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WO2020200669A1 - Tank device for storing compressed fluids with a sensor device, method for producing a sensor device of the tank device - Google Patents

Tank device for storing compressed fluids with a sensor device, method for producing a sensor device of the tank device Download PDF

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Publication number
WO2020200669A1
WO2020200669A1 PCT/EP2020/056410 EP2020056410W WO2020200669A1 WO 2020200669 A1 WO2020200669 A1 WO 2020200669A1 EP 2020056410 W EP2020056410 W EP 2020056410W WO 2020200669 A1 WO2020200669 A1 WO 2020200669A1
Authority
WO
WIPO (PCT)
Prior art keywords
tank device
tank
sensor
coating
connection element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2020/056410
Other languages
German (de)
French (fr)
Inventor
Herbert Gruhn
Ingo Brauer
Tim Poljansek
Marc Fischer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of WO2020200669A1 publication Critical patent/WO2020200669A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/025—Special adaptations of indicating, measuring, or monitoring equipment having the pressure as the parameter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0044—Constructional details of non-semiconductive diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/05—Size
    • F17C2201/056—Small (<1 m3)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2209/00—Vessel construction, in particular methods of manufacturing
    • F17C2209/23—Manufacturing of particular parts or at special locations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/012—Hydrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/036—Very high pressure (>80 bar)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/043—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/01—Improving mechanical properties or manufacturing
    • F17C2260/011—Improving strength
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/02—Improving properties related to fluid or fluid transfer
    • F17C2260/024—Improving metering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/05—Improving chemical properties
    • F17C2260/053—Reducing corrosion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2265/00—Effects achieved by gas storage or gas handling
    • F17C2265/06—Fluid distribution
    • F17C2265/066—Fluid distribution for feeding engines for propulsion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/01—Applications for fluid transport or storage
    • F17C2270/0165—Applications for fluid transport or storage on the road
    • F17C2270/0168—Applications for fluid transport or storage on the road by vehicles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/01—Applications for fluid transport or storage
    • F17C2270/0165—Applications for fluid transport or storage on the road
    • F17C2270/0184—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/32—Hydrogen storage

