从选择的行中的个别像素接收输出(PIXOUT)。The
图5是根据本申请一实施例图像传感器像素电路的原理框图,为方便说明,本申请实施例中以三抽头的像素为例进行说明。在图4的实施例中,像素阵列42中的每个像素41可具有图5中的像素配置。FIG. 5 is a schematic block diagram of a pixel circuit of an image sensor according to an embodiment of the present application. For the convenience of description, a three-tap pixel is used as an example for description in the embodiment of the present application. In the embodiment of FIG. 4 , each
参照图5所示,图像传感器像素电路100包括:电荷生成单元60、电荷存储单元70、电荷传输单元80和读出单元90。Referring to FIG. 5 , the image
电荷生成单元60用于将入射的光信号转换成电信号,其包括有光电二极管(PD)以及多个曝光控制晶体管,通过多个曝光控制晶体管交替地将光电二极管累积的电荷存储至对应的电荷存储单元。具体地,本申请实施例中,电信号根据第一曝光控制晶体管(MG1)生成第一电信号,根据第二曝光控制晶体管(MG2)生成第二电信号,根据第三曝光控制晶体管(MG3)生成第三电信号。MG1、MG2和MG3在全局曝光的时候,交替地将光电二极管累积的电荷存储至对应的电荷存储单元。The
电荷存储单元70连接所述电荷生成单元,被配置为存储所述电信号。本申请实施例中,电荷存储单元包括第一电荷存储单元SG1、第二电荷存储单元SG2和第三电荷存储单元SG3,以分别与第一曝光晶体管MG1、第二曝光晶体管MG2和第三曝光晶体管MG3连接,被配置为分别存储第一电信号、第二电信号和第三电信号。在一些实施例中,电荷存储单元可以为电容、PN结或者其它,在此对其不做限制。The
电荷传输单元80连接所述电荷存储单元,被配置为将所述电信号传输至读出单元。本申请实施例中,电荷传输单元80包括第一电荷传输单元TG1、第二电荷传输单元TG2和第三电荷传输单元TG3,以分别连接所述第一电荷存储单元SG1、第二电荷存储单元SG2和第三电荷存储单元SG3,用于将电荷存储单元存储的电荷传输至读出单元。在一些实施例中,电荷传输单元可以为电子传输晶体管。The
读出单元90被配置为将所述电荷存储单元的电信号作为像素传输以及读取所述像素的信号。具体地,本申请实施例中,读出单元90被配置将所述第一电荷存储单元SG1、第二电荷存储单元SG2和第三电荷存储单元SG3存储的电荷作为像素传输以及读取所述像素的信号。The
在一些实施例中,图像传感器像素电路100还包括防溢出晶体管(DRN),防溢出晶体管的源极连接所述电荷生成单元,被配置为避免曝光结束后,所述电荷生成单元的电子溢出至所述电荷存储单元。具体地,在本申请实施例中,所述防溢出晶体管的源极连接所述光电二极管,以避免曝光结束后,光电二极管一直收集电子溢出至电荷存储单元。In some embodiments, the image
在一些实施例中,读出单元90包括有复位晶体管(RST)、源极跟随晶体管(SF)、选择晶体管(SEL)和浮置扩散节点(FD)。其中,浮置扩散节点分别连接电荷传输单元和复位晶体管的源极,复位晶体管被配置为根据复位控制信号重置浮置扩散节点的电压。一旦像素被选择晶体管SEL选择并被复位晶体管RST重置,则关闭电荷存储单元传输电子至浮置扩散节点FD,此时将浮置扩散节点FD处的电压作为PIXOUT输出,并传输至ADC单元被转换成数字信号。In some embodiments, the
在一些实施例中,读出单元90包括第一读出单元901、第二读出单元902和第三读出单元903。如图6所示,第一读出单元901连接第一电荷传输单元、第二读出单元902连接第二电荷传输单元、第三读出单元903连接第三电荷传输单元,以分别读取第一电荷存储单元、第二电荷存储单元和第三电荷存储单元的电荷。In some embodiments, the
下面以第一读出单元901为例进行说明,第一读出单元901的复位晶体管(RST)的漏极连接电压源,根据复位控制信号重置浮动扩散节点(FD)的电压,接着第一电荷传输单元将第一电荷存储单元存储的电子转移至浮置扩散节点FD,第一读出单元的源极跟随晶体管(SF)的栅极连接至浮置扩散节点(FD),其漏极连接电压源,源极跟随晶体管对浮置扩散节点的电压信号放大作为PIXOUT1输出,并传输至ADC单元被转换成适当的数字信号。可以理解的是, 第二读出单元、第三读出单元和第一读出单元结构和传输方式一样,在此不再赘述。The first readout unit 901 is taken as an example for description below. The drain of the reset transistor (RST) of the first readout unit 901 is connected to a voltage source, and the voltage of the floating diffusion node (FD) is reset according to the reset control signal. The charge transfer unit transfers the electrons stored in the first charge storage unit to the floating diffusion node FD, and the gate of the source follower transistor (SF) of the first readout unit is connected to the floating diffusion node (FD), and the drain thereof is connected The voltage source, the source follower transistor amplifies the voltage signal of the floating diffusion node as the output of PIXOUT1, and transmits it to the ADC unit to be converted into an appropriate digital signal. It can be understood that the structures and transmission modes of the second readout unit, the third readout unit and the first readout unit are the same, and details are not described herein again.