Definitions

  • Tank device for storing compressed fluids with a Sen ⁇ sensor device, method for producing a sensor device of the
  • the invention relates to a tank device for storing condense ⁇ th fluids with a sensor device, in particular for an internal ⁇ fuel cells tank for storing hydrogen, for example for at ⁇ application in fuel cell vehicles. It further relates to the ⁇ invention a method of manufacturing the sensor device and a
  • Gaseous hydrogen pressure is, inter alia, gene for mobile applicatio ⁇ , eg. Bar stored in motor vehicles, having a pressure of 700.
  • the pressure sensor devices are therefore made from materials which generally have little or no susceptibility to hydrogen embrittlement.
  • the sensor devices are typically made of a suitable steel, for example of the martensite class.
  • Martensites are inexpensive and have a high mechanical Festig ⁇ on ness. Nevertheless, hydrogen embrittlement can also occur here, which can lead to damage to the sensor device. As a result, precise pressure information is no longer possible, which leads to an impairment of the functioning of the tank device.
  • the device according to the invention with the characterizing features of claim 1 has the advantage that a hydrogen diffusion barrier is generated by suitable coatings of the sensor device, so that the hydrogen is no longer in direct contact with the sensor device and so is more robust the sensor device and an optimized functioning of the entire tank device is achieved.
  • the tank device for storing compressed fluids, in particular hydrogen has at least one tank container and a sensor device.
  • the sensor device comprises a threaded connection element with an outer wall, in which threaded connection element a pressure bore is formed.
  • the Druckboh tion has an inner wall.
  • the inner wall of the pressure bore and / or the outer wall of the threaded connection element has a coating, the threaded connection element comprising steel from the martensite class.
  • the coating comprises aluminum oxide (Al 2 O3).
  • the coating comprises chromium oxide (Cr203).
  • the coating hafnia (HfCh) umfas ⁇ can sen.
  • the invention relates to a method for producing a coating of a Be ⁇ included in the above described tank system sensor device by means of an ALD process (atomic layer deposition, atomic layer deposition).
  • the coating has a thickness of 50 nm to 400 nm. This ensures optimum protection of the components involved from hydrogen embrittlement without impairing the functionality of the sensor device.
  • the pressure bore is designed in multiple stages.
  • the pressure ⁇ bore is cylindrically shaped. This can be achieved constructively simp ⁇ che and cost-effective production.
  • the sensor device comprises a Sensorel ⁇ ement, which sensor element comprises a pressure sensitive film in the form of a membrane. A proper functioning of the sensor device can thus be achieved.
  • the Sen ⁇ sorelement is fixedly connected connection element by means of a weld connection to the threaded Dean ⁇ .
  • the sensor element and the threaded connecting element are designed as one-piece component, which one-piece component is made by means of a silicon wafer process ⁇ forth.
  • the sensor element of a metal preferably, prepared from the class of martensite before ⁇ .
  • the tank described device for storing compressed flui ⁇ is preferably in a fuel cell arrangement for storing hydrogen for operating a fuel cell.
  • the tank described device for storing compressed flui ⁇ is preferably in a vehicle with a drive with gaseous fuels.
  • embodiments are a tank device for storing compressed fluids with a sensor device Darge ⁇ provides. It shows in
  • Fig. 1 shows a first embodiment of an inventive Sen ⁇ sorvorraum in longitudinal section
  • Fig. 2 shows a second embodiment of an inventive Sen ⁇ sorvorraum in longitudinal section
  • Fig. 3 is a tank system with an embodiment of the sensor device OF INVENTION ⁇ to the invention in longitudinal section. Description of the exemplary embodiments
  • Fig.l shows a first embodiment of a Sen ⁇ sensor device 1 according to the invention in longitudinal section.
  • the sensor device 1 comprises a sorelement 2 Sen ⁇ , a threaded connection element 4, and a screw element 10 on.
  • the threaded connection element 4 and the screw element 10 are firmly connected to one another.
  • the sensor element 2 has a pressure-sensitive thin layer in the form of a membrane 28 and is firmly connected to the threaded connection element 4 via a welded joint 8.
  • the threaded connecting element has a step-shaped pressure hole 6 with an inner wall 22, wherein the pressure bore 6 facing away from the end of the screw member 10 a 32 a Publ ⁇ voltage 30th
  • the sensor element 2 is arranged at an end of the pressure bore 6 facing away from the opening 30.
  • the threaded connection element 4 has an outer wall 24 on which a thread 26 is formed.
  • threaded connection element 4 and the sensor element 2 of a metal of the class of martensite is for example 1.4542, Herge ⁇ .
  • FIG. 2 shows a second exemplary embodiment of a sensor device 1 according to the invention in longitudinal section.
  • the second embodiment corresponds to continuously test the first embodiment in function and structure wei ⁇ .
  • the sensor element 2 and the thread chamfer ⁇ is closing element 4 formed as a one-piece component here.
  • the sensor element 2 is compactglast-circuit element 4 by means of silicon wafer processes on the thread chamfer ⁇ .
  • pressure bore 6 is cylindrical here.
  • the inner wall 22 of the pressure ⁇ bore and the outer wall 24 except for the thread 26 formed parts with a coating 12 by an ALD process. It is a method by means of chemical reactions very thin Schich ⁇ th of a starting material on a substrate material, here the inner ⁇ wall 22 and the outer wall 24, is deposited.
  • the coating 12 has a thickness of 50 nm to 400 nm.
  • a hydrogen diffusion barrier ⁇ can be achieved, so that the hydrogen not by the thread ⁇ connection element 4 by diffuse can, which could lead to a leak in the tank system fourteenth
  • the coating 12 comprises here aluminum ⁇ miniumoxid (AI2O3).
  • FIG. 3 shows a tank device 14 for storing compressed fluids, in particular hydrogen, in a schematic view.
  • This Tankvor device 14 is used, for example, in vehicles with fuel cell drive.
  • the tank device 14 has a tank container 18 in which the sensor device 1 is integrated. Furthermore, the tank device 14 supplies a fuel cell arrangement 16 with hydrogen via a connecting line 20,
  • the number of tank containers 18 can be selected as desired, with each tank container 18 having a sensor device 1 by means of which the pressure and the fill level in the respective tank container 18 can be precisely determined.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)

Abstract

The invention relates to a tank device (14) for storing compressed fluids, in particular hydrogen, comprising at least one tank container (18) and a sensor device (1), which sensor device (1) has a threaded connection element (4) and an outer wall (24). A pressure bore (6) is formed in the threaded connection element (4), said pressure bore (6) having an inner wall (22). Furthermore, the inner wall (22) of the pressure bore (6) and/or the outer wall (24) of the threaded connection element (4) has a coating (12), wherein the threaded connection element (4) comprises steel from the class of martensites.