通过将三个读出单元分开,且每个读出单元都有单独的浮置扩散节点FD,这样浮置扩散节点FD上的寄生电容值较小,可以做到较大的转换增益。但是这样会增加单个像素里面的晶体管数量,从而减小了填充因子,此外,通过在时间上固定背景光,存储单元存储的电荷被转移至相应的浮置扩散节点FD中,由于背景光产生的电荷量理论上是相同的,但是因为工艺生产偏差,比如源极跟随器(SF)的增益偏差,会增加多个时间窗之间的增益误差,给后续标定增大了难度。By separating the three readout units, and each readout unit has a separate floating diffusion node FD, the parasitic capacitance value on the floating diffusion node FD is small, and a large conversion gain can be achieved. However, this will increase the number of transistors in a single pixel, thereby reducing the fill factor. In addition, by fixing the background light in time, the charge stored in the memory cell is transferred to the corresponding floating diffusion node FD. The amount of charge is theoretically the same, but due to process production deviations, such as the gain deviation of the source follower (SF), the gain error between multiple time windows will increase, making subsequent calibration more difficult.
在一些实施例中,参照图7所示。第一电荷传输单元、第二电荷传输单元和第三电荷传输单元连接同一个读出单元。复位晶体管(RST)、源极跟随晶体管(SF)、选择晶体管(SEL)和浮置扩散节点(FD)共用作为读出单元的一部分。图7所示电路中的第一电荷存储单元、第二电荷存储单元和第三电荷存储单元的存储电荷依次通过第一电荷传输单元、第二电荷传输单元和第三电荷传输单元分时传送至同一个浮置扩散节点,并将浮置扩散节点FD处的电压通过同一路读出电路的PIXOUT输出,依次传输至ADC单元。可以理解的是,浮置扩散节点FD处的电压获取方式与图6所示实施例中第一读出单元中浮置扩散节点FD电压获取方式一致,在此不再赘述。In some embodiments, reference is made to FIG. 7 . The first charge transfer unit, the second charge transfer unit and the third charge transfer unit are connected to the same readout unit. A reset transistor (RST), a source follower transistor (SF), a select transistor (SEL) and a floating diffusion node (FD) are shared as part of the readout cell. The stored charges of the first charge storage unit, the second charge storage unit and the third charge storage unit in the circuit shown in FIG. 7 are sequentially transferred to the first charge transfer unit, the second charge transfer unit and the third charge transfer unit in a time-sharing manner The same floating diffusion node, and the voltage at the floating diffusion node FD is output through the PIXOUT of the same readout circuit, and then transmitted to the ADC unit in turn. It can be understood that the voltage acquisition method at the floating diffusion node FD is the same as the voltage acquisition method of the floating diffusion node FD in the first readout unit in the embodiment shown in FIG. 6 , and details are not described herein again.
通过将第一电荷传输单元、第二电荷传输单元和第三电荷传输单元连接同一个读出单元,这样大大减少了像素里面的晶体管,提升了像素的填充因子,也避免了不同读出单元由于工艺偏差带来深度上的增益误差,减少了后续的校正工作。By connecting the first charge transfer unit, the second charge transfer unit and the third charge transfer unit to the same readout unit, the number of transistors in the pixel is greatly reduced, the fill factor of the pixel is improved, and the Process deviation brings gain error in depth, reducing subsequent correction work.
参照图8所示,在一些实施例中,为了针对iTOF应用场景的复杂性,比如室外强环境光。读出单元还包括转换增益控制晶体管(LG)和双转换增益电容(CLG),转换增益控制晶体管连接至复位晶体管和浮置扩散节点之间,双转换增益电容连接固定电平和转换增益控制晶体管的漏极,这样通过控制转换增益 控制晶体管的栅极电压,实现了转换增益控制。可以理解的是,双转换增益的电容可以为MIM、MOM、MOS电容、寄生电容等实现。Referring to FIG. 8 , in some embodiments, in order to address the complexity of iTOF application scenarios, such as outdoor strong ambient light. The readout unit further includes a conversion gain control transistor (LG) and a double conversion gain capacitor (CLG), the conversion gain control transistor is connected between the reset transistor and the floating diffusion node, and the double conversion gain capacitor is connected between the fixed level and the conversion gain control transistor. drain, so that the conversion gain control is achieved by controlling the gate voltage of the conversion gain control transistor. It can be understood that the capacitance of the double conversion gain can be realized by MIM, MOM, MOS capacitance, parasitic capacitance, and the like.
在第一帧关闭转换增益控制晶体管,浮置扩散节点的积分电容是由复位晶体管(RST)、源极跟随晶体管(SF)、选择晶体管(SEL)带来的寄生电容以及浮置扩散节点到衬底的结电容组成,电容值比较小,从而可实现一个高转换增益;在得到三个抽头各自的具有高转换增益的图像帧后,使能增益控制晶体管,此时浮置扩散节点的积分电容在原来基础上增加了一个双转换增益电容CLG,积分电容值变大,降低了像素的转换增益,三个抽头依次获得各自的具有低转换增益的图像帧,最后通过算法对这2帧深度图像进行融合,可实现具有高动态范围的3D深度信息。In the first frame, the conversion gain control transistor is turned off, and the integral capacitance of the floating diffusion node is the parasitic capacitance brought by the reset transistor (RST), the source follower transistor (SF), the select transistor (SEL), and the floating diffusion node to the liner. It is composed of the bottom junction capacitance, and the capacitance value is relatively small, so that a high conversion gain can be achieved; after obtaining the image frame with high conversion gain of each of the three taps, the gain control transistor is enabled, and the integral capacitance of the floating diffusion node is now floating. On the basis of the original, a double conversion gain capacitor CLG is added, and the value of the integral capacitor becomes larger, which reduces the conversion gain of the pixel. The three taps obtain their respective image frames with low conversion gain in turn. For fusion, 3D depth information with high dynamic range can be achieved.