Description

Beschreibung description

Tankvorrichtung zur Speicherung von verdichteten Fluiden mit einer Sen¬ sorvorrichtung, Verfahren zur Herstellung einer Sensorvorrichtung der Tank device for storing compressed fluids with a Sen ¬ sensor device, method for producing a sensor device of the

Tankvorrichtung Tank device

Die Erfindung betrifft eine Tankvorrichtung zur Speicherung von verdichte¬ ten Fluiden mit einer Sensorvorrichtung, insbesondere für einen Brenn¬ stoffzellentank zur Speicherung von Wasserstoff, beispielsweise zur An¬ wendung in Fahrzeugen mit Brennstoffzellenantrieb. Ferner betrifft die Er¬ findung ein Verfahren zur Herstellung der Sensorvorrichtung und eine The invention relates to a tank device for storing condense ¬ th fluids with a sensor device, in particular for an internal ¬ fuel cells tank for storing hydrogen, for example for at ¬ application in fuel cell vehicles. It further relates to the ¬ invention a method of manufacturing the sensor device and a

Brennstoffzellenanordnung mit solch einer Tankvorrichtung. Fuel cell arrangement with such a tank device.

Stand der Technik State of the art

Die DE 10 2017 204 240 Al beschreibt eine Tankvorrichtung zur Speicherung von Wasserstoff. Gasförmiger Druckwasserstoff wird u.a. für mobile Anwendun¬ gen, bspw. in Kraftfahrzeugen mit einem Druck von 700 bar gespeichert. DE 10 2017 204 240 A1 describes a tank device for storing hydrogen. Gaseous hydrogen pressure is, inter alia, gene for mobile applicatio ¬, eg. Bar stored in motor vehicles, having a pressure of 700.

Für die Überwachung der Druckverhältnisse in der Tankvorrichtung wer¬ den typischerweise Drucksensorvorrichtungen eingesetzt, die aufgrund ih¬ res Einsatzbereichs mit Wasserstoff in Kontakt treten. Daher werden die Drucksensorvorrichtungen aus Werkstoffen hergestellt, die in der Regel keine oder nur wenig Anfälligkeit zur Wasserstoff-Versprödung aufweisen. Who used ¬ typically pressure sensor devices for monitoring pressure conditions in the tank system that come into contact with hydrogen due ih ¬ res application range. The pressure sensor devices are therefore made from materials which generally have little or no susceptibility to hydrogen embrittlement.

Heutzutage werden die Sensorvorrichtungen typischerweise aus einem geeigneten Stahl gefertigt, beispielsweise aus der Klasse der Martensite. Nowadays the sensor devices are typically made of a suitable steel, for example of the martensite class.

Martensite sind kostengünstig und weisen eine hohe mechanische Festig¬ keit auf. Dennoch kann auch hier eine Wasserstoff-Versprödung auftreten, was zu einer Beschädigung der Sensorvorrichtung führen kann. Dadurch ist keine präzise Druckangabe mehr möglich, was zu einer Beeinträchtigung der Funktionsweise der Tankvorrichtung führt. Martensites are inexpensive and have a high mechanical Festig ¬ on ness. Nevertheless, hydrogen embrittlement can also occur here, which can lead to damage to the sensor device. As a result, precise pressure information is no longer possible, which leads to an impairment of the functioning of the tank device.

Vorteile der Erfindung Advantages of the invention

Die erfindungsgemäße Einrichtung mit den kennzeichnenden Merkmalen des Anspruchs 1 weist demgegenüber den Vorteil auf, dass durch geeig nete Beschichtungen der Sensorvorrichtung eine Wasserstoff- Diffusions sperre erzeugt wird, so dass der Wasserstoff nicht mehr in direktem Kon takt mit der Sensorvorrichtung steht und so eine höhere Robustheit der Sensorvorrichtung und eine optimierte Funktionsweise der gesamten Tankvorrichtung erzielt wird. The device according to the invention with the characterizing features of claim 1 has the advantage that a hydrogen diffusion barrier is generated by suitable coatings of the sensor device, so that the hydrogen is no longer in direct contact with the sensor device and so is more robust the sensor device and an optimized functioning of the entire tank device is achieved.

Dazu weist die Tankvorrichtung zur Speicherung von verdichteten Fluiden, insbesondere Wasserstoff, mindestens einen Tankbehälter und eine Sen sorvorrichtung auf. Die Sensorvorrichtung umfasst ein Gewindeanschlus selement mit einer Außenwandung, in welchem Gewindeanschlussele ment eine Druckbohrung ausgebildet ist. Weiterhin weist die Druckboh rung eine Innenwandung auf. Darüber hinaus weist die Innenwandung der Druckbohrung und/oder die Außenwandung des Gewindeanschlussele ments eine Beschichtung auf, wobei das Gewindeanschlusselement Stahl aus der Klasse der Martensite umfasst. For this purpose, the tank device for storing compressed fluids, in particular hydrogen, has at least one tank container and a sensor device. The sensor device comprises a threaded connection element with an outer wall, in which threaded connection element a pressure bore is formed. Furthermore, the Druckboh tion has an inner wall. In addition, the inner wall of the pressure bore and / or the outer wall of the threaded connection element has a coating, the threaded connection element comprising steel from the martensite class.