在一些实施例中,读出单元90还包括相关双采样(CDS)电路(未图示),在相关双采样电路中,像素的输出可被测量两次:一次在已知的条件下,另一次在未知的条件下,可从在未知条件下测量的值减去在已知条件下测量的值,以生成具有与测量的物理量有已知关系的值,代表接收光的像素特定部分的光电子电荷。通过使用相关双采样,通过在每个积分时段结束时从像素的信号电压去除像素的参考电压(比如被重置后的像素电压),从而可降低噪声。In some embodiments,
要说明的是,图4实施例图像传感器中,像素阵列42中的像素为前述图5-图8任一实施例方案中记载的像素,详细参照图5-图8的描述,在图4所示图像传感器实施例中不作赘述。同样,图1实施例的深度相机中,所述采集模组包括的图像传感器121为图4实施例方案中记载的图像传感器,详细不再赘述。It should be noted that, in the image sensor of the embodiment of FIG. 4 , the pixels in the
可以理解的是,以上内容是结合具体/优选的实施方式对本申请所作的进一步详细说明,不能认定本申请的具体实施只局限于这些说明。对于本申请所属技术领域的普通技术人员来说,在不脱离本申请构思的前提下,其还可以对这些已描述的实施方式做出若干替代或变型,而这些替代或变型方式都应当视为属于本申请的保护范围。在本说明书的描述中,参考术语“一种实施例”、“一些实施例”、“优选实施例”、“示例”、“具体示例”、或“一些示例”等的描述意 指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本申请的至少一个实施例或示例中。It can be understood that the above content is a further detailed description of the present application in conjunction with specific/preferred embodiments, and it cannot be considered that the specific implementation of the present application is limited to these descriptions. For those of ordinary skill in the technical field of the present application, without departing from the concept of the present application, they can also make several substitutions or modifications to the described embodiments, and these substitutions or modifications should be regarded as It belongs to the protection scope of this application. In the description of this specification, reference to the terms "one embodiment," "some embodiments," "preferred embodiment," "example," "specific example," or "some examples" or the like is meant to be used in conjunction with the description. A particular feature, structure, material, or characteristic described by an example or example is included in at least one embodiment or example of the present application.
在本说明书中,对上述术语的示意性表述不必须针对的是相同的实施例或示例。而且,描述的具体特征、结构、材料或者特点可以在任一个或多个实施例或示例中以合适的方式结合。此外,在不相互矛盾的情况下,本领域的技术人员可以将本说明书中描述的不同实施例或示例以及不同实施例或示例的特征进行结合和组合。尽管已经详细描述了本申请的实施例及其优点,但应当理解,在不脱离由所附权利要求限定的范围的情况下,可以在本文中进行各种改变、替换和变更。In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, those skilled in the art may combine and combine the different embodiments or examples described in this specification, as well as the features of the different embodiments or examples, without conflicting each other. Although the embodiments of the present application and their advantages have been described in detail, it should be understood that various changes, substitutions and alterations can be made herein without departing from the scope as defined by the appended claims.
此外,本申请的范围不旨在限于说明书中所述的过程、机器、制造、物质组成、手段、方法和步骤的特定实施例。本领域普通技术人员将容易理解,可以利用执行与本文所述相应实施例基本相同功能或获得与本文所述实施例基本相同结果的目前存在的或稍后要开发的上述披露、过程、机器、制造、物质组成、手段、方法或步骤。因此,所附权利要求旨在将这些过程、机器、制造、物质组成、手段、方法或步骤包含在其范围内。Furthermore, the scope of the present application is not intended to be limited to the particular embodiments of the process, machine, manufacture, composition of matter, means, methods and steps described in the specification. Those of ordinary skill in the art will readily appreciate that the above disclosures, processes, machines, now existing or later developed, that perform substantially the same functions or achieve substantially the same results as the corresponding embodiments described herein can be utilized. Manufacture, composition of matter, means, method or step. Accordingly, the appended claims are intended to include within their scope such processes, machines, manufacture, compositions of matter, means, methods, or steps.
Claims (10)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010659009.9A CN111885316B (en) | 2020-07-09 | 2020-07-09 | Image sensor pixel circuit, image sensor and depth camera |
| CN202010659009.9 | 2020-07-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2022007449A1 true WO2022007449A1 (en) | 2022-01-13 |
Family
ID=73150530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/CN2021/085005 Ceased WO2022007449A1 (en) | 2020-07-09 | 2021-04-01 | Image sensor pixel circuit, image sensor, and depth camera |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN111885316B (en) |
| WO (1) | WO2022007449A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114630062A (en) * | 2022-03-10 | 2022-06-14 | 杭州指数星空智能设备制造有限责任公司 | Method for improving dynamic range of TOF sensor |
| CN116156298A (en) * | 2023-04-11 | 2023-05-23 | 安徽医科大学 | Endoscope high-definition video processing system and method based on integration of sensing, memory and computing |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111885316B (en) * | 2020-07-09 | 2022-07-29 | 深圳奥辰光电科技有限公司 | Image sensor pixel circuit, image sensor and depth camera |
| CN112615995B (en) * | 2020-12-28 | 2022-07-01 | 维沃移动通信有限公司 | Pixel circuit, image sensor, camera module and electronic equipment |
| CN115308756B (en) * | 2021-05-07 | 2025-02-11 | 宁波飞芯电子科技有限公司 | A pixel circuit, image sensor and detection device |
| CN113359144A (en) * | 2021-07-23 | 2021-09-07 | 思特威(上海)电子科技股份有限公司 | Time-of-flight sensor pixel circuit and configuration method thereof |
| JP2024546634A (en) * | 2021-12-09 | 2024-12-26 | ソニーセミコンダクタソリューションズ株式会社 | Time-of-Flight Sensors and Electronic Devices |
| CN120380743A (en) * | 2023-02-27 | 2025-07-25 | 华为技术有限公司 | Imaging apparatus, method for driving imaging apparatus, and electronic apparatus |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101877769A (en) * | 2009-04-30 | 2010-11-03 | 美商豪威科技股份有限公司 | Image sensor with global shutter |
| CN102346250A (en) * | 2010-06-09 | 2012-02-08 | 汤姆森特许公司 | Time-of-flight imager |
| CN102822693A (en) * | 2010-01-06 | 2012-12-12 | 美萨影像股份公司 | Demodulation Sensor with Separate Pixel and Storage Arrays |
| CN104067607A (en) * | 2012-01-13 | 2014-09-24 | 全视科技有限公司 | Shared time-of-flight pixels |
| JP2017112420A (en) * | 2015-12-14 | 2017-06-22 | 株式会社ニコン | Imaging device and imaging apparatus |
| WO2019118786A1 (en) * | 2017-12-13 | 2019-06-20 | Magic Leap, Inc. | Global shutter pixel circuit and method for computer vision applications |
| CN111034177A (en) * | 2017-09-14 | 2020-04-17 | 松下知识产权经营株式会社 | Solid-state imaging device and imaging device provided with same |
| CN111885316A (en) * | 2020-07-09 | 2020-11-03 | 深圳奥辰光电科技有限公司 | Image sensor pixel circuit, image sensor and depth camera |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9549158B2 (en) * | 2012-04-18 | 2017-01-17 | Brightway Vision Ltd. | Controllable single pixel sensors |
| US10750097B2 (en) * | 2017-08-14 | 2020-08-18 | Facebooke Technologies, Llc | Varying exposure time of pixels in photo sensor using motion prediction |
| CN110412607B (en) * | 2018-04-28 | 2021-12-03 | 思特威(上海)电子科技股份有限公司 | TOF pixel circuit with high dynamic range and ranging system |
| CN110557582B (en) * | 2018-06-19 | 2021-09-17 | 思特威(上海)电子科技股份有限公司 | 3D imaging image sensor pixel circuit based on TOF and ranging system |
-
2020
- 2020-07-09 CN CN202010659009.9A patent/CN111885316B/en active Active
-
2021
- 2021-04-01 WO PCT/CN2021/085005 patent/WO2022007449A1/en not_active Ceased
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101877769A (en) * | 2009-04-30 | 2010-11-03 | 美商豪威科技股份有限公司 | Image sensor with global shutter |
| CN102822693A (en) * | 2010-01-06 | 2012-12-12 | 美萨影像股份公司 | Demodulation Sensor with Separate Pixel and Storage Arrays |
| CN102346250A (en) * | 2010-06-09 | 2012-02-08 | 汤姆森特许公司 | Time-of-flight imager |
| CN104067607A (en) * | 2012-01-13 | 2014-09-24 | 全视科技有限公司 | Shared time-of-flight pixels |