In vorteilhafter Weiterbildung der Erfindung ist es vorgesehen, dass die Beschichtung Aluminiumoxid (AI2O3) umfasst. In an advantageous further development of the invention it is provided that the coating comprises aluminum oxide (Al 2 O3).

In vorteilhafter Weiterbildung der Erfindung umfasst die Beschichtung Chromoxid (Cr203). Vorteilhafterweise kann die Beschichtung Hafniumdioxid (HfCh) umfas¬ sen. In an advantageous development of the invention, the coating comprises chromium oxide (Cr203). Advantageously, the coating hafnia (HfCh) umfas ¬ can sen.

Weiterhin betrifft die Erfindung ein Verfahren zur Herstellung einer Be¬ schichtung einer in der oben beschriebenen Tankvorrichtung umfassten Sensorvorrichtung mittels eines ALD-Prozesses (atomic layer deposition, Atomlagenabscheidung). Furthermore, the invention relates to a method for producing a coating of a Be ¬ included in the above described tank system sensor device by means of an ALD process (atomic layer deposition, atomic layer deposition).

So kann in einfacher Weise die Sensorvorrichtung vor einer Wasserstoff¬ versprödung geschützt werden, ohne die Funktionsweise der Sensorvor¬ richtung, d.h. die präzise Druckmessung in dem Tankbehälter, zu beein¬ trächtigen. Thus, in simple manner, the sensor device from hydrogen embrittlement ¬ be protected, direction without the operation of Sensorvor ¬, the precise pressure measurement that is in the tank container, prone to impressive ¬.

In vorteilhafter Weiterbildung ist es vorgesehen, dass die Beschichtung eine Dicke von 50 nm bis 400 nm aufweist. So ist ein optimaler Schutz der beteiligten Bauteile vor einer Wasserstoff-Versprödung gewährleistet, ohne die Funktionsweise der Sensorvorrichtung zu beeinträchtigen. In an advantageous further development it is provided that the coating has a thickness of 50 nm to 400 nm. This ensures optimum protection of the components involved from hydrogen embrittlement without impairing the functionality of the sensor device.

In weiterer Ausgestaltung der Erfindung ist es vorgesehen, dass die Druckbohrung mehrstufig ausgebildet ist. Vorteilhafterweise ist die Druck¬ bohrung zylinderförmig ausgebildet. Dadurch kann eine konstruktiv einfa¬ che und kostengünstige Herstellung erzielt werden. In a further embodiment of the invention, it is provided that the pressure bore is designed in multiple stages. Advantageously, the pressure ¬ bore is cylindrically shaped. This can be achieved constructively simp ¬ che and cost-effective production.

In vorteilhafter Weiterbildung umfasst die Sensorvorrichtung ein Sensorel¬ ement, welches Sensorelement eine drucksensitive Dünnschicht in Form einer Membran aufweist. So kann eine ordentliche Funktionsweise der Sensorvorrichtung erzielt werden. In an advantageous embodiment, the sensor device comprises a Sensorel ¬ ement, which sensor element comprises a pressure sensitive film in the form of a membrane. A proper functioning of the sensor device can thus be achieved.

In weiterer Ausgestaltung der Erfindung ist es vorgesehen, dass das Sen¬ sorelement mittels einer Schweißnahtverbindung fest mit dem Gewindean¬ schlusselement verbunden ist. ln vorteilhafter Weiterbildung ist es vorgesehen, dass das Sensorelement und das Gewindeanschlusselement als einteiliges Bauteil ausgebildet sind, welches einteilige Bauteil mittels eines Siliziumwafer- Prozesses her¬ gestellt ist. Dadurch wird ein kompakter Aufbau der gesamten Sensorvor¬ richtung erzielt. In a further embodiment of the invention, it is provided that the Sen ¬ sorelement is fixedly connected connection element by means of a weld connection to the threaded Dean ¬. In an advantageous development it is provided that the sensor element and the threaded connecting element are designed as one-piece component, which one-piece component is made by means of a silicon wafer process ¬ forth. Thus, a compact structure of the entire Sensorvor ¬ is directionally achieved.

In vorteilhafter Weiterbildung ist das Sensorelement aus einem Metall, vor¬ zugsweise aus der Klasse der Martensite, hergestellt. So wird neben der Beschichtung der mit Wasserstoff in Kontakt tretenden Stellen des Senso¬ relements ein zusätzlicher Schutz vor einer möglichen Wasserstoff-Ver¬ sprödung erzielt. In an advantageous embodiment, the sensor element of a metal, preferably, prepared from the class of martensite before ¬. Thus, in addition to the coating of the passing with hydrogen in the contact points of the Senso ¬ relements obtained an additional protection from possible hydrogen embrittlement ¬ Ver.

Die beschriebene Tankvorrichtung zur Speicherung von verdichteten Flui¬ den eignet sich vorzugsweise in einer Brennstoffzellenanordnung zur Speicherung von Wasserstoff für den Betrieb einer Brennstoffzelle. The tank described device for storing compressed flui ¬ is preferably in a fuel cell arrangement for storing hydrogen for operating a fuel cell.

Die beschriebene Tankvorrichtung zur Speicherung von verdichteten Flui¬ den eignet sich vorzugsweise in einem Fahrzeug mit einem Antrieb mit gasförmigen Kraftstoffen. The tank described device for storing compressed flui ¬ is preferably in a vehicle with a drive with gaseous fuels.

Zeichnungen drawings

In der Zeichnung sind Ausführungsbeispiele einer Tankvorrichtung zur Speicherung von verdichteten Fluiden mit einer Sensorvorrichtung darge¬ stellt. Es zeigt in In the drawing, embodiments are a tank device for storing compressed fluids with a sensor device Darge ¬ provides. It shows in

Fig. 1 ein erstes Ausführungsbeispiel einer erfindungsgemäßen Sen¬ sorvorrichtung im Längsschnitt, Fig. 1 shows a first embodiment of an inventive Sen ¬ sorvorrichtung in longitudinal section;

Fig. 2 ein zweites Ausführungsbeispiel einer erfindungsgemäßen Sen¬ sorvorrichtung im Längsschnitt, Fig. 2 shows a second embodiment of an inventive Sen ¬ sorvorrichtung in longitudinal section;

Fig. 3 eine Tankvorrichtung mit einem Ausführungsbeispiel der erfin¬ dungsgemäßen Sensorvorrichtung im Längsschnitt. Beschreibung der Ausführungsbeispiele Fig. 3 is a tank system with an embodiment of the sensor device OF INVENTION ¬ to the invention in longitudinal section. Description of the exemplary embodiments

Fig.l zeigt ein erstes Ausführungsbeispiel einer erfindungsgemäßen Sen¬ sorvorrichtung 1 im Längsschnitt. Die Sensorvorrichtung 1 weist ein Sen¬ sorelement 2, ein Gewindeanschlusselement 4 und ein Schraubenelement 10 auf. Das Gewindeanschlusselement 4 und das Schraubenelement 10 sind dabei fest miteinander verbunden. Fig.l shows a first embodiment of a Sen ¬ sensor device 1 according to the invention in longitudinal section. The sensor device 1 comprises a sorelement 2 Sen ¬, a threaded connection element 4, and a screw element 10 on. The threaded connection element 4 and the screw element 10 are firmly connected to one another.

Das Sensorelement 2 weist eine drucksensitive Dünnschicht in Form einer Membran 28 auf und ist mit dem Gewindeanschlusselement 4 über eine Schweißnahtverbindung 8 fest verbunden. The sensor element 2 has a pressure-sensitive thin layer in the form of a membrane 28 and is firmly connected to the threaded connection element 4 via a welded joint 8.

Weiterhin weist das Gewindeanschlusselement 4 eine stufenförmige Druckbohrung 6 mit einer Innenwandung 22 auf, wobei die Druckbohrung 6 an einem dem Schraubenelement 10 abgewandten Ende 32 eine Öff¬ nung 30 aufweist. An einem der Öffnung 30 abgewandten Ende der Druckbohrung 6 ist das Sensorelement 2 angeordnet. 4 further comprises the threaded connecting element has a step-shaped pressure hole 6 with an inner wall 22, wherein the pressure bore 6 facing away from the end of the screw member 10 a 32 a Publ ¬ voltage 30th The sensor element 2 is arranged at an end of the pressure bore 6 facing away from the opening 30.

Das Gewindeanschlusselement 4 weist eine Außenwandung 24 auf, an der ein Gewinde 26 ausgebildet ist. The threaded connection element 4 has an outer wall 24 on which a thread 26 is formed.