| JP2017112420A (en) * | 2015-12-14 | 2017-06-22 | 株式会社ニコン | Imaging device and imaging apparatus |
| CN111034177A (en) * | 2017-09-14 | 2020-04-17 | 松下知识产权经营株式会社 | Solid-state imaging device and imaging device provided with same |
| WO2019118786A1 (en) * | 2017-12-13 | 2019-06-20 | Magic Leap, Inc. | Global shutter pixel circuit and method for computer vision applications |
| CN111885316A (en) * | 2020-07-09 | 2020-11-03 | 深圳奥辰光电科技有限公司 | Image sensor pixel circuit, image sensor and depth camera |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114630062A (en) * | 2022-03-10 | 2022-06-14 | 杭州指数星空智能设备制造有限责任公司 | Method for improving dynamic range of TOF sensor |
| CN114630062B (en) * | 2022-03-10 | 2024-03-12 | 杭州指数星空智能设备制造有限责任公司 | Method for improving dynamic range of TOF sensor |
| CN116156298A (en) * | 2023-04-11 | 2023-05-23 | 安徽医科大学 | Endoscope high-definition video processing system and method based on integration of sensing, memory and computing |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111885316B (en) | 2022-07-29 |
| CN111885316A (en) | 2020-11-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111885316B (en) | Image sensor pixel circuit, image sensor and depth camera | |
| TWI524762B (en) | Shared flight time pixel | |
| CN110596722B (en) | System and method for measuring flight time distance with adjustable histogram | |
| CN110596721B (en) | Flight time distance measuring system and method of double-shared TDC circuit | |
| US11240445B2 (en) | Single-chip RGB-D camera | |
| TWI544232B (en) | Calibration circuitry and method for a time of flight imaging system | |
| CN107300705B (en) | Lidar ranging system and ranging method based on carrier modulation | |
| WO2021051479A1 (en) | Interpolation-based time of flight measurement method and system | |
| US9140795B2 (en) | Time of flight sensor with subframe compression and method | |
| TW202112122A (en) | Distance-image capturing apparatus and distance-image capturing method | |
| US20010024271A1 (en) | Distance measurement apparatus and distance measuring | |
| US20130140433A1 (en) | Sensor Pixel Array and Separated Array of Storage and Accumulation with Parallel Acquisition and Readout | |
| WO2021051481A1 (en) | Dynamic histogram drawing time-of-flight distance measurement method and measurement system | |
| WO2021051480A1 (en) | Dynamic histogram drawing-based time of flight distance measurement method and measurement system | |
| CN111885324B (en) | Image sensor, acquisition module and TOF depth camera | |
| US12181610B2 (en) | CMOS image sensor for direct time of flight measurement | |
| CN111885321B (en) | Germanium-silicon image sensor, acquisition module and TOF depth camera | |
| WO2020223981A1 (en) | Time flight depth camera and multi-frequency modulation and demodulation distance measuring method | |
| CN114300492A (en) | A device that captures a depth image of a scene | |
| CN115308756B (en) | A pixel circuit, image sensor and detection device | |
| CN111048540A (en) | Gated pixel unit and 3D image sensor | |
| Kuo et al. | A Half-Pulse 2-Tap Indirect Time-of-Flight Ranging Method with Sub-Frame Operation for Depth Precision Enhancement and Motion Artifact Suppression | |
| CN111885325A (en) | Image sensor, acquisition module and depth camera | |
| Park et al. | A Fully Digital Indirect Time-of-Flight Image Sensor with Multi-Frame Integration and Time-gated Single-Photon Counting Method | |
| CN116939387A (en) | Pixel structure capable of performing two-dimensional or three-dimensional compatible imaging and imaging method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 21838866 Country of ref document: EP Kind code of ref document: A1 |
|
| NENP | Non-entry into the national phase |
Ref country code: DE |
|
| 122 | Ep: pct application non-entry in european phase |
Ref document number: 21838866 Country of ref document: EP Kind code of ref document: A1 |