Weiterhin sind das Gewindeanschlusselement 4 und das Sensorelement 2 aus einem Metall der Klasse der Martensite, beispielsweise 1.4542, herge¬ stellt. Furthermore, the threaded connection element 4 and the sensor element 2 of a metal of the class of martensite, is for example 1.4542, Herge ¬.

Fig.2 zeigt ein zweites Ausführungsbeispiel einer erfindungsgemäßen Sensorvorrichtung 1 im Längsschnitt. 2 shows a second exemplary embodiment of a sensor device 1 according to the invention in longitudinal section.

Bauteile mit gleicher Funktion wurden mit derselben Bezugsziffer bezeich¬ net. Das zweite Ausführungsbeispiel entspricht in Funktion und Aufbau wei¬ testgehend dem ersten Ausführungsbeispiel. Im Unterschied zum ersten Ausführungsbeispiel ist hier das Sensorelement 2 und das Gewindean¬ schlusselement 4 als ein einteiliges Bauteil ausgebildet. Dabei wird das Sensorelement 2 mittels Siliziumwafer- Prozesse auf das Gewindean¬ schlusselement 4 aufgeglast. So können im Gegensatz zu einer Verwen¬ dung mit einer Schweißnahtverbindung höhere Druckbereiche erzielt wer¬ den. Components with the same function have been denoted with the same reference numeral ¬ net. The second embodiment corresponds to continuously test the first embodiment in function and structure wei ¬. Unlike the first embodiment, the sensor element 2 and the thread chamfer ¬ is closing element 4 formed as a one-piece component here. In this case, the sensor element 2 is aufgeglast-circuit element 4 by means of silicon wafer processes on the thread chamfer ¬. Thus achieved with a welded joint higher pressure ranges as opposed to a USAGE ¬ ¬ dung to.

Weiterhin ist die Druckbohrung 6 hier zylinderförmig ausgebildet. Furthermore, the pressure bore 6 is cylindrical here.

In den beiden Ausführungsbeispielen ist die Innenwandung 22 der Druck¬ bohrung und Teile der Außenwandung 24 mit Ausnahme des Gewindes 26 mit einer Beschichtung 12 mittels eines ALD-Prozesses (atomic layer deposition, Atomlagenabscheidung) ausgebildet. Dabei handelt es sich um ein Verfahren, das mittels chemischer Reaktionen sehr dünne Schich¬ ten eines Ausgangsmaterials auf einem Substratmaterial, hier die Innen¬ wandung 22 bzw. die Außenwandung 24, abscheidet. In the two embodiments, the inner wall 22 of the pressure ¬ bore and the outer wall 24 except for the thread 26 (, atomic layer deposition, atomic layer deposition) formed parts with a coating 12 by an ALD process. It is a method by means of chemical reactions very thin Schich ¬ th of a starting material on a substrate material, here the inner ¬ wall 22 and the outer wall 24, is deposited.

Es werden insbesondere die Stellen der Sensorvorrichtung 1 mit einer Be¬ schichtung 12 behaftet, die mit gasförmigem Medium, beispielsweise Wasserstoff, in Berührung kommen. Die Beschichtung 12 weist dabei eine Dicke von 50 nm bis 400 nm auf. So kann eine Wasserstoff- Diffusions¬ sperre erzielt werden, so dass der Wasserstoff nicht durch das Gewinde¬ anschlusselement 4 durch diffundieren kann, was zu einem Leck in der Tankvorrichtung 14 führen könnte. Die Beschichtung 12 umfasst hier Alu¬ miniumoxid (AI2O3). There are in particular the positions of the sensor device 1 with a coating 12 Be ¬ subject that come with gaseous medium, for example, hydrogen in contact. The coating 12 has a thickness of 50 nm to 400 nm. Thus, a hydrogen diffusion barrier ¬ can be achieved, so that the hydrogen not by the thread ¬ connection element 4 by diffuse can, which could lead to a leak in the tank system fourteenth The coating 12 comprises here aluminum ¬ miniumoxid (AI2O3).

Neben Aluminiumoxid (AI2O3) sind auch Beschichtungen möglich, die Chromoxid (Cr203) oder Hafniumdioxid (HfCh) umfassen. Fig.3 zeigt eine Tankvorrichtung 14 zur Speicherung von verdichteten Flu iden, insbesondere Wasserstoff, in schematischer Ansicht. Diese Tankvor richtung 14 findet beispielsweise Anwendung in Fahrzeugen mit Brenn stoffzellenantrieb. In addition to aluminum oxide (AI2O3), coatings that include chromium oxide (Cr203) or hafnium dioxide (HfCh) are also possible. 3 shows a tank device 14 for storing compressed fluids, in particular hydrogen, in a schematic view. This Tankvor device 14 is used, for example, in vehicles with fuel cell drive.

Die Tankvorrichtung 14 weist einen Tankbehälter 18 auf, in dem die Sen sorvorrichtung 1 integriert ist. Weiterhin versorgt die Tankvorrichtung 14 über eine Verbindungsleitung 20 eine Brennstoffzellenanordnung 16 mit Wasserstoff, The tank device 14 has a tank container 18 in which the sensor device 1 is integrated. Furthermore, the tank device 14 supplies a fuel cell arrangement 16 with hydrogen via a connecting line 20,

Die Anzahl der Tankbehälter 18 kann dabei beliebig gewählt werden, wo bei jeder Tankbehälter 18 jeweils eine Sensorvorrichtung 1 aufweist, durch welche der Druck und die Füllstandshöhe in dem jeweiligen Tankbehälter 18 präzise ermittelt werden kann. The number of tank containers 18 can be selected as desired, with each tank container 18 having a sensor device 1 by means of which the pressure and the fill level in the respective tank container 18 can be precisely determined.

Claims

Ansprüche Expectations 1. Tankvorrichtung (14) zur Speicherung von verdichteten Fluiden, insbeson dere Wasserstoff, mit mindestens einem Tankbehälter (18) und einer Sen sorvorrichtung (1), welche Sensorvorrichtung (1) ein Gewindeanschlus selement (4) mit einer Außenwandung (24) umfasst, in welchem Gewinde anschlusselement (4) eine Druckbohrung (6) ausgebildet ist, welche Druckbohrung (6) eine Innenwandung (22) aufweist, dadurch gekennzeichnet, dass die Innenwandung (22) der Druckbohrung (6) und/oder die Außenwandung (24) des Gewindeanschlusselements (4) eine Beschich tung (12) aufweist, wobei das Gewindeanschlusselement (4) Stahl aus der Klasse der Martensite umfasst. 1. Tank device (14) for storing compressed fluids, in particular hydrogen, with at least one tank container (18) and a sensor device (1), which sensor device (1) comprises a threaded connection element (4) with an outer wall (24), in which thread connection element (4) a pressure bore (6) is formed, which pressure bore (6) has an inner wall (22), characterized in that the inner wall (22) of the pressure bore (6) and / or the outer wall (24) of the Threaded connection element (4) has a coating (12), the threaded connection element (4) comprising steel from the martensite class. 2. Tankvorrichtung (14) nach Anspruch 1, dadurch gekennzeichnet, dass die Beschichtung (12) Aluminiumoxid (AI2O3) umfasst. 2. Tank device (14) according to claim 1, characterized in that the coating (12) comprises aluminum oxide (Al 2 O3). 3. Tankvorrichtung (14) nach Anspruch 1, dadurch gekennzeichnet, dass die Beschichtung (12) Chromoxid (Cr2Ü3) umfasst. 3. Tank device (14) according to claim 1, characterized in that the coating (12) comprises chromium oxide (Cr2Ü3). 4. Tankvorrichtung (14) nach Anspruch 1, dadurch gekennzeichnet, dass die Beschichtung (12) Hafniumdioxid (HfCh) umfasst. 4. Tank device (14) according to claim 1, characterized in that the coating (12) comprises hafnium dioxide (HfCh). 5. Tankvorrichtung (14) nach einem der vorhergehenden Ansprüche, 5. tank device (14) according to one of the preceding claims, dadurch gekennzeichnet, dass die Beschichtung (12) eine Dicke von 50 nm bis 400 nm aufweist. characterized in that the coating (12) has a thickness of 50 nm to 400 nm. 6. Tankvorrichtung (4) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Druckbohrung (6) mehrstufig ausgebildet ist. 6. Tank device (4) according to one of the preceding claims, characterized in that the pressure bore (6) is formed in several stages. 7. Tankvorrichtung (4) nach einem der Ansprüche 1 bis 5, dadurch gekenn zeichnet, dass die Druckbohrung (6) zylinderförmig ausgebildet ist. 7. Tank device (4) according to one of claims 1 to 5, characterized in that the pressure bore (6) is cylindrical. 8. Tankvorrichtung (14) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Sensorvorrichtung (1) ein Sensorele ment (2) umfasst, welches Sensorelement (2) eine drucksensitive Dünn schicht in Form einer Membran (28) aufweist. 8. Tank device (14) according to one of the preceding claims, characterized in that the sensor device (1) comprises a Sensorele element (2), which sensor element (2) has a pressure-sensitive thin layer in the form of a membrane (28). 9. Tankvorrichtung (14) nach dem vorhergehenden Anspruch, dadurch ge kennzeichnet, dass das Sensorelement (2) mittels einer Schweißnahtver bindung (8) fest mit dem Gewindeanschlusselement (4) verbunden ist. 9. tank device (14) according to the preceding claim, characterized in that the sensor element (2) by means of a weld seam connection (8) is firmly connected to the threaded connection element (4). 10. Tankvorrichtung (14) nach Anspruch 8, dadurch gekennzeichnet, dass das Sensorelement (2) und das Gewindeanschlusselement (4) als einteiliges Bauteil ausgebildet sind. 10. Tank device (14) according to claim 8, characterized in that the sensor element (2) and the threaded connection element (4) are designed as a one-piece component. 11. Tankvorrichtung (14) nach einem der Ansprüche 8 bis 10, dadurch ge kennzeichnet, dass das Sensorelement (2) aus einem Metall, vorzugs weise aus der Klasse der Martensite, hergestellt ist. 11. Tank device (14) according to one of claims 8 to 10, characterized in that the sensor element (2) is made of a metal, preferably from the class of martensites. 12. Brennstoffzellenanordnung (16) mit einer Tankvorrichtung (14) nach ei nem der vorhergehenden Ansprüche. 12. Fuel cell arrangement (16) with a tank device (14) according to egg NEM of the preceding claims. 13. Fahrzeug mit einer Tankvorrichtung (14) zur Speicherung von verdichteten Fluiden nach einem der Ansprüche 1 bis 11. 13. Vehicle with a tank device (14) for storing compressed fluids according to one of claims 1 to 11. 14. Verfahren zur Herstellung einer Beschichtung (12) einer in einer Tankvor richtung (14) umfassten Sensorvorrichtung (1) nach einem der Ansprüche 1 bis 11 mittels eines ALD- Prozesses (atomic layer deposition, Atomla genabscheidung). 14. A method for producing a coating (12) of a sensor device (1) comprised in a Tankvor device (14) according to one of claims 1 to 11 by means of an ALD process (atomic layer deposition).
PCT/EP2020/056410 2019-04-01 2020-03-11 Tank device for storing compressed fluids with a sensor device, method for producing a sensor device of the tank device Ceased WO2020200669A1 (en)

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Citations (7)

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Publication number Priority date Publication date Assignee Title
EP1281947A1 (en) * 2001-08-03 2003-02-05 Trafag AG High-pressure sensor and its manufacturing method
JP2007009276A (en) * 2005-06-30 2007-01-18 Ion Engineering Research Institute Corp Hydrogen barrier coated article in stainless steel pipe and containers, and its manufacturing method
EP2034288A2 (en) * 2007-09-05 2009-03-11 Nagano Keiki Co., Ltd. Manufacturing Method of Pressure Sensor and Pressure Sensor
US20110088460A1 (en) * 2008-06-04 2011-04-21 Kistler Holding Ag Pressure sensor for measurements in a chamber of an internal combustion engine
JP5440295B2 (en) * 2010-03-18 2014-03-12 富士通株式会社 Pressure sensor and manufacturing method thereof
US8701496B1 (en) * 2013-02-27 2014-04-22 Honeywell International Inc. Systems and methods for a pressure sensor having a two layer die structure
DE102017204240A1 (en) 2017-03-14 2018-09-20 Robert Bosch Gmbh Fuel tank for a fuel cell system and method of manufacturing a fuel tank

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1281947A1 (en) * 2001-08-03 2003-02-05 Trafag AG High-pressure sensor and its manufacturing method
JP2007009276A (en) * 2005-06-30 2007-01-18 Ion Engineering Research Institute Corp Hydrogen barrier coated article in stainless steel pipe and containers, and its manufacturing method
EP2034288A2 (en) * 2007-09-05 2009-03-11 Nagano Keiki Co., Ltd. Manufacturing Method of Pressure Sensor and Pressure Sensor
US20110088460A1 (en) * 2008-06-04 2011-04-21 Kistler Holding Ag Pressure sensor for measurements in a chamber of an internal combustion engine
JP5440295B2 (en) * 2010-03-18 2014-03-12 富士通株式会社 Pressure sensor and manufacturing method thereof
US8701496B1 (en) * 2013-02-27 2014-04-22 Honeywell International Inc. Systems and methods for a pressure sensor having a two layer die structure
DE102017204240A1 (en) 2017-03-14 2018-09-20 Robert Bosch Gmbh Fuel tank for a fuel cell system and method of manufacturing a fuel tank

